Abstract: A semiconductor substrate stage for carrying a substrate is provided. The semiconductor substrate stage includes a base layer, a magnetic shielding layer disposed on the base layer, a carrier layer disposed on the magnetic shielding layer, a receiver disposed on the carrier layer, a storage layer disposed between the base layer and the magnetic shielding layer, and a magnetic shielding element disposed on the carrier layer and surrounding the receiver.

Abstract: A container carrier for carrying a sample container along a track is presented. The container carrier comprises a holding portion for receiving and holding a sample container and a base portion. A radio frequency identification (RFID) tag containing identifying information is provided with an antenna for wireless communication of the RFID tag with a reader device of the diagnostics system to read the identifying information. The RFID tag is on the holding portion. An arrangement for a diagnostics system is provided comprising container carriers and a track with a transport mechanism for moving the container carriers along a transportation lane. The transport mechanism defines a transport plane along which the container carriers move. A reader device reads the identifying information from the RFID tags. The reader device comprising a reader antenna above the transport plane to generate and emit a reader field for wireless communication with the RFID tag's antenna.

Abstract: A module for a laboratory sample distribution system, a laboratory sample distribution system comprising such modules, and a laboratory automation system comprising such a laboratory sample distribution system are presented. A magnetic coupling enhancer is provided in order to increase magnetic coupling between adjacent modules.

Abstract: A substrate transfer apparatus includes a guide rail, a carrier, a magnetic levitation unit, and a transferring unit. The guide rail is in a vacuum evacuable chamber. The carrier may carry a substrate and may be linearly movable along the guide rail. The magnetic levitation unit is configured to generate a magnetic levitation force between the guide rail and the carrier. The transferring unit is configured to generate a momentum for linearly transferring the carrier and includes a plurality of first transferring magnetic material members on an upper surface of the carrier, a plurality of second transferring magnetic material members over the carrier and spaced apart from the first transferring magnetic material members, and a plurality of containers in which the plurality of second transferring magnetic material members is respectively disposed.

Abstract: A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.

Abstract: The invention comprises a monolithic magnet or a combination of monolithic magnets with magnetic field domains for diamagnetic levitation of diamagnetic objects wherein the magnetic field pattern, the magnetic field strength and the magnetic field gradient of the magnetic field domains are chosen in such way that levitation of diamagnetic objects is achieved.

Abstract: A laboratory sample distribution system is presented. The laboratory sample distribution system comprises a number of container carriers. The container carriers each comprise at least one magnetically active device such as, for example, at least one permanent magnet, and carry a sample container. The system further comprises a transport plane to carry the container carriers and a number of electro-magnetic actuators being stationary arranged below the transport plane. The electro-magnetic actuators move a container carrier on top of the transport plane by applying a magnetic force to the container carrier.

Abstract: The invention relates to a device and method for fixing glass sheets in a superclean room for feeding a sputter system, comprising the following: a) a roller drive (12), designed to convey a transport frame (19) to a centering unit that centers the transport frame (19) horizontally and to convey the frame from the unit to a sputter system; b) a frame lifting device (7) which lifts and lowers the transport frame (19) in a magnetic rail mounting (2); c) a fixing unit (5, 8) which fixes and releases the transport frame (19), opening heads (3) being provided for opening and closing frame clips (17) that receive a glass plate (18); d) a lifting unit for lifting and pivoting said glass plate (18), the unit bringing the plate into a vertical position and placing said plate in the transport frame (9).

Abstract: There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers. A four-axis robot arm is disclosed, capable of linear translation, rotation and articulation, and z-motion.

Abstract: A carriage for high magnetic field environments includes a first work-piece holding means for holding a first work-piece, the first work-piece holding means being disposed in an operable relationship with a work-piece processing magnet having a magnetic field strength of at least 1 Tesla. The first work-piece holding means is further disposed in operable connection with a second work-piece holding means for holding a second work-piece so that, as the first work-piece is inserted into the magnetic field, the second work-piece is simultaneously withdrawn from the magnetic field, so that an attractive magnetic force imparted on the first work-piece offsets a resistive magnetic force imparted on the second work-piece.

Abstract: A device for particle free handling of substrates of micro technology within mini environments under clean room conditions works friction free and thus particle free. One component of the device is movable relative to an other component in at least the x-, y-, z-axes and a ?-direction and supported and driven along each of the axes and the direction contactless electromagnetically. Transmission of energy for bearing and driving the one component is effected contactless. The device includes at least one active component and at least one passive component. A movable active component may be guided on the fixed passive component by a magnet bearing, and a drive motor which rides with the active component may be coupled with an energy supply over an electromagnetic coupling.

Abstract: An apparatus for transferring substrates includes a carrier to which substrates are loaded, an upper transfer unit transferring the carrier horizontally by applying thrust to the carrier, a lower transfer unit maintaining the lower body of the carrier at the horizontal in a non-contact status, a magnetic levitation module levitating the carrier magnetically, and a lower damper unit maintaining the lower center of gravity of the carrier levitated by the magnetic levitation module.

Abstract: A method of operating a production line comprises the steps of supporting equipment in the production line on a plurality of crawlers comprising at least one rolling track and a structural support for supporting the equipment. A first plurality of lifting magnets coupled to an interior surface of said at least one rolling track is configured to oppose a second plurality of lifting magnets coupled to an exterior surface of said structure support to lift the structural support, such that the structural support floats between and within said at least one rolling track. The magnetic fields experienced by the first and second plurality of lift magnets are adjusted to translate the at least one rolling track, such that the crawlers move along the production line.

