Orienter Has Article Gripping Means Patents (Class 414/783)
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Patent number: 11443973Abstract: Exemplary substrate processing systems may include a transfer region housing defining a transfer region fluidly coupled with a plurality of processing regions. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a plurality of substrate supports disposed within the transfer region. The systems may also include a transfer apparatus having a central hub including a first shaft and a second shaft counter-rotatable with the first shaft. The transfer apparatus may include an eccentric hub extending at least partially through the central hub, and which is radially offset from a central axis of the central hub. The transfer apparatus may also include an end effector coupled with the eccentric hub. The end effector may include a plurality of arms having a number of arms equal to the number of substrate supports of the plurality of substrate supports.Type: GrantFiled: July 7, 2020Date of Patent: September 13, 2022Assignee: Applied Materials, Inc.Inventors: Jason M. Schaller, Luke Bonecutter, Charles T. Carlson, Rajkumar Thanu, Karuppasamy Muthukamatchi, Jeff Hudgens, Benjamin Riordon
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Patent number: 11421658Abstract: A handling device for a transmission includes a first pillar, a second pillar, a first receptacle for the transmission and a second receptacle for the transmission, and a first rail and a second rail. The first receptacle is fixed in the first pillar so as to be rotatable and translationally displaceable. The second receptacle is fixed in the second pillar so as to be rotatable and translationally displaceable in parallel to the first receptacle. The first pillar is fixed in the first rail so as to be translationally displaceable. The second pillar is translationally displaceable in the second rail in parallel to the first pillar. The axes of rotation of the receptacles are aligned or oriented such that they can be brought into alignment by displacing the first receptacle, the second receptacle, the first pillar and/or the second pillar.Type: GrantFiled: August 5, 2019Date of Patent: August 23, 2022Assignee: ZF FRIEDRICHSHAFEN AGInventors: Adil Ben Haddou, Steffen Fischer, Kristiaan Van Rompaey
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Patent number: 11318517Abstract: A method of adjusting a position of a blank entering a furnace includes measuring a position of a heated blank exiting the furnace, recording one or more offset values from a nominal value of the heated blank exiting the furnace, calculating a revised position of a subsequent blank entering the furnace as a function of the one or more offset values, and adjusting a position of the subsequent blank entering the furnace as a function of the one or more offset values. The position of the heated blank exiting the furnace can be measured with an electronic vision system, a robot can adjust the position of the subsequent blank, and offset value(s) can be an elapsed furnace operation time, a number of heated blanks that have exited the furnace, and a physical dimension between an actual position of the heated blank and the nominal value of the heated blank.Type: GrantFiled: September 30, 2020Date of Patent: May 3, 2022Assignee: Ford Global Technologies, LLCInventors: Raj Sohmshetty, Elizabeth Bullard, Kyle Lee Fleeger, Robert Hess, Nguyen Phan
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Patent number: 11221239Abstract: A polishing device has a substrate stage which holds a substrate Wf, a processing head which processes a surface of the substrate Wf, an indentation detecting system which detects a position of an indentation in the substrate Wf, a movement mechanism which moves the processing head in a radial direction of the substrate stage, and a rotation mechanism which rotates the substrate stage, and the indentation detecting system has a fluid injection nozzle configured to inject a fluid to a circumferential edge portion of the substrate Wf when the substrate Wf is held on the substrate stage, a fluid measuring device which measures a physical quantity which is pressure or a flow rate of the fluid, and a position detector which detects the position of the indentation formed in the circumferential edge portion of the substrate Wf based on a change in physical quantity.Type: GrantFiled: July 17, 2018Date of Patent: January 11, 2022Assignee: EBARA CORPORATIONInventors: Zhongxin Wen, Nobuyuki Takahashi, Suguru Sakugawa
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Patent number: 11139184Abstract: The inventive concept provides an apparatus and a method for heat-treating a substrate. The method includes a first treatment operation of spacing a substrate apart from a support plate provided with a heater to a first height in a state in which a treatment space, in which the substrate is treated, is closed and heating the substrate, a second treatment operation of, after the first treatment operation, lowering the substrate such that the substrate is located at a second height and heating the substrate, a third treatment operation of, after the second treatment operation, lifting the substrate such that the substrate is spaced apart from the support plate to be located at a third height and heating the substrate, and a fourth treatment operation of, after the third treatment operation, lowering the substrate such that the substrate is located at a fourth height and heating the substrate.Type: GrantFiled: October 12, 2018Date of Patent: October 5, 2021Assignee: SEMES CO., LTD.Inventors: Ki Seung Lee, Soo Hyun Cho, Choongki Min
