Abstract: A batch charger includes a barrel defining a direction X of charging a glass forming batch into the furnace, and a mechanical assembly provided with a member for conveying the batch to the furnace in the charging direction X, this conveying member being at least partially arranged in the barrel, and a motorized unit for driving the conveying member. The batch charger includes a mechanical assembly translatably mobile relative to the barrel, in the charging direction X.

Abstract: The present invention relates to a multistory electronic device testing apparatus, which mainly comprises a feeding and binning device, a multi-axis transfer device, a chip-testing device and a main controller. The feeding and binning device includes an upper module and a lower module. The chip-testing device includes a plurality of testing units arranged vertically. The main controller not only controls the feeding, binning and testing operations, but also controls the multi-axis transfer device to transfer an electronic device to be tested or a tested electronic device between the feeding and binning device and the chip-testing device. Accordingly, the three-dimensional arrangement of the feeding and binning module and the testing device is realized, and the accommodating capacity and the testing capacity for the electronic devices to be tested and the tested electronic devices can be increased.

Abstract: The disclosure relates to a substrate processing apparatus, comprising: a first reactor constructed and arranged to process a rack with a plurality of substrates therein; a second reactor constructed and arranged to process a substrate; and, a substrate transfer device constructed and arranged to transfer substrates to and from the first and second reactor. The second reactor may be provided with an illumination system constructed and arranged to irradiate ultraviolet radiation within a range from 100 to 500 nanometers onto a top surface of at least a substrate in the second reactor.

Abstract: A method and apparatus for replacing process kits that include edge rings and/or support rings in processing chambers. In one implementation, a process kit comprises a multi-segment edge ring. The multi-segment edge ring comprises a first segment, a second segment, and a first annular body. The first annular body comprises a first upper surface, a first lower surface opposite the first upper surface, a first inner surface and a first outer surface. The first segment and the second segment are connectable to form the first annular body. The first lower surface is operable to be positioned over a substrate support disposed within a processing chamber, and at least a portion of the inner surface, which is positioned between the first upper surface and the first lower surface has a diameter greater than a diameter of a substrate to be processed in the processing chamber.

Abstract: The embodiments herein relate to methods and apparatus for inserting a substrate into a processing chamber. While many of the disclosed embodiments are described in relation to insertion of a semiconductor substrate into an anneal chamber with minimal introduction of oxygen, the implementations are not so limited. The disclosed embodiments are useful in many different situations where a relatively flat object is inserted through a channel into a processing volume, where it is desired that a particular gas concentration in the processing volume remain low. The disclosed embodiments use multiple cavities to serially attenuate the concentration of oxygen as the substrate moves into the processing volume of the anneal chamber. In some cases, a relatively high flow of gas originating from the anneal chamber is used. Further, a relatively low transfer speed may be used to transport the substrate into and out of the anneal chamber.

Abstract: A deposition arrangement for depositing a material on a substrate is described. The deposition arrangement includes a vacuum chamber; a roller device within the vacuum chamber; and an electrical heating device within the roller device, wherein the heating device comprises a first end and a second end, and wherein the heating device is held at the first end and at the second end. Also, a method for heating a substrate in a vacuum deposition arrangement is described.

Abstract: According to the disclosed embodiments, a repeatable interface in a crystalline material growth system is achieved through an automated heat exchanger alignment apparatus and method. In one embodiment, a furnace chamber including a bottom wall and side walls that define an interior portion is provided. A crucible is disposed in the interior portion of the furnace chamber and configured to contain a crystalline material growth process. Also, a heat exchanger includes an elongated shaft that extends in a vertical direction and traverses the bottom wall of the furnace chamber, whereby a first end portion of the heat exchanger shaft is coupled to the crucible. Furthermore, an automated lifting device is configured to be actuated to adjust a position of the heat exchanger shaft in the vertical direction, whereby a second end portion of the heat exchanger shaft is coupled to the automated lifting device.

Abstract: A substrate processing apparatus suppresses vibration of a cover when unloading a boat from a process pipe. The apparatus comprises a boat for placing a substrate, a process pipe configured to accommodate the boat, a cover having the boat placed thereon, the cover configured to open and close a furnace port installed on a lower end of the process pipe, a motor to drive an elevation mechanism which moves the cover upward and downward, a sealing member to seal a space between the cover and the process pipe, and a controller to control motor speed and limit motor torque while the cover moves from the furnace port to a predetermined position. The substrate is maintained at a rest position in the boat during a recovery from a deformation of the cover occurring when separating the sealing member from the cover surface or the process pipe surface.

Abstract: A method for providing material to a gasifier. The method comprises providing a feedstock. A flow of the feedstock is formed. The flow is then delivered to a gasifier such that it provides a substantially airtight seal to the gasifier.

Abstract: A method of reducing the heat loss of a workpiece when the workpiece is displaced from a furnace to a tool includes displacing the workpiece resting on a carrier to the tool. The displacement takes place with the workpiece and the carrier located internally in a box with a heat reflecting inner side. At the tool, the workpiece is exposed. An apparatus for carrying the method into effect his according to the present invention, a box with a heat reflecting inner side and a linear conveyor for insertion and removal of the carrier and the workpiece into and out of the box, respectively.

Abstract: An embodiment of the present invention is a technique to automate transfer of parts for high throughput. A boat transfer unit (BTU) arm carrying a boat containing a plurality of parts is rotated from an initial position to a first position that is below a process chamber. The BTU arm engages a boat support that supports the boat. The BTU arm is moved upward to a second position such that the boat partially enters the process chamber at a distance D with respect to an entrance opening of the process chamber. An elevator arm carrying a pedestal is engaged to lower side of the boat support. The BTU arm is moved away from the second position. The elevator arm is moved upward to fully insert the boat inside the process chamber.

Abstract: In a charging process of a shaft furnace, in particular of a blast furnace, batches of charge material are typically discharged in cyclical sequence into the furnace from a top hopper using a flow control valve. A method and system is proposed for adjusting the flow rate of charge material in such a process. According to the invention, a respective set of plural valve settings is stored for each batch, each valve setting of a set being associated to a different stage in the discharge of the batch. The method and system are configured to discharge a given batch so that, at each stage in the discharge of the given batch, the flow control valve operates at a constant valve opening according to the valve setting associated to that stage and so that an actual average flow rate at which charge material is discharged is determined for that stage.

Abstract: A wafer boat assembly for use with a loading apparatus configured to insert the wafer boat assembly loaded with semiconductor substrates into a furnace. The wafer boat assembly includes a first wafer boat part comprising a base and a first cover part mounted on the base; and a second wafer boat part comprising a second cover part that is provided with receiving slots for holding a plurality of semiconductor substrates. The second cover part has an arcuate shape that extends from a first longitudinal edge to a second longitudinal edge. The first and second wafer boat parts are detachably connectable, such that they mate together to extend around an outer perimeter of a loaded substrate at a predetermined distance.

Abstract: The present invention is directed to the use and application of robotics in mining and post-mining applications, including smelting and processes associated with electrodeposition, electrorefining, cleaning, and disposal. In addition, the application of robotics includes functions associated with maintenance and operation of equipment used in mining operations.

Abstract: A selective dispensing device (1) is disclosed for limestone in vats (5a, 5b) of a regenerating oven adapted to arrange limestone with greater sizes next to an external wall (7a, 7b) of the vats (5a, 5b) and limestone with smaller sizes next to an internal wall (8a, 8b) of the vats (5a, 5b), comprising at least one mobile bulkhead (11) connected to a drive shaft (13) rotating around a rotation axis (X), such rotation being driven by an actuator system and the mobile bulkhead (11) being able to rotate around the rotation axis X to be alternatively inclined by a first angle (?) and by a second angle (?) with respect to reference plane (Z).

Abstract: The invention relates to methods and devices for melting furnaces, conveying paths and conveying means for the melt, the melt product and for any type of discharges from a melting furnace and transportation means for the melt, with an extended service life, which in the case of a complete screen, that is to say in the optimum situation, may also be infinite, and/or with increased purity of the melt. This is achieved by the pushing-through or rotating-through of screens, clinkers, coatings, linings, etc., that is to say solid materials which are situated between the melt or melt product or the discharges and the materials situated behind the same which counteract the pressure of the melt, of the melt product or the discharges, for example walls. Here, new pieces of the screens etc. may be added at one free end, and used or worn pieces of the screens can be removed or withdrawn at another free end.

Abstract: A method of exhausting a gas in a chamber of a load-lock system having a first valve defining an opening for supplying a gas and a second valve defining an opening for conveyance of an article. The method includes a gas supplying step for supplying a gas heated by a heater into the chamber through the first valve, while the first valve and the second valve are kept open, a conveying step for conveying the article into the chamber while the second valve is kept open, and an exhausting step to be carried out after the gas supplying step and the conveying step are executed and the first and second valves are closed, to exhaust the gas inside the chamber while the first valve and the second valve are kept closed.