Abstract: An apparatus for transferring substrates includes a carrier to which substrates are loaded, an upper transfer unit transferring the carrier horizontally by applying thrust to the carrier, a lower transfer unit maintaining the lower body of the carrier at the horizontal in a non-contact status, a magnetic levitation module levitating the carrier magnetically, and a lower damper unit maintaining the lower center of gravity of the carrier levitated by the magnetic levitation module.

Abstract: A rotational magnetic field is applied to a base material having a paramagnetic property, a ferromagnetic property, or a diamagnetic property, and to a magnetic-particle containing substance that contains at least one magnetic particle and is placed on the base material. The magnetic particle also has a paramagnetic property, a ferromagnetic property, or a diamagnetic property. With the rotational magnetic field being applied, the magnetic dipole in the magnetic particle is rotated, and the magnetic-particle containing substance that contains the magnetic particle is moved on the base material by the magnetic dipole interaction between the magnetic particle and the base material. Thus, a manipulation method that utilizes a rotational magnetic field to perform manipulation readily at low costs is provided.

Abstract: A glass substrate carrier has a base, a tray assembly, a transmission device and a non-contact brake assembly. The base is movable. The tray assembly has a tray slidably mounted on the base and holding a glass substrate. The transmission device is mounted between the base and the tray assembly and is capable of driving the tray to extend out or retract back to the base. The non-contact brake assembly has a first brake element mounted on the base and a second brake element mounted on the tray assembly and un-contacting the first brake element. The first and second brake elements attract each other with an attractive force to brake a movement of the tray of the tray assembly. The first and second brake elements do not rub against each other and no dust is generated to damage circuit on the glass substrate.

Abstract: A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.

Abstract: An equipment-carrying crawler (20) includes a rolling track (44) and a structural support (70). The structural support (70) supports equipment (16). Lifting magnets (72) are coupled to the rolling track (44) and to the structural support (70). The lifting magnets (72) are configured to oppose each other, lift the structural support (70), and aid in the translation of the rolling track (44).

Abstract: An apparatus for transferring substrates includes a carrier to which substrates are loaded, an upper transfer unit transferring the carrier horizontally by applying thrust to the carrier, a lower transfer unit maintaining the lower body of the carrier at the horizontal in a non-contact status, a magnetic levitation module levitating the carrier magnetically, and a lower damper unit maintaining the lower center of gravity of the carrier levitated by the magnetic levitation module.

Abstract: A process system contains a device for transporting substrates along a transport path. The device contains a bearing module and a drive module. The bearing module has a bearing stator with actuators embodied in the form of electromagnets and a bearing rotor with a ferromagnetic component. At least two of the actuators are disposed at a distance from each other and define at least one pair of actuators with an associated gap area formed therebetween. An active magnetic bearing of the bearing rotor is provided in the gap area.

Abstract: A mini-modular manufacturing environmental chamber for processing and transporting semiconductor devices is disclosed. The cylindrical chamber is provided with a conveyer assembly that transports items within the chamber and divides the interior into two sections. Also included within the chamber are a power and control bus for process equipment located therein and a mounting assembly for securing the process equipment. Multiple environmental chambers can be connected by interconnect units and the chambers can be arranged in rows and columns to produce an array of manufacturing chambers useful for various semiconductor and microelectronic machine manufacture (MEMS) processing steps.

Abstract: A magnetic bearing enables to rotatably support a levitated body non-contactingly disposed in a hermetically sealed container filled with a gaseous process substance of a corrosive nature, while without contaminating the gaseous environment and suffering from corrosion. The magnetic bearing has an electromagnet for supporting a levitated body, a displacement sensor for detecting a levitated position of the levitated body, and a controller for supplying signals and excitation currents to the displacement sensor and the electromagnet through cables. An electromagnet target of the magnetic bearing that generates variations in magnetic fields due to rotation of the levitated body, is constructed of a single piece of ferromagnetic material, and is provided with an electrical insulation structure oriented parallel to magnetic fluxes generated by the electromagnet.

Abstract: A magnetic drive system for moving a substrate transfer shuttle along a linear path between chambers in a semiconductor fabrication apparatus. A rack with rack magnets is secured to the shuttle, and a rotatable pinion with pinion magnets is positioned adjacent the rack so that the pinion magnets can magnetically engage the rack magnets. Thus, rotation of the pinion will cause the shuttle to move along the linear path. The magnets may be oriented with a helix angle between their primary axis and the axis of rotation of the pinion. One rack and one pinion are located on each side of the shuttle. A set of lower guide rollers supports the shuttle, and a set of upper guide rollers prevents the shuttle from lifting off the lower guide rollers.

Abstract: A frictionless transport apparatus for transporting an object from a first to a second station is disclosed. The apparatus has a frame extending between the first and second stations and a carriage mounted for movement along said frame, in a levitated condition. A substantial portion of the weight of the carriage and load is supported by biasing magnets on the frame and carriage. The carriage and load are stabilized in a levitated condition by magnetic interactions between a diamagnetic plate on the carriage and a magnetic array extending along the frame. The carriage is moved in its levitated condition by a frictionless drive system, such as an electromagnetic, electrostatic, or pneumatic drive system. Also disclosed is a method of frictionless transport of an object between first and second stations.

Abstract: A frictionless transport apparatus for transporting an object from a first to a second station is disclosed. The apparatus has a frame extending between the first and second stations and a carriage mounted for movement along said frame, in a levitated condition. A substantial portion of the weight of the carriage and load is supported by biasing magnets on the frame and carriage. The carriage and load are stabilized in a levitated condition by magnetic interactions between a diamagnetic plate on the carriage and a magnetic array extending along the frame. The carriage is moved in its levitated condition by a frictionless drive system, such as an electromagnetic, electrostatic, or pneumatic drive system. Also disclosed is a method of frictionless transport of an object between first and second stations.