Abstract: The inside of a vacuum pump is heated by means of a first heating unit to a temperature higher than the temperature at which products of reaction discharged from a process chamber are separated, and the inner surface of an exhaust pipe is heated to a temperature higher than the separation temperature by means of a second heating unit. If a vacuum process is carried out in the process chamber in this state, exhaust gas discharged from the process chamber can pass in a gaseous phase through the exhaust pipe and the vacuum pump without separating its unwanted by-products. Since a trap unit is located on the downstream side of the vacuum pump, moreover, the reaction products and the like can be prevented from adhering to the inside of the vacuum pump so that the maintenance operation is easier, although the conductance of the exhaust pipe is lowered so that the trap unit and the vacuum pump can be reduced in size.

Abstract: A housing for a propulsion system, such as for a plurality of disks, is provided as well as a system and a method for using the same. The housing is shaped to provide a streamlined motion through a fluid, such as air or water. Openings in the housing allow the fluid to flow through the propulsion system. The housing may be attached to a shaft in a motor or engine to provide a drive for the propulsion system contained therein.

Abstract: A turbine comprising a first housing having a first shaft rotatably mounted in the housing; a plurality of first spaced apart discs having an outer diameter and mounted on the first shaft and rotatable therewith, each first disc having a radial inner end defining an inner opening, a radial outer end and a pair of opposed surfaces extending therebetween; a second housing having a second shaft rotatably mounted in the housing; and, a plurality of second spaced apart discs having an outer diameter and mounted on the second shaft and rotatable therewith, each second disc having a radial inner end defining an inner opening, a radial outer end and a pair of opposed surfaces extending therebetween, the outer diameter of at least some of the first spaced apart discs is less than the outer diameter of at least some of the second spaced apart discs.

Abstract: A blade and a series of blades are provided for implementation into a device, such as, for example, a turbine, a fan, a pump or the like. The blades are substantially flat and include at least one rib or irregularity peripherally formed in the blade equidistantly from the center of the blade. The blade may include one or more ribs and the ribs are formed equidistantly on each blade such that a plurality of blades may be stacked closely without interference from the ribs formed in adjacent blades.

Abstract: One or more improved pump impellers are provided and are rotationally supported in a pump having one or more stages. The improved impeller comprises a fluid induction core of flow passages spiraling axially about the impellers rotational axis and a stack of circular disks extending radially and concentrically from the induction core. The stack of disks is preferably a frusto-conical stack with the disks at the downstream end of the impeller having a lesser radial extent than do the upstream disks so that incrementally less fluid issues from each successive radial flow passage between adjacent disks thereby reducing head loss in the issuing viscous fluid flow and increasing pumping efficiency. Increased pump efficiency permits one to provide a conical pump housing profile about each impeller which corresponds with the conical stack, thereby diminishing the fluid flow area and increasing the discharge pressure and flow capacity of each pumping stage.

Abstract: An apparatus comprises a longitudinally extending housing having a fluid inlet port and a fluid outlet port; a plurality of spaced apart members rotatably mounted in the housing to transmit motive force between fluid introduced through the fluid inlet port and the members; each member having a pair of smooth opposed surfaces, each surface having an inner portion and an outer portion; and, at least one of the members having a width that is increased at at least one discrete location to alter the fluid flow over the surface of that member.

Abstract: In the invention, deposits that disturb electrical discharges between the rotor and the stator inside a turbomolecular pump with a plurality of stages on magnetic or gas bearings are prevented from forming by injecting an active gas at at least one suitable location inside the pump via at least one gas intake pipe, which active gas reacts with the deposit-generating molecules and forms gaseous compounds that are removed by the pump. Such deposits are thus prevented from forming without disturbing the conductance of the pump or adversely affecting the atmosphere present in the enclosure to which the pump is connected.

Abstract: A turbomolecular pump comprising a rotor and a stator housed in a casing and an exhaust mechanism is formed between the rotor and the stator; wherein the turbomolecular pump has a valve body for opening and closing a suction port provided in the casing, and a valve driving mechanism for opening/closing-driving the valve body, wherein the valve driving mechanism is provided integrally with the turbomolecular pump.

Abstract: An apparatus for transporting particulate material includes a housing having an inlet for receiving particulate material and an outlet through which particulate material is discharged in a moving dynamic mass. A rotor is supported for rotation within the housing, adjacent a stationary glide surface. The rotor has a plurality of disks spaced apart by hub sections and defining a plurality of transport channels between the disks, adjacent the glide surface. Each transport channel extends between the inlet and the outlet. The rotor is rotated while particulate material is fed into the housing inlet. The particulate material is received within the transport channels and, by the action of the rotating disks and the stationary glide surface, the particulate material in each of the transport channels interlocks with the disk walls and bridges across transport channel. The material is transported by the motion of the disk walls and, at the same time, forms a moving dynamic mass.

Abstract: A high-vacuum pump includes a first vacuum pump section and a second vacuum pump section coupled in series and having an interstage region between them. The vacuum pump further includes a housing containing the first and second vacuum pump sections. The housing includes a high conductance peripheral duct surrounding all or part of the interstage region and coupled to the interstage region. The housing defines a first inlet port coupled to an inlet of the first vacuum pump section, a second inlet port coupled to the peripheral duct, and an exhaust port coupled to an outlet of the second vacuum pump section. Examples of high-vacuum pumps according to the invention include turbomolecular vacuum pumps, diffusion pumps and mixed vacuum pumps which include both axial flow stages and molecular drag stages.

Abstract: An apparatus comprising a longitudinally extending housing having a fluid inlet port; a plurality of spaced apart members rotatably mounted in the housing to transmit motive force between fluid introduced through the fluid inlet port and the members and to separate the fluid into at least two fluid streams; and, a fluid outlet port positioned on the housing for receiving each fluid stream.

Abstract: A vacuum pump includes a housing having an inlet port and an exhaust port, a motor disposed in the housing, and one or more vacuum pumping stages disposed in the housing and operationally coupled to the motor for pumping gas from the inlet port to the exhaust port. The motor includes a stator disposed on a central axis and a rotor disposed around the stator. The rotor rotates about the central axis when the motor is energized. The motor may be located at the center of the housing, and the vacuum pumping stages may be disposed around the motor in an annular configuration. The inverted motor configuration facilitates a compact vacuum pump structure.

Abstract: A turbine comprising a first housing having a first shaft rotatably drivingly connected to a second shaft and mounted in the first housing; a plurality of first spaced apart discs mounted on the first shaft and rotatable therewith; a second housing having the second shaft rotatably mounted in the second housing; and, a plurality of second spaced apart discs mounted on the second shaft and rotatable therewith.

Abstract: The present invention relates to a friction vacuum pump having at least one turbomolecular pump stage (2) joined at its pressure side to a screw pump stage (4). In order to improve the pump properties it is proposed that a filling stage (3) be arranged between the turbomolecular pump stage (2) and the screw pump stage (4) that has blades (13) whose length corresponds at the suction side to the active length of the blades at the pressure side of the turbomolecular pump stage (2), and at the pressure side to the depth of the suction-side region of the screw (14) of the screw stage (4).

Abstract: A vacuum pump has a shaft bearing (6) supported in a bearing outer ring (8). In order to improve the damping properties a substantially cylindrical radial supporting ring (7) is provided between the outer ring (8) and an interior surface of a bore (9) in a housing (1). First and second circumferential projections (11, 12) project from opposite edges of cylindrical ring (7) on one side. On its other side, a third circumferential projection (13) is axially arranged between the first projections (11, 12). The first and second projections engage one of the outer race and the bore and the third projection engages the other. The damping of the radial support ring (7) is determined by its radial stiffness which is determined by the stiffness of the material and the distance between the projections (11, 12, 13).

Abstract: A fluid machine comprising a fluid storage tank (1), provided with an inlet (2) and at least with one outlet nozzle (3), and in the area of the outlet nozzle (3) there is mounted, on a holding device (4), at least one rolling rotor (5) represented by a body of a rotary shape.

Abstract: An apparatus comprising a longitudinally extending housing having a fluid inlet port; at leat one plurality of spaced apart members rotatably mounted in the housing to transmit motive force between fluid introduced through the fluid inlet port and the members, the spaced apart members having an upstream end and a downstream end; and, a fluid outlet port extending longitudinally along the housing and having a first end positioned towards the upstream end of the spaced apart members and a second end positioned towards the downstream end of the spaced apart members, the second end of the fluid outlet port radially displaced along the housing from the first end.

Abstract: A vacuum pump comprising at least a molecular drag section and a turbo-molecular section, a rotor common to both sections and a stator common to both sections. The turbo-molecular section is positioned wholly within an envelope defined by the molecular drag section.

Abstract: A turbo-molecular vacuum pump comprising alternate first and second stages. The first stage comprises a plurality of blades arranged in an annular envelope with the blades depending radially from a disc and being angled about radial lines out of the plane of the disc. The second stage comprises a plurality of coaxial, concentric frusto-conical members arrayed in a plane parallel to that of the annular envelope such that at least some of the blades and at least some of the frusto-conical members are axially aligned and are adapted to remain so during rotation of one stage relative to the other.

Abstract: A vacuum pump comprising a plurality of vacuum stages and having a first pump inlet through which gas can pass through all the pump stages and a second inlet through which gas can enter the pump at an interstage location and pass only through subsequent stages of the pump, wherein the pump stages prior to the interstage are sized differently to these stages subsequent to the interstages such that the pump overall suits the pressure requirements and pumping capacity of the different systems attached to the first and second inlet, respectively.

Abstract: A vacuum pump is provided with back-up bearings in addition to magnetic bearings for supporting its rotor with respect to the pump housing. The rotor has a hollow rotary shaft extending backwards enclosing in its inner space a forwardly protruding tubular shaft affixed to the pump housing, and another cylindrical member affixed to the rotor protrudes backward inside this fixed tubular shaft. One set of back-up bearings is provided on the outer surface of the fixed tubular shaft spaced from the inner surface of the rotor shaft and another set of back-up bearings is provided on the inner surface of the fixed tubular shaft, spaced from the protruding cylindrical member. The back-up bearings thus positioned can be made smaller for improved dynamic emergency capabilities.

Abstract: A turbomolecular pump evacuates gas in an apparatus (or a chamber) by means of a rotor having blades and/or spiral grooves which rotates at a high speed. The turbomolecular pump includes a casing housing a rotor and a stator therein, a pumping section comprising the rotor and the stator, a valve element capable of opening or closing an intake port of the casing, and a supporting member for supporting the valve element. The supporting member extends through at least one of the rotor and the stator. The turbomolecular pump further includes an actuating mechanism for actuating the valve element, and the actuating mechanism is provided at a side opposite to the intake port with respect to the rotor.

Abstract: High velocity vacuum pump, such as turbomolecular pump, drag pump, centrifugal pump or the like, comprising a stator (10) and a rotor (18,43,53), which is axially and radially suspended with respect to the stator (10) by magnetic bearings (27). The vacuum pump may comprise two at the same rotor provided, parallelly acting pump portions, each one comprising two pumping steps. The rotor may be cylindrical and rotates around an inner stator shaft and within an outer stator portion. In that way, one pumping step (22) is formed between the inner stator shaft and the rotor and another pumping step (24) between the outer stator portion (10) and the rotor. The magnet bearing comprises at least one rotation symmetric magnet (27) and is disposed to give rise to a rotation symmetric magnetic field which is centered around the rotational axis.

Abstract: The invention concerns a friction vacuum pump (1) with an inlet (11), an outlet (20) and a rotor (6, 7) and stator (14, 21) which are located between the inlet (11) and the outlet (20) and carry blades (7 and 8), respectively. In order to design an intermediate inlet (28), which passes into an annular channel (31) surrounding the stator and rotor blades (7 and 8), respectively, so that it is simple and effective, the invention proposes that the stator (21) consists of annular blades or blade segments (25) and annular spacers (22, 23, 24), the outer edges (26) of the annular blades or blade segments (25) being located between the spacers (22, 23, 24) and at least one spacer (23, 24) located at the height of the annular channel (31) having perforations (32) in it.

Abstract: A paper machine has a high pressure liquid pump for use with a liquid slitter for slitting a fiber material web. The high pressure liquid pump includes a pump shell having an axis of rotation and an annular smooth inwardly facing surface. The inwardly facing surface is configured for carrying a film of liquid thereon. A hydraulic shoe having an outer convexly curved working face is in close running engagement with the inwardly facing surface. A pivotal arm is connected with the shoe and positions the shoe relative to the inwardly facing surface. The arm is movable toward and away from the inwardly facing surface. A hydraulic pressure member is engaged with the arm for urging the shoe toward the inwardly facing surface dependent upon a hydraulic pressure therein.

