Device Engaging Transporting Means Or Source To Align Element Relative To Source Patents (Class 414/226.04)
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Patent number: 12162717Abstract: The component supply device includes a body, a first carrier tape transporter, a second carrier tape transporter, and a controller. The body includes a tape transport path. The first carrier tape transporter transports a carrier tape to a component pickup position. The second carrier tape transporter transports the carrier tape to the first carrier tape transporter. The controller is configured to communicate with the component installation device and control the first carrier tape transporter and the second carrier tape transporter in one operation mode selected from a plurality of operation modes.Type: GrantFiled: January 27, 2020Date of Patent: December 10, 2024Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Yoshinori Isobata, Atuyuki Horie, Chikara Takata, Kunimi Tsuzurugi, Kazunari Mishima, Kyourei Ri, Minoru Kitani, Tatsuo Yamamura
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Publication number: 20150147143Abstract: There is provided a tape feeder that feeds a carrier tape to supply components to a component suction position for a mounting head in a component mounting apparatus. The tape feeder includes a first tape feed mechanism which is provided in a downstream side and feeds a preceding tape to the component suction position, and a second tape feed mechanism provided in an upstream side and feeds a following tape from a tape introducing port side toward the first tape feed mechanism. The tape feeder also includes a tape slipping-off informing unit which informs the component mounting apparatus that the following tape is slipped off from the second tape feed mechanism. For example, the tape slipping-off informing unit decides that the following tape is slipped off when a rotation of a sprocket of the second tape feed mechanism in an opposite direction is detected.Type: ApplicationFiled: November 25, 2014Publication date: May 28, 2015Inventors: Junkei SHIMIZU, Kazunori KANAI, Masayuki HIGASHI, Tatsuo YAMAMURA
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Publication number: 20150147142Abstract: The present disclosure concerns a transport vehicle for handling a rotor blade mold for the production of a rotor blade of a wind power installation or a shell portion of a rotor blade of a wind power installation, adapted for use in a handling apparatus. The handling apparatus includes a first rail set for displacement of the transport vehicle in a first direction, and a second rail set for displacement of the transport vehicle in a second direction. In addition the transport vehicle includes a first wheel set including a plurality of wheels for movement on the first rail set, and a second wheel set including a plurality of wheels for movement on the second rail set.Type: ApplicationFiled: July 1, 2013Publication date: May 28, 2015Inventors: Arno Georgs, Herbert Biebl, Rainer Schluter
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Patent number: 9008817Abstract: Disclosed is a substrate positioning apparatus capable of accurately performing positioning of a center of a circular-shape substrate with respect to a rotating shaft. The substrate positioning apparatus includes: a substrate disposing part; a first positioning mechanism including a first reference part contacting a side of the substrate; a second positioning mechanism including a second reference part contacting the side of the substrate; a first driver configured to drive the first positioning mechanism; a controller configured to control the drive of the first positioning mechanism. In particular, the second reference part contacts the substrate at a contact part and includes an elastic part that applies force in a moving direction of the first driver to the contact part and a detector that detects position information of the second positioning mechanism.Type: GrantFiled: May 10, 2011Date of Patent: April 14, 2015Assignee: Tokyo Electron LimitedInventor: Yoshifumi Amano
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Publication number: 20140126981Abstract: An automated insertion apparatus for inserting at least one insert into each of a multiplicity of reactor channels. The apparatus comprises a feed position that supports a magazine that holds a multiplicity of inserts, and a transport mechanism defining at least two support channels each configured to hold a single insert, and means to transport each support channel repeatedly between an input location adjacent to the feed position and an output location, and means to feed one insert from a magazine at the feed position into a support channel of the transport mechanism at the input location. The apparatus also includes a transfer mechanism to push an insert into a reactor channel, and an alignment mechanism to ensure that the insert that is being inserted is aligned with the reactor channel. The transfer mechanism is adjacent to the output location. The transport mechanism may be a rotary drum.Type: ApplicationFiled: June 7, 2012Publication date: May 8, 2014Applicant: CompactGTL LimitedInventors: Mark Le Sueur, Richard Matthews
