Multiple Loads, Having Means Spacing One Load From Another Load Patents (Class 414/749.5)
  • Patent number: 9022714
    Abstract: A substrate processing system and substrate transferring method capable of transferring a substrate bi-directionally through the use of substrate transferring device provided between two rows of processing chambers arranged linearly, thereby improving the substrate-transferring efficiency, the substrate processing system includes a transfer chamber having at least one bi-directional substrate transferring device for bi-directionally transferring a substrate; and a plurality of processing chambers for applying a semiconductor-manufacturing process to the substrate, wherein the plurality of processing chambers are linearly arranged along two rows confronting each other, and the transfer chamber is interposed between the two rows of the processing chambers, wherein the bi-directional substrate transferring device have a moving unit inside the transfer chamber, and horizontally moved by a linear motor; and a bi-directional substrate transferring unit in the moving unit, the bi-directional substrate transferring u
    Type: Grant
    Filed: January 12, 2010
    Date of Patent: May 5, 2015
    Assignee: Jusung Engineering Co., Ltd.
    Inventors: Kyoo Hwan Lee, Duck Won Moon, Jae Wook Choi
  • Patent number: 8944745
    Abstract: A carrier device is provided that can supply, at uneven intervals, a plurality of works arranged at even intervals. The carrier device (1) includes: a first retaining portion (11), second retaining portion (12), third retaining portion (13) and fourth retaining portion (14) that hold and carry a plurality of works arranged at even intervals and supply these to a supply pallet (7) at any intervals; and a retaining base portion (20) to which these first to fourth retaining portions are connected. The retaining base portion (20) includes first to fourth sliding portions that cause the first retaining portion (11) to fourth retaining portion (14) to approach each other or separate in the arrangement direction of the works. The first retaining portion (11) to fourth retaining portion (14) respectively include first engaging parts and second engaging parts that disengage with the works independently.
    Type: Grant
    Filed: October 28, 2011
    Date of Patent: February 3, 2015
    Assignee: Honda Motor Co., Ltd.
    Inventors: Katsumi Fujiwara, Shunsuke Sunahara, Takeshi Tada, Takayuki Motojima
  • Publication number: 20150016936
    Abstract: A substrate transfer method includes: a step of placing a first and a second substrate on a first and a second alignment part which are arranged to be vertically spaced from each other by using a first and a second pick. The method further includes a first positioning step of positioning the first pick at a first reception position determined based on an alignment position for the first substrate; a first receiving step of receiving the first substrate from the first alignment part by moving the first pick. The method further includes a second positioning step of positioning the second pick at a second reception position determined based on an alignment position for the second substrate; and a second receiving step of receiving the second substrate from the second alignment part by moving the second pick.
    Type: Application
    Filed: July 7, 2014
    Publication date: January 15, 2015
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: Takehiro SHINDO
  • Publication number: 20140271083
    Abstract: A substrate processing system including at least two vertically stacked transport chambers, each of the vertically stacked transport chambers including a plurality of openings arranged to form vertical stacks of openings configured for coupling to vertically stacked process modules, at least one of the vertically stacked transport chambers includes at least one transport chamber module arranged for coupling to another transport chamber module to form a linear transport chamber and another of the at least two stacked transport chambers including at least one transport chamber module arranged for coupling to another transport chamber module to form another linear transport chamber, and a transport robot disposed in each of the transport chamber modules, where a joint of the transport robot is locationally fixed along a linear path formed by the respective linear transport chamber.
    Type: Application
    Filed: October 26, 2012
    Publication date: September 18, 2014
    Applicant: Brooks Automation, Inc.
    Inventor: Robert T. Caveney
  • Patent number: 8590954
    Abstract: A suction gripper arrangement includes several suction gripper arms arranged in a row, which, at their lower ends, each have a suction gripper head with an abutment surface for abutting an article to be sucked onto the suction gripper head. The abutment surfaces of the suction gripper heads of the suction gripper arms neighboring each other are arranged in different planes. Moreover, the invention relates to a suction gripper arrangement in which at least one of the suction gripper arms is connected to an actuator via a lever, wherein both between the lever and the suction gripper arm, and also between the lever and the actuator, respectively, a pivot joint is formed, and wherein the lever is composed of at least to lever parts.
    Type: Grant
    Filed: September 21, 2011
    Date of Patent: November 26, 2013
    Assignee: Multivac Sepp Haggenmuller GmbH & Co. KG
    Inventors: Michael Hümmeler, Martin Drechsler, Kurt Waizenegger
  • Patent number: 8534727
    Abstract: An apparatus is disclosed for engaging and releasing a plurality of items. The apparatus comprises a frame having a longitudinally extending support member and at least one group of engagement unit. Each engagement unit has at least one engagement member, and each engagement unit is adapted for engaging, and disengaging from at least one item. Each of the engagement units in the one group is mounted in series for longitudinal movement on the longitudinal support member, and each one of the plurality of engagement units is interconnected to at least one other of the plurality of engagement units. A movement apparatus is provided for engaging at least one but not all of the plurality of engagement units in the one group to displace the group longitudinally on the longitudinal support member.
