Abstract: A device for metering out a paste-like material includes a connector for connecting the mouth of a flexible container to a positive-displacement pump, means for compressing, over a limited area, a bag filled with the paste so that the paste is acted on at this point by shear forces and at the same time squeezed towards the mouth of the bag. A suction pump is located behind the positive-displacement pump. The devices makes it possible to meter highly viscous pastes from flexible bags simply and without interruption, even when the paste includes trapped air.

Abstract: High velocity vacuum pump, such as turbomolecular pump, drag pump, centrifugal pump or the like, comprising a stator (10) and a rotor (18,43,53), which is axially and radially suspended with respect to the stator (10) by magnetic bearings (27). The vacuum pump may comprise two at the same rotor provided, parallelly acting pump portions, each one comprising two pumping steps. The rotor may be cylindrical and rotates around an inner stator shaft and within an outer stator portion. In that way, one pumping step (22) is formed between the inner stator shaft and the rotor and another pumping step (24) between the outer stator portion (10) and the rotor. The magnet bearing comprises at least one rotation symmetric magnet (27) and is disposed to give rise to a rotation symmetric magnetic field which is centered around the rotational axis.

Abstract: A pump for precision metered pumping of high viscosity materials. A pump housing has a material inlet and a material outlet, a drive gear and at least one cooperating driven gear for receiving material from the material inlet and pumping a metered amount of material to and out of the material outlet. A motor rotates the drive gear, and an impeller also driven by the motor feeds material under positive pressure into the material inlet where the material is metered and pumped downstream into the outlet.

Abstract: A first vacuum pump (14) is connected to a vacuum chamber (5) by a primary intake line (13) having a first vacuum valve (4) therein. A second vacuum pump (15) is connected to the output of the first vacuum pump (14) by a connecting line (20) having a second vacuum valve (12) therein. A blowout valve (17) is connected to the connecting line (20) between the first pump (14) and the second valve (12). A secondary intake line (19) having therein a third vacuum valve (13) is connected between the vacuum chamber (5) and the intake of the second vacuum pump (15).

Abstract: A fuel pump (10) for supplying fuel to an internal combustion engine employs at least one composite pumping plunger (43) disposed within a plunger bore (46) for reciprocation therein. Each composite plunger comprises at least a high-pressure plunger element (48), which is in contact with a high-pressure fuel charge to be delivered by the pump, and an abutting leak-off plunger element (47) disposed between the high-pressure element and a plunger actuating member (50, 52). The plunger elements of each composite plunger are stacked in the direction of reciprocation such that the abutting plunger elements form confronting end faces. The confronting end face of at least one of the elements in each composite plunger is contoured and the confronting end face of the abutting element is non-complementary in shape.

Abstract: Vacuum pumping apparatus includes a non-scroll type auxiliary pump and a scroll pump disposed in a single housing. The auxiliary pump and the scroll pump are connected in series and are driven by a common motor. Typically, the auxiliary pump has a relatively high pumping speed and the scroll pump has a relatively high compression ratio. The auxiliary pump may be a regenerative blower, a roots-type blower or a screw-type blower. When a co-rotating scroll pump is utilized, a regenerative blower may be formed at or near the outer periphery of a disk on which the non-orbiting scroll blade is mounted. In another configuration, first and second scroll pumps are disposed within a housing. The scroll blade sets of the first and second scroll pumps have different orbiting radii. Scroll pump leakage may be reduced by forming a closed-loop seal around the inlet region of the scroll pump and connecting the inlet region to an intermediate pressure.

Abstract: The invention provides an apparatus for optimizing performance of a fluid pump having a supply port and a pressurized output port, comprising: a pressurized supply of a first fluid; a variable regulator coupled to the supply having a variable pressure output; and a second pump driven by the variable pressure output for impelling a second fluid into the supply port of the fluid pump.