Abstract: An alkali metal introduction apparatus (1) includes: a dedicated fracture chamber (10) and a vacuum chamber (20); vacuum pumps (60a) and (60b) for evacuating the insides of the dedicated fracture chamber (10) and the vacuum chamber (20); an ampul fracturing section for causing, in the dedicated fracture chamber (10), an alkali metal encapsulated in an ampul (16) to be exposed out of the ampul (16) by deforming the ampul (16); a collision cell (40) configured to allow the ampul (16) to be introduced therein, the collision room (40) being provided inside the vacuum chamber (20); and an ampul introducing section (12) for moving the ampul (16) between an exposure position where the alkali metal encapsulated in the ampul (16) is to be exposed out of the ampul (16) thus deformed and an introduction position where the ampul (16) is to be introduced into the collision cell (40).

Abstract: Particulate filling devices and methods are disclosed that use a loading system generally including a loading cart, a drive system, and a line assembly. The drive system generally includes a motor, a drive shaft, a driven shaft, a spool, a plurality of cable partitions, and a controller. Each line assembly generally includes cable sections, swivel connectors, one or more spring blocks and a weight.

Abstract: A method and device position a deflectable material basket at a charging opening of a furnace. The method and device reliably prevent a swinging or oscillating movement of the deflectable material basket that is moved by a crane, when approaching the furnace and when discharging the material.

Abstract: A device for use in the semiconductor industry includes a robotic arm whose end effector includes at least two prongs designed to hold a substrate carrier. A pushing member located between the prongs can move independently of the prongs and is configured to exert force against the substrate carrier while the prongs are retracted from the substrate carrier, after the substrate carrier has been brought to its intended position. In this manner, the position of the substrate carrier is maintained at its intended position as the prongs are retracted. Each of the prongs may include a claw or gripping member for grasping the substrate carrier.

Abstract: A solid particle flow distribution controller includes an extension skirt configured to be mounted to a discharge skirt at a division between an upstream solid particle conveyance pipe and a plurality of downstream pipes. The extension skirt includes a plurality of circumferential segments. Each segment is movably mounted to the discharge skirt for movement in an upstream and downstream direction with respect to the discharge skirt. The segments of the extension skirt are configured and adapted for motion in the upstream and downstream direction independent of one another to extend upstream of the discharge skirt as needed to improve solid particle distribution among the downstream pipes.

Abstract: The present invention relates to a device (1) for transporting blanks (2) made from an initially plastic, especially ceramic, material towards a dryer (3), from the dryer (3) and towards a kiln (4), with a dryer supply device (7) for supplying the blanks (2) to the dryer (3) and a removal and supply device (8) for removing the blanks (2) from the dryer (3) and for supplying the blanks (2) to the kiln (4). Transport trays (5) made from a heat-resistant material for the blanks (2) are associated with the device (1). The supply device (7) provides a blank-loading device (19) for loading the blanks (2) in each case onto a transport tray (5), and the removal and supply device (8) provides a transfer device (22a, 22b, 22c) for gripping the respective transport tray (5) loaded with the blanks (2) and transferring it to the kiln (4). The present invention further relates to a method for transporting blanks.

Abstract: Wafer boat assembly for use in a loading apparatus for loading semiconductor substrates in a vertical furnace configured for batch processing, wherein the wafer boat assembly comprises a wafer boat for holding semiconductor substrates and a cover configured to substantially surround the substrates, wherein the wafer boat assembly is provided with a first wafer boat part comprising a base and a first cover part mounted thereto, said first cover part extending at least partially along a base upper perimeter; and a second wafer boat part comprising a second cover part removably provided on the first wafer boat part and configured to cooperate with the first cover part, said second cover part comprising receiving slots for receiving at least a semiconductor substrate to be processed.

Abstract: Equipment and a method for transporting red-hot coke are provided, which do not need increase in size of a hoist, reinforcement of a CDQ system, and the like, even when the amount capacity of a coke bucket does not correspond to an amount equivalent to the coke amount from one oven chamber. In particular, transporting equipment for red-hot coke, includes: a non-rotary coke receiving car for receiving coke out of a coke oven; a coke bucket for receiving the coke discharged from the coke receiving car; a transporting device for transporting the coke bucket to a hoist position; and a hoist for transporting the coke bucket to a coke dry quenching system.