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Patent number: 11008668Abstract: There is provided an inspection method of a substrate holder for holding a substrate. This inspection method has a step of providing the substrate holder comprising a first member and a second member between which a substrate is held, an electric contact, and a seal member, the first member having a surface region where intrusion of the liquid is prevented by the seal member, the second member having the seal member, a step of holding the second member by a holding portion of a substrate holder opening/closing unit, and detaching the second member from the first member, and a detection step of detecting that the liquid adheres to the surface region of the first member, by a detector located above the first member and the second member.Type: GrantFiled: April 23, 2019Date of Patent: May 18, 2021Assignee: EBARA CORPORATIONInventor: Masaki Tomita
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Patent number: 10974853Abstract: A universal white room disposed at the distal end of an access arm of a launch pad service tower utilizes multiple interchangeable modular rooms of varying shapes, sizes and configurations to interface with access points on multiple differently configured launch vehicles and/or payload(s). The interchangeable modular rooms attach to a common portal in the white room allowing a single white room to be used. The modular rooms may be stationary relative to the white room or movable relative to the white room.Type: GrantFiled: November 13, 2018Date of Patent: April 13, 2021Assignee: United Launch Alliance, L.L.C.Inventors: Mark Burcar, Michael S. Gerlach
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Patent number: 10947057Abstract: A control unit performs first loading control that is to be performed when a target article that has been determined by a determination unit as being an article that is in an appropriate orientation is to be loaded onto a first supporting member in the appropriate orientation, and second loading control that is to be performed when a target article that has been determined by the determination unit as being an article that is in an inappropriate orientation is to be loaded onto the first supporting member in the appropriate orientation.Type: GrantFiled: January 30, 2020Date of Patent: March 16, 2021Assignee: Daifuku Co., Ltd.Inventors: Takuya Gondoh, Shigeru Sugano, Atsushi Kurayama, Masami Iwai, Atsushi Minoo
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Patent number: 10832926Abstract: An ion implantation apparatus, system, and method are provided for transferring a plurality of workpieces between vacuum and atmospheric pressures, wherein an alignment mechanism is operable to align a plurality of workpieces for generally simultaneous transportation to a dual-workpiece load lock chamber. The alignment mechanism comprises a characterization device, an elevator, and two vertically-aligned workpiece supports for supporting two workpieces. First and second atmospheric robots are configured to generally simultaneously transfer two workpieces at a time between load lock modules, the alignment mechanism, and a FOUP. Third and fourth vacuum robots are configured to transfer one workpiece at a time between the load lock modules and a process module.Type: GrantFiled: December 27, 2016Date of Patent: November 10, 2020Assignee: Axcelis Technologies, Inc.Inventors: Joseph Ferrara, Robert J. Mitchell
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Patent number: 10653539Abstract: The disclosed invention is an innovative, cost-efficient driving mechanism for the prosthetic hand industry that makes the use of only one motor to individually control each digit on a prosthetic hand separately. The use of the novel electromagnetic actuation system, locking mechanism, and spline nut and shaft configuration coupled with the single motor greatly reduces the weight, size and power usage of the prosthetic, increases functionality, minimizes noise, increases and speeds and forces, and orients the parts of the device in a manner that creates an aesthetically appealing design.Type: GrantFiled: December 20, 2017Date of Patent: May 19, 2020Inventor: Blain Joseph Cazenave
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Patent number: 10522381Abstract: Described herein are aligners and methods of aligning workpieces. A workpiece aligner apparatus comprises an aligner chuck including an arm having a first end and a second end, a first edge gripping element on the first end and a second edge gripping element on the second end, the first edge gripping element and the second edge gripping element spaced apart to hold a workpiece at edges thereof, and a central workpiece handling element located in a central region of the arm, wherein the central workpiece handling element has a height such that the central workpiece handling element extends higher than the first edge gripping element and second edge gripping element.Type: GrantFiled: April 7, 2017Date of Patent: December 31, 2019Assignee: Applied Materials, Inc.Inventors: Yaseer Arafath Ahamed, James D. Strassner
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Patent number: 10194570Abstract: A mounter is provided with a head unit with a suction nozzle capable of picking up an electronic component that transfers the electronic component to a specified position, an imaging device that images the pickup orientation of the electronic component, a component data acquiring device that acquires the size of the electronic component, an image processing section that image processes the captured image, and an image processing pattern selecting section. The image processing pattern selecting section, based on the size of the electronic component, is able to select one image processing range and one image processing accuracy from multiple predetermined image processing ranges and multiple predetermined printing accuracies, and, as the size of the electronic component acquired from the component data acquiring section becomes smaller, selects a smaller image processing range and a more accurate image processing accuracy from the multiple image processing ranges and multiple image processing accuracies.Type: GrantFiled: November 13, 2014Date of Patent: January 29, 2019Assignee: FUJI CORPORATIONInventor: Yoshiyuki Fukaya
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Patent number: 10026639Abstract: The semiconductor wafer conveying tool which can realize the uniform heating to a surface of a semiconductor wafer when heating the semiconductor wafer is a semiconductor wafer conveying tool which holds the semiconductor wafer having a predetermined diameter to convey it wherein the tool is provided with a main body having an opening with a diameter which is larger than a diameter of the semiconductor wafer, and at least three supporting members each having a predetermined length, containing plural pins which are arranged corresponding to the diameter of the semiconductor wafer and being configured to be a holding mechanism for holding the semiconductor wafer concentrically at a projection position from an inner periphery portion of the main body around the opening, as shown in FIG. 1.Type: GrantFiled: July 25, 2013Date of Patent: July 17, 2018Assignee: Senju Metal Industry Co., Ltd.Inventors: Toshihiko Mutsuji, Kaname Nagata
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Patent number: 9966292Abstract: A centering fixture for centering a wafer on a chuck is provided. The centering fixture includes a body including an upper surface, a lower surface, an inner periphery and an outer periphery. A chuck seat is positioned in a lower portion of the inner periphery and configured to mate the body with the chuck. A wafer seat is positioned in an upper portion of the inner periphery above the chuck seat, the wafer seat configured to receive and center the wafer on the chuck. The centering fixture ensures centering of the wafer relative to the chuck for automated handling system calibration. The wafer, body, chuck, chuck seat and wafer seat can be circular.Type: GrantFiled: July 12, 2016Date of Patent: May 8, 2018Assignee: GLOBALFOUNDRIES INC.Inventors: Donald R. Boyea, Jr., Matthew J. Bombardier
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Patent number: 9929033Abstract: In a gas purge apparatus, a load port apparatus, an installation stand for a purging container, and a gas purge method, the inside of the purging container can be filled with a cleaning gas without inclining the purging container. A control means drives a nozzle driving mechanism to move a purge nozzle toward a purge port based on a fixing detection signal detected by a fixing detection sensor showing that the purging container is fixed on a table.Type: GrantFiled: March 31, 2016Date of Patent: March 27, 2018Assignee: TDK CORPORATIONInventors: Jun Emoto, Tadamasa Iwamoto
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Patent number: 9630316Abstract: Example systems and methods may be used to determine a trajectory for moving an object using a robotic device. One example method includes determining a plurality of possible trajectories for moving an object with an end effector of a robotic manipulator based on a plurality of possible object measurements. The method may further include causing the robotic manipulator to pick up the object with the end effector. After causing the robotic manipulator to pick up the object with the end effector, the method may also include receiving sensor data from one or more sensors indicative of one or more measurements of the object. Based on the received sensor data, the method may additionally include selecting a trajectory for moving the object from the plurality of possible trajectories. The method may further include causing the robotic manipulator to move the object through the selected trajectory.Type: GrantFiled: January 26, 2016Date of Patent: April 25, 2017Assignee: X Development LLCInventors: Kurt Konolige, Ethan Rublee, Mrinal Kalakrishnan
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Patent number: 9204586Abstract: An electronic-circuit assembling process to be carried out in an electronic-circuit assembling system, for assembling an electronic circuit, by mounting electronic circuit components supplied from a component supplier, onto a circuit board, wherein the electronic circuit components includes at least one of different-property components having respective different electrical properties.Type: GrantFiled: June 7, 2011Date of Patent: December 1, 2015Assignee: FUJI MACHINE MFG. CO., LTD.Inventors: Daisuke Kato, Hiroyuki Haneda