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Patent number: 8616824Abstract: An apparatus for transferring and moving elements that are removably associable with an operating machine comprises a moving arrangement suitable for receiving and supporting the elements, the moving arrangement being movable for transferring to and/or removing from the operating machine the elements; the operating machine comprises a supporting arrangement configured for receiving from and giving to the apparatus the elements, the supporting arrangement in turn comprising hooking elements suitable for abutting and locking abutting elements of the elements.Type: GrantFiled: April 4, 2007Date of Patent: December 31, 2013Assignee: IMA Life S.R.L.Inventors: Claudio Trebbi, Alessandro Bisi, Francesco Sanmartin
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Patent number: 8425175Abstract: According to an aspect of an embodiment, there is provided a part-delivery apparatus which transports a part to a designated part-delivery position by drawing the part onto a head by suction pressure at a designated part-suction position, and which releases the part at the part-delivery position by stopping application of the suction pressure. The apparatus includes: a compliance mechanism for allowing movement of the head in a horizontal plane; an upper-side positioning unit for positioning the head in the part-suction position by responding to an upward movement of the head; and a lower-side positioning unit for positioning the head in the part-delivery position by responding to the downward movement of the head.Type: GrantFiled: May 14, 2008Date of Patent: April 23, 2013Assignee: Fujitsu LimitedInventors: Makoto Kobayashi, Tsutomu Miyamoto, Kazuyoshi Akiike, Takeshi Kurumizawa
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Patent number: 8403315Abstract: A system for retaining a film on a single-piece frame includes a frame having a shape with a center open area larger than the film, the frame comprising a plurality of fingers on the frame extending into the open area, and a barb positioned on an end of each of the plurality of fingers, wherein the barbs retain the film. The system also includes an end effecter comprising a first and second plurality of vacuum line openings, wherein the end effecter holds onto the film with the first plurality of vacuum line openings and holds onto the frame with the second plurality of vacuum line openings, wherein the end effecter picks up the film with the first plurality of vacuum line openings and presses the film onto the frame, wherein pressing the film onto the frame will retain the film on the barbs.Type: GrantFiled: March 31, 2011Date of Patent: March 26, 2013Assignee: Alta Devices, Inc.Inventor: Jonathan Stuart Frankel
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Patent number: 8157497Abstract: A loader assembly for a TEM machine having a retractable arm that is moveable between a retracted position and an extended position. A hoop portion of the retractable arm also moves between the retracted position and the extended position. A lower closure for holding a part to be processed in the TEM machine is removably positioned in the hoop portion. A ram piston of the TEM machine is movable between a load position and a process position. When the ram piston moves from a load position to a process position the ram piston contacts the lower closure and extends through the hoop of the retractable arm to move the lower closure to the process position. A thermal chamber receives the lower closure when the ram piston moves to the process position.Type: GrantFiled: May 6, 2008Date of Patent: April 17, 2012Assignee: Kennametal Inc.Inventors: Miles Edmond Loretta, Daryl Duane Perkins, Axel Willi Kieser
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Publication number: 20100166529Abstract: A semiconductor handler subassembly is provided. The semiconductor handler subassembly includes an adjustment apparatus with a floating lock that is configured to adjust and lock in place to a desired position, and a tip attached to the floating lock and configured to engage a part.Type: ApplicationFiled: December 31, 2008Publication date: July 1, 2010Inventor: Alton R. Lindsey, JR.
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Publication number: 20100124481Abstract: An apparatus for handling a module of cotton for being supplied to a machine for processing the cotton includes a support structure configured to support the module above a surface. The support structure includes a first segment, a second segment, and a hinging structure configured to operably couple the first segment and the second segment to one another, such that the first segment and the second segment can pivot with respect to one another. The apparatus also includes an actuator operably coupled to at least one of the first segment and the second segment. The actuator is configured to pivot one of the first segment and the second segment relative to another of the first segment and the second segment, and the apparatus is configured to re-orient the module.Type: ApplicationFiled: July 23, 2009Publication date: May 20, 2010Inventor: William E. Winn
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Publication number: 20100068016Abstract: A removable stem for handling and transporting articles such as optical lens blanks during “wet processing” is disclosed. The stem is dimensioned and configured to support such articles particularly in liquid baths, while directing “wet” materials along the surface of the stem and away from flow onto the article. The stem further provides a drip collection point to avoid disturbing the surface of a “wet bath” while an article is immersed in the bath.Type: ApplicationFiled: September 12, 2008Publication date: March 18, 2010Applicant: INTERLAB INCORPORATEDInventor: Liviu L. Marian
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Publication number: 20100068014Abstract: A substrate processing apparatus includes a substrate processing section that processes a plurality of substrates assuming a vertical posture in a batch manner; a first traversing mechanism that laterally moves a first traverse holding portion along a first traversing path between a substrate transfer position and a substrate delivery position; a second traversing mechanism that laterally moves a second traverse holding portion along a second traversing path disposed below the first traversing path between the substrate transfer position and the substrate delivery position; an elevation mechanism that raises and lowers an elevation holding portion in the substrate transfer position; and a main transfer mechanism that conveys a plurality of substrates assuming a vertical posture in a batch manner between the substrate delivery position and the substrate processing section, the first and second traverse holding portions, and the elevation holding portion each holds a plurality of substrates assuming a verticalType: ApplicationFiled: September 10, 2009Publication date: March 18, 2010Inventors: Ichiro Mitsuyoshi, Ryo Muramoto
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Publication number: 20090324371Abstract: A method and apparatus for producing and/or machining panels. The apparatus includes a transport device for transporting a panel along a transport path and a machining device for machining the panel as it moves via the transport device. The transport device includes a plurality of positioning devices arranged one behind the other and spaced apart by a distance along the transport path. Each positioning device includes upper and lower abutment mechanisms arranged opposite one another and on opposite sides of a panel plane, and being spaced apart by a distance. An adjusting device is used for setting the distance between the upper and lower abutment mechanisms. An actuating arrangement is structured and arranged to actuate the adjusting device of at least two of the plurality of positioning devices. An arrangement is used for independently adjusting each of the upper and lower abutment mechanisms of at least one of the plurality of positioning devices.Type: ApplicationFiled: July 30, 2007Publication date: December 31, 2009Applicant: INTERGLARION LIMITEDInventor: Rupert Krallinger
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Publication number: 20090279990Abstract: Devices and methods for mounting and aligning transport rails to a processing chamber of a substrate processing system are described. An alignment feature is built-in to the transport rail and a corresponding alignment feature is added to the valves separating processing chambers. The alignment feature may be a pin-groove arrangement.Type: ApplicationFiled: October 31, 2008Publication date: November 12, 2009Applicant: INTEVAC, INC.Inventor: Stuart Scollay
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Patent number: 7611319Abstract: In at least one aspect, a system is provided that includes (1) a substrate carrier having first docking features; and (2) a loadport having second docking features. The second docking features are adapted to block docking of substrate carriers that do not include the first docking features and to allow docking of substrate carriers that include the first docking features. Numerous other aspects are provided.Type: GrantFiled: June 16, 2005Date of Patent: November 3, 2009Assignee: Applied Materials, Inc.Inventors: Vinay Shah, Martin R. Elliott, Jeffrey C. Hudgens, Eric Andrew Englhardt
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Publication number: 20090252578Abstract: One of reverse passing parts provided in a substrate passing part comprises a first holding mechanism and a second holding mechanism. The first holding mechanism and the second holding mechanism are arranged in vertically symmetry with respect to a rotary central axis and rotate 180 degrees about the rotary central axis, to replace each other in position. A transport robot on the loading side passes a substrate to a third holding mechanism or a fourth holding mechanism at a first vertical position. The substrate reversed in the reverse passing part is passed to a transport robot on the unloading side from the third holding mechanism or the fourth holding mechanism at a second vertical position. Before a reverse process on the preceding substrate is finished, the transport robot on the loading side can start the transfer of the following substrate.Type: ApplicationFiled: February 12, 2009Publication date: October 8, 2009Inventor: Eisaku Machida
