Abstract: An electromagnetic micropump for pumping small volumes of liquids and gases comprises a magnetic actuator assembly, a flexible membrane and a housing defining a chamber and a plurality of valves. The magnetic actuator assembly comprises a coil and a permanent magnet for deflecting the membrane to effect pumping of the fluid. A plurality of micropumps may be stacked together to increase pumping capacity.

Abstract: A diaphragm pump and method for making same, the pump having a diaphragm coupled to a wobble plate achieved using: a post (11) protruding from the wobble plate toward the diaphragm and at least partially surