Abstract: A substrate processing system comprising a first detecting part configured to detect unprocessed wafers, and a second detecting part configured to detect processed wafers. The first detecting part is configured to detect whether the unprocessed wafers are respectively accommodated in respective accommodating portions of a container or not, and to detect accommodated conditions of the respective unprocessed wafers accommodated in the respective accommodating portions. The second detecting part is configured to collectively detect whether the processed wafers are respectively accommodated in the respective accommodating portions of the container.

Abstract: A substrate processing system 1 comprises a first detecting part 40 configured to detect unprocessed wafers W, and a second detecting part 50 configured to detect processed wafers W. The first detecting part 40 is configured to detect whether the unprocessed wafers W are respectively accommodated in respective accommodating portions 82 of a container 80 or not, and to detect accommodated conditions of the respective unprocessed wafers W accommodated in the respective accommodating portions 82. The second detecting part 50 is configured to collectively detect whether the processed wafers W are respectively accommodated in the respective accommodating portions 82 of the container 80.

Abstract: A method for processing portable objects and a machine for processing portable objects including a device (1) for transferring portable objects (C), incorporating an integrated circuit and processing means consisting of at least two processing lifts (2, 2?) separated by a space of a size of a portable object (C), translatory moved perpendicularly to the plane of the main surface of the portable objects (C) and sequentially on a guiding support (25) by driving and positioning means, each lift (2, 2?) being formed with a parallelepipedal plate (22) provided with at least two processing devices, both lifts having determined different roles. The method consists of successively placing each portable object to be processed in contact with a processing station of the first lift and of the second lift.

Abstract: An apparatus and method for indicating a position of an item to be processed from a shelf is disclosed. An embodiment of the apparatus includes a frame member and an indicator moveable on the frame member. The indicator is positionable in front of the item to be processed from the shelf. In an embodiment of a method for indicating a position of an item to be processed from a shelf, the method includes moving the indicator on the frame member such that the indicator is positioned in front of the item to be processed from the shelf.

Abstract: A wafer mapping device that recognizes the existence of wafers along with the descending and opening of a front door (2a) of a closed type clean container (2) in a state where the front door of the closed type clean container for mounting and housing wafers (4) on any one of or a plurality of shelves among a plurality of internal shelves is made tightly contact to a port door (13) of a load port (12), comprising a swinging member (22) coupled to the port door so as to swing around predetermined horizontal axes parallel to the port door, a pair of sensor portions (20) fixed to the swinging member and mutually separated as well as protruding towards the clean container from the swinging member above the port door, a light emitting device (20a) and light receiving device (20b) fixed one each to the pair of sensor portions and facing each other, and swinging drive means (25) for rotating the swinging member around the horizontal axis to an angle where the wafers enter between the light emitting device and the lig

Abstract: A device for transporting cartridges comprises a housing for holding a plurality of cartridges in a temperature controlled environment. A transport system is also provided and has a grasping mechanism for grasping one of the cartridges. The transport system is further used to remove the cartridge from the housing and to place the cartridge into a scanner.

Abstract: A device for transporting cartridges comprises a housing for holding a plurality of cartridges in a temperature controlled environment. A transport system is also provided and has a grasping mechanism for grasping one of the cartridges. The transport system is further used to remove the cartridge from the housing and to place the cartridge into a scanner.

Abstract: The present invention relates to a linear personalization machine comprising a transfer system (3) for portable objects (4), incorporating an integrated circuit, characterized in that it comprises a personalization elevator (20) translated vertically and sequentially on a guide support (70) by driving end positioning means (29, 73, 28, 75, 72), said elevator (20) being made up of a parallelepiped plate (23) fitted wits a plurality of connection devices whether or not mixed type (22i, 22n) connecting to the integrated circuit of portable objects (4) that are brought in sequential manner in front of an incoming/outgoing station or the transfer line.

Abstract: A device and a method for detecting and distinguishing between shelf-forming supports in cassettes and disk-shaped objects deposited thereon are provided for increasing accuracy in the determination of the position of shelves and objects as well as reliability of detection in distinguishing between cassette types without a disruptive influence being exerted on the objects by the inserted protective supports. The objects and different types of supports for the objects which are distinguished through an offset arrangement in the measurement plane pass through measurement beam bundles with their end sides, wherein each of the measurement beam bundles is situated in the region of only one type of support. The extension of the end sides of the supports in the measurement plane is completely detected by the measurement beam bundle. The device is used for the fabrication of integrated circuits.

Abstract: A cart loading system for placing library-like items onto a library cart is provided for a cart having a plurality of shelves between first and second cart end members. The loading system includes a cart tilting mechanism for receiving and tilting the cart so as to raise the second cart end member relative to a ground plane and relative to said first cart end member such that the shelves are at a selected angle relative to the ground plane. The loading system also includes a placer device having a rack member for supporting an individual item and a pusher element for pushing the individual item off of the rack member.