And Moving Load Support Radially With Respect To Pivot Patents (Class 414/744.6)
  • Patent number: 10675751
    Abstract: A multi-motion-platform parallel robot, comprising an original parallel mechanism; and a plurality of N1 derivative parallel mechanisms, wherein: each of the parallel mechanisms possesses N2 degrees-of-freedom (DOFs) and shares an identical set of DOF properties; N1 is an integer greater than 1; N2 is one of 2, 3, 4, 5 and 6; the original parallel mechanism includes an original base platform, an original movable platform and a plurality of N2 original chains; the plurality of original chains connect the original base platform and the original movable platform; each of the original chains includes a plurality of generalized kinematic pairs interconnected in series; the derivative parallel mechanism includes a derivative base platform, a derivative movable platform and a plurality of (N2×N1) derivative chains; and the plurality of derivative chains connect the derivative base platform and the derivative movable platform.
    Type: Grant
    Filed: May 7, 2019
    Date of Patent: June 9, 2020
    Assignees: BEIJING FINE WAY TECHNOLOGY CO., LTD.
    Inventor: Fangyuan Han
  • Patent number: 9972523
    Abstract: A robot includes robot arm including lower arm, upper arm and hand attached to tip end portion of upper arm such that the hand is rotatable around rotational axis thereof; lower arm drive unit which drive the lower arm to move the hand, upper arm drive unit which drives the upper arm to move the hand; hand drive unit which rotates the hand; hand angular position detecting section which detects angular position of the hand around the rotational axis; and control unit which controls upper arm drive unit, lower arm drive unit, and hand drive unit, wherein the hand includes a blade having a first contact/slide surface and second contact/slide surface which extend in a first direction, contact a teaching target and slide thereon, and first contact/slide surface and second contact/slide surface include a first characterizing portion and a second characterizing portion having bent points in the first direction, respectively.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: May 15, 2018
    Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
    Inventor: Yasuhiko Hashimoto
  • Patent number: 9592924
    Abstract: An aseptic filling machine of envelope-type bags provided with a filling mouth closed by a removable cap, comprising an empty bag supply device, a discharge device configured to discharge full bags, a carousel device on which at least two filling stations are located; each filling station comprising a sterile chamber; a raising device configured to raise the mouth of the empty bag internally of the sterile chamber; an overpressure device configured to place the chamber in slight overpressure; a removal device configured to remove the cap and positioning it by a side of the mouth; and a dispenser-batcher device that is vertically slidable and configured to engage with the mouth.
    Type: Grant
    Filed: December 19, 2012
    Date of Patent: March 14, 2017
    Assignee: ALFA LAVAL CORPORATE AB
    Inventor: Pierluigi Decio
  • Patent number: 9079316
    Abstract: A length-adjustable mechanical arm includes: a base; a first arm unit having one end formed with a first pivot portion pivoted to the base, and another end formed with a second pivot portion, a second arm unit pivoted to the first arm unit includes a pivot member, an inner sleeve, an outer sleeve and an accessory mounting seat. The length of the second arm unit of the mechanical arm is adjustable by adjusting the inner and outer sleeves, and the second arm unit is switchable between an extended position and a retracted position. Therefore, the mechanical arm can be used for two distance operation.
    Type: Grant
    Filed: January 4, 2014
    Date of Patent: July 14, 2015
    Assignee: HIWIN TECHNOLOGIES CORP.
    Inventors: Yueh-Ling Chiu, Wu-Teng Hsieh
  • Publication number: 20150139770
    Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.
    Type: Application
    Filed: November 13, 2014
    Publication date: May 21, 2015
    Inventors: Jairo T. MOURA, Ulysses GILCHRIST, Robert T. CAVENEY
  • Patent number: 9033645
    Abstract: Source support arm of a liquid crystal panel transportation device is provided, which includes a primary arm section. The primary arm section includes a plurality of ancillary arm sections that are rotatable to open mounted thereon. A liquid crystal panel transportation device is also disclosed, which includes a support arm having a primary arm section and ancillary arm sections that are mounted to the primary arm section and are rotatable to open.
    Type: Grant
    Filed: August 6, 2012
    Date of Patent: May 19, 2015
    Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
    Inventors: Zenghong Chen, Chunhao Wu, Kunhsien Lin, Minghu Qi, Zhenhua Guo, Yunshao Jiang
  • Publication number: 20150071738
    Abstract: Disclosed herein is a manipulator apparatus. The manipulator apparatus includes a jig unit provided with a manipulator. The jig unit includes a first member provided with the manipulator, a second member configured to move the first member, and a third member configured to move the second member.
    Type: Application
    Filed: September 11, 2014
    Publication date: March 12, 2015
    Applicant: ALLIED TECHFINDERS CO., LTD.
    Inventor: Kee Won SUH
  • Patent number: 8950998
    Abstract: A substrate-handling vacuum robot includes a first robotic arm with a single-substrate end effector and a second robotic arm with a batch end effector. The single-substrate end effector permits single-substrate pick-and-place operations while the batch end effector permits batch handling of substrates within a vacuum environment.
    Type: Grant
    Filed: April 21, 2008
    Date of Patent: February 10, 2015
    Assignee: Brooks Automation, Inc.
    Inventor: Peter van der Meulen
  • Patent number: 8855817
    Abstract: A method for operating a system including at least two robots for handling parts and a robot control unit arranged for control of said at least two robots. Each of the robots is arranged with a parts handler device including a rigid arm with one end connected to the end element of an arm of the robot by a first swivel arranged for radial movement of the rigid arm in relation to the end element. Each of the robots is also arranged with a gripper connected to the rigid arm by a second swivel arranged for free, passive rotation of the gripper in relation to the rigid arm. The method includes generating instructions for the at least two robots to pick and/or move and/or place a part and sending the instructions to each robot simultaneously.
    Type: Grant
    Filed: December 19, 2007
    Date of Patent: October 7, 2014
    Assignee: ABB Research Ltd.
    Inventors: Ramon Casanelles, Francisco Cortés Grau
  • Publication number: 20140250678
    Abstract: A substrate transport apparatus comprises a substrate holder capable of holding a substrate, a link unit which extends/retracts the substrate holder, a driving unit which generates a driving force to operate the link unit, a guide bar provided to one of the substrate holder and the link unit; and a support unit which is provided to the other of the substrate holder and the link unit, and slidably supports the guide bar when the substrate holder moves by the operation of the link unit.
    Type: Application
    Filed: May 22, 2014
    Publication date: September 11, 2014
    Applicant: CANON ANELVA CORPORATION
    Inventor: Kazuhito WATANABE
  • Publication number: 20140205416
    Abstract: A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted.
    Type: Application
    Filed: March 15, 2013
    Publication date: July 24, 2014
    Applicant: Persimmon Technologies Corp.
    Inventors: Martin Hosek, Christopher Hofmeister
  • Patent number: 8755935
    Abstract: A substrate holder positioning method, capable of positioning a substrate holder without using any positioning jig, includes: measuring a first position of a substrate held on a substrate holder included in a substrate carrying mechanism; carrying the substrate held on the substrate holder to a substrate rotating unit for holding and rotating the substrate; turning the substrate held by the substrate rotating unit through a predetermined angle by the substrate rotating unit; transferring the substrate turned by the substrate rotating unit from the substrate rotating unit to the substrate holder; measuring a second position of the substrate transferred from the substrate rotating unit to the substrate holder; determining the position of the center of rotation of the substrate rotating unit on the basis of the first and the second position; and positioning the substrate holder on the basis of the position of the center of rotation.
    Type: Grant
    Filed: February 27, 2012
    Date of Patent: June 17, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Yuichi Douki, Tokutarou Hayashi, Naruaki Iida, Suguru Enokida
  • Publication number: 20140161576
    Abstract: A workpiece transfer device includes a base, a rotating portion rotatably mounted on the base, and a transfer mechanism mounted on the rotating portion. The transfer mechanism includes a rotational housing, at least one bearing table, and a driving device. The bearing table is received in the rotational housing. The bearing table is configured to support a workpiece. The driving device is operable to drive the bearing table to slide in the rotational housing.
    Type: Application
    Filed: November 22, 2013
    Publication date: June 12, 2014
    Applicant: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: Ming-Lung Guo
  • Publication number: 20140140801
    Abstract: A substrate transfer robot includes an extensible/retractable arm unit, a robot hand and a sensor unit. The extensible/retractable arm unit is configured to extend and retract in a horizontal direction. The robot hand is provided with prongs for holding a substrate. The robot hand includes a base end portion rotatably connected to a tip end portion of the extensible/retractable arm unit. The sensor unit is arranged to be rotated by a rotating force of the robot hand. The sensor unit is configured to, when rotated, intersect a lateral end portion of the substrate held by the prongs when seen in a plan view and to detect a lateral end position of the substrate.
    Type: Application
    Filed: October 10, 2013
    Publication date: May 22, 2014
    Applicant: KABUSHIKI KAISHA YASKAWA DENKI
    Inventors: Satoshi SUEYOSHI, Makoto TARUNO
  • Publication number: 20140126987
    Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
    Type: Application
    Filed: November 4, 2013
    Publication date: May 8, 2014
    Applicant: Brooks Automation Inc.
    Inventors: Ulysses Gilchrist, Christopher Hofmeister
  • Publication number: 20140056678
    Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
    Type: Application
    Filed: February 15, 2013
    Publication date: February 27, 2014
    Applicant: BROOKS AUTOMATION, INC.
    Inventor: Brooks Automation, Inc.
  • Publication number: 20130266405
    Abstract: A work piece transfer mechanism for use in a chamber has at least one port through which a work piece may be passed along a linear work piece transfer path between a retracted location inside the chamber and an extended location outside the chamber. The chamber has a predetermined internal dimension of given axial extent in the direction of the transfer path, and the transfer mechanism includes a work piece support movable with a linear stroke. The work piece support is driven along the linear stroke by a drive lever pivotally attached to the work piece support by a pivot, and the drive lever is drivable such that the pivot is driven along a linear path to move the work piece support along the linear work piece transfer path. The linear work piece transfer path includes a portion beyond the port of axial extent greater than predetermined internal dimension.
    Type: Application
    Filed: December 19, 2011
    Publication date: October 10, 2013
    Applicant: UHV DESIGN LIMITED
    Inventor: Peter Coxon
  • Patent number: 8528438
    Abstract: The invention provides a robotic arm for transporting a substrate in an ultrahigh vacuum including a carrier module and a drive module. The drive module includes a magnetic coupling, a first transmission module, a second transmission module, and a third transmission module. The magnetic coupling includes an inner shaft and an outer shaft. The first transmission module drives the first active unit of the magnetic coupling to turn a first passive unit of the inner shaft by magnetic force. The second transmission module drives the second active unit of the magnetic coupling to turn a second passive unit of the outer shaft by magnetic force. The third transmission module drives the magnetic coupling and the carrier module to perform vertical movement. The carrier module will achieve rotational motion or extending motion when the inner shaft and the outer shaft are driven by the first transmission module and the second transmission module of the drive module.
    Type: Grant
    Filed: November 25, 2009
    Date of Patent: September 10, 2013
    Assignee: Chung-Shan Institute of Science and Technology, Armaments Bureau, Ministry of National Defense
    Inventors: Hsien-Chung Chen, Kun-Feng Huang
  • Publication number: 20130216335
    Abstract: A transfer device can control a posture of a holding table accurately and prevent the holding table from wobbling even when the holding table is moved at a high speed. A first posture holding link 56 and a second posture holding link 57 are provided at the transfer device. One end of the first posture holding link 56 and one end of the second posture holding link 57 are rotatably connected to a connecting shaft 53. Rails 51 and 52 are fastened to a base plate 27 of the holding table 21. Rollers 54 and 55 are connected to the connecting shaft 53 to be rotated about an axis line. The rollers 54 and 55 are in contact with roller driving portions 51a and 52a. When the holding table 21 is moved, the rollers 54 and 55 are rotated on the roller driving portions 51a and 52a.
    Type: Application
    Filed: September 14, 2011
    Publication date: August 22, 2013
    Applicants: SANKYO SEISAKUSHO CORPORATION, TOKYO ELECTRON LIMITED
    Inventors: Tsutomu Hiroki, Toshinao Kato
  • Publication number: 20130202398
    Abstract: A substrate transport apparatus including a first substrate holder and a second substrate holder capable of respectively holding substrates includes a first drive arm which has first and second end portions, and is rotatable with rotation of a first drive shaft, a second drive arm which has a third end portion spaced apart from the first end portion by a first distance, and a fourth end portion spaced apart from the second end portion by a second distance, and is rotatable with rotation of a second drive shaft coaxial with the first drive shaft, two first driven arms coupled to the first substrate holder, and two second driven arms coupled to the second substrate holder.
    Type: Application
    Filed: January 29, 2013
    Publication date: August 8, 2013
    Applicant: CANON ANELVA CORPOREATION
    Inventor: CANON ANELVA CORPOREATION
  • Publication number: 20130097975
    Abstract: A packaging system and associated method for use with a pharmaceutical dispenser provides a turnkey solution for packaging pharmaceutical products such as solid medications and nutritional supplements to be taken orally in health care settings, including but not limited to long term care (LTC) and assisted living settings. An overall pharmacy system and methodology begins with bulk medications and supplements introduced into the work flow, individually packaged and assembled into medpass orders per patient and delivered to the LTC facility or other institution for patient consumption. The process begins by converting bulk medications and supplements to packaged unit doses and ultimately individually packaged medpass bags for each patient on a 24-hour schedule. The design of the overall system and its individual components allows for physical control of each unit dose package from start to finish without any unit dose package “free fall” in the system.
    Type: Application
    Filed: October 24, 2012
    Publication date: April 25, 2013
    Applicant: Remedi Technology Holdings, LLC
    Inventor: Remedi Technology Holdings, LLC
  • Publication number: 20130062016
    Abstract: A transfer apparatus transfers an object to be transferred onto a case. The transfer apparatus includes a transfer arm, an arm shaft, a plurality of electromagnets, and a control unit. The transfer arm has a pick unit on a front end thereof and extends and retracts in a horizontal direction. The object to be transferred is held on the pick unit. The arm shaft supports the transfer arm. The plurality of electromagnets apply an force in upward direction to the transfer arm by generating a magnetic field in the case. The control unit controls the plurality of electromagnets in such a manner that when the transfer arm extends and retracts in the horizontal direction, the force in upward direction applied to the transfer arm increases as a length from the arm shaft to the front end of the transfer arm increases.
    Type: Application
    Filed: September 12, 2012
    Publication date: March 14, 2013
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Shinji HIMORI, Takehiro KATO, Etsuji ITO
  • Patent number: 8352074
    Abstract: A path planning apparatus and method of a robot, in which a path, along which the robot accesses an object to grasp the object, is planned. The path planning method includes judging whether or not a robot hand of a robot collides with an obstacle when the robot hand moves along one access path candidate selected from plural access path candidates along which the robot hand accesses an object to grasp the object, calculating an access score of the selected access path candidate when the robot hand does not collide with the obstacle, and determining an access path plan using the access score of the selected access path candidate.
    Type: Grant
    Filed: July 21, 2010
    Date of Patent: January 8, 2013
    Assignee: Samsung Electronics
    Inventors: Guochunxu, Kyung Shik Roh, San Lim, Bok Man Lim, Myung Hee Kim
  • Patent number: 8269447
    Abstract: A drive system is presented for controlling rotation of a sphere. The system facilitates holonomic motion of a drive with respect to a sphere such that a holonomic drive or drives may be maintained at a relative position with respect to a sphere. The motion of a sphere may be controlled by controlling the position of a drive with respect to the sphere. The drive may be controlled by way of a controller. A holonomic drive may be urged against a sphere by way magnetic interaction of the holonomic drive and a second structure. Also, a support structure is facilitated that allows a sphere to pass through a support column without breaks or interruptions in the sphere.
    Type: Grant
    Filed: March 17, 2010
    Date of Patent: September 18, 2012
    Assignee: Disney Enterprises, Inc.
    Inventors: Lanny Smoot, Dirk Ruiken
  • Patent number: 8202034
    Abstract: A robot according to this invention includes a driving mechanism, a first arm rotatably connected to the driving mechanism, a second arm rotatably connected to the first arm, and an X-shaped end effector rotatably disposed at the distal end of the second arm. Of the four distal ends of the end effector, two distal ends include holding units which can hold substrates in one direction, and the remaining two distal ends include holding units which can hold substrates in the opposite direction.
    Type: Grant
    Filed: September 1, 2010
    Date of Patent: June 19, 2012
    Assignee: Canon Anelva Corporation
    Inventors: Hiroshi Sone, Ryuji Higashisaka, Kazutoshi Yoshibayashi, Tatsunori Sato, Tatsuhiro Takahashi
  • Patent number: 8099192
    Abstract: A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to the pedestal assembly, a transfer robot having an end effector, and a processing chamber containing the pedestal assembly and light sensor. The method includes the steps of producing light within the processing chamber, moving the end effector over the optical input such that amount of light reaching the light sensor varies in relation to the position of the end effector, and recording the signal gain as the end effector is moved over the optical input. The method also includes the step of establishing from the recorded signal gain a desired position of the end effector relative to the pedestal assembly.
    Type: Grant
    Filed: November 6, 2007
    Date of Patent: January 17, 2012
    Assignee: Novellus Systems, Inc.
    Inventors: Damon Genetti, Heinrich Von Bunau, Tarek Radwan, Karen Townsend
  • Patent number: 8011874
    Abstract: A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the rotary base about a vertical rotation axis, a linear moving mechanism supported by the rotary base, and a work hand supported by the linear moving mechanism. The lifting mechanism includes a slide guide mechanism for vertical movement of the lift base, and first and second screw-feeding mechanisms. Each screw-feeding mechanism includes a rotatable vertical screw shaft, and a nut member provided on the lift base and screwed onto the screw shaft. The first and the second screw-feeding mechanisms are spaced from each other, with the rotation axis of the rotary base being located between the first and the second screw-feeding mechanisms.
    Type: Grant
    Filed: July 25, 2008
    Date of Patent: September 6, 2011
    Assignee: Daihen Corporation
    Inventors: Takafumi Uratani, Daisuke Sado, Hideki Matsuo
  • Patent number: 7918639
    Abstract: An automation apparatus and method includes a first unit rotationally moving objects from one area to another, and a second unit connected to the first unit and holding the objects, moving through or offset from the body of the first unit from a first side of the first unit to the other side the first unit in a direction other than the rotational movement by the first unit. Moreover, the apparatus and method provides moving the objects through a vertical axis of the body of the first unit.
    Type: Grant
    Filed: May 14, 2008
    Date of Patent: April 5, 2011
    Assignee: Thermo CRS Ltd.
    Inventors: John Fink, Jonathan David Wittchen, Michael P. Riff, Gary Darnel
  • Patent number: 7736118
    Abstract: A transfer apparatus includes a stationary base, a swivel supported by the stationary base to be rotatable about a vertical axis, a guide member mounted on the swivel, a linear movement mechanism supported by the swivel or the guide member, a hand supported by the linear movement mechanism and moved by the linear movement mechanism for carrying a work along a straight and horizontal travel stroke, a drive source disposed inside the stationary base, and a transmission shaft disposed along the vertical axis to transmit drive power from the drive source to the linear movement mechanism. The swivel includes an upper section and a lower section detachably connected with each other. The upper section has a connecting member supported by the upper section to be rotatable about the vertical axis. The connecting member has a detachable engagement member for engagement with the transmission shaft from the above.
    Type: Grant
    Filed: April 16, 2008
    Date of Patent: June 15, 2010
    Assignee: DAIHEN Corporation
    Inventors: Takafumi Uratani, Daisuke Sado, Hideki Matsuo
  • Publication number: 20100040447
    Abstract: A compact transport apparatus that does not cause pollution to its environment is provided. In a transport apparatus according to a first aspect of the present invention, an installation area of the apparatus is small because first and second rotary shafts are arranged concentrically, and a dead center escaping mechanism has a simple structure with a small thickness. Since a connecting portion of a hand portion can be made thin, an opening of a gate valve through which the hand portion is inserted can be reduced. As a result, it becomes difficult for dust inside a transport chamber to enter a processing chamber. A second aspect of the present invention is directed to a spaced dual shaft-type transport apparatus.
    Type: Application
    Filed: September 22, 2009
    Publication date: February 18, 2010
    Applicant: ULVAC, Inc.
    Inventors: Kazuhiro MUSHA, Hirofumi Minami, Kenji Ago, Takashi Asaishi, Toshio Koike
  • Patent number: 7648327
    Abstract: The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a linear drive for moving the wafer along a radial axis. The linear drive for moving the wafer along a z axis is offset from the rotational drive. When the rotational drive rotates about the theta axis, both the z axis and radial axis drives are also rotated about the theta axis. Preferably, the linear drive for moving the wafer along a radial axis is a dual or rapid swap slide body mechanism having an upper and lower end effector. The slide body mechanism preferably also has means to align the wafer and perform various inspection and marking procedures.
    Type: Grant
    Filed: December 16, 2005
    Date of Patent: January 19, 2010
    Assignee: Crossing Automation, Inc.