Abstract: The present invention relates to a rotor of a vacuum pump comprising a rotatable shaft and a plurality of spaced apart parallel rotor disks secured to said rotatable shaft, such rotor being provided with a corrosion-resistant protective coating formed by a layer of polymeric material. The protective coating of the present invention may apply to any of the stationary or rotational parts which are disposed within a pump body and may be exposed to corrosive gases.

Abstract: The invention is concerned with an electronic control unit (1) for the electric motor of a vacuum pump (100) comprising a suction port (119), an exhaust port (120) and pumping stages formed by rotor disks (113, 114) secured to a rotating shaft driven by an electric motor, and stator rings (115, 116) secured to a pump housing (101) and cooperating with said rotor disks. The unit (1) comprises: a housing (2), first leads (50) for electrically feeding the control unit, second leads (60) for electrically feeding the motor of the pump (100), a circuit for generating a voltage adapted to feed the motor, the circuit generating drive signals (A, B, D, E, G, H, PWM) and providing at least a pulsating signal (PWM the width of which for combining said drive signals can be modulated, and means (201, 202, 203) for combining the, pulsating signal (PWM) with at least one of the drive signals (A, D, G) so as to change the rms voltage of said voltage system.

Abstract: A double-flow gas friction pump including a shaft supported in the pump housing and extending at a right angle to an axis of the suction port, a rotor fixedly secured on the shaft for joint rotation therewith, a stator fixedly secured in the housing and cooperating with the rotor for pumping gas, and a discharge element located in the suction region of the pump and operatively connected with the shaft for joint rotation with the shaft and the rotor for conducting the gas from the suction port directly to the stator and the rotor.

Abstract: A turbo molecular pump comprising a plurality of moving blades and stationary blades arranged alternately in the axial direction in a pump casing having a gas suction port and exhaust port, a thread groove pump stage disposed on the exhaust side of the moving and stationary blades, and a spacer for fixing the position intervals of the stationary blades, characterized in that a heating apparatus includes a radiating plate is provided in a gas passage of the thread groove pump stage, and the radiating plate is connected to a heating portion located on the outside of the pump by a good heat conductor. The heating apparatus heats the gas in the thread groove pump stage to a temperature above the gas sublimation temperature.

Abstract: The present invention relates to a rotor of a vacuum pump comprising a rotatable shaft and a plurality of spaced apart parallel rotor disks secured to said rotatable shaft, such rotor being provided with a corrosion-resistant protective coating formed by a layer of polymeric material.

Abstract: A molecular drag pump including a stator and a rotor supported in the stator using two ball bearings at least one of which presses against at least one bearing surface of the stator serving as an axial abutment for the rotor, wherein the contact between the ball bearing and the bearing surface operates in bending and not in shear.

Abstract: A gas friction pump including a rotor located in the pump housing and formed of a plurality of coaxial first cylindrical elements, and a stator located in the housing and formed of a plurality of second cylindrical elements coaxial with the first cylindrical elements and surrounding respective first cylindrical elements, with the first cylindrical elements or the second cylindrical elements having smooth inner and outer surfaces, and another ones of the first cylindrical elements and the second cylindrical elements have a plurality of parallel discharge channels formed on their inner and outer surfaces, arranged one beneath another and separated by a respective plurality of webs, the parallel discharge channels defining a plurality of parallel discharge chambers forming a plurality of parallel operating pumping chambers for pumping gas form the suction port to the discharge port.

Abstract: The inside of a vacuum pump is heated by means of a first heating unit to a temperature higher than the temperature at which products of reaction discharged from a process chamber are separated, and the inner surface of an exhaust pipe is heated to a temperature higher than the separation temperature by means of a second heating unit. If a vacuum process is carried out in the process chamber in this state, exhaust gas discharged from the process chamber can pass in a gaseous phase through the exhaust pipe and the vacuum pump without separating its unwanted by-products.