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Publication number: 20090245982Abstract: A unit for opening an insert of a test tray which comprises an accommodating space for accommodating a semiconductor device and a support for supporting the semiconductor device accommodated in the accommodating space, the unit includes a body, a pair of opening devices provided in the body to open the insert, and a positioning guide unit protruding to be inserted into an accommodating space for a semiconductor device when opening the insert and supporting the semiconductor device that is transferred into the accommodating space to be spaced upward apart from a support provided in the accommodating space.Type: ApplicationFiled: March 19, 2009Publication date: October 1, 2009Applicant: TECHWING CO., LTD.Inventors: Yun Sung NA, Tae Hung KU, Jung Woo HWANG
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Publication number: 20090245983Abstract: A clam shell wafer holder includes a base and a lid pivotally connected with the base by an integral hinge. The base includes a rotatable wafer support, and the lid includes a universal frame and a pin holder attachment spaced inwardly from the frame. Only two contact pins are formed in a wafer-facing surface of the pin holder attachment. The contact pins are manually aligned with and contact two points on a wafer when the lid is closed against the base. A method for holding a wafer for plating is provided using the disclosed holder apparatus.Type: ApplicationFiled: March 31, 2009Publication date: October 1, 2009Inventors: Kennith Ray Law, Rodney Allen Biskeborn
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Publication number: 20090226287Abstract: The present invention relates to an arrangement for producing paper cushions from a paper web which has been rolled up into a supply roll, the arrangement having a machine with a bearing arrangement for bearing the supply roll in a rotatable manner, and also having a device for forming the paper web and an arrangement for producing the paper cushions. The machine has coupling elements via which a transporting carriage provided with mating coupling elements can be coupled in a releasable manner to the machine, it being possible for a supply roll to be mounted on the transporting carriage such that, when the transporting carriage is coupled to the machine, the supply roll can be inserted into the bearing arrangement of the machine by way of a rolling and/or sliding movement.Type: ApplicationFiled: November 14, 2006Publication date: September 10, 2009Inventor: Sandro Keller
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Publication number: 20090202324Abstract: A wafer transfer device and method capable of preventing a wafer from falling off of a carrier. A first carrier receiver holding a first carrier has a box-like shape having an opening through which the first carrier is attached/removed to/from the first carrier receiving member. A second carrier receiver holding a second carrier has a box-like shape having an opening through which the second carrier is attached/removed to/from the first carrier receiving member. The first carrier and the second carrier can be attached/removed to/from the first carrier receiver and the second carrier receiver, respectively. Owing to such a configuration, it is possible to prevent a wafer received in the first carrier and the second carrier from falling off from the first carrier and the second carrier, respectively.Type: ApplicationFiled: January 21, 2009Publication date: August 13, 2009Inventor: Katsuhiro YOSHINO
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Publication number: 20090202323Abstract: An alignment device to align a plate for electronic circuits comprises transport members able to transport the plate along a transport axis, at least from an entrance position to an alignment position defining an alignment plane. The device also comprises mobile members provided with: first movement members able to move the mobile members in a first direction directed along a first axis substantially perpendicular to the alignment plane so as to associate the mobile members with the plate; second movement members able to rotate the plate, associated with the mobile members, around the first axis; and at least third movement members able to move the plate, associated with the mobile members, in a second direction, directed along a second axis substantially transverse to the first axis and substantially co-planar with the transport axis.Type: ApplicationFiled: October 23, 2008Publication date: August 13, 2009Applicant: APPLIED MATERIALS BACCINI SPA CON SOCIO UNICOInventor: Andrea BACCINI
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Publication number: 20090175705Abstract: The present invention restrains, during a transfer of a substrate, a central portion of the substrate from being warped by its own weight, which might be caused by a super-enlargement of a diameter of the substrate. A substrate transfer apparatus 18 includes: a support part 17 which is moved above a substrate w of a large diameter; and an upside grip mechanism 28 disposed on the support part 17, the upside grip mechanism 28 capable of supporting a peripheral portion of the substrate w from above. The support part 17 is provided with a non-contact sucking and holding part 30 having a suction hole 31 and a blow hole 32. The non-contact sucking and holding part 30 sucks and holds the substrate w in a non-contact manner, by blowing a gas onto the central portion of the upper surface of the substrate w and sucking the central portion to form an air layer 50 such that the central portion of the wafer w is not warped.Type: ApplicationFiled: April 23, 2007Publication date: July 9, 2009Inventors: Ken Nakao, Hitoshi Kato, Junichi Hagihara
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Publication number: 20090142169Abstract: A disk drive handling apparatus includes a manifold, one or more vacuum suction elements in fluid communication with the manifold, and one or more tips. Each tip is coupled to an end of a corresponding one of the vacuum suction elements. Each tip is compliant in one or more axes of motion.Type: ApplicationFiled: November 26, 2008Publication date: June 4, 2009Inventors: Edward Garcia, Richard W. Slocum, III
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Publication number: 20090067960Abstract: A wafer guide for preventing a wafer breakage in a semiconductor cleaning apparatus includes a lower supporter, side supporters, fixing units and stoppers. The lower supporter is provided with a plurality of slots formed with the same interval in a length direction to vertically stand a plurality of wafers thereon. The side supporters are structured and arranged in parallel at each side above the lower supporter. The side supporters support side end parts of the wafers. The fixing units are adapted to support both end parts of the lower supporter and the side supporters, and may be fixed to a bath. The stoppers are individually coupled to each of the fixing units. The stoppers are operable to generate an error in a close operation of holder units of the robot chuck when the robot chuck deviates from a normal alignment range, so as not to perform a wafer chucking, thereby preventing a wafer breakage during the wafer chucking.Type: ApplicationFiled: September 12, 2008Publication date: March 12, 2009Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hea-Woong LEE, Chang-Gil RYU, Byoung-Moon YOON, Yong-Myung JUN, Kang-Hee HAN
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Publication number: 20080260502Abstract: A substrate processing apparatus comprises a storage container for storing multiple substrates and whose substrate loading and unloading opening is sealed by a lid, a load port for placing the storage container, an attaching and detaching device for attaching and detaching the lid on the substrate loading and unloading opening in the load port, a first placement unit for mounting the storage container in the load port and moving away from and near the attaching and detaching device, and a second placement unit provided separately from the first placement unit, for mounting the storage container in the load port and moving up and down relative to the attaching and detaching device.Type: ApplicationFiled: April 1, 2008Publication date: October 23, 2008Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventor: Yukinori Aburatani
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Publication number: 20080187420Abstract: A mounting device provided on a horizontally movable stage mechanism, includes a mounting table for mounting thereon a target object, a cylindrical elevation body, having a diameter smaller than a diameter of the mounting table, for supporting the mounting table, a plurality of elevation guide rails provided on an outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in a circumferential direction, and a plurality of support members each having a vertical plate to which engaging bodies engaged with the elevation guide rails are fixed. Further, a plurality of reinforcing parts are vertically provided on the outer peripheral surface of the elevation body so as to be spaced from each other at substantially regular intervals in the circumferential direction.Type: ApplicationFiled: February 1, 2008Publication date: August 7, 2008Applicant: TOKYO ELECTRON LIMITEDInventors: Hiroshi SHIMOYAMA, Kazuya Yano, Masaru Suzuki
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Patent number: 7274767Abstract: In one example, a radiation scanning system and method rotates a cargo conveyance after removal from a ship for proper orientation with respect to a scanning source and detector, for scanning. A movable carriage may be provided on a crane system, to rotate the cargo conveyance. A rotating flywheel on the carriage rotates in a direction opposite the direction of rotation of the cargo conveyance, to counterbalance angular momentum generated by the rotating conveyance, to avoid or minimize twisting of the carriage. Feedback is provided to control the rotation of the flywheel. Once the cargo conveyance is in the predetermined position, the conveyance is moved between the radiation source and detector for scanning by a vertically extending radiation beam.Type: GrantFiled: August 12, 2005Date of Patent: September 25, 2007Assignee: Varian Medical Systems Technologies, Inc.Inventors: James E. Clayton, Paul Bjorkholm
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Patent number: 7063497Abstract: A drive over conveyor pit assembly includes a mainframe including a grain pit located between and adjacent a plurality of drive over sections. Attached to the mainframe are a plurality of entrance ramps and a pair of exit ramps. Each ramp is pivotably attached to an end of the drive over sections. The drive over conveyor pit assembly includes a drive over pit coupled to a grain conveyor in such a configuration to be transported with the main grain conveyor by a single tow vehicle. The assembly includes a drive over conveyor pit hydraulically positioned for transportation.Type: GrantFiled: February 6, 2003Date of Patent: June 20, 2006Inventors: Steve J. Mast, Brent C. Mast
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Patent number: 7056076Abstract: After a roll supply carriage housing rolls in a light-shielded case is coupled to a film manufacturing apparatus, shutters are opened, and a roll retainer shaft and a roll loading shaft are connected to each other. A motor in a roll transferring apparatus is energized to transfer one of the rolls into the roll transferring apparatus. Then, a rotary table is turned to supply the transferred roll to a given region in the film manufacturing apparatus.Type: GrantFiled: November 30, 2001Date of Patent: June 6, 2006Assignee: Fuji Photo Film Co., Ltd.Inventors: Haruo Ichikawa, Akira Wakabayashi
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Patent number: 6712579Abstract: A substrate transfer apparatus provided with a first substrate transfer mechanism having a first substrate holding hand which is movable while holding a substrate; and a second substrate transfer mechanism having a second substrate holding hand for receiving and transferring a substrate directly from and to the first substrate holding hand. The apparatus has a positioning mechanism disposed, in a moving passage of a substrate held by the first substrate holding hand, independently from the first substrate transfer mechanism, and having a positioning contact portion for regulating the movement of a substrate such that the substrate is positioned at a predetermined position on the first substrate holding hand.Type: GrantFiled: April 11, 2002Date of Patent: March 30, 2004Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Kenji Fujii, Fuminori Asa, Ryuichi Hayama, Tomoyuki Komura
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Patent number: 6560857Abstract: An assembly device, in particular a fully automatic assembly device for producing microsystem technical products and for assembling components in the semiconductor industries, comprising an assembly table, a material transport system that transports the products to be placed with components, at least one transport system mounted on the assembly table, and at least one movable component transport unit with at least one assembly head. The component transport unit(s) is/are arranged on one or more carrier system(s) displaceable by means of a transport system in parallel to the direction of transport of the products to be placed with components, which products are in turn displaced by the material transport system(s).Type: GrantFiled: May 10, 2001Date of Patent: May 13, 2003Assignees: Simotech GmbH, Osram Opto Semiconductors GmbH & Co. OHGInventors: Günter Waitl, Johann Feraric
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Publication number: 20020154285Abstract: Apparatus and methods to protect a photomask that is used for semiconductor photolithography at wavelengths outside the visible spectrum include a pellicle that is readily retracted during exposure or to provide access to the photomask. The pellicle can be transparent at an inspection wavelength and opaque at an exposure wavelength. In various embodiments, the pellicle is slid, retracted, or pivoted relative to a base aligned with the photomask, thus uncovering the photomask. When overlying the photomask, the pellicle can be secured with magnetic elements, such as magnets or electromagnets. In another embodiment, the pellicle includes a diaphragm that can be opened or closed. Methods of using a pellicle are also described.Type: ApplicationFiled: April 23, 2001Publication date: October 24, 2002Applicant: Intel CorporationInventors: Arun Ramamoorthy, Hsing-Chien Ma
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Publication number: 20020069517Abstract: There is provided a circuit board fixing table having a structure in which no vibration or shock is applied to a transport motor when a circuit board is fixed and an electronic component mounting apparatus utilizing the circuit board fixing table and capable of mounting electronic components without causing operational failures during transportation. A circuit board fixing table for transporting a circuit board placed on transport belts to a predetermined position and fixing it with an elevating fixing device, the table having a transport motor provided separately from a support member for the transport belts for driving the transport belts and power transmission mechanisms A and B for transmitting a driving force of the transport motor to the transport belts.Type: ApplicationFiled: December 10, 2001Publication date: June 13, 2002Applicant: Matsushita Electric Industrial Co., Ltd.Inventors: Izumi Miura, Hirofumi Obara, Naoto Mimura, Kazuyuki Nakano
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Patent number: 6371716Abstract: Disclosed is an apparatus for unloading substrates. The apparatus includes a handling station, a conveying robot, and a process apparatus controller. The handling station arranges substrates having different sizes and processed by a prior process apparatus. The conveying robot lifts the substrate arranged on the handling station and loads the substrate to a predetermined position on a cassette or a subsequent process apparatus. The process apparatus controller controls the arrangement of the substrate or motions of the conveying robot so that the substrate is loaded on the predetermined position of the cassette or the subsequent process apparatus. The unloading apparatus according to the present invention adjusts the position on which the substrate is placed in the handling station according to the size of the substrate or adjusts a rotational arc of the conveying robot so that the substrate is loaded to a secure position on the cassette or subsequent process apparatus.Type: GrantFiled: December 14, 1999Date of Patent: April 16, 2002Assignee: Samsung Electronics Co., Ltd.Inventors: Sung-Joon Byun, Jong-Beom An, Sung-Cue Choi