Abstract: A modular automatic warehouse comprising at least one module having a parallelepiped shape delimited by respective vertical uprights is provided. The module comprises a first and a second element, each element comprising a plurality of substantially horizontal seats or guides defined by structural flanks for the introduction and/or extraction of a respective plurality of shelves or drawers adapted to contain articles to be stored. The first and second elements being opposite to each other and separated by a compartment inside which at least one lift operates. The lift is able to translate from a lowered position to a raised position in order to move to a location of the drawers. The warehouse may further comprise a means for translating at least one at a time of the drawers towards further similar adjacent modules in turn provided with a means for translating the drawers to be displaced.

Abstract: A ceiling conveyance vehicle includes a traveling wheel to roll on a track including a first track and a second track and a main body below the track and coupled to the traveling wheel. The ceiling conveyance vehicle includes a direction changer to change between a first state in which the traveling wheel rolls on the first track and a second state in which the traveling wheel rolls on the second track, with an orientation of the main body with respect to the track maintained, an article holder capable of holding an article, a hoisting-and-lowering driver to hoist and lower the article holder, a lateral slider to slidingly move the hoisting-and-lowering driver in a horizontal, linear direction, and a first rotational driver to rotationally drive the lateral slider around a first perpendicular axis with respect to the main body.

Abstract: A handling system for high throughput processing of a large volume of biological samples is provided herein. Such systems can include an array support assembly that supports multiple diagnostic assay modules in an array having at least two dimensions, a loader that loads multiple diagnostic assay cartridges within the multiple diagnostic assay modules. The array support assembly can be movable relative the loader to facilitate loading and unloading so as to provide more efficient processing.

Abstract: An apparatus for bonding semiconductor chips may comprise transfer rails configured to transfer substrates, loading members configured to load the substrates onto the transfer rails, unloading members configured to unload the substrates from the transfer rails, a first wafer supply unit configured to supply a first wafer including semiconductor chips, and/or a bonding unit configured to bond the semiconductor chips to the substrates. An apparatus for bonding semiconductor chips may comprise a transfer rail configured to transfer substrates, loading members configured to load the substrates onto the transfer rail, unloading members configured to unload the substrates from the transfer rail, a buffer member at a side of the transfer rail configured to temporarily receive the substrates loaded by the loading members, a first wafer supply unit configured to supply a first wafer including semiconductor chips, and/or a bonding unit configured to bond the semiconductor chips to the substrates.

Abstract: A support body includes a protrusion that protrudes in the horizontal direction from a base and passes through a notch in the vertical direction when a container is transferred, and the lateral width of the protrusion is formed to be narrower than the lateral width of the container. A small container and a large container configured to be wider than the small container in the lateral width direction exist as the container. The support body includes, as support body-side supporting parts, three support body-side small container supporting parts that support three small container supported parts located on the bottom surface of the small container, and a support body-side edge supporting part that supports an edge of the outer periphery of the bottom surface of the large container near the base.

Abstract: An apparatus for mounting a semiconductor device includes a mounting component and a loading component. The mounting component is configured to mount the semiconductor device onto a circuit board. The loading component is disposed adjacent to the mounting component, and is configured to supply the semiconductor device and the circuit board to the mounting component.

Abstract: A panel-storing shelf comprises at least two support members, at least two tracks disposed around a surface of each of the at least two support members, respectively, to rotate about respective support member, and at least two brackets disposed on each of the at least two tracks, respectively, and at the same level, to hold the panel and rotate along with the track.

Abstract: A system for replacing a discharged battery in a vehicle featuring a trolley with wheels operatively connected to a driving mechanism, the trolley can be directed to a battery tunnel of a vehicle via sensors; a moving battery tray mounted atop the trolley via a hydraulic cylinder, which functions to move the moving battery tray upwardly and downwardly; a charged battery removably disposed atop the moving battery tray; a locking system for locking the charged battery into the battery tunnel of the vehicle. The system allows the trolley to deliver the charged battery from a charging station to the vehicle. The discharged battery is removed from the vehicle in the same process the charged battery is installed in the vehicle. The trolley can carry the discharged battery back to the charging station for recharging.

Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

Abstract: A magazine for mounting twist locks includes a rotatably mounted drum having a plurality of axially oriented elongated guide elements, which are arranged at a distance from each other on the circumference of the drum and the longitudinal axes of which are oriented parallel to each other. The distance between the guide elements is larger than the diameter of a concave section of a respective twist lock and the guide elements form the support for the terminal sections of the twist lock. Closing elements are arranged at each end of the drum and delimit the intermediate spaces formed by the guide elements in the radial direction. One closing element is arranged in a non-rotatable manner and has a radially oriented recess for inserting twist locks between two guide elements in the axial direction.