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Patent number: 9174235Abstract: A substrate treating apparatus includes a treating block including a plurality of cells arranged one over another. Each cell has treating units for treating substrates and a single main transport mechanism disposed in a transporting space for transporting the substrates to the treating units. The treating units include solution treating units and heat-treating units. The solution treating units are arranged at one side of the transporting space, the heat-treating units are arranged at the other side of the transporting space, and the main transport mechanism and the treating units are in substantially the same layout in plan view for the respective cells. The solution treating units are in substantially the same layout in side view for the respective cells, the heat-treating units are in substantially the same layout in side view for the respective cells, and treatments of the substrates carried out in the respective cells are the same.Type: GrantFiled: February 21, 2012Date of Patent: November 3, 2015Assignee: Screen Semiconductor Solutions Co., Ltd.Inventors: Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima
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Patent number: 9011074Abstract: A device and a method for turning stacks of sheet-shaped material include a device for transporting the stacks into a pivot fork. The pivot fork is part of a turning unit and includes upper grippers, lower grippers and a stack stop. The pivot fork is open on one side to receive the stacks. The pivot fork is supported at its other end to pivot on a horizontal pivot shaft that extends in a direction transverse to a direction of introduction of the stacks and is disposed off-center relative to the pivot fork.Type: GrantFiled: October 26, 2011Date of Patent: April 21, 2015Assignee: Heidelberger Druckmaschinen AktiengesellschaftInventors: Wolfgang Diehr, Uwe Hartstock, René Heider, Tomasz Ollek
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Patent number: 9004847Abstract: A method and apparatus for automated aerating and handling a sub stack of a stack of rectangular paper sheets where the sub stack is gripped near or at opposed corners of a common edge of the sub stack by means of two robotic grippers (A, B) having two opposed gripping fingers (A1, A2, B1, B2), lifting and rotating the corners in mutually opposite first directions such that the work stack achieves an upwards concave form, gripping the corners by the robotic grippers (A, B), and rotating the grippers in second directions opposite to the first directions such that the upper sheet of the sub stack has a curvature smaller than the bottom sheet of the sub stack, preferably a substantially plane form.Type: GrantFiled: November 21, 2011Date of Patent: April 14, 2015Assignee: Industrial Robot AutomationInventors: Lars Fleckenstein, Henrik Christiansen
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Patent number: 8983659Abstract: A robot system according to the embodiments includes a robot that includes a hand including a gripping mechanism that grips a thin plate-shaped work and an arm that moves the hand, and a robot control apparatus that controls the robot. The robot control apparatus, when causing the robot to transfer the work at a predetermined work transfer position by controlling the robot, performs a presence/absence confirmation of the work by operating the gripping mechanism while causing the hand to retract after the hand reaches the work transfer position.Type: GrantFiled: November 14, 2012Date of Patent: March 17, 2015Assignee: Kabushiki Kaisha Yaskawa DenkiInventor: Yoshiki Kimura
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Publication number: 20150063969Abstract: A semiconductor device is aligned by placing the semiconductor device in a nest between first and second sections of the nest when the nest is in a receiving position in which the first and second sections are spaced further apart from one another than when the nest is in an aligning position. The nest is moved from the receiving position to the aligning position with the semiconductor device in the nest so that the first and second sections are spaced closer to one another and align the semiconductor device in the nest. The semiconductor device is removed from the nest after the semiconductor device is aligned.Type: ApplicationFiled: September 4, 2013Publication date: March 5, 2015Inventors: Nee Wan Khoo, Horst Groeninger
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Patent number: 8961094Abstract: The invention relates to a method and a device for aligning substrates (2) in an XY-plane. A polygonal, flat substrate (2), the substrate plane of which is parallel to the XY-plane or lies in the XY-plane, is aligned with respect to reference coordinates and a reference angular position in the XY-plane. A corner (12) of the substrate (2) is detected using image detecting means (9). In addition, the position coordinates of the substrate (2) are determined. Using evaluating means (10), the angular position of the corner (12) of the substrate (2) in the XY-plane is determined, and the position differences between the reference coordinates and the position coordinates as well as the angle difference between the reference angular position and the angular position of the substrate corner (12) are calculated. The substrate (2) is moved and/or rotated in the XY-plane according to the determined position difference or the angle difference.Type: GrantFiled: April 6, 2010Date of Patent: February 24, 2015Assignee: Singulus Technologies AGInventors: Edgar Rüth, Wolfgang Becker, Marjan Filipovic, Reiner Rohrmann
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Patent number: 8948904Abstract: A work picking system according to embodiments includes a three-dimensional measuring unit, a hand, a calculating unit, a determining unit, and an instructing unit. The three-dimensional measuring unit measures a three-dimensional shape of a work that is a gripping target. The hand is provided on a terminal movable unit of a multi-axis robot and includes a mechanism that changes a distance between gripping claws and a mechanism that changes a tip end direction of the gripping claws. The determining unit determines a tip end direction of the gripping claws based on the attitude of the work calculated by the calculating unit and a direction of a rotation axis of the terminal movable unit.Type: GrantFiled: December 7, 2011Date of Patent: February 3, 2015Assignee: Kabushiki Kaisha Yaskawa DenkiInventors: Takuya Murayama, Jun Goto, Shinji Ogasawara
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Patent number: 8845259Abstract: The invention concerns a method and corresponding apparatus of transferring a piece of cloth (3) from a pair of spreader clamps (4,5) to a conveyor (1) via a transverse boom, where the piece of cloth is first suspended and straightened between the spreader clamps, then delivered to the transverse boom (8,9), and subsequently delivered from the transverse boom to the conveyor. Apart from that, a straightening of the fore edge of the piece of cloth is performed, seen in the direction of conveyance of the conveyor, after its delivery from the clamps to the transverse boom has been initiated, but before it is delivered to the conveyor.Type: GrantFiled: December 16, 2008Date of Patent: September 30, 2014Assignee: Jensen Denmark A/SInventors: Steen Nielsen, Henrik Munch Jensen, Niels Peter Madsen
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Patent number: 8790064Abstract: A device is proposed for the positional orientation of plate-shaped parts (12), comprising continuous conveying equipment (13) for conveying plate-shaped parts (12), an optical measuring device (15) assigned to the continuous conveying equipment (13) for determining the actual position of at least one specific plate-shaped part (12) and for comparing this actual position to a stored set position and for determining the deviation of the actual position from the set position, and a control unit (20) coupled to the optical measuring device (15) for controlling a positioning unit (19) such that at least one specific plate-shaped part (12) the deviation of which from the set position was determined can be picked up by the positioning unit (19) in a pick-up region and deposited in a defined delivery region in the correct position corresponding to the set position for transfer on the continuous conveying equipment (13).Type: GrantFiled: March 12, 2008Date of Patent: July 29, 2014Assignee: Schuler Automation GmbH & Co. KG.Inventors: Reiner Dörner, Joachim Pottiez
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Patent number: 8756798Abstract: The invention relates to a device for fitting and equipping motor vehicle battery housings as a compact system, which comprises individual production stations and associated transport devices, wherein the battery plate packs to be processed are arranged in clamping cassettes and are provided to the device in the necessary pack width for the intended battery cells by a feeding station arranged upstream.Type: GrantFiled: August 20, 2010Date of Patent: June 24, 2014Assignees: Sasit Industrietechnik GmbH, VB Autobatterie GmbH & Co. KGAAInventors: Jochen Meier, Thomas Dörffel, Roger Loer
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Publication number: 20140154036Abstract: An apparatus for the automated handling of workpieces comprising at least one gripper for picking the workpiece; a control for controlling the at least one gripper and an intermediate station for placing the workpiece, with the apparatus being configured such that the workpiece is placed in a defined position and/or defined orientation on the intermediate station and is picked up again with a changed orientation and/or with greater accuracy.Type: ApplicationFiled: June 27, 2013Publication date: June 5, 2014Inventors: Thomas Mattern, David Haenschke, Bernhard Riedmiller, Alois Mundt
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Patent number: 8706289Abstract: Methods and systems, in one embodiment, for receiving a warped flexible wafer to be transferred between a first mechanism and a second mechanism are described. The method and system senses a first vacuum suction between the warped flexible wafer and the first mechanism. The warped flexible wafer is positioned to define a gap between the warped flexible wafer and the second mechanism. Methods and systems for closing the gap incrementally between the warped flexible wafer and the second mechanism are described. At each increment, the methods and systems detect whether a second vacuum suction is created between the warped flexible wafer and the second mechanism. When a second vacuum suction is detected between the warped flexible wafer and the second mechanism, the first vacuum suction between the warped flexible wafer and the first mechanism is released.Type: GrantFiled: March 23, 2012Date of Patent: April 22, 2014Assignee: FormFactor, Inc.Inventors: Bjorn Monteen, Gustaaf Ponder
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Patent number: 8696294Abstract: An apparatus for orientating a solid growth culture medium plate from an original orientation to a worked orientation, the plate having a lid and a bottom, the apparatus including an orientation mechanism that includes opposed jaws able to receive and hold a plate therebetween in a held position that defines a notional tube above and below the plate, the orientation mechanism being mounted on a jaw support member such that the jaw support member is rotatable such that at least the plate bottom rotates about a generally horizontal axis that intersects the notional tube to orientate at least the plate bottom from the original orientation to the worked orientation.Type: GrantFiled: February 28, 2013Date of Patent: April 15, 2014Assignee: LBT Innovations LimitedInventors: Rajiv Gupta, Stephen Lewis Leckenby, Phillip James Duncan, Daniel Patrick Torpy, Colin William Potter
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Patent number: 8616599Abstract: A hand according to an embodiment includes a pair of supporting units, a pair of capturing claws, an opening-and-closing mechanism, and a reciprocating mechanism. The pair of capturing claws are supported on the inner surfaces of the pair of respective supporting units and capture a part. The opening-and-closing mechanism opens and closes the pair of supporting units along a reciprocating axis intersecting with longitudinal directions of the supporting units. The reciprocating mechanism causes the pair of capturing claws to rotate about the reciprocating axis to change the direction of each tip of the capturing claws.Type: GrantFiled: September 8, 2011Date of Patent: December 31, 2013Assignee: Kabushiki Kaisha Yaskawa DenkiInventors: Kenichi Motonaga, Takashi Baba, Toshiyuki Harada, Yoichiro Dan, Yoshiaki Kubota, Jun Tijiwa
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Patent number: 8608423Abstract: A device, used for clamping and rotating the object, includes two first rods, one ends of which are respectively connected to one ends of the first plate and the second plate through a linked unit; another ends of the first rods are connected to the third rod that is used for balancing the rotating angles of the first rod and two linked units, such that the heights of two ends of the first rods and the second rods can be kept in step. Two second rods are connected to the first plate and the second plate respectively, as well as, another ends of second rods are connected to the fourth rod respectively. Accordingly, the fourth rod can be rotated to drive the second rod, such that the first plate and the second plate can be rotated. Therefore, due to two plates are used for clamping and rotating synchronously, users can take the advantages while the device is used.Type: GrantFiled: September 13, 2011Date of Patent: December 17, 2013Assignee: Chan Li Machinery Co., Ltd.Inventor: Huang-Pin Hsu
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Patent number: 8593613Abstract: An LCD exposure stage device is used for placing a substrate thereon, and comprises: a stage having an upper surface contacting with a bottom surface of the substrate; and a plurality of moving pins disposed flat on the upper surface of the stage with pin heads thereof corresponding to side surfaces of the substrate respectively so that the substrate can move horizontally by the moving pins. According to the present disclosure, only the substrate needs to be moved, so the operations are more convenient; and because the stage is always kept at a fixed position, the requirement on its strength can be appropriately lowered. Furthermore, because the substrate contacts with the stage all the time during the moving and exposure processes, and the time necessary for the exposure process is shortened, which make fabrication of the whole LCD panel more efficient.Type: GrantFiled: September 17, 2011Date of Patent: November 26, 2013Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.Inventor: Hsiao-hsien Chen
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Patent number: 8585346Abstract: An object of the present invention is to provide a crucible handling device that can firmly sandwich and reliably move a quartz glass crucible under a clean environment and a method of handling a quartz glass crucible using the crucible handling device.Type: GrantFiled: July 21, 2010Date of Patent: November 19, 2013Assignee: Japan Super Quartz CorporationInventors: Manabu Shonai, Taira Sato, Minoru Shirakawa, Hiroshi Takahashi, Shuichi Ikehata
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Patent number: 8571704Abstract: A substrate transfer apparatus that reduces the quantity of sensors used to detect the position of a substrate so as to simplify the structure and lower costs. The substrate transfer apparatus transfers a substrate (S) between a core chamber (11) and a peripheral chamber (12 or 13). A transfer robot (15) is arranged in the core chamber. The transfer robot includes a hand (17) for carrying the substrate and is capable of extending/drawing and pivoting the hand. A sensor (19) detects an edge surface of the substrate. The sensor is arranged at a position that the edge surface of the substrate passes by when the hand is extended/drawn between the core chamber and the peripheral chamber and that the edge surface of the substrate passes by when the hand is pivoted in the core chamber.Type: GrantFiled: February 27, 2008Date of Patent: October 29, 2013Assignee: ULVAC, Inc.Inventors: Takafumi Kawaguchi, Kenji Ago, Toshio Koike
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Patent number: 8550441Abstract: A supporting member, carrier and method of supporting are provided with a supporting member main body mounted to freely rotate. The supporting member main body is provided with a plurality of projections extending radially from a central rotation axis. Since the substrate is supported by abutment of the projections with an end of the substrate, the occurrence of cracking in the substrate can be prevented or the durability of the supporting member main body can be increased.Type: GrantFiled: April 16, 2008Date of Patent: October 8, 2013Assignee: ULVAC, Inc.Inventors: Koji Ishino, Hajime Nakamura, Mayako Matsuda, Takaaki Shindou, Yukio Kikuchi