Abstract: A hydraulic distributor for safely and efficiently top charging a bell-less blast furnace. The hydraulic distributor includes a main housing, an inner ring, a trunnion, and an actuator ring, which act together to lift and rotate the distributor chute. Hydraulic tilt cylinders operatively coupled to the inner ring act to lift the distributor chute to change tilt. Rotational Drives operatively coupled to the trunnion act to rotate the distributor chute. The hydraulic distributor provides improved repeatability and precision control of the distributor chute, and hence the placement of burden materials within the blast furnace resulting in improved productivity and operation of the furnace. The hydraulic distributor provides a less complex design and construction resulting in reduced costs for manufacturing and maintenance.

Abstract: A method and system for loading and centering a crucible in a furnace is disclosed. The method comprises, in part, the steps of centering a rail loader over a furnace bottom; placing the crucible on the rail loader; and moving the crucible over the crucible block in the center of the furnace bottom. A rail loader system that is capable of centering the crucible in the furnace is also disclosed.

Abstract: A method and a device for supplying free flowing glass mixtures by transport devices for feeding the glass mixture through a doghouse opening of a glass melting furnace above the glass level, and a pusher driven by a pusher arm for distributing the glass mixture on the glass melt. The transport devices and the pusher arm extend through the doghouse opening and at are least extensively sealed. To feed glass mixture into the furnace and to distribute it over the melt surface in a targeted manner, thereby extensively maintaining the sealing of the interior of the furnace from the surroundings, the glass mixture is applied to the glass melt by two adjacent transport devices and independently controlled with regard to the delivered quantity per unit of time, and is distributed over the glass melt by continuous rotary motions of the pusher at both sides of the pusher arm.

Abstract: A method for compacting coal in a manner suitable for coke oven chambers is disclosed. The coal is initially compressed by means of a suitable compressing device into one or more coal cakes, and the obtained coal cakes are divided into compacted products by a cutting device. The compacted products are stacked on top of the each other such that they can be loaded into a coke oven chamber for coking. The compacted products enable the coke oven chambers to be loaded in a precise and a coal loss-free manner. The coal compacted products are easy to store.

Abstract: A substrate processing apparatus comprises a storage container for storing multiple substrates and whose substrate loading and unloading opening is shut by a lid, a loading and unloading port for carrying the storage container into and out of the case, a placement unit for placing the storage container in the loading and unloading port, a storage chamber provided adjacent to the loading and unloading port for storing the storage container, an opening and closing device for opening and closing the substrate loading and unloading opening of the storage container placed in the placement unit, a transfer device containing a holding mechanism for supporting the bottom of the storage container and transferring the storage container supported in the holding mechanism, over the opening and closing device between the inside and outside of the storage chamber, and an elevator mechanism for raising and lowering the placement unit between the placement unit height position where the opening and closing device opens and c

Abstract: A substrate processing apparatus includes a substrate container holding shelf comprising a plurality of shelf boards configured to hold substrate containers thereon; a substrate container carrying mechanism configured to load and unload the substrate containers into/from the substrate container holding shelf; a substrate container holding shelf elevation mechanism configured to lift each of the plurality of the shelf boards of the substrate container holding shelf in a vertical direction; and a processing unit configured to receive at least one of the substrate containers from the substrate container holding shelf.

Abstract: The present invention proposes a method for feeding a burden to a blast furnace (32), wherein the method comprises providing a charging device (38) having at least one material hopper (40), the material hopper (40) comprising a hopper chamber (42), a material inlet aperture for feeding a burden into the hopper chamber (40), and a material discharge aperture for feeding a burden from the hopper chamber (40) to the blast furnace (32); the material inlet aperture having an associated inlet seal valve 44) for opening and closing the material inlet aperture and the material discharge aperture having an associated material discharge valve (46) for opening and closing the material discharge aperture.

Abstract: A disk processing system with a corner chamber having a heater assembly and a carrier rotary assembly configured to rotate the heater assembly.

Abstract: In a charging process of a shaft furnace, in particular of a blast furnace, batches of charge material are typically discharged in cyclical sequence into the furnace from a top hopper using a flow control valve. A method and system is proposed for adjusting the flow rate of charge material in such a process. According to the invention, a respective set of plural valve settings is stored for each batch, each valve setting of a set being associated to a different stage in the discharge of the batch. The method and system are configured to discharge a given batch so that, at each stage in the discharge of the given batch, the flow control valve operates at a constant valve opening according to the valve setting associated to that stage and so that an actual average flow rate at which charge material is discharged is determined for that stage.