Abstract: An automated arrangement for filling a shipping rack structure with water bottles (or any other type of bottle) includes an elevator arrangement and a pusher component, both under the control of a programmed control element (such as a microprocessor), to automatically present a plurality of filled bottles to an open rack “column” and move (push) the bottles from the elevator into the rack. The loader system is pre-programmed with inputs including the array size of the rack being loaded (i.e., how many bottles “deep” along each rail, the number of rows in the rack and the number of columns in the rack). With this information, the elevator will thus lift the proper number of bottles into place to fill a column, and then stop. Once the elevator stops, the pusher component will advance to move the column of bottles into the rack. The pusher then retracts, the elevator is re-started, and the next column of filled bottles is loaded into the elevator.

Abstract: A system and method is disclosed that transfers carrier boards in a handler that supports the testing of electronic devices. A carrier board can be transferred from the transfer start position to one of the mid transfer positions and the transfer final position. Carrier boards, which are spaced apart from each other in a chamber, can be gathered adjacent to each other in the circulation direction of carrier board. The transfer speed and the total circulation speed of the carrier boards can be enhanced. The transfer speed of carrier board can be easily controlled according to the test conditions.

Abstract: The invention relates to a storage shelf system (10) for storing storage goods, comprising at least one service opening (18) for introducing and for removing storage goods, at least one revolving storage shelf unit (20, 30) having a plurality of storage locations and at least one storage shelf unit (40) which has at least one shelving column having storage locations disposed one above the other. The invention further relates to a transfer device (60) for transporting the storage goods (12) from a storage location in the storage shelf unit (40) to a storage location in the revolving storage shelf unit (20, 30) and vice versa.

Abstract: A service station facility for replenishing various motivational energy sources onboard different types of automotive vehicles is disclosed herein. In one embodiment, the service station facility includes a rack, replaceable fuel tanks, a service module, and an electronic computer control system. The replaceable fuel tanks are stocked on the rack and substantially filled with various fluids, such as hydrogen, which are utile as motivational energy sources within fuel-operated automotive vehicles. The service module is mounted on the rack, and the electronic computer control system is connected in electrical communication with the service module. In this configuration, the service module is controllably operable to receive a depleted replaceable fuel tank from a fuel-operated automotive vehicle and also selectively deliver one of the filled replaceable fuel tanks onboard the automotive vehicle.

Abstract: A storage-access apparatus includes a first support device including a first base; at least one first storage-access device and at least one first storage device, disposed on the first base and arranged in a first circle; a second support device including a second base; at least one second storage-access device and at least one second storage device, disposed on the second base and arranged in a second circle; and a transporting device, wherein the first storage-access device, the first storage device, the second storage-access device and the second storage device each has plural compartments, the transporting device corresponds to the compartments, and the first storage-access device and the first storage device can rotate relative to the second storage-access device and the second storage device. Accordingly, the storage-access apparatus can be employed in depositing and picking up products independently. Also disclosed is a storage system including, among others, the storage-access apparatus.

Abstract: The present invention provides a pharmaceutical container transferring system suitable for taking containers stored in a storage rack in closely-spaced relation into and out of the storage rack. The system has a storage rack mounting plate for holding the storage rack, a thrust-up member provided underneath of the plate to thrust up a target container through an insertion hole of the storage rack while abutting the bottom of the container, a picking member provided above the mounting plate and having compressible jaw members having a spacing smaller than the upper part of the thrust-up container which are compressed to pinch the incoming container by extending their spacing, an upper thrust-down member disposed vertically above the lower thrust-up member for thrusting down the container pinched by the picking member and a picking carriage provided with the lower thrust-up member, the upper picking member and the upper thrust-down member that sandwich the mounting plate as the carriage moves.

Abstract: Wafer boat assembly for use in a loading apparatus for loading semiconductor substrates in a vertical furnace configured for batch processing, wherein the wafer boat assembly comprises a wafer boat for holding semiconductor substrates and a cover configured to substantially surround the substrates, wherein the wafer boat assembly is provided with a first wafer boat part comprising a base and a first cover part mounted thereto, said first cover part extending at least partially along a base upper perimeter; and a second wafer boat part comprising a second cover part removably provided on the first wafer boat part and configured to cooperate with the first cover part, said second cover part comprising receiving slots for receiving at least a semiconductor substrate to be processed.

Abstract: A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle.

Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

Abstract: A service station facility for replenishing various motivational energy sources onboard different types of automotive vehicles is disclosed herein. In one embodiment, the service station facility includes a rack, replaceable fuel tanks, a service module, and an electronic computer control system. The replaceable fuel tanks are stocked on the rack and substantially filled with various fluids, such as hydrogen, which are utile as motivational energy sources within fuel-operated automotive vehicles. The service module is mounted on the rack, and the electronic computer control system is connected in electrical communication with the service module. In this configuration, the service module is controllably operable to receive a depleted replaceable fuel tank from a fuel-operated automotive vehicle and also selectively deliver one of the filled replaceable fuel tanks onboard the automotive vehicle.

Abstract: A panel-storing shelf comprises at least two support members, at least two tracks disposed around a surface of each of the at least two support members, respectively, to rotate about respective support member, and at least two brackets disposed on each of the at least two tracks, respectively, and at the same level, to hold the panel and rotate along with the track.

Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

Abstract: An apparatus for automatically depositing, preserving and retrieving biological material test tubes is described, comprising a refrigerated storage (1) with movable horizontal shelves (37) and a conveyor interface (4), adapted to automatically transport biological material test tubes, a device (3) adapted to handle the test tubes between the interface (4) and the containers (5) of a sorted plurality of test tubes, said containers (5) having toothed guides (20) and being able to be placed on the lanes (11) of a bench (6), a handling device (7) of the containers (5) between the bench (6) and an access area (38) of the storage (1), slidingly mounted to the bench (6) and comprising motorized toothed means (18) adapted to couple with said toothed guides (20) of the containers (5) for horizontally moving the latter between the access area (38) of the storage (1) and the bench (6), and a control unit (9) adapted to coordinate said devices (3, 7) during the loading/unloading operations by means of locating means (43,

Abstract: Storage matrixes associated with storage and retrieval systems and methods are provided to automate the process of handling a mixed inventory of palletized and containerized items. In one embodiment, the storage matrix comprises a storage matrix comprising a plurality of stationary cell modules and a plurality of carriers. The outer row cell modules comprise a plurality of motors configured to move the respective carrier bi-directionally within the storage matrix and is also configured to stabilize the respective carrier when the carrier is moving or at a stationary position. The inner row cell modules comprise at least one motor configured to move the respective carriers uni-directionally within the storage matrix and also comprises at least one ferrous metal plate configured to stabilize the respective carrier when the carrier is moving or at a stationary position.

Abstract: An Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and a vertical carousel stocker having a plurality of storage bins. The subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route running adjacent to the stocker, allowing the vehicle to access a WIP part directly from a storage bin. At least one storage bin includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the vehicle. The storage unit is partially open to allow the movable shelf to move to the second position, allowing the hoist to access a material unit directly from the shelf for subsequent transport along the track.

Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

Abstract: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

Abstract: An automated storage system for storing large quantities of samples in trays includes a storage compartment, a tray shuttle compartment abutting the storage compartment on one side and a plurality of independent modules on the other side. The modules perform processing of samples that are retrieved from the storage compartment by a tray shuttle, including extraction of selected samples from retrieved source trays and transfer of the selected samples into a separate, destination tray that can be further processed or removed from the system for use. The independent operation of the modules permits handling and processing to be performed simultaneously by different modules while the tray shuttle accesses additional samples within the storage compartment. In one embodiment, a vertical carousel is used to vertically align a desired tray with the tray shuttle, while the tray shuttle operates within a horizontal plane.

Abstract: A service station facility for replenishing various motivational energy sources onboard different types of automotive vehicles is disclosed herein. In one embodiment, the service station facility includes a rack, replaceable fuel tanks, a service module, and an electronic computer control system. The replaceable fuel tanks are stocked on the rack and substantially filled with various fluids, such as hydrogen, which are utile as motivational energy sources within fuel-operated automotive vehicles. The service module is mounted on the rack, and the electronic computer control system is connected in electrical communication with the service module. In this configuration, the service module is controllably operable to receive a depleted replaceable fuel tank from a fuel-operated automotive vehicle and also selectively deliver one of the filled replaceable fuel tanks onboard the automotive vehicle.

Abstract: A stocker apparatus includes a first tray stock section (70) for storing a plurality of empty trays (11a), a second tray stock section (80) for storing the plurality of empty trays (11a) loaded with products, tray supporting means (130) provided in the first tray stock section (70) and the second tray stock section (80) for mounting the trays (11) thereon, and lifting and lowering means for lifting and lowering the tray supporting means (130). The stocker apparatus further includes carrier means (140) for carrying the loaded tray to the second tray stock section (80). The stocker apparatus further includes an outer wall constituting member covering the first tray stock section (70) and the second tray stock portion (80) for shielding the first tray stock section (70) and the second tray stock section (80) from an external atmosphere.