    Inventors: Anthony C. Bonora, Richard H. Gould, Roger G. Hine, Michael Krolak, Jerry A. Speasl
  • Patent number: 7578649
    Abstract: A substrate transport apparatus comprising a drive section, an upper arm, a first forearm, and a second forearm. The upper arm is rotatably connected to the drive section at a first end of the upper arm. The upper arm is rotatably connected to the drive section for rotating the upper arm about an axis of rotation of the drive section. The first forearm is pivotably connected to the upper arm for pivoting relative to the upper arm. The first forearm has a first end effector depending therefrom. The second forearm is pivotably connected to the upper arm for pivoting relative to the upper arm. The second forearm has a second end effector depending therefrom.
    Type: Grant
    Filed: May 29, 2002
    Date of Patent: August 25, 2009
    Assignee: Brooks Automation, Inc.
    Inventors: Robert T. Caveney, Todd Solomon
  • Patent number: 7453160
    Abstract: The present invention is directed to aligning wafers within semiconductor fabrication tools. More particularly, one or more aspects of the present invention pertain to quickly and efficiently finding an alignment marking, such as an alignment notch, on a wafer to allow the wafer to be appropriately oriented within an alignment tool. Unlike conventional systems, the notch is located without firmly holding and spinning or rotating the wafer. Exposure to considerable backside contaminants is thereby mitigated and the complexity and/or cost associated with aligning the wafer is thereby reduced.
    Type: Grant
    Filed: April 23, 2004
    Date of Patent: November 18, 2008
    Assignee: Axcelis Technologies, Inc.
    Inventor: Andrew M. Ray
  • Patent number: 7383751
    Abstract: An articulated robot is provided with first, second and third arms respectively having effective lengths substantially equal to each other and capable of turning respectively about first, second and third pivotal axes. The second and the third arm are interlocked by an interlocking mechanism such that the third arm turns about a third pivotal axis relative to the second arm in one of opposite directions through an angle twice as large as an angle through which the second arm turns about a second pivotal axis relative to the first arm in the other direction. The second arm 25 and the third arm 26 are moved in either of first and second working areas respectively extending on the opposite sides of an imaginary plane including a reference line and the first pivotal axis to move hand units along the reference line. Since the second and the third arm are necessarily only in one of the first and the second working region, the articulated robot is capable of operating in a narrow working area.
    Type: Grant
    Filed: July 13, 2004
    Date of Patent: June 10, 2008
    Assignee: Kawasaki Jukogyo Kabushiki Kaisha
    Inventors: Yasuhiko Hashimoto, Eiichi Yamaki
  • Publication number: 20080075572
    Abstract: The invention relates to a service module for factories producing aluminium by fusion electrolysis. The turret (9) of the inventive service module (7) is provided with a determined tool set, wherein each tool (101, 102, 103) is mounted on a telescopic arm (111, 112, 113) which is fixed to the turret (9) by a hinge support (121, 122, 123) which enables said telescopic arm to be perpendicularly movable with respect to a determined hinge point without rotating around the main axis thereof. Said telescopic arms are interconnected by a mechanical connection device (200) which maintains the relative angular deviation between the perpendicular movements thereof within a given tolerance range. Said invention makes it possible to bring the tools closer without striking each other during the use thereof.
    Type: Application
    Filed: June 22, 2005
    Publication date: March 27, 2008
    Inventors: Alain Van Acker, Stephane David
  • Patent number: 7313462
    Abstract: An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
    Type: Grant
    Filed: June 3, 2004
    Date of Patent: December 25, 2007
    Assignee: Semitool, Inc.
    Inventors: Daniel J. Woodruff, David P. Mattson, James J. Erickson, Matthew C. Egloff
  • Publication number: 20070217896
    Abstract: A substrate treatment apparatus is provided. The substrate treatment apparatus includes a process room, a load port in which a container receiving wafers is disposed, and a wafer transfer module disposed between the load port and the process room to transfer the wafers between the load port and the process room. The wafer transfer module includes a first barrier, a second barrier extending from a first end of the first barrier or from a portion near the first end of the first barrier at a predetermined inclined angle with respect to the first barrier, and a third barrier extending from a second end of the first barrier or from a portion near the second end of the first barrier at a predetermined inclined angle. The load portion is provided along the first barrier. The process room includes a plurality of chambers arranged along the second and third barriers.