Abstract: A propulsion system for accelerating and directionally controlling a fluid having a continuous dynamic surface for circulating through a fluid from an entrainment region where fluid is introduced to the dynamic surface to a thrust region where fluid is discharged from the dynamic surface. The dynamic surface accelerates the fluid proximate to the surface so as to produce a layer of accelerated fluid from the entrainment region through the thrust region. A motor is operatively connected to the dynamic surface for driving the dynamic surface. A separator plate is positioned next to the dynamic surface. The separator plate has a leading edge for stripping the layer of accelerated fluid from the dynamic surface, and a substantially flat thrust face adjacent to the leading edge for directing the accelerated fluid in a desired direction.

Abstract: A vacuum pump of the regenerative type comprising a rotor and a stator body in which the rotor is adapted for rotation. The rotor has a series of blades positioned in an annular array on a side of the rotor. The stator has an annular channel within which the blades can rotate having a cross-sectional area greater than that of the individual blades except for a small part of the channel which has a reduced cross-section providing a close clearance for the blades. Further, the rotor has at least two series of blades positioned in concentric annular arrays on a side of the rotor and the stator has a corresponding number of channels within which the blades of the arrays can rotate. The channels are linked to form a continuous passageway through which gas being evacuated by the pump can pass.

Abstract: In order to reduce the noise made by a foam flotation separator working on the dispersion apparatus principle and maximise the air supply, the foam flotation separator is designed so as to comprise a dispersion pump (2) which draws in water and a gas such as air and/or ozone, a reaction chamber connected on the delivery side, a collector (5) on the upper end of the reaction chamber (4) and an expanded section (15) at the lower, outlet end of the reaction chamber (4).

Abstract: An integrated air mover/heatsink for cooling semiconductor chip packages supports disks to rotate within the heat sink parallel to a heat receiving surface so that the heat sink acts as an enclosing housing for the disks. The heat sink preferably defines enclosing aperatures for respective disks which are closely spaced and coextensive heat with transfer surfaces over which air is forced by rotation of the disks. By so arranging the disks and enclosing aperature walls parallel to the heat receiving surface, a forced intimate flow of air over heat sink surfaces is achieved in a low profile configuration. Alternative implementations provide cooling for multiple chips and various arrangements for intake and exhaust of cooling air.

Abstract: A vacuum pump assembly which comprises at least two cylinders of different diameters and arranged coaxially relative to each other to define an annular space therebetween and a helical member positioned within the space to define a helical path between the cylinders. Rotation of the cylinders is effected relative to the helical member, or vice versa, about their longitudinal axis.

Abstract: A spin vane for burners and over fire air ports in a furnace comprise a sheet-like vane element having a base and an extension extending perpendicularly off the base on the low pressure side of the vane element. The extension reduces the formation and propagation of vortices on the low pressure side of the vane, increasing flow efficiency and reducing pressure loss across the spin vanes.

Abstract: A molecular drag pump comprising a rotor and a stator, the pump being of the type including at least alternating finned stages of the rotor and of the stator, and in which the rotor is bell-shaped, while the stator includes at least one external portion carrying the stator fins and at least one internal portion penetrating into the bell-shaped rotor, said internal portion closing the pump at its delivery end and including a flange-forming external peripheral rim, wherein said external portion of the stator carrying the stator pins is made up of two half-stators that meet in a diametral plane, each half-stator comprising a single piece and being positioned axially by having a bearing surface situated at its end remote from its suction end that hooks into a complementary circular groove of said internal portion of the stator, and wherein the outside diameter of the first finned stage of the rotor at its suction end corresponds, ignoring operating clearance, to the outside diameter of the external portion of the

Abstract: A molecular drag compressor includes a rotor disk and a stator that defines a tangential flow channel having an inlet and an outlet. A stationary baffle is disposed in the tangential flow channel adjacent to the outlet. The baffle is spaced from the rotor disk by a gap. A surface of the baffle facing the rotor disk has surface irregularities including peaks for defining the gap and valleys between the peaks for accumulation of particles. The surface irregularities may form a series of grooves. The molecular drag compressor is preferably utilized in a high vacuum pump which includes an axial turbomolecular compressor and a molecular drag compressor. Additional features which limit the effect of particulate accumulation in molecular drag compressors are disclosed.