Abstract: An automatic system (100) for conserving samples at a controlled temperature comprising at least one controlled-temperature thermo-insulated conservation chamber (1) with temperature control means (3) containing a set of disks (9) for storing samples (19) and a Cartesian robotic system (4) equipped with pick-up device (18), contained in an upper chamber (2) separated from the chamber (1) by means of an insulating shelf (6), where said Cartesian system (4) through the controlled-access opening (7) moves the samples (19) between the I/O drawer (20) and the above-mentioned set of disks (9). The combined and synchronized movement of the robotic device (4) and of every single disk of the set enables each storage location to be reached. The management of the devices of the automatic system (100) is controlled by an N/C system driven by dedicated management SW.

Abstract: A multiple loader, also adapted to operate as a magazine for storing vertically arranged panels, comprises, at a front head portion thereof, a step-by-step pushing device including a carriage driven by pneumatic cylinders causing the carriage to slide with a rectilinear reciprocating horizontal movement, to provide a pushing action on a first of a series of separating elements, arranged at a top sliding platform.

Abstract: A storage system having one or more storage modules each comprising a substantially cylindrical housing having a curved sidewall portion extending between a top wall portion and a bottom wall portion, with the housing being disposed about a central axis. A carousel is mounted within the housing for controlled rotation about the central axis. The carousel has a plurality of storage locations disposed in vertical arrays about the axis to receive articles to be stored. A first door opening is formed in the sidewall portion to provide for access from the exterior of the housing to at least one of the vertical arrays adjacent to the first door opening. A means for controlling the temperature within the housing is also provided.

Abstract: The invention relates to a storage device and a climate controlled cabinet with a storage assembly and a transport device. For minimizing the access times, the transport device can be arranged in the center of a rotating table. The storage assembly is arranged on the rotating table, which improves access. The climate controlled cabinet is provided with an automatic door at a wall, roof or bottom thereof.

Abstract: A circulating storage system (1) has at least two storage columns (4) of stored-goods carriers (5) that are arranged one above another and circulate during operation, at least one horizontal conveyor device (9) which, during operation, transfers the stored-goods carriers from one storage column to the other storage column, and a vertical conveyor device (7) which, during operation, can move at least one part of the storage column in a vertical direction. The circulating storage system also has at least one further vertical conveyor device (7), for each vertical conveyor device assigned to a storage column, to provide each storage column with the capability of being moved in the vertical direction, independently of the other storage column, by the vertical conveyor device assigned to it.

Abstract: This system includes a base unit having an array of data storage locations mounted in a rectangular form factor along a back wall of the housing and at least one read/write device. The robotic mechanism includes a stationary vertical shaft on which is mounted on a horizontal track, movable in the vertical direction. The horizontal track extends from end to end of the base unit housing. The robotic mechanism includes a rotatable gripper that moves on the horizontal track and swivels on a pivot about an axis that is parallel to the vertical shaft to provide access to all interior surfaces of the base unit housing where data storage locations reside. An expansion module, comprising a rotary carousel of data storage locations, can be connected to either end of the base unit which enables the robotic mechanism to access the data storage elements within the expansion module without modification.

Abstract: An Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load/ unload parts directly to/from storage units included in the system. The AMHS includes an overhead hoist transport subsystem and a vertical carousel stocker having a plurality of storage bins. The subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route. The route passes over the stocker, which allows the vehicle to access parts directly from one of the storage bins. The selected bin is positioned at the top of the stocker underneath the track. Next, the vehicle is moved along the track to a position above the selected bin. The hoist is then lowered parallel to the longitudinal axis of the stocker toward the selected bin. Finally, the hoist is operated to pick parts directly from the bin, or to place parts in the bin.

Abstract: A storage and retrieval apparatus including a robotic device capable of gripping items stored in the apparatus and delivering the item to a separate, proximate instrument. The items to be stored are loaded from the outside of the apparatus at each face of the hexagonal or octagonal shaped storage carousel. The storage carousel, which can be manually rotated, is mounted on a stationary base, both structures including a hollow core. The robotic device includes slider bars within the core of the apparatus and is rotatable about the central axis of the apparatus. The robotic device is capable of translating vertically, telescoping horizontally, rotating and gripping an item stored at a desired location within the storage carousel. Upon retrieval of a desired item, the robotic device will proceed to retract and translate downward to an aperture within the base. The item is transferred to an adjacent instrument through the aperture using the telescopic arm of the robotic device.