    Type: Application
    Filed: February 27, 2007
    Publication date: September 20, 2007
    Inventors: Ki-Sang Kim, Kyue-Sang Choi, Byong-Kyu Seo, Soon-Chon Park
  • Patent number: 7258237
    Abstract: A method for weighing and portioning items utilizing a robot device. The robot device includes a grip, e.g., a suction cup, to remove an item from a delivery station to a receiving area for placement into a particular batch. The method involves placing the items at delivery station according their weight and the weight of items already moved to a receiving area, selecting the items for a batch from the combination of items available for movement to the batch, and selective batching of the items in weight-determined and, optionally, type-determined groups.
    Type: Grant
    Filed: January 13, 2005
    Date of Patent: August 21, 2007
    Assignee: Scanvaegt International A/S
    Inventor: Ulrich Carlin Nielsen
  • Patent number: 7233842
    Abstract: A method determines axial alignment between the centroid of an end effector and the effective center of a specimen held by the end effector. The method is implemented with use of an end effector coupled to a robot arm and having a controllable supination angle. A condition in which two locations of the effective center of the specimen measured at 180° displaced supination angles do not lie on the supination axis indicates that the centroid is offset from the actual effective center of the specimen.
    Type: Grant
    Filed: May 23, 2005
    Date of Patent: June 19, 2007
    Assignee: Brooks Automation, Inc.
    Inventors: Paul Bacchi, Paul S. Filipski
  • Patent number: 7039498
    Abstract: A robot arm positioning error is corrected by employing a specimen gripping end effector in which a light source and a light receiver form a light transmission pathway that senses proximity to the specimen. A robot arm old position is sensed and recorded. The robot arm retrieves the specimen from the old position and employs old position information to replace the specimen at a new position that is ideally the same as the old position. A robot arm new position is sensed and recorded. A difference between the new and old positions represents a position error. A correct position is obtained by processing the position error and the old position information.
    Type: Grant
    Filed: July 23, 2003
    Date of Patent: May 2, 2006
    Assignee: Newport Corporation
    Inventors: Paul Bacchi, Paul S. Filipski
  • Patent number: 6969227
    Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.
    Type: Grant
    Filed: September 16, 2003
    Date of Patent: November 29, 2005
    Assignee: Axcolis Technologies, Inc.
    Inventors: David William Kinnard, Daniel Richardson
  • Patent number: 6960057
    Abstract: A substrate transport apparatus comprising a drive section and a robot transport arm. The robot transport arm is mounted to the drive section. The robot transport arm has a wrist and an end effector to hold the substrate thereon. The end effector is rotatably mounted to the wrist to rotate about the wrist. The rotation of the end effector about the wrist is slaved to the robot transport arm. The robot transport arm is adapted to transport substrates into and out of two general side-by-side orientated substrate holding areas with the drive section being located in only one location relative to the two holding areas.
    Type: Grant
    Filed: September 30, 1998
    Date of Patent: November 1, 2005
    Assignee: Brooks Automation, Inc.
    Inventor: Christopher A. Hofmeister
  • Patent number: 6832885
    Abstract: There is provided an apparatus for handling a structural member. The apparatus includes a beam that extends from a first end to a second end and a shuttle in translational communication with the beam in a direction extending between the first and second ends. A fork actuator is connected to the shuttle and capable of hydraulically raising and lowering a fork. The fork can include a cooling system to maintain a temperature of the fork, even when used in a heated environment.
    Type: Grant
    Filed: September 4, 2002
    Date of Patent: December 21, 2004
    Assignee: The Boeing Company
    Inventors: Daniel G. Sanders, Mark T. Schergen
  • Patent number: 6811108
    Abstract: A recording tape cartridge which can be loaded in a drive device by a robot hand which grips the recording tape cartridge from above and below. A pair of ribs along a loading direction of a recording tape cartridge are formed at an angled surface portion of a lower case. A separation distance between these ribs is substantially the same as a width of a lower hand portion of a robot hand. The robot hand grips the recording tape cartridge such that the lower hand portion of the robot hand is disposed between the two ribs. When the recording tape cartridge is being loaded into the drive device, the ribs abut against lateral direction end surfaces of the lower hand portion. Thus, positioning of the recording tape cartridge in the lateral direction relative to the lower hand portion is achieved through the ribs.