    Type: Grant
    Filed: October 9, 2008
    Date of Patent: September 17, 2013
    Assignee: Langen Packaging Inc.
    Inventors: Andre Weclawski, Constantin Mighiu, Berger Pogrzeba, Peter Guttinger
  • Patent number: 8272830
    Abstract: A method and apparatus for a transfer robot that may be used in a vacuum environment is described. The transfer robot includes a lift assembly comprising a first platform and a second platform coupled to the first platform by a plurality of support members, the plurality of support members comprising a first pair of support members and a second pair of support members, a first drive assembly coupled to a portion of the plurality of support members, the first drive assembly providing a motive force to the plurality of support members to move the second platform in a first linear direction relative to the first platform, and an end effector disposed on the second platform and movable in a second linear direction by a second drive assembly, the second linear direction being orthogonal to the first linear direction.
    Type: Grant
    Filed: October 7, 2008
    Date of Patent: September 25, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Shinichi Kurita, Takayuki Matsumoto, Suhail Anwar
  • Publication number: 20120114455
    Abstract: A carrier device is provided that can supply, at uneven intervals, a plurality of works arranged at even intervals. The carrier device (1) includes: a first retaining portion (11), second retaining portion (12), third retaining portion (13) and fourth retaining portion (14) that hold and carry a plurality of works arranged at even intervals and supply these to a supply pallet (7) at any intervals; and a retaining base portion (20) to which these first to fourth retaining portions are connected. The retaining base portion (20) includes first to fourth sliding portions that cause the first retaining portion (11) to fourth retaining portion (14) to approach each other or separate in the arrangement direction of the works. The first retaining portion (11) to fourth retaining portion (14) respectively include first engaging parts and second engaging parts that disengage with the works independently.
    Type: Application
    Filed: October 28, 2011
    Publication date: May 10, 2012
    Applicant: HONDA MOTOR CO., LTD.
    Inventors: Katsumi Fujiwara, Shunsuke Sunahara, Takeshi Tada, Takayuki Motojima
  • Patent number: 7940023
    Abstract: A geometric end effector system for use on a robot. The system includes a platform and a frame secured to the platform. At least one base is arranged at a predetermined position on the frame. The system also has an anchor mount secured to the base and a component connected to an end of the anchor mount by a collar assembly. A key is arranged between the component and the anchor mount.
    Type: Grant
    Filed: September 23, 2009
    Date of Patent: May 10, 2011
    Assignee: Delaware Capital Formation, Inc.
    Inventors: Jason M. Kniss, Michael J. Goff, Jerry Berendt, Ron Micallef
  • Publication number: 20100221093
    Abstract: The invention relates to an automated method for positioning eggs on a tray that comprises the automated detection of the presence/absence of eggs in the cells of a tray, and the picking-up of eggs from a supply and the placement thereof in the empty cells of a tray. The invention also relates to a system or positioning eggs on a stabilizing tray, the tray including evenly distributed cells in which the eggs are placed, one or more cells being likely not to contain eggs, this information being stored in an information processing unit, wherein said system includes a means in the form of a robot having an egg pick-up head that are driven by the information processing unit in order to pick up eggs from a supply tray and to place them in the empty cells of the stabilizing tray.
    Type: Application
    Filed: February 18, 2008
    Publication date: September 2, 2010
    Applicant: EGG-CHICK AUTOMATED TECHNOLOGIES
    Inventors: Laurent Mogenet, Jean-Claude Yvin, Christophe Dupont
  • Patent number: 7464807
    Abstract: A transfer device of a handler for testing semiconductor devices is provided in which a pitch between each of a plurality of picker heads may be adjusted without replacing a cam plate. The transfer device may include a base part, a plurality of picker heads movably mounted on the base part, and a cam plate movably mounted on the base part and having a plurality of inclined cam grooves formed therein. Each picker head is connected to a corresponding cam groove by a connection part extending therebetween, with an end of each connection part movably coupled to its respective cam groove. A driving unit reciprocates the cam plate so that, as the ends of the connection parts move within the cam grooves, a position of the picker heads may be varied.
    Type: Grant
    Filed: August 10, 2005
    Date of Patent: December 16, 2008
    Assignee: Mirae Corporation
    Inventors: Chul Ho Ham, Woo Young Lim, Young Geun Park, Ho Keun Song
  • Patent number: 7316537
    Abstract: A substrate transport apparatus is provided for stably transporting a substrate and sensing a receiving state of the substrate. The substrate transport apparatus includes a grip member for gripping a substrate placed on the pocket part of the hand when a hand returns to a groove position from a pickup position. The grip member may include a pusher and an elastic member. The pusher has a curved section contacting the edge of a substrate and is mounted on the base to move in the same direction as the at least one hand, and the elastic member supplies an elastic force for enabling the pusher to laterally press the edge of the substrate.
    Type: Grant
    Filed: May 24, 2005
    Date of Patent: January 8, 2008
    Assignee: Semes Co., Ltd.
    Inventors: Joo-Jib Park, Jeong-Yeol Choi
  • Patent number: 6968612
    Abstract: A production line (1) is constituted of a sliding path (10) as a moving path provided along nine working step positions from a first step position (P1) to a ninth step position (P9), nine skids (20) as support-receipt plates slidably mounted on the sliding path (10) every predetermined interval so as to correspond to the step positions (P1) to (P9), and driving mechanisms (30), that is, (31A), (30B) and (30C) as moving and driving mechanisms for moving and driving the skids (20).
    Type: Grant
    Filed: July 24, 2002
    Date of Patent: November 29, 2005
    Assignee: Ishikawajima-Harima Heavy Industries Co., Ltd.
    Inventors: Chikara Yagaki, Akira Inoue
  • Patent number: 6795202
    Abstract: If a plurality of wafers are placed on each shelf of a rack in a pod, some problems will arise in processing processes. In addition, in some apparatus for detecting wafers, driving means having a not so high stability in the speed such as an air-operated cylinder is used for moving the sensor, in order to make the structure simple. In the case that detection is performed while the sensor is moved by such driving means, errors becomes large and it is difficult to detect wafers accurately. The present invention provides a wafer processing apparatus provided with a transmissive wafer detection sensor, a dog having index means and a transmissive sensor for the dog. The wafer processing apparatus calculates the ratio of the duration time of a signal from the transmissive wafer detection sensor and the duration time of a signal from the transmissive sensor for the dog corresponding to the index means and compares the ratio with a threshold value set in advance to determine the number of wafers.
    Type: Grant
    Filed: November 14, 2003
    Date of Patent: September 21, 2004
    Assignee: TDK Corporation
    Inventors: Jun Emoto, Takeshi Kagaya, Kazuo Yamazaki
  • Publication number: 20040146383
    Abstract: An apparatus including a pick-and-place apparatus and methods of operating a pick-and-place apparatus. The pick-and-place apparatus includes a frame, a plurality of vacuum rails movable in the frame, a row of vacuum nozzles on each vacuum rail, a plurality of stop members, a first mechanism for biasing the vacuum rails apart, toward, and into engagement with the stop members, and a second mechanism for biasing the vacuum rails together. The vacuum rails have a maximum pitch, in which the vacuum rails are biased apart by the first mechanism and engage the stop members, and a minimum pitch, in which the second mechanism overcomes the bias of the first mechanism and biases the vacuum rails together. The pick-and-place apparatus can pick up a two dimensional array of electrical parts, change spacing between the electrical parts, rotate the two-dimension array of electrical parts and place the parts in carrier tape.
    Type: Application
    Filed: January 13, 2004
    Publication date: July 29, 2004
    Applicant: International Product Technology, Inc.
    Inventor: Merlin E. Behnke
  • Patent number: 6520733
    Abstract: A substrate transporting method including inputting process data and determining whether a number of units required for processing a wafer is an odd number or an even number. Depending on the number of units required for processing the wafer, steps of transporting the wafer, taking out the wafer from a cassette section, loading the wafer, unloading the wafer and loading the wafer into a cassette section are performed via predetermined arms and with predetermined processing units.
    Type: Grant
    Filed: November 14, 2000
    Date of Patent: February 18, 2003
    Assignee: Tokyo Electron Limited
    Inventors: Hiroki Taniyama, Hiroyuki Ataka
  • Patent number: 6471460
    Abstract: An apparatus is set forth for providing access to individual workpiece positions in a microelectronic workpiece cassette. The assembly comprises a workpiece cassette inventory assembly having a plurality of cassette inventory cassette supports, which are selectively aligned with the staging cassette supports of a workpiece staging assembly. This allows a plurality of cassettes to be separately indexed, thereby enabling the workpiece staging assembly to access multiple cassettes and process a larger number of microelectronic workpieces between loading/unloading cycles that require user activity.
    Type: Grant
    Filed: July 7, 2000
    Date of Patent: October 29, 2002
    Assignee: Semitool, Inc.
    Inventors: John M. Pedersen, Kyle M. Hanson