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Patent number: 8545165Abstract: A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads.Type: GrantFiled: July 11, 2005Date of Patent: October 1, 2013Assignee: Brooks Automation, Inc.Inventors: Jairo T. Moura, Martin Hosek, Todd Bottomley, Ulysses Gilchrist
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Publication number: 20130223968Abstract: A method and apparatus for automated aerating and handling a sub stack of a stack of rectangular paper sheets where the sub stack is gripped near or at opposed corners of a common edge of the sub stack by means of two robotic grippers (A, B) having two opposed gripping fingers (A1, A2, B1, B2), lifting and rotating the corners in mutually opposite first directions such that the work stack achieves an upwards concave form, gripping the corners by the robotic grippers (A, B), and rotating the grippers in second directions opposite to the first directions such that the upper sheet of the sub stack has a curvature smaller than the bottom sheet of the sub stack, preferably a substantially plane form.Type: ApplicationFiled: November 21, 2011Publication date: August 29, 2013Applicant: INDUSTRIAL ROBOT AUTOMATIONInventors: Lars Fleckenstein, Henrik Christiansen
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Publication number: 20130183132Abstract: An apparatus for orientating a solid growth culture medium plate from an original orientation to a worked orientation, the plate having a lid and a bottom, the apparatus including an orientation mechanism that includes opposed jaws able to receive and hold a plate therebetween in a held position that defines a notional tube above and below the plate, the orientation mechanism being mounted on a jaw support member such that the jaw support member is rotatable such that at least the plate bottom rotates about a generally horizontal axis that intersects the notional tube to orientate at least the plate bottom from the original orientation to the worked orientation.Type: ApplicationFiled: February 28, 2013Publication date: July 18, 2013Applicant: LABTECH SYSTEMS LIMITEDInventor: LABTECH SYSTEMS LIMITED
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Patent number: 8489227Abstract: Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on at least one of an acceleration of the substrate holders, an acceleration of a transporting section that transports the substrate holders, relative positions of the substrate holders, or relative positions of the transporting section and one of the pair of substrate holders.Type: GrantFiled: July 13, 2012Date of Patent: July 16, 2013Assignee: Nikon CorporationInventors: Hidehiro Maeda, Kazuya Okamoto, Yasuaki Tanaka
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Publication number: 20130177378Abstract: A method and a system for the automatic loading of air-transport units. In the method, the piece goods and the air-transport unit, on at least one side of which is an openable loading opening, are transported to the packing location, when the piece goods are packed automatically through the loading opening into the air-transport unit. The air-transport unit is tilted in connection with the packing, in such a way that the side with the loading opening is raised relative to the side opposite to the loading opening, so that the air-transport unit is loaded in at least two different attitudes.Type: ApplicationFiled: August 19, 2010Publication date: July 11, 2013Applicant: AHKERA SMART TECH OYInventors: Juha Tuominen, Harri Ruoslahti, Arto Juosila
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Patent number: 8469648Abstract: An apparatus for a pipe handling apparatus has a main rotating structural member rotating about a pivot axis relative to a skid and moving from a first position to a second position. A tensioning mechanism is affixed to the main rotating structural member. The tensioning mechanism applies a tension to the main rotating structural member when the main rotating structural member is in the second position. The tensioning mechanism has a first cable having an end attached adjacent a top of the main rotating structural member, and a second cable having an end attached adjacent the top of the main rotating structural member. The first and second cables have opposite ends attached to a fixed surface. The first and second cables extend angularly outwardly from a front of the main rotating structural member. The first and second cables extend angularly outwardly from the sides of the main rotating structural member.Type: GrantFiled: October 27, 2008Date of Patent: June 25, 2013Assignee: T&T Engineering ServicesInventor: Keith J. Orgeron
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Patent number: 8408860Abstract: An apparatus for orientating a solid growth culture medium plate from an original orientation to a worked orientation, the plate having a lid and a bottom, the apparatus including an orientation mechanism that includes opposed jaws able to receive and hold a plate therebetween in a held position that defines a notional tube above and below the plate, the orientation mechanism being mounted on a jaw support member such that the jaw support member is rotatable such that at least the plate bottom rotates about a generally horizontal axis that intersects the notional tube to orientate at least the plate bottom from the original orientation to the worked orientation.Type: GrantFiled: January 11, 2008Date of Patent: April 2, 2013Assignee: Labtech Systems LimitedInventors: Rajiv Gupta, Stephen Lewis Leckenby, Phillip James Duncan, Daniel Patrick Torpy, Colin William Potter