    Type: Grant
    Filed: November 14, 2002
    Date of Patent: November 2, 2004
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Wataru Iino
  • Patent number: 6773382
    Abstract: An automatic tool-exchanging apparatus is provided which extends/contracts an arm with a rational and simple structure and can realize a high-speed operation essentially obtainable by making the arm's turning radius small. The apparatus comprises: an arm-driving shaft for being driven to rotate; an arm provided on the shaft and capable of being rotated, the arm capable of being moved to extend/contract and comprising a grip arm for attaching/detaching a tool, and an arm support movably supporting the grip arm; a clutch between the arm support and the shaft, the clutch for connecting the arm support and the shaft to make them rotate integrally, and disconnecting the arm support and the shaft to generate a relative rotation therebetween; and a link between the grip arm and the shaft, the link for transmitting the relative rotation of the shaft in respect to the arm support to make the grip arm move.
    Type: Grant
    Filed: December 5, 2002
    Date of Patent: August 10, 2004
    Assignee: Sankyo Manufacturing Co., Ltd.
    Inventor: Heizaburo Kato
  • Patent number: 6719516
    Abstract: The present invention provides a load lock having a vertically movable lid, an internal robot, and a wafer lifting mechanism and further provides a method of transferring wafers through a load lock directly to a process chamber. An atmospheric transfer robot shuttles wafers to and from the lifting mechanism while the lid is raised and the lifting mechanism then transfers wafers to and from the internal robot. The load lock is directly attached to a process chamber and communicates therewith via a slit valve which is selectively opened and closed. The internal robot is extended and retracted through the slit valve aperture in order to transfer a wafer to and from the process chamber. In one embodiment the lifting mechanism is comprised of vertically movable lift pins disposed through the bottom of the load lock. In another embodiment the lifting mechanism includes two pairs of lift forks disposed through the cover of the load lock.
    Type: Grant
    Filed: September 28, 1998
    Date of Patent: April 13, 2004
    Assignee: Applied Materials, Inc.
    Inventor: Tony Kroeker
  • Publication number: 20040042889
    Abstract: There is provided an apparatus for handling a structural member. The apparatus includes a beam that extends from a first end to a second end and a shuttle in translational communication with the beam in a direction extending between the first and second ends. A fork actuator is connected to the shuttle and capable of hydraulically raising and lowering a fork. The fork can include a cooling system to maintain a temperature of the fork, even when used in a heated environment.
    Type: Application
    Filed: September 4, 2002
    Publication date: March 4, 2004
    Applicant: THE BOEING COMPANY
    Inventors: Daniel G. Sanders, Mark T. Schergen
  • Publication number: 20030219333
    Abstract: The object of the present invention is to provide a wafer support mechanism for a sample stage that does not require a special drive source for attaching and detaching a wafer to be provided within a sample chamber so as to eliminate problems with lining up drive portions occurring as a result of the drive source being provided outside so as to provide a stable and reliable mechanism that is not restricted by problems regarding environment.
    Type: Application
    Filed: April 9, 2003
    Publication date: November 27, 2003
    Inventor: Toshitada Takeuchi
  • Patent number: 6592315
    Abstract: A robotic self-feeding device uses a multiplicity of dishes, utensils and control methods to handle a wide variety of food, including sandwiches. Its operating sequence has a hover mode in which a utensil is automatically steered over a food holder and is constrained from moving away from the food holder. The user points to the desired food with the utensil and triggers pickup which is automatically accomplished. Its gripper can operate tong utensils to grasp food. It can cut food. The process of eating is thus easy and intuitive for people who may have a wide variety of severe paralysis disabilities.
    Type: Grant
    Filed: May 7, 2001
    Date of Patent: July 15, 2003
    Inventor: William Joseph Osborne, Jr.
  • Patent number: 6533530
    Abstract: A wafer transferring robot capable of restraining the vibration of wafers during the transfer. The robot comprises a rotating base (2) rotatable on a base (1), two horizontally extensible robot arms (3A, 3B) arranged laterally symmetrically to each other on the rotating base (2) and comprising first arms (32A, 32B), second arms (33A, 33B), and third arms (34A, 34B), respectively, and chucks (4A, 4B), fixed to the third arms (34A, 34B), respectively; wherein the lower surface of the second arm (33B) of one robot arm (3B) is higher than the upper surface of the wafer (WA) held over the third arm (34A) of the other robot arm (3A) via the chuck. Accordingly, the rigidity of transferring parts can be so enhanced that the vibration of wafers (WA, WB) can be prevented.
    Type: Grant
    Filed: June 26, 2000
    Date of Patent: March 18, 2003
    Assignee: Kabushiki Kaisha Yasakawa Denki
    Inventor: Hideharu Zenpo