Abstract: A recovery system for recovering hydrocarbon vapor given off by motor vehicle tanks while they are being filled with liquid fuel via at least one dispensing pipe. According to the invention, said recovery system comprises a recovery pipe associated with said dispensing pipe, a power pump placed on said recovery pipe, and a metering pump driven by a motor at an angular velocity that is substantially proportional to the volume flow rate of liquid fuel delivered by the dispensing pipe, said metering pump being mounted in series with said power pump via a differential pressure expander-regulator suitable for maintaining a pressure difference that is small between the outlet and the inlet of the metering pump so as to obtain a vapor volume flow rate that is substantially proportional to the angular velocity imparted by said motor. Application to dispensing liquid fuel.

Abstract: An apparatus for low pressure chemical vapor deposition for fabricating a semiconductor device comprises a group of reaction chambers, a group of high-vacuum pumps connected to the reaction chambers, a group of gate valves connected to the high-vacuum pumps, and a low-vacuum pump connected to the gate valves. There are fewer gate valves than high-vacuum pumps. A method for fabricating a semiconductor device using the above apparatus includes the sequence and duration of opening gate valves, injecting reaction gases, and pumping with the low vacuum pump. According to the present invention, since the number of pumps is reduced, the cost for installation, operation and maintenance of the semiconductor device fabrication apparatus is reduced.

Abstract: A hydraulic axial piston machine, such as a high-pressure water discharge pump, may include a first subassembly having a plurality of cylinder-piston units arranged at a distance from, and either parallel to or at an acute angle to, a central axis. The cylinder-piston units may be circumferentially offset, relative to each other, around the central axis by a predetermined angle. The hydraulic axial discharge pump may also include a second subassembly which may be coaxially positioned and arranged for rotation around the central axis on a drive shaft and which may have a force-transmitting connection with the cylinder-piston units to receive oscillating drive forces of the cylinder-piston units. The drive shaft, which may include at least two rotationally coupled longitudinal sections, may extend coaxially to the central axis from its drive input end through at least one of a corresponding central opening of the first subassembly and of the housing to a head-subassembly.

Abstract: A positive displacement vacuum pump, in which a plurality of rotors are driven into synchronous operation by independent motors, uses a rotational position sensor making use of the electromagnetic induction effect for obtaining rotational position information for the individual shafts. The rotational position sensor is cooled.

Abstract: There is disclosed an apparatus for pumping multiphase fluids in oil field production, particularly a twin-screw pump for providing a large pressure boost to high gas-fraction inlet streams. The pump includes a housing having an internal rotor enclosure, the enclosure having an inlet and an outlet and a plurality of rotors operably contained in the enclosure. Each rotor has a shaft and a plurality of outwardly extending threads affixed thereon, the rotors being shaped to provide a non-uniform volumetric delivery rate along the length of each rotor. The pump also has means for rotating the rotors, whereby a fluid stream entering from the inlet is subjected to a pumping action to transport the fluid stream to exit the rotor enclosure through the outlet. In one embodiment, the rotors have a plurality of threaded pumping stages separated by unthreaded non-pumping chambers.

Abstract: A fluid dispensing system is provided which has first diaphragm pump means, a filter connected to receive the discharge of said first pump, and accumulator/second diaphragm pump means connected to receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independently actuate each of the diaphragm pumps, providing accurate, controllable and repeatable dispense of the subject fluid.

Abstract: An evacuation system (1) with exhaust gas cleaning, consists of at least one vacuum pump unit (4) and at least one cleaning unit (10) in series as to enable the continuous flow of fluid media supplied by the vacuum pump unit (4). In order to prevent condensates in a gas connection pipe (9) and in order to decrease the surface area, the at least one vacuum pump unit (4) and the at least one cleaning unit (10) are compressed into substantially one component, and the gas connection pipe (9) which runs between the vacuum pump unit (4) and the cleaning unit (10) is run in the shortest possible path and is, as a result, kept at a temperature which is above the condensation temperature of constituents in the fluid media capable of condensation, essentially without the addition of external heat, with only the compression heat of the vacuum pump unit (4). Further, a central control unit (16) for the vacuum pump unit (4) and the cleaning unit (10) can be placed over the at least one vacuum pump unit (4).

Abstract: An aspiration and irrigation system of an ophthalmologic device for performing surgical operations on an eye of a living being, includes an irrigation unit for conducting a fluid under pressure to the eye via a first passageway, and an aspiration unit for simultaneous removal of fluid and/or tissue from the eye via a second passageway. The aspiration unit includes a two-stage pump system with a primary vacuum pump producing suction to effect a withdrawal of fluid and/or tissue from the eye through the second passageway and a secondary vacuum pump positioned downstream of the primary pump in a third passageway in communication with the second passageway, for boosting the suction pressure produced by the primary pump.