Abstract: The object of the present invention is to provide a load storage apparatus that can automatically and efficiently adjust the distances for which its transferrer moves loads to transfer them. The apparatus may include a rotary rack, fixed racks and a transferrer. Each of the racks may include shelves. The transferrer includes a carrier for transferring cassettes by moving relative to the shelves. The carrier can be fitted with a unit including a photoelectric switch for detecting ends of the shelves. The apparatus measures the distance for which the carrier moves from a reference position toward each of the shelves until the photoelectric switch of the unit on the carrier is activated. The measurement enables the apparatus to learn the distance for which the carrier moves to the position where a cassette can be transferred onto and from each of the shelves.

Abstract: A storage and loading device for sheet articles, wherein the articles are stored vertically in a rotating carousel. A picking mechanism picks a foremost article and delivers it to a depositing location. A slip-sheet removal mechanism removes protective slip sheets located between the sheet articles. The device may be used in conjunction with a CTP system.

Abstract: There is provided compact load storage equipment that can store a large number of loads. The storage equipment comprises a rotary rack 21, a transferrer 51, one or more fixed racks 101, an inlet port 111a and an outlet port 111b. The rotary rack 21 is supported rotatably about a first vertical axis and includes a number of vertically arranged stages of turning load supports 32. The transferrer 51 adjoins the rotary rack 21 and includes a carrier 81, which can vertically move and rotate about a second vertical axis. The fixed racks 101 are positioned around the transferrer 51 and each includes a number of vertically arranged stages of fixed load supports 103. In plan view, the ports 111a and 111b each overlap with one of the rotary and fixed racks 21 and 101.

Abstract: A method of exchanging a thin film coated tray (30) for a clean tray (30) is provided. The method replaces the tray (30) at an intermediate position on the handler (10) and not at an intermediate disk loading position of the rotating disk loading mechanism.

Abstract: A substrate processing apparatus includes a rotation accommodating shelf and a transfer machine. The rotation accommodating shelf is capable of accommodating a plurality of accommodating containers in which substrates are to be loaded. The transfer machine is for transferring the plurality of accommodating containers to the rotation accommodating shelf. The plurality of accommodating containers are respectively disposed on radial lines, which radiate from a rotation center of the rotation accommodating shelf, such that each accommodating container is respectively inclined in a horizontal plane in a same fixed direction with respect to a radial line.

Abstract: An object retention system secures an object in a rotatable carousel. The rotatable carousel has an axis of rotation. A latching hub is mounted within the rotatable carousel about the axis of rotation. The object has a latch reciprocal configured to mate with the latching hub. Either the latching hub includes a prominence and the latch reciprocal has a depression formed therein to receive the prominence or the latch reciprocal includes a prominence and the latching hub has a depression formed therein to receive the prominence. At least one retainer is positioned adjacent the object within the rotatable carousel. Each retainer is configured to maintain contact between the latch reciprocal and the latching hub. Either each retainer or the latching hub is springable to permit insertion and removal of the container.

Abstract: There is provided compact load storage equipment that can store a large number of loads. The storage equipment comprises a rotary rack 21, a transferrer 51, one or more fixed racks 101, an inlet port 111a and an outlet port 111b. The rotary rack 21 is supported rotatably about a first vertical axis and includes a number of vertically arranged stages of turning load supports 32. The transferrer 51 adjoins the rotary rack 21 and includes a carrier 81, which can vertically move and rotate about a second vertical axis. The fixed racks 101 are positioned around the transferrer 51 and each includes a number of vertically arranged stages of fixed load supports 103. In plan view, the ports 111a and 111b each overlap with one of the rotary and fixed racks 21 and 101.

Abstract: A method and apparatus are provided for substrate handling. In a first aspect, a temperature adjustment plate is located below a substrate carriage and is configured such that a substrate may be transferred between the temperature adjustment plate and the substrate carriage by lifting and lowering the substrate carriage above and below the top surface of the temperature adjustment plate. The temperature adjustment plate may be configured to heat and/or cool a substrate positioned thereon. In a second aspect, the substrate carriage is magnetically coupled so as to rotate and/or lift and lower magnetically, thereby reducing particle generation via contact between moving parts (and potential chamber contamination therefrom). In a third aspect, a substrate handler positioned below the substrate carriage is both magnetically coupled and magnetically levitated, providing further particle reduction.