Abstract: A friction vacuum pump (1) is provided with pump sections of different designs, of which the pump section on the inlet side consists of turbomolecular pump stages (14, 15) and a further pump section of Siegbahn stages (16, 17) with spiral grooves (19), whereby the active pumping surfaces of the Siegbahn stages are formed by facing surfaces of an annular rotor disc and an annular stator disc (16, 17). To simplify the production of such a pump, it is proposed that the annular stator discs (16) have spiral grooves (19).

Abstract: A turbomolecular pump comprises a pump body housing a gas inlet and a gas exhaust port and a plurality of pumping assemblies with interleaved rotors and stators located within the pump body. The rotors are secured to a rotating shaft that is supported by at least one rotatable support and driven by a motor. At least one stator of the pumping assemblies is provided with at least one spiral channel adapted to push and eject the gases from an area proximal to the shaft toward an area distal from the shaft and vice versa.

Abstract: A friction pump, which is equipped with at least one actively controlled magnetic radial bearing, wherein, in order to satisfy the extreme requirements necessary through the tight tolerances of pump elements and an emergency bearing, the high rotational speed and the magnetic support, a special control arrangement for the cooperation of rotor, positional sensors and the magnetic bearing control loop so that a safe operation of the pump at extreme requirements is assured in a simple manner without the use of any additional constructional elements.

Abstract: A dry turbo vacuum pump has a multistage circumferential impeller supported on a shaft, and a stator which cooperates with it to form a multistage peripheral flow pump. A centrifugal pump arranged at an inlet side of the peripheral flow pump is also mounted on the same shaft, so that gas sucked from the inlet is discharged to the atmosphere from the peripheral flow pump. The multistage peripheral flow pump and at least one stage of the centrifugal pump are integrated.

Abstract: The invention relates to a friction vacuum pump (1) with a housing (2, 3), a rotor (8) and a rotor bearing (9) which is supported in the housing (2, 3) via a sleeve-like support (21). In order to obtain a precise support which nonetheless permits slight oscillations in the rotating system, it is proposed that the sleeve-like support (21) is in turn supported in the housing (2, 3) via several, preferably three, substantially axially extending rods (26).

Abstract: A rotary turbine employs rotors that are rotated primarily by the frictional forces of a pressurized medium flowing through a gap that separates the rotors from the stationary housing. The rotors are coupled to a source of pressurized medium that creates a medium flow through the gap. The frictional forces between the flowing medium and the rotors create a torque that rotates the rotors. A compressor is formed of a rotor assembly that includes first and second counter-rotating rotors having substantially smooth surfaces. The rotors are separated by a gap that allows the medium to flow therethrough, with the surface of at least one of the rotors contacting the medium, such that the flow of the medium through the gap is induced by surface friction between the contact surface and the medium.

Abstract: A thread groove type vacuum pump in which the gap between a rotor and a stator is not subjected to any influence of the rotor temperature and thus the pumping performance does not deteriorate during plasma combustion in a nuclear fusion reactor. The thread groove pumping portion is formed as a circular cone so that the expansion and contraction of the rotor occurs along the generatrix of the circular cone. The pump exhibits supreme pumping performance throughout the whole running mode of the vacuum pumping system of the nuclear fusion reactor because the gap between the rotor and the stator is kept constant despite changes of thermal expansion due to the temperature change of the rotor caused by the different gas loads.

Abstract: A vacuum pumping apparatus is presented having a Peltier element based device to provide a dual role of cooling for bearings/drive-motor and heating for sections prone to depositing reaction products. A housing (7) having the bearing and motor sections is provided with a Peltier element based device (20) to absorb the waste heat generated in the bearings and the drive motor, and transfer the waste heat to another section (17) of the apparatus to be released. The released heat may be used to heat that section of the device to facilitate vacuum processing, wherein reaction products are prone to sublime and deposit.

Abstract: An evacuation apparatus and method using a turbomolecular pump having a rotor provided with a plurality of rotor blades and a spacer provided with a plurality of stator blades so that gas molecules are sucked in from a suction port, compressed and discharged from an exhaust port of the turbomolecular pump is disclosed. A heat exchanger is provided at the suction port side of the turbomolecular pump to freeze-trap gas molecules from being cooled by a helium refrigerator.The gate valve is disposed upstream of the heat exchanger and is provided in a suction pipe which extends between the vacuum vessel and the turbomolecular pump. In exhausting the vacuum vessel, the gate valve is opened and, in this state, the turbomolecular pump and the helium refrigerator are run.