Abstract: The pump includes two pistons 10 each sliding in a cylinder 11. These are fed by a screw 21 through ports 12. Upon delivery, a rotary valve 6 turning in a bearing 1A2 in succession closes off and uncovers the passages 1A1 from the cylinders. This rotary valve 6 includes an axial bore 61 and a slot 62 through which the material collected from the cylinders passes in the direction of the outlet orifice of the pump.

Abstract: A method and apparatus for compressing a gas by adiabatic compression and isothermal compression. In a preferred embodiment, the gas is first adiabatically compressed from a first state to a second state and then isothermally compressed to a third final desired state. The disclosed two stage compression allows rejection of the heat generated during isothermal compression at a somewhat elevated temperature so that the radiator or other heat exchanger used to reject this heat may be significantly smaller than would be needed if the gas were isothermally compressed starting from the first state.

Abstract: A vacuum pumping stand for the cyclic pumping-down of containers and for maintaining an operating vacuum in the containers, for the pumping-down of the container. The vacuum pumping stand has a first and a second vacuum pump which are arranged in series and form a first and a second pumping stage. The first vacuum pump is a radial flow compressor with a controllable throttle which is located in the intake pipe to the first vacuum pump. The second vacuum pump is a rotary compressor or a water ring pump. The second vacuum pump is located in a vacuum pipe in parallel to an outlet pipe of the first vacuum pump and is connected with its inlet at a branch-off with the outlet pipe. A control part is situated in each of the outlet pipe and the vacuum pipe downstream of the branch-off for directing the delivered volume at higher pressures from the first vacuum pump directly or at lower pressures from the first vacuum pump by way of the second vacuum pump 13 to the outlet 10 of the vacuum pump stand.

Abstract: A two-stage positive displacement pump (1) is used in particular to operate in conjunction with a turbomolecular pump (2) that can be placed ahead of it in series. The two-stage positive displacement pump (1) is configured as a hybrid pump (3) that has on the medium-entry side a reciprocating pump (5) with a comparatively large displacement area (6), whereby its piston-cylinder space (7) is sealed off with respect to the crank area (8) by means of a sealing membrane (9). Also as a part of this two-stage positive displacement pump (1) which forms the hybrid pump (3), there is placed in series behind the reciprocating pump (5) a diaphragm pump (10), whose displacement area (11) is noticeably smaller compared to that of the reciprocating pump (5).

Abstract: A device for delivering fuel from a storage tank to the engine of a motor vehicle, having a two-stage feed pump driven to rotate by an electric drive motor. The preliminary stage of the feed pump is embodied as a side channel pump whose partially ring-shaped supply conduit has in its pump course a cross sectionally reduced region, which is constituted by means of a reduction of the conduit depth and in which the fuel flowing through the supply conduit is maintained at a constant pressure level so that the length of the supply conduit effective for a pressure increase can be reduced to achieve a quick increase of delivery pressure.

Abstract: A turbo vacuum pump for compressing a low-pressure gas to discharge the compressed gas into atmosphere comprises pump stator having a gas flow passage comprising a plurality of annular flow passages on an inner surface thereof arranged stepwise diameters of which become smaller toward downstream and passages intercommunicating with adjacent annular flow passages and a gas discharge port communicated with one of the plurality of annular flow passages disposed at the most downstream. The pump stator includes a cylindrical spiral grooved pump impeller and a plurality of peripheral flow pump impellers facing the annular flow passages provided downstream of the cylindrical spiral grooved pump impeller and having stepwise diameters which become smaller toward downstream to form a peripheral flow pump stage.