Abstract: A system, apparatus, and method is provided for preventing condensation on a workpiece in an end station of an ion implantation system. A workpiece is cooled in a first environment, and is transferred to a load lock chamber that is in selective fluid communication with the end station and a second environment, respectively. A workpiece temperature monitoring device is configured to measure a temperature of the workpiece in the load lock chamber. An external monitoring device measures a temperature and relative humidity in the second environment, and a controller is configured to determine a temperature of the workpiece at which condensation will not form on the workpiece when the workpiece is transferred from the load lock chamber to the second environment.

Abstract: A method and a device are involved in feeding hot material from a combustion boiler including at least one housing, at least one conveyor belt and at least one redirecting device, wherein the at least one conveyor belt first feeds the material with a first horizontal directional component and after passage through the redirecting device the material is fed with at least a second horizontal directional component that deviates from the first. Also, the material with the first directional component outside the redirecting device is continuously separated from the material with the second directional component. Additionally, the first directional component and the second directional component span an angle of 135° to 180°.

Abstract: A device and method for transporting and handling catalyst for a chemical reactor.

Abstract: In accordance with some embodiments described herein, a method for transferring a substrate is provided. The method includes loading one or more substrates into a respective mobile chamber of one or more mobile chambers. The mobile chambers are movable on a first rail positioned adjacent to two or more process modules. Each mobile chamber is configured to maintain a specified gas condition. The respective mobile chamber is moved along the first rail. The respective mobile chamber is docked to a respective process module of the two or more process modules. At least one of the one or more substrates is conveyed from the respective mobile chamber to the respective process module.

Abstract: Embodiments of the present invention provide a transfer robot having a cooling plate attached thereto for cooling a substrate during transfer between a processing chamber and a load lock chamber. In one embodiment, the cooling plate is a single, large area cooling plate attached to the transfer robot beneath the substrate being transferred. In another embodiment, the cooling plate is an array of substrates attached to the transfer robot beneath the substrate being transferred. The cooling plate may include a conduit path for circulating a cooling fluid throughout the cooling plate. The cooling plate may have an upper surface with a high emissivity coating applied thereto.

Abstract: Provided is a substrate processing apparatus suppressing the vibration of a cover in an initial stage of unloading a boat from a process pipe. The substrate processing apparatus comprises: a boat for placing a substrate; a process pipe receiving the boat; a cover on which the boat is placed, the cover opening and closing a furnace port installed on a lower end of the process pipe; an elevation mechanism moving the cover upward and downward; a motor driving the elevation mechanism; a sealing member sealing a space between the cover and a lower end surface of the process pipe; and a controller controlling torque of the motor such that the substrate is maintained a rest position within the boat in a deformation recovery period of the cover occurring when the sealing member is removed from a surface of the cover or the lower end surface of the process pipe.

Abstract: Particulate filling devices and methods are disclosed that use a loading system generally including a loading cart, a drive system, and a line assembly. The drive system generally includes a motor, a drive shaft, a driven shaft, a spool, a plurality of cable partitions, and a controller. Each line assembly generally includes cable sections, swivel connectors, one or more spring blocks and a weight.

Abstract: The invention relates to the transportation and preparation for combustion of coal used as a solid fuel at heat power plants and can find applications in coal-based power generation. The object of the invention is a complex use of energy resources contained in coal, reduction of power consumption for the realization of the process, expansion of solid fuel pipeline transport application in coal-based power generation, increase in the coal pipeline operation safety, and the environment protection. Prior to the transportation via a pipeline, the initial stream of coal is screened into coarse material and fines, the latter being pressed into cylindrical monolithic blocks. Coal is transported via a pipeline filled with aqueous salt solution with a density exceeding that of the transported material, the coarse coal and pressed blocks being loaded into the pipeline alternately.

Abstract: A holder manufacturing method for loading a substrate of a semiconductor manufacturing device, a batch type boat having the holder, a loading/unloading method of a semiconductor substrate using the same, and a semiconductor manufacturing device having the same are disclosed. For example, the manufacturing method of the holder of the boat for loading a semiconductor substrate includes the steps of molding a holder substrate of a pipe shape having inner and outer circumference of a predetermined size in such a manner that a lower portion of the semiconductor substrate is seated thereon; and forming a plurality of holder rings by cutting the holder rings from the holder substrate in such a manner that each holder ring is matched to a disposal interval of the semiconductor substrates in the boat.