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Patent number: 8403619Abstract: In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter.Type: GrantFiled: February 18, 2011Date of Patent: March 26, 2013Assignee: Brooks Automation, Inc.Inventors: Jairo Terra Moura, Martin Hosek, Todd Bottomley, Ulysses Gilchrist
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Patent number: 8393849Abstract: According to one embodiment of the present invention, a method for adjusting a position of an object to compensate for tilt includes providing a rotatable base supporting an object and directing the object relative to the base such that the position of the object is controlled relative to a first axis. The object is stabilized along a second axis. The object is positioned relative to the base using at least one bearing arm. The at least one bearing arm movably couples the object to the base at a first position relative to a third axis and a fourth axis. The at least one bearing arm includes a first portion and a second portion, which are coincident with the third axis and fourth axis, respectively. The object is adjusted to a second position using the at least one bearing arms to maintain the first axis when a tilt angle of the base is detected.Type: GrantFiled: February 28, 2011Date of Patent: March 12, 2013Assignee: Raytheon CompanyInventor: Matthew Jonas
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Publication number: 20130022437Abstract: An automated, high volume container manipulator and process useful with an agricultural seed box. In an exemplary application, the manipulator removes an upper ring of a seed box, rotates the ring 180 degrees and places the ring over the lower seed box base in a nested condition. Container lid removal, transport and replacement devices and processes are also included.Type: ApplicationFiled: July 20, 2012Publication date: January 24, 2013Inventors: Harold Parslow, II, Terry Pelc
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Patent number: 8328255Abstract: Disclosed are a method and apparatus for the contamination-free transfer of thin, shock-sensitive crystalline plates, especially glass plates, from a horizontal into a defined vertical position. Said method and apparatus have the following features: a) a transverse bar of a transfer fork is disposed below the glass plate in order to grip the glass plate, said transverse bar (6) being fitted with suction head-supporting bars which are vertically mounted thereon and have suction heads that are distributed along the top side thereof and penetrate the free space between the rolls: b) the suction heads are moved close to the bottom side of the glass plate; and the suction elements thereof are connected to the glass plate by means of intake air, c) the glass plate is put into the placement device after being finely adjusted. Also disclosed are a computer program and a machine-readable carrier containing the corresponding program code.Type: GrantFiled: October 24, 2008Date of Patent: December 11, 2012Assignee: Grenzebach Maschinenbau GmbHInventors: Roland Franz, Kornelia Ulrike Franz, legal representative
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Publication number: 20120305028Abstract: Provided is a buffer unit, which includes a frame including a base plate, a first vertical plate, and a second vertical plate, wherein the first and second vertical plates are spaced apart from each other on the base plate, a first buffer on which a photomask is placed, the first buffer being allowed to be reversed between the first and second vertical plates; and a plurality of driving parts disposed at outsides of the first and second vertical plates, and driving the first buffer to grip and reverse the photomask placed on the first buffer.Type: ApplicationFiled: May 30, 2012Publication date: December 6, 2012Applicant: SEMES CO., LTD.Inventors: Kihoon Choi, Byung Man Kang, Byung Chul Kang, Donghyuk Jang
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Publication number: 20120267499Abstract: A carrier apparatus for a medical device in a medical treatment facility includes a device holder that is configured to hold a medical device and a container that is configured to receive the device holder with a medical device, such that the device holder can move between an upper resting position in the container and a lower operating position in which a medical device held by the device holder can be used by medical staff.Type: ApplicationFiled: March 27, 2012Publication date: October 25, 2012Inventors: Omid Abri, Stephan Schrader, Thorsten Karge, Julian Verkin
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Publication number: 20120253516Abstract: A robot control method includes gripping a work with a hand unit; transferring the work to the vicinity of a plane; dropping the work to the plane by reducing the grip force of the hand unit, and aligning the work with the plane; and re-gripping the work, which is aligned with the plane, again with the hand unit.Type: ApplicationFiled: March 27, 2012Publication date: October 4, 2012Applicant: SEIKO EPSON CORPORATIONInventor: Izumi IIDA