Abstract: An apparatus for processing materials, such as mixing or homogenizing fluids or dispersing a fluid in a viscous material, comprises a housing having bores and at least one inlet port and an outlet port disposed in the housing and in fluid communication with the bores. A pressure mechanism is disposed outside the housing and is in communication with the inlet port for introducing the materials under pressure to the bore and for forcing the materials through the bores to the outlet port. A rotor is disposed in each bore. The rotors do not contact each other. Each rotor has teeth, and the teeth of one rotor mesh with the teeth of an adjacent rotor so that the materials are squeezed in the space between two adjacent teeth of one rotor and the meshing tooth of the other rotor to impart stretching flow to the materials and to expel the materials from the interstices between the teeth of the one rotor and the other rotor.

Abstract: A vacuum pump includes a plurality of rotors accommodated in a housing, a plurality of bearings for supporting the shafts of the rotors, respectively, a fluid-suction opening and a fluid-discharge opening formed in the housing, and a motor for driving at least one of the rotors. The pump has a first pump structure section for suction and discharge of gas, the pressure of which is in a viscous flow region, by utilizing change in volume of a space formed by the rotors and the housing. A second pump structure section is provided for transporting gas, a pressure of which is in an intermediate flow region, and gas, the pressure of which is lower than a pressure of the intermediate flow region, by utilizing movement of the space from a suction side to a discharge side of the second pump structure section.

Abstract: A method and apparatus are disclosed for minimizing the increase of entropy of an adiabatic enthalpizer by means of a thermal sweep insulation system which surrounds at least a portion of the adiabatic enthalpizer and through which the working fluid for the adiabatic enthalpizer passes whereby the fluid both causes the thermal sweep insulation system to operate and the fluid is pre-enthalpized. Examples of adiabatic enthalpizers include but are not limited to compressors, expanders, devices to heat and expand a gas, Roots blowers, ammonia absorption chambers, etc.

Abstract: A fluid rotating apparatus includes a plurality of rotors accommodated in a housing, at least one of the rotors having its outer diameter different from that of the other of the rotors. Bearings are provided for supporting rotary shafts of the plurality of rotors. A fluid suction port and a fluid discharge port are formed in the housing. A motor is provides for rotating at least one of the plurality of rotors, and a control system for synchronously controlling the plurality of rotors in a contactless manner is provided for each rotary shaft of the plurality of rotors.

Abstract: Disclosed is a pump device for pastry or paste-like media. The medium is located in a container and within the container a cover is lowered under the influence of a pressure device. The cover has on its underside, inclined surfaces which are inclined in the direction of a suction opening. The pump device allows a dependable conveyance of the medium, even in an unfavorable relationship of the suction pressure and the viscosity of the medium, by using a conveyor device within the container which helps move the medium.

Abstract: A fluid rotary apparatus includes rotors accommodated in a housing, driving shafts on which the rotors are mounted, upper and lower bearings for rotatably supporting upper and lower portions of each of the shafts, fluid suction and fluid-discharging openings formed in the housing, motors adapted for independently and synchronously driving each of the shafts, rotation-detecting devices for detecting the rotational angle and/or the number of rotations of each motor, contact-preventing gears for contacting each other before the rotors contact each other, and a positive displacement pump structure section sucking and discharging fluid by utilizing a closed space formed by the rotors and the housing and controlling the motors in synchronous rotation thereof in response to signals outputted from the device.

Abstract: A unified fuel pump assembly combines a vane-type pump and a booster stage for the inlet of the vane-type pump, in a unitary structure to substantially reduce "windage" losses caused by relatively moving parts. The unified structure also includes an electric motor subassembly to provide motive power, and a liquid ring pump, which helps to process air bubbles through the fuel pump, is coupled to the electric motor rotor to further avoid "windage" losses. The vane type pump relies on the use of a central shaft capable of having a substantially uniform and relatively large diameter from end to end.

Abstract: A device for producing compressed air arranged to suction air from the atmosphere an increase the pressure of the suctioned air by a turbo-supercharger, to cool the air at high temperature by passing the air through an intercooler and to compress the air to a required pressure by an oil-free screw compressor having an air inlet port connected to the intercooler. The compressed air discharged from the compressor is cooled by coolers and then delivered to a user side.

Abstract: A multi-stage automotive fuel pump includes a casing and motor located within the casing for driving primary and secondary pumping sections, with the primary and secondary pumping sections sharing a common wall which axially separates primary and secondary rotary pumping elements and which houses a fuel transfer for moving fuel from the primary into the secondary pumping sections in a manner which avoids generation of turbulence and cavitation.

Abstract: A motor vehicle fuel pump including a tubular shell, an electric motor in the shell having an armature shaft rotatable about a longitudinal centerline of the shell, and a pump assembly at one end of the shell having a first rotatable element therein and a second element therein between the first rotatable element and the electric motor. A barrel-shaped driver in a cavity between the first and second rotatable elements includes drive lugs on each longitudinal end projecting into corresponding drive sockets in the first and second rotatable elements. Each drive lug has a rounded edge engaging a side of the corresponding drive socket such that the driver is effectively decoupled from the first and second rotatable elements except with respect to force reactions establishing torsional force couples on the rotatable elements in planes perpendicular to the longitudinal centerline of the shell.

Abstract: A two-stage positive displacement pump (1) is used in particular to operate in conjunction with a turbomolecular pump (2) that can be placed ahead of it in series. The two-stage positive displacement pump (1) is configured as a hybrid pump (3) that has on the medium-entry side a reciprocating pump (5) with a comparatively large displacement area (6), whereby its piston-cylinder space (7) is sealed off with respect to the crank area (8) by means of a sealing membrane (9). Also as a part of this two-stage positive displacement pump (1) which forms the hybrid pump (3), there is placed in series behind the reciprocating pump (5) a diaphragm pump (10), whose displacement area (11) is noticeably smaller compared to that of the reciprocating pump (5).

Abstract: An electric submersible pumping system uses a small diameter capillary tube and a high pressure injection pump. The tube size is selected so that the frictional flow resistance of the tubing at the desired flow volumes balances the pressure caused by the height difference in the columns of fluid. The flexibility of the system is expanded by tapering the capillary tubing string, preferably, but not necessarily, using a larger inner diameter tube above and a smaller inner diameter tube below. Using calculated lengths of different diameter tubing, the pressure loss due to flow can be adjusted to suit the anticipated well conditions. For example, for a flow rate of two gallons per day of oil, a 4,000 foot well might start with 1,500 feet of 0.069" inner diameter tubing at the top and 2,500 feet of 0.055" inner diameter tubing on the bottom. The high pressure injection pump assures that the surface pressure will never go negative, even if the well productivity or other conditions are unknown or changing.

Abstract: A fluid device (pump or motor) comprises a case having a closed chamber, a rotating element mounted for rotation within the closed chamber, a reciprocating piston drivingly connected to the rotating element such that rotation of the rotating element corresponds to reciprocating movement of the piston, passages for admitting and discharging fluid to and from a cylinder in which the piston reciprocates, and scavenger pump means drivingly connected to the rotating element and operable to pump fluid out of the closed chamber at a rate greater than the rate at which fluid leaks or otherwise is metered into the interior chamber, thereby to maintain the level of fluid within the closed chamber below a predetermined level.

Abstract: A fluid rotating apparatus according to the present invention is designed to promptly achieve an extremely high degree of vacuum from atmospheric pressure by its single apparatus. Moreover, high-speed synchronous rotation of the rotary shafts of the apparatus is controlled by use of a rotary position detecting sensor, to thereby avoid control through mechanical contact thereof with a gear or the like. In addition, hydrostatic bearings are employed for supporting the rotary shaft to avoid mechanical abrasion and the use of lubricant oil.

Abstract: A vacuum pump includes a positive displacement vacuum pump structure section disposed on a discharge opening side; a kinetic vacuum pump structure section, disposed on a suction opening side, for providing a high vacuum; and a kinetic vacuum pump structure section, disposed on a suction opening side, for providing a high pumping speed. The construction of the kinetic vacuum pump structure section is different from that of the kinetic vacuum pump structure section so as to differ relative thereto in one of ultimate pressure, pumping speed, and pumping speed of sucked gas with respect to a molecular weight of the sucked gas.

Abstract: In a co-rotational scroll apparatus having two interleaving scroll wraps secured to end plates rotating about parallel, non-concentric axes, a procharging device affixed to one end plate and substantially enclosing the scroll wraps and the second end plate. Preferably, the procharging device includes a cup-shaped drive housing secured to one end plate and enclosing the scroll wraps, and a flexible torque-transmitting member connecting between the enclosure member and the second end plate. Apertures are provided in the enclosure member to permit fluid flow into the space enclosed by the enclosure device, with vanes disposed adjacent the apertures to force fluid into the enclosed space during rotation of the scroll wraps. Fluid thus forced into the enclosed space is precharged prior to entering the scroll wraps, being at higher pressure than fluid exterior the enclosed space, improving the operating efficiency of the scroll apparatus.

Abstract: The present invention relates to a viscous material pump. According to the invention, a pressure sensor is associated with the hydraulic drive cylinder of the fixed displacement pump for generating a pressure signal when a first sudden pressure increase occurs after the drive piston moves out of its end position. The volume subsequently displaced by the conveying piston corresponds to the actual delivery volume during the pumping stroke. A processor calculates the actual delivery volume for each pumping stroke using the ratio between the stroke time, as defined by the occurrence of the pressure peak and the maximum available conveying volume of the cylinder, as defined by the stroke time the piston needs to move from its first to its second end position. The present invention further provides for adjusting the supply volume of a supply means discharging the material to the viscous material pump.

Abstract: A fluid rotating apparatus of a positive displacement type pump includes a plurality of rotors accommodated in a housing, a bearing for rotatably supporting the rotors, a suction port and a discharge port formed in the housing, a plurality of motors for individually rotating the rotors, a detector for detecting rotating angles and rotating speeds of the motors, a synchronous controller for controlling rotation of the plurality of motors by a signal from the detector, and a transporting member coaxially provided on one of the rotors and on the upstream side thereof. The transporting member includes a rotary disk rotatable together with the rotor and a fixed disk opposed to the rotary disk fixed to the housing so as to maintain a gap between the rotary disk and the fixed disk. A spiral groove is formed on one of a surface of the rotary disk and an opposing surface of the fixed surface so as to transport one of fluid and gas molecules in a radial direction of the rotor between the rotary disk and the fixed disk.

Abstract: An extractor having a cleaning solution line which extends from the solution tank to a non-self-priming pump and to the normally closed valve which controls the flow of liquid on to the cleaning head. The extractor uses a manually operated priming pump to draw cleaning solution from the solution tank through the cleaning solution line to the non-self-priming pump. Following activation of the manually operated priming pump, a check valve directs the cleaning solution to the operating non-self-priming pump to effect priming of said pump. Solution is then controlably pumped past the fluid flow control valve to the cleaning head. The check valve remains open while the pump is in operation.

Abstract: The invention relates to a pump arrangement, especially for the operation of an osmotic water purifier comprising a filter housing (10) having a raw water inlet (11), a filtrate outlet (15), a reject outlet (16), and a flush valve (18) adapted to be opened for flushing raw water through the filter housing. The pump arrangement comprises a high pressure pump (12) for supplying raw water at the required pressure, and a circulation pump (13) for recirculating a relatively large flow through the filter housing. The high pressure pump (12) consists of a sliding vane pump of the type in which the vanes (24) are caused to sealingly engage the surrounding wall of the pump chamber by a hycraulic pressure supplied from the pressure side of the high pressure pump.

Abstract: A fluid rotating apparatus of a positive displacement pump includes a plurality of rotors accommodated in a housing, a bearing for rotatably supporting the rotors, a suction port and a discharge port formed in the housing, a suction chamber and a discharge chamber in the housing respectively communicating with the suction port and the discharge port, a plurality of motors for individually rotating the rotors, and a detecting device for detecting rotating angles and rotating numbers of the motors. In the apparatus, a fluid is sucked and discharged due to capacity change of a space defined by the rotors and the housing through synchronous control of the rotation of the plurality of motors by a signal from the detecting device. The housing has a communicating path with a flow control device to make an upstream side communicate with a downstream side of the apparatus when the rotational numbers of the rotors are less than a predetermined value.

Abstract: A two-stage pumping apparatus is provided with a pump housing through which gross movement of material occurs generally from an infeed opening to a discharge opening. The first stage includes two non-positive displacement helical flight augers which each rotate about respective, spaced-apart, parallel axes. The upstream end of one of the first stage augers terminates axially downstream of the downstream end of the other first stage auger helical flights. The helical flights of the upstream first stage auger extend laterally over at least a portion of the adjacent first stage auger. The first stage augers are coaxial with, and cooperate with, a pair of second stage augers which each have a positive displacement helical flight for engaging the material and for being respectively intermeshed to provide positive displacement pumping.

Abstract: A volumetric pump for paste-like material, for example, unvulcanized rubber, in which a screw 21 feeds a cylinder 11 through ports 12 and in which a delivery piston 10 within the cylinder displaces the material through a non-return valve 15. A process for volumetric pumping of the material utilizing such volumetric pump.

Abstract: A miniature mechanical vacuum pump capable of producing intermediate vacuums on the order of about 10.sup.-1 to 10.sup.-2 Torr is provided by a peristaltic pump. In order to dissipate heat in the pump tubing, a cooling fan provides direct a continuously flow of air onto the pump tubing and pump parts contacting the tubing. The pump produces pressures in the range of about 10.sup.-1 to 10.sup.-2 Torr while consuming only about 17 Watts.

Abstract: An integrated system and method are disclosed for filtering a fluid and for dispensing a desired volume of the fluid. The integrated system includes a feed pump sub-assembly for receiving fluid and for directing the fluid through a filter. A filtration sub-assembly is joined with the feed pump sub-assembly for receiving fluid from the feed pump sub-assembly and for housing the filter. A dispense pump sub-assembly is integrally joined with the filtration sub-assembly and defines a dispense chamber for receiving filtered fluid from the filtration sub-assembly. The dispense pump sub-assembly includes a dispensing means which is moveable from a fill position to a purge position for purging at least a portion of any gas bubbles from the dispense chamber. The gas bubbles are purged through a purge outlet disposed above a fluid inlet and a fluid outlet of the dispense chamber.

Abstract: An evacuation system in an ultra-high vacuum sputtering apparatus capable of shortening the pumping time of the system. A main pump, composed of a turbo-molecular pump and a baffle is positioned upstream of a main pump and cooled to a temperature in which argon gas is not absorbed and only water is absorbed. The pump and a vacuum chamber are separated by a valve. A pipeline circulates a heating medium to rapidly heat and cool the vacuum chamber for enabling a gas discharge from the vacuum chamber whereby the pumping time can be reduced and the overall production of the system can be increased.

Abstract: A Roots-type machine is connected to an enclosure to be evacuated via a suction inlet portion, and to a primary pump via a delivery outlet portion. A bellows is disposed transversely in the inlet portion, one end of the bellows being fixed in gastight manner in the wall, and the other end being closed and movable, so that the bellows forms a regulating member for regulating the gas-flow sectional area in the inlet portion. The outside face of the movable end of the bellows is subjected to the pressure in the inlet portion, and the inside face of the movable end is subjected to the pressure in the delivery outlet portion via a rod passing through the wall, and via a channel. The invention applies to Roots-type machines, in particular for automatically regulating the pumping speed so as to match it to the flow-rate of the corresponding primary pump.

Abstract: A gear pump for pumping viscous material has a housing with an inlet and an outlet and a gear chamber between the inlet and the outlet. A pair of intermeshing gear wheels which are rotatably supported by bearings in the gear chamber of the housing have end faces in rotative contact with abutting faces of the housing. Spiral grooves in end faces of the gear wheels have a direction to move radially outwardly any material entering between end faces of the gear wheels and abutting faces of the housing to prevent such material from reaching the bearings. An integral drive shaft of one of the gears has a helical groove for preventing material from reaching bearings of the drive shaft. The driven gear has a central circular recess in which a bearing stud projects with bearing needles between the stud and the recess in the gear.

Abstract: A fluid rotating apparatus according to the present invention is designed to promptly achieve an extremely high degree of vacuum from promptly atmospheric pressure promptly by its single apparatus. Moreover, high-speed synchronous rotation of the rotary shafts of the apparatus is controlled by use of a rotary position detecting sensor, to thereby avoid control mechanical contact thereof with a gear or the like. In addition, hydrostatic bearing are employed for supporting the rotary shafts to avoid of mechanical abrasion and the use of lubricant oil.