Abstract: A sterile enclosure contains a transfer module defining a window. A port covers the window to maintain the inside of the enclosure as a sealed and sterile environment. A sliding, heated cutting element mounted on the port serves to sterilize and sever a portion of a sterile transfer bag assembly attached to the port. Preferably, the excised portion of the sterile transfer bag assembly is affixed to the port when the port opens. The sliding cutting element remains extended and heated to prevent contamination when the port is open. Further, a heating element is mounted about the window in order to sterilize around the opening when the port is open.

Abstract: The present invention is a vertical-type heat processing apparatus comprising: a heat processing furnace; a holder capable of being loaded into the heat processing furnace and unloaded therefrom, with holding therein a plurality of objects to be processed at predetermined vertical intervals in a tier-like manner; a transfer mechanism including a base table capable of vertically moving and rotating, and a substrate supporter capable of horizontally moving on the base table; and a controller for controlling the transfer mechanism; wherein the transfer mechanism is adapted to transfer an object to be processed between a container containing a plurality of objects to be processed at predetermined intervals, and the holder; the substrate supporter includes a to-and-fro driving part for driving the substrate supporter in the horizontal direction, and a pitch-change driving part for changing a pitch at which the objects to be processed are supported; the controller is adapted to monitor at least one information of p

Abstract: A device for pushing the contents of a coke oven chamber includes a pusher ram head with pusher rams mounted there behind, wherein guiding plates or aprons are mounted to a pusher ram head which avoid a simultaneous pressing-in of air into the coke oven chamber, thus preventing a non-desired cooling-off of the coke oven chamber during pushing. The aprons also prevent the pusher ram and the rearward side of the pusher ram head from excessive heat burdens. The aprons can also serve for protecting measuring devices mounted in the enclosure. The aprons can be fabricated from a heat-resistant metallic or ceramic material. The aprons or the pusher ram head can also be provided with a heat-resistant or heat-reflecting coating or with heat-resistant or heat-reflecting tiles. Also shown is a method for pushing of coke oven chambers by applying the inventive device.

Abstract: A charging device for a shaft furnace, which includes at least one charging hopper having a discharge orifice arranged in a position off-centre with respect to the central axis of the shaft furnace, and a material distribution device arranged below this hopper. The material distribution device includes a feed channel coaxial with the central axis of the furnace and a rotatable, pivotable chute, which is arranged below the feed channel for distributing a charge in the shaft furnace. The charging device also includes a connecting box in the shape of a funnel, arranged between the material distribution device and the charging hopper. The connecting box possesses a lower central outlet communicating with the charging hopper and at least one upper inlet which is arranged off-centre with respect to the central axis of the furnace and communicates with the discharge orifice of the hopper.

Abstract: The present invention is referred to a method and an apparatus for feeding a pulverized material. The apparatus comprises fuel feeding means to supply pulverized fuel. Flexible means are coupled between the fuel feeding means and dosing means for the filling of the dosing means. The dosing means are closed and pressurized once that the dosing means have been filled. The pulverized material is discharged from the dosing means while controlling the pressurization during the discharge, in order to provide a continuous and constant discharge of the pulverized fuel. The apparatus includes means for detecting a minimum level or weight of pulverized fuel in the dosing means, and means for depressurizing the dosing means once that the minimum level of the pulverized fuel has been reached.

Abstract: Automated systems and methods for adapting semiconductor fabrication tools to process wafers of different diameters are described. In one embodiment, a method comprises providing a semiconductor fabrication tool, placing an adapter ring on a plurality of ring holders via a robotic arm, the plurality of ring holders being operable to support the adapter ring at a vertical distance from a stage heater and the stage heater being movable in a vertical direction, placing a first semiconductor wafer on the stage heater via the robotic arm, the first semiconductor wafer having a first diameter, and moving the stage heater upward to receive the adapter ring from the plurality of ring holders and to cover a portion of the stage heater during processing of the first semiconductor wafer.

Abstract: A closure for silica glass crucible to be mounted on an opening portion of a silica glass crucible is provided with a peripheral edge mounting portion closely adhered to an inner peripheral end of the opening portion.