With Means To Seal Receptacle In Vicinity Of Entrance For Charging Or Discharging Means Patents (Class 414/292)
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Patent number: 10577714Abstract: There are provided a plating apparatus and a plating method enabling continuous operation even while a stocker is taken out of the plating apparatus. The plating apparatus includes a plating treatment section performing plating on a substrate and a plurality of stockers configured to be able to store a holder configured to hold a substrate or an anode. At least one of the plurality of stockers is configured to be movable into and out of the plating apparatus.Type: GrantFiled: April 13, 2017Date of Patent: March 3, 2020Assignee: EBARA CORPORATIONInventors: Yoshitaka Mukaiyama, Jumpei Fujikata, Hideharu Aoyama
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Patent number: 9726289Abstract: A sealing assembly includes a first component having a first sealing surface, a second component having a second sealing surface and a flat gasket arranged in the space between the first sealing surface and the second sealing surface, wherein the gasket has a through-opening for a third component arranged at least partially in the first component and/or the second component and at least engaging in the through-opening. The flat gasket has retaining means for securing the third component, the retaining means releasing the third component in a release position of said flat gasket and fixing said third component in at least one direction with respect to the first component and/or the second component in a retaining position of the gasket.Type: GrantFiled: July 30, 2014Date of Patent: August 8, 2017Assignee: AUDI AGInventor: Wolfgang Leska
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Patent number: 9033639Abstract: A grain bin access door and chute system that can be retrofitted into existing grain bins or installed in new grain bins. The access panel includes an outer door and an inner door and allows a user to quickly access and assess the grain within a bin without fear of falling into the grain or through the crust of grain which can form a bridge on the top of grain. The access door includes a lever-controlled chute door and pipe-chute connection. This allows grain to be gravity fed into awaiting grain trucks or rail cars without using a more dangerous grain auger and without relying on outside energy sources. Additionally, grain transferred through a gravity-fed method is less likely to become damaged than grain transferred through a grain auger. An optional grain agitator may likewise be installed within the grain bin.Type: GrantFiled: February 25, 2013Date of Patent: May 19, 2015Inventors: Roger H. Schoenfeld, Ryan H. Schoenfeld
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Patent number: 8985932Abstract: In a multi-silo distribution and storage system, the regions between the stationary and transport batchers, and between transport batcher and storage bin are isolated during asphalt discharge with a bellows automatically deployed when clamshell gates of the stationary and transport batchers are opened. The storage bin is provided with a sealing door that lifts vertically for unsealing and slides horizontally to permit access to the bin interior for receiving asphalt discharged from the transport batcher. After registry above the top bin opening, the sealing door is forced downwardly to create a tight seal. For prolonged storage, a fluid seal isolates the lower discharge gate of the storage bin. Steam is delivered to the stored asphalt and bin interior to displace atmospheric oxygen vented through a valve in the bin top. An oxygen sensor linked to a process controller monitors the oxygen level within the storage bin.Type: GrantFiled: September 13, 2012Date of Patent: March 24, 2015Inventor: Michael R Hawkins
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Publication number: 20150010379Abstract: A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.Type: ApplicationFiled: July 8, 2014Publication date: January 8, 2015Inventor: Leigh F. Sharrock
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Publication number: 20140356108Abstract: The invention relates to an unloading system for bulk material from a transport vessel (4), in particular a container, into a silo or another hopper. With this system, the unloading process of the bulk material is easier, more cost-efficient, less time-consuming, more effective, contamination-free and emission-free. To do so, a basic frame (2) is provided which can be fixed to the transport vessel (4) to be unloaded. A screw trough (7) which can be shifted and locked horizontally, with a worm drive (8) as well as a pressurisable dust seal (12) between the screw trough (7) and the unloading opening of the transport vessel (4), are arranged on the basic frame (2). Moreover, a dosing device (11) for dosing the bulk material to be delivered and transport brackets (14) for forklift trucks are provided on the screw trough (7).Type: ApplicationFiled: September 12, 2013Publication date: December 4, 2014Applicant: Pool Invest GmbHInventors: Christian Hanses, Roland Sitta
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Publication number: 20140314527Abstract: The invention relates to a discharge method for discharging an at least partially flexible container without contamination, in which method the container (1) is discharged into a base body (10), a liner (20) that encloses a filling opening (11) of the base body (10) being secured to the base body (10). According to the invention, a filling end (21) of the liner (20) is folded inwards such that a receiving region forms for the container (1). The receiving region is sealed in such a manner that a discharge opening formed by means of a knife (15) allows the container (1) to be discharged whilst being completely sealed off to the exterior.Type: ApplicationFiled: November 13, 2012Publication date: October 23, 2014Inventors: Günter Untch, Peter Lais, Martin Koch
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Patent number: 8651791Abstract: A door assembly for an agricultural storage bin includes an exterior chute communicating with a lower portion of a bin door opening. The exterior chute extends outwardly at an upward inclination from a bottom edge of the door opening to an open top end spaced below a top end of the door opening. An inner door panel hinged at an inner side of the bin wall spans an upper portion of the door opening above the exterior chute when closed. A cover member spans an open top end of the exterior chute when closed. An unloading auger can be readily inserted through the external chute below the inner door panel for unloading the bin by removing the cover member. The inner door can be subsequently opened inwardly when the level in the bin falls below the upper portion of the bin door opening.Type: GrantFiled: December 21, 2010Date of Patent: February 18, 2014Inventor: Lester James Thiessen
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Publication number: 20130223960Abstract: A grain bin access door and chute system that can be retrofitted into existing grain bins or installed in new grain bins. The access panel includes an outer door and an inner door and allows a user to quickly access and assess the grain within a bin without fear of falling into the grain or through the crust of grain which can form a bridge on the top of grain. The access door includes a lever-controlled chute door and pipe-chute connection. This allows grain to be gravity fed into awaiting grain trucks or rail cars without using a more dangerous grain auger and without relying on outside energy sources. Additionally, grain transferred through a gravity-fed method is less likely to become damaged than grain transferred through a grain auger. An optional grain agitator may likewise be installed within the grain bin.Type: ApplicationFiled: February 25, 2013Publication date: August 29, 2013Inventors: Roger H. Schoenfeld, Ryan H. Schoenfeld
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Patent number: 7597525Abstract: A bulk material cargo container liner system comprises an inflatable bulk material cargo container liner which has at least one vacuum discharge tube member disposed internally within the bulk material cargo container liner and extending along the longitudinal extent thereof for discharging bulk cargo material outwardly from the bulk material cargo container liner, and at least one inflatable air bag component for conducting the bulk material, disposed within the bulk material cargo container, toward the vacuum discharge tube member.Type: GrantFiled: March 16, 2004Date of Patent: October 6, 2009Assignee: Illinois Tool Works Inc.Inventors: Michael J. McMahon, Stanley Piotrowski, Douglas Miller, Oswaldo Mino, Shelley Stopper
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Publication number: 20080145198Abstract: A liner emptying device and a liner filling device as well as methods using them for contamination-free filling and emptying of a liner. This contamination-free filling and emptying prevents any danger to the health of the people working with the packaged substances. Both the liner emptying device and the liner filling device are connected to the liner via a fastening device and the residual films sealing off the device can be removed via an access port, whereby the liner can be filled or emptied without contaminating the surroundings.Type: ApplicationFiled: December 4, 2007Publication date: June 19, 2008Applicant: HECHT ANLAGENBAU GMBHInventors: Steven MULTER, Karsten WEBER
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Publication number: 20080008570Abstract: A bridge loadport is described comprising a tool interface, an advance plate assembly, a port plate, and a port door. The tool interface extends vertically and is configured to substantially cover one end of a process tool. The advance plate assembly is supported on the front side of the tool interface and is configured to support a front-opening unified pod (pod). The port plate extends vertically, covering an upper portion of the tool interface. An aperture having a size and shape that substantially matches a size and shape of a door of a pod is formed in the port plate. The port door has a port door actuator and a port door face attached to the port door actuator. In one embodiment, the port door face is movable with respect to the port door actuator along a ling perpendicular to the aperture.Type: ApplicationFiled: July 9, 2007Publication date: January 10, 2008Inventors: Theodore W. Rogers, Roumen I. Deyanov
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Patent number: 6981832Abstract: A system for processing semiconductor wafers includes adaptations allowing the selective handling of cassettes for both 200-mm wafers and 300-mm wafers. The system is configured initially for handling standard 300-mm FOUP cassettes. Adaptions for handling 200-mm wafer open cassettes include a load port adapter frame for receiving such cassettes on a input/output platform; a cassette handler adapter configured for reversibly mounting on a cassette handler end effector and for receiving 200-mm open cassettes; a store adapter frame for converting 300-mm FOUP storage compartments into compartments for storing 200-mm open cassettes; and a Transhipment FOUP for holding 200-mm open cassettes upon a cassette transfer platform and bringing such cassettes into an interface with a wafer handler. The Transhipment FOUP has outer surfaces resembling a standard 300-mm FOUP cassette, but is configured to receive a 200-mm open cassette therein.Type: GrantFiled: August 15, 2003Date of Patent: January 3, 2006Assignee: ASM International NVInventors: Jan Zinger, Christianus G. M. De Ridder
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Patent number: 6802685Abstract: In a device for transferring bulk material from a reservoir or a holding space through a lock space into a pneumatic conveyor line—in which the lock space can be closed in relation to the reservoir or holding space by an axially movable closure body and at least one counterpart sealing element disposed in opposite relationship in its path of movement—the closure body has at least one vent opening which opens into an air discharge passage and can be closed in the upward closing movement of a stroke element with the sealing body; the downward opening travel (x) thereof is shorter than the downward travel of the stroke element with the sealing body. The closure body enlarges from a narrow cross-section—forming an inner sealing edge in a funnel-like configuration towards the sealing body and the narrow cross-section is an annular seat for the sealing body in the closure position.Type: GrantFiled: December 26, 2001Date of Patent: October 12, 2004Inventor: Bernd Federhen
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Patent number: 6779567Abstract: A transfer port apparatus (10) is provided to enable a worker to transfer one or more objects through a sealed passageway provided in the apparatus (10) from one sealed chamber into another sealed chamber. Transfer port apparatus (10) is adapted to be coupled to a movable canister (12) and a stationary isolator (16). Expandable airtight seals (72, 120) are deflated, doors (30, 40) are removed and an object (20) is transferred into the airtight clean working environment established in the isolator (16) through the sealed passageway established in transfer port apparatus (10) following coupling of canister (12) to isolator (16) using transfer port apparatus (10). After the object (20) is moved, doors (30, 40) are replaced and expandable airtight seals (72, 120) are inflated creating a substantially airtight seal. Movable canister (12) can be uncoupled from the transfer port apparatus (10).Type: GrantFiled: March 18, 2002Date of Patent: August 24, 2004Assignee: La Calhene, Inc.Inventor: Michael A. Szatmary
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Patent number: 6679672Abstract: A transfer port facilitates transfer of a material between clean room modules, and/or between a clean room module and a clean box transporter that can travel through the contaminated ambient environment. A transfer port permits transfer of clean material between Class 1 clean rooms without degrading their cleanliness levels. The clean box transporter cars each comprise a small self-propelled clean room with laminar air flow and a HEPA filter. A door on the clean box mates against a similar door on one wall of the clean room module. A seal between a transporter car door and its opening, and a seal between a clean room door and its opening, a pair of seals disposed inside and outside a split line together define a limited contaminated volume. This volume is evacuated and/or flushed with clean gas to remove as much particulate matter as possible.Type: GrantFiled: March 10, 2003Date of Patent: January 20, 2004Assignee: Syracuse UniversityInventor: John F. Barrows
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Patent number: 6619338Abstract: A material loading skirt system for reducing contamination of material during loading. The material loading skirt system includes a tubular skirt having a narrow end and a broad end, a first elastic band is attached to the broad end of the tubular skirt, and a second elastic band is attached to the narrow end of the tubular skirt. The narrow end of the tubular skirt is snugly attachable about a loading tube and the broad end of the tubular skirt is snugly attachable about a container hatch. The tubular skirt has a tapered structure from the broad end to the narrow end.Type: GrantFiled: January 18, 2002Date of Patent: September 16, 2003Inventor: Henry C. Bonde, III
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Patent number: 6595735Abstract: A bulk particulate handling apparatus and method for transferring material between a first and second site which utilizes a stream of gas to remove material from the flow path. Contamination of the flow-path is thereby reduced by providing the stream of gas for the removal of material before and after flow of material. A method embodied by the invention is directed toward the use of a bulk particulate handling apparatus.Type: GrantFiled: October 23, 2000Date of Patent: July 22, 2003Assignee: Matcon (R&D) LimitedInventor: Charles Lee
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Publication number: 20020159868Abstract: A sealing device is provided for a working chamber system with a robot hand (216) that extends into the working chamber (100) through an aperture (120) by means of which a seal may be established and removed by remote control. The sealing device includes: (a) a flexible sealing element (20) by means of which an inner pass-through ring element (40) is connected with the edge of the aperture (120); (b) at least two coupling elements that are attached to the pass-through ring element (40) and (c) at least one locking element that is connected with the robot hand (216) and that may be positioned by means of positioning elements for coupling of the robot hand (216) with the pass-through ring element (40) by means of the coupling elements.Type: ApplicationFiled: April 17, 2002Publication date: October 31, 2002Inventor: Reinhard Nadicksbernd
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Publication number: 20020114686Abstract: A front opening wafer container has a container portion with a transparent shell and a door to close the open front. The container portion has a machine interface on the bottom of the shell, such as a kinematic coupling, and a receptacle at the top of the shell to receive an accessories, in particular a robotic lifting flange or an adaptor plate. The adaptor plate will ideally have a cooperating machine interface portions to allow stacking of the wafer carriers. The receptacle has, in preferred embodiments, sliding support guides with undercut portions for retention of the robotic lifting flange or the adaptor plate. The accessory will ideally have a detent positioned on the accessories to releaseably lock said accessory in place on the container portion.Type: ApplicationFiled: December 4, 2001Publication date: August 22, 2002Inventors: Phil Glynn, Fred W. Ludwig
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Patent number: 6170235Abstract: A wafer packaging method in which a wafer is placed into a packaging bag that is sealed before the concentration of sulphuric oxide on the surface of the wafer reaches 3×1012 atoms/cm2.Type: GrantFiled: December 7, 1998Date of Patent: January 9, 2001Assignee: Samsung Electronics Co., Ltd.Inventors: Kyoo-chul Cho, Jea-gun Park, Sung-hoon Cho
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Patent number: 5893567Abstract: An intake/outtake arrangement of a container for a material may communicate with a tube, a transfer container or the like. In order to control intake or outtake of the material container, the intake/outtake arrangement is movable relative to wall means of the container between an open position and a closed position whereby an intake/outtake opening is opened and closed. A sealing body is located between the material container and the intake/outtake arrangement, and is elastically deformable. The sealing body has an inner cavity to be connected to a source of fluid. When in communication with the source of fluid, the sealing body expands in outward direction while being supported by a rigid inner wall.Type: GrantFiled: May 9, 1997Date of Patent: April 13, 1999Assignee: Anag A. Nussbaumer AGInventor: Benno Bitterli
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Patent number: 5893399Abstract: A mechanism for hindering the escape of grain dust from a grain bin, including baffle units having diagonally extending barrier members and vertically oriented baffle members. First and second sloped side walls of the bin, a cover, and a curtain confine the circulation of dust to portions of the bin remote from the baffle units to thereby hinder the escape of dust from the bin. Metering and dump units can be combined with the baffle units to allow operation of a single grain bin in both the high and low flow rate modes of operation.Type: GrantFiled: December 22, 1997Date of Patent: April 13, 1999Assignee: Agricultural Building CompanyInventor: Ken Kearney
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Patent number: 5870886Abstract: A transfer system for transferring objects into a barrier isolator is provided. The barrier isolator includes a barrier wall to maintain a decontaminated environment in an isolated space. The transfer system includes a port opening located in the barrier wall. A first port barrier film is sealingly located over the port opening. A container is provided which includes an interior cavity which contains a second, replacement port barrier film and which is adapted to further receive and hold decontaminated objects to be delivered through the port opening and into the isolated space. A container barrier film is sealingly connected to the container to seal the second, replacement port barrier film and the decontaminated objects within the cavity in a decontaminated state. The container barrier film has a first, decontaminated side which faces the cavity, and a second exposed side, positionable adjacent to the port barrier film.Type: GrantFiled: October 9, 1997Date of Patent: February 16, 1999Assignee: The West Company, IncorporatedInventor: Paul H. Norton
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Patent number: 5735321Abstract: An isolator system 10 comprises an isolator 11 moveably mounted on a support 12 and an impervious bag 16 open at one end and sealingly attachable to the isolator 11. A drum 90 containing a substance to be dispensed may be sealingly attached to the isolator by moving the isolator to the drum. The lid 110 of the drum 90 may be removed from the drum once the lidded end of the drum is within the isolator 11. The isolator is able to rotate about the axis of its support which causes inversion of the isolator and the drum now contained within the isolator. Substances contained within the drum may be dispensed into a second container such as an IBC whilst contained within the enclosure thus protecting an operator from contamination from the substance.Type: GrantFiled: July 20, 1995Date of Patent: April 7, 1998Assignee: Extract Technology Ltd.Inventors: Ryder Martyn, Neil Graham Cocker
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Patent number: 5715659Abstract: A transfer system for transferring objects into a barrier isolator is provided. The transfer system includes a port opening located in a barrier wall to provide access to an isolated space. A port barrier film is sealingly located over the port opening, with the port barrier film having a first, decontaminated side which faces the isolated space and a second side which is exposed. A container adapted to hold the objects to be delivered through the port opening and into the isolated space is provided. A container barrier film is sealingly engaged to the container opening such that decontaminated objects sealed within the cavity in the container remain decontaminated. The container barrier film has a first, decontaminated side which faces the cavity and a second exposed side.Type: GrantFiled: February 3, 1997Date of Patent: February 10, 1998Assignee: The West Company, IncorporatedInventor: Paul H. Norton
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Patent number: 5711427Abstract: A wafer container has an open front defined by a door frame and a door sized for the door frame. The door receiving frame has slots on opposite sides and the door utilizes latching portions that extend and retract from the edge portion of the door into and out of the slots for latching and unlatching the door on the door receiving frame. The door also has wafer engaging arms which extend inwardly toward the wafers to secure said wafers when the door is in place. The retractable latching portions and wafer retaining arms are linked to a rotatable cammed member in the interior of the door. The cammed member utilizes cammed surfaces configured to first latch the door and to then extend the wafer retaining arms.Type: GrantFiled: July 12, 1996Date of Patent: January 27, 1998Assignee: Fluoroware, Inc.Inventor: David L. Nyseth
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Patent number: 5651472Abstract: The invention relates to a clamping mechanism for clamping together a closure and a body mounting same, comprising a first member mounting a plurality of clamping devices, and a second member having an over-center part. The first and second members are in engagement, the arrangement being such that when the body engages the first member, the first and second members move over-center and the clamping devices and the second member engage the closure to clamp the closure in the body.Type: GrantFiled: October 3, 1994Date of Patent: July 29, 1997Inventor: Ivan Semenenko
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Patent number: 5636959Abstract: Apparatus for covering a ship's hatch or similar opening that is exposed to weather or environmental conditions, whereby the opening is closable by means of a cover that is at least partially removable. The cover safeguards against water penetration when loading and unloading during bad weather and allows for dry loading and unloading. By sealingly placing a frame-like housing around the edge of the opening, a shaft open on one lateral boundary is formed within the frame housing. The shaft is closable from above by means of overlapping covers, which open automatically when pressed upon by a body suspended on a loading or unloading crane or close automatically when the body is removed.Type: GrantFiled: December 22, 1995Date of Patent: June 10, 1997Assignee: Mannesmann AktiengesellschaftInventors: Joachim Kroell, Hermann Franzen, Melanie Gamerschlag
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Patent number: 5628683Abstract: A system for transferring substrates in a clean room (100) has a box (1) for receiving a cassette (101) that contains the substrates (102), and a bottom (2) that hermetically closes the box (1) and that can be locked and unlocked in the box (1) by a locking mechanism. The locking mechanism has a captive C-washer (25) rotatively mounted in the box bottom (2). The captive C-washer (25) drives locking elements (21a, 21b; 321a, 321b), preferably by means of connecting rods (24a, 24b; 324a, 324b). The locking elements (21a, 21b; 321a, 321b) engage locking slots (11a, 11b) of the box (1). The captive C-washer (25) has catching bores (26a, 26b) engaged by the locking bolts (41a, 41b) of a rotary disk (45) arranged in a lock gate (4). A swivelling movement of the rotary disk (45) driven by a driving device of the system causes the bottom (2) to be locked and unlocked in the box (1).Type: GrantFiled: November 28, 1994Date of Patent: May 13, 1997Assignee: Josef GentischerInventor: Josef Gentischer
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Patent number: 5546651Abstract: A method and apparatus for encapsulating a payload in a shroud and mounting the resulting assembly on a launch vehicle. An encapsulation cell is provided for containing a payload to be encapsulated in a shroud. That cell is maintained at a "clean room" level of cleanliness. A shroud having a cleaned and sealed interior is placed on the roof in a vertical orientation. A seal arrangement seals between the shroud near its lower end and the roof, creating an airlock. The roof panels below the shroud are opened and the payload is lifted into the shroud through the opening and secured in the shroud. The opening is then closed, the seal retracted and the assembly of payload and shroud moved to a bay where it is mated to a space launch vehicle. This cell and encapsulation system eliminates the need to clean the shroud exterior and any need for a very large clean room cell to house the payload, shroud and lifting device.Type: GrantFiled: August 1, 1994Date of Patent: August 20, 1996Assignee: Lockheed Martin CorporationInventors: James E. Hollopeter, Tsvi H. Estline, Robert L. Barton
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Patent number: 5482161Abstract: A standardized mechanical interface (SMIF) pod for use in conjunction with SMIF systems is disclosed. The pod is utilized for transporting article, such as semiconductor wafers or the like, between locations such as SMIF processing stations. The pod includes a box having an open end and a box door which sealably engages and closes the open end. The box contains a removable carrier which seats on the box door and which has an open side for insertion and removal of the articles. The pod features a latching mechanism in the box door utilizing a star wheel with tips that rotate and extend out of slots in the box door into slots in the interior sidewalls of the box. The tips then move vertically downward to sealingly engage the box door to the box. The star wheel embraces a concentric cammed hub having angled cam surfaces engaged by cam follower pins extending radially inward from the star wheel.Type: GrantFiled: May 24, 1994Date of Patent: January 9, 1996Assignee: Fluoroware, Inc.Inventors: Randall S. Williams, Nicholas T. Cheesebrow
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Patent number: 5451131Abstract: Disclosed is a manufacturing system having isolated islands of "clean room" environment connected by inter-process transfer containers for transfering in-process workpieces. The system has airlock transfer ports between the process enclosures and the inter-process transfer containers. The make and break airlock transfer ports have facing sealable doors in the process enclosure and the transfer container. These doors are in air sealable facing recesses of the process enclosure and the transfer container. At least one peripheral gasket surrounds the recesses and the pair of doors. This provides a substantially clean room environment in the airlock. The sealable door in the interprocess transfer container is fabricated of a ferromagnetic material and is seated on a ferromagnetic gasket, while the sealable door in the process enclosure has a controllable electromagnetic clamp.Type: GrantFiled: June 19, 1992Date of Patent: September 19, 1995Assignee: International Business Machines CorporationInventors: Lewis C. Hecht, Merritt P. Sulger, deceased, Ernst E. Thiele, Mark V. Pierson, Lawrence E. Williams
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Patent number: 5374148Abstract: The invention relates to a procedure and an apparatus for feeding solid material into a pressurized space. According to the invention, the apparatus comprises a feed chamber (12) communicating with the pressurized space (1) via a gate (13), a piston cylinder (8) adjoining the feed chamber (12) and provided with an aperture (28) in its wall for the intake of solid material, and a piston (9) which consists of an inner and an outer piston (11,10), moves within the piston cylinder (8) and closes the feed chamber (12) tightly when in its front position. The inner piston (11) moves inside the outer piston (10) and in the feed chamber (12) to insert the solid material into the pressurized space (1).Type: GrantFiled: March 30, 1993Date of Patent: December 20, 1994Assignee: Kone OyInventors: Reijo Kilpelainen, Risto Laukkanen, Matti Virolainen
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Patent number: 5359785Abstract: A deck movable between cassettes arranged on a base for storing a plurality of substrates in multiple stages and a substrate cleaning section for cleaning the substrates, supports a substrate fetching arm for fetching the substrates from the cassettes, and a cleaned substrate depositing arm for depositing treated substrates. The depositing arm is vertically movable between a position in which a substrate supporting surface thereof is situated below a substrate supporting surface of the substrate fetching arm to render the latter operative, and a position in which the supporting surface of the depositing arm is situated above the supporting surface of the fetching arm to render the depositing arm operative.Type: GrantFiled: November 18, 1992Date of Patent: November 1, 1994Assignee: Dainippon Screen Mfg. Co., Ltd.Inventors: Yoshiteru Fukutomi, Masami Ohtani, Takeo Okamoto
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Patent number: 5302073Abstract: A dumper for use in dumping the contents of a container. The dumper includes a hollow receiving portion for receiving therein at least an upper end of the container and an outlet portion for guiding contents emanating from the container to a desired location. A mechanism for effecting a relative movement between the receiving portion and the upper end of the container and an orientation of the receiving portion onto the upper end of the container is provided. An inflatable bladder mechanism is mounted on an inwardly facing surface of the receiving portion and oriented to engage a peripheral side surface of the container, when inflated, with sufficient force to clamp and hold the container to the receiving portion. A tipping mechanism is also provided for tipping the receiving portion and the container in unison only when the bladder is inflated.Type: GrantFiled: August 20, 1992Date of Patent: April 12, 1994Assignee: National Bulk Equipment, Inc.Inventors: Keith A. Riemersma, Philip S. Keller, Steven C. Nyland
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Patent number: 5295522Abstract: A reusable isolation enclosure has a closure member adapted for purging gases from the enclosure. The closure member includes filters and vapor and moisture drains. Replacement of ambient environmental gases in the sealed enclosure is provided. A purge gas is provided by the gas replacement system which quickly connects to the enclosure and quickly disconnects from the enclosure. Suction cups surrounding the ends of gas connection lines form the interface to the filter membrane and form a sealed connection with the closure member. No other mechanical connection than the suction cups is required. The outlets and inlets of the purging system and the exhausting system are automatically disconnected by a spring valve when the isolation container to be purged is removed. When the closure member of the isolation enclosure is placed upon the purge system the weight of the package compresses the valve spring opening the valves, permitting the purge gas to flow.Type: GrantFiled: September 24, 1992Date of Patent: March 22, 1994Assignee: International Business Machines CorporationInventors: Robert L. DeAngelis, Gary M. Gallagher
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Patent number: 5291923Abstract: A reusable isolation structure features an easily cleanable shell. The opening of the shell includes a groove formed around the periphery thereof and is preferably not more than slightly smaller than an interior cross-section of the shell. A closure member (door) of the isolation structure is dimensioned to fit within the opening and has a resilient seal member clamped to the periphery of a backbone by front and rear plates. The front and rear plates cooperate with grooves formed in the backbone to define a preferred form of manifold for coupling pressure or a vacuum to the interior of the resilient seal member whereby the resilient seal member may be collapsed to allow removal of the closure member or allowed to expand or pressurized to provide secure closure member. A vacuum structure for handling the closure member simultaneously provides for evacuation and controlled collapse of the resilient seal member as well as containment of contamination of the exterior thereof.Type: GrantFiled: September 24, 1992Date of Patent: March 8, 1994Assignee: Internatinal Business Machines CorporationInventors: Gary M. Gallagher, Gordon E. Johnson
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Patent number: 5226781Abstract: For transferring products from a contaminated enclosure (12) into a second enclosure (16) without contaminating the latter, it is proposed to engage on the contaminated enclosure a transportation container (20), in which is placed an empty transfer chamber (22). After removing the coupled doors (C,F,H) of the contaminated enclosure, the container and the transfer chamber, the products to be transferred are introduced into the latter, without the space surrounding the chamber within the container communicating with the enclosure. This is followed by the reclosing of the coupled doors (C,F,H) and the disconnection of the container (20), in order to transport it and engage it on the second enclosure (16). The coupled doors (B'C', F) of said second enclosure and the container (20) are then opened in order to introduce into said second enclosure the transfer chamber (22) containing the products.Type: GrantFiled: March 18, 1992Date of Patent: July 13, 1993Assignee: EuritechInventors: Charles Glachet, Liliane Ponchet
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Patent number: 5192506Abstract: An automated assay system includes a temperature controlled chamber with a conveyor therein. The conveyor carries berths past a port in a sidewall of the chamber to permit insertion and extraction of assay cartridges via the port into respective ones of the berths. An injector disposed outside the chamber and at the port includes a loader arm for advancing cartridges along a path through the port to accomplish insertion and extraction of a cartridge. A track is provided in the injector for guiding the assay module. A portion of the track connects by a swing arm to a pivot allowing the track portion to be swung away from the path for ejection of a cartridge. A door which provides for opening and closing of the port is connected to the swing arm to move concurrently with the swinging of the track portion. This allows for automatic closure of the port subsequent to an insertion or an extraction of a cartridge, and automatic opening of the port prior to insertion or extraction of the cartridge.Type: GrantFiled: February 14, 1991Date of Patent: March 9, 1993Assignee: P B Diagnostic Systems, Inc.Inventors: Fareed Kureshy, Charles A. DeAngelis, Robert C. MacIndoe, Jr.
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Patent number: 5171541Abstract: Process for discharging solid particulate products present in a fluidized bed reactor in which the polymerization or copolymerization of alpha-olefins is carried out, in a system consisting of a vessel connected to the reactor by way of a pipe provided with a first valve and connected to a reservoir situated downstream by way of a pipe provided with a second valve, the said method being characterized in that:the two valves consist of continuously rotating plug, valves, these valves being moved in such a way that the two valves are not open at the same time, even partly, and the volume of the vessel comprises between 1/10 and 1/000, and preferably between 1/100 and 1/500 of the volume of fluidized solid contained in the reactor.Type: GrantFiled: May 14, 1991Date of Patent: December 15, 1992Assignee: BP Chemicals LimitedInventor: Charles Raufast
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Patent number: 5098245Abstract: The present invention describes a loading system for high speed loading of wafers, such as semiconductor wafers, into vacuum chambers for various applications such as inspection or processing using, for example, a SEM. This system provides low contamination from atmospheric conditions both on loading and unloading the wafers.Type: GrantFiled: November 5, 1990Date of Patent: March 24, 1992Assignee: U.S. Philips CorporationInventors: Guillermo L. Toro-Lira, Alan C. Abel, Alan H. Achilles
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Patent number: 5000644Abstract: A bin inlet deflector for a granulator wherein the deflector is secured to the screen chamber and encloses the bin to ensure that all granulate is received in the bin and not outside the bin.Type: GrantFiled: June 4, 1990Date of Patent: March 19, 1991Assignee: Nelmor Company, Inc.Inventors: Thomas D. McBridge, Jean B. Lamoureux, Edward P. Lariviere
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Patent number: 4995430Abstract: A transportable, sealable container, for example a SMIF pod, has a box and a box door. The box has a first sealing surface and the box door has a second sealing surface which forms a seal with the first sealing surface when the box door is moved in a sealing direction with respect to the box. A latch mechanism provided in the box door is operable in two stages. The first stage of operation moves latch members from a retracted position to an extended position, in the retracted position the latch members are contained in the box door to allow movement of the box door with respect to the box, and in the extended position the latch members are adjacent to latch surfaces of the box. Movement from the retracted to the extended position is performed without contact between the latch members and the latch surfaces to avoid any scraping or rubbing action which would create particles in the "clean" interior region of the box.Type: GrantFiled: May 19, 1989Date of Patent: February 26, 1991Assignee: Asyst Technologies, Inc.Inventors: Anthony C. Bonora, Frederick T. Rosenquist
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Patent number: 4990045Abstract: An arrangement for unloading bulk material from the hold (12) of a freighter (11) which includes a hatch cover (25) in combination with a lifting screw (14) or similar unloading means which is lowered down into the hold (12) via the associated loading hatch (13). The hatch cover (25), which is adapted to rest on a coaming (26) on loading hatch (13) of the freighter (11) via an annular cover frame (34), is provided with a cover portion (31) pivotably mounted about a vertical axis (31a) having a vertical through-going guide (30) for the reception of the unloading means (14) for swinging of the same in a path forwards and backwards from one side portion of the hatch cover to the middle of the hatch. The cover portion (31) is allowed to turn in the cover frame (34) with corresponding movement of the unloading means (14).Type: GrantFiled: July 27, 1989Date of Patent: February 5, 1991Inventor: Per T. Aralt
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Patent number: 4984510Abstract: A sphincter seal, to accommodate variations in diameters of drums, is employed at a posting port into a containment. The seal comprises an annular assembly of inner and outer brush seals between which are sandwiched rings of resilient material. An elastic garter is secured to the resilient rings to resist deformation of the rings through use.Type: GrantFiled: April 11, 1988Date of Patent: January 15, 1991Assignee: British Nuclear Fuels PlcInventors: Richard J. Critchley, Samuel R. Oldham
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Patent number: 4976579Abstract: A flask assembly for the transfer of objects, in particular objects contaminated by radioactivity, into and out of an enclosure. The assembly includes a levelling system to sit over a posting port in an enclosure for the objects and which supports a stool assembly. The stool assembly includes a lower gamma gate which cooperates with an upper gamma gate on a flask body which is removably mounted on the stool assembly. The flask body carries a winch system for flasking objects through the posting port. A shock absorber unit is housed within the stool assembly.Type: GrantFiled: April 12, 1989Date of Patent: December 11, 1990Assignee: British Nuclear Fuels plcInventor: James Jones
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Patent number: 4957221Abstract: A improved silo is provided having a pair of pivoting receiver gates overlying a pair of receiver openings and a pair of pivoting discharge gates overlying a pair of discharge openings. A deformable seal is secured to the silo between the receiver openings and the receiver gates and between the discharge openings and the discharge gates. The gates are vertically adjusted by an eccentric assembly to compress the respective deformable seal for forming an air tight barrier between the respective openings and the gate.Type: GrantFiled: January 3, 1989Date of Patent: September 18, 1990Assignee: CMI CorporationInventor: Stuart W. Murray
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Patent number: 4943199Abstract: Machine tool apparatus utilizes a tool magazine provided with first plurality of horizontally extending parallel separate compartments disposed vertically one above the other. A plurality of elongated tool units are disposed in the compartments, each compartment containing a like number of units, the units in each compartment being disposed in spaced side by side position across the width of the compartment. Each unit in any compartment is vertically aligned with the correspondingly positioned units in all other compartments. Displaceable, first mechanisms coupled to each unit enable each unit to be separately moveable back and forth along the length of its compartment to either extend the unit out of its compartment into position for subsequent transfer or to retract the corresponding unit back into its compartment.Type: GrantFiled: March 3, 1989Date of Patent: July 24, 1990Assignee: Starrfrasmaschinen AGInventor: Gerhard Hillen
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Patent number: 4834394Abstract: Apparatus includes a mounting member having a bore which closely receives the shaft and a counterbore in which two elastic O-rings separated by an annular element are received. A first compression member threadably engages the mounting member to apply axial pressure to the O-rings, which are radially compressed against the shaft by bevelled annular surfaces which capture the O-rings. This provides an environmental seal effective for a vacuum while still permitting axial and rotational movement of the shaft. Apparatus further includes a ball member fixed to the mounting member and received against an O-ring in a socket member. A second compression member threadably engaging the socket member to urge the ball member against the seal to provide additional sealing while permitting pivotal movement of the shaft.Type: GrantFiled: July 7, 1988Date of Patent: May 30, 1989Assignee: North American Philip CorporationInventors: George Katz, Theodore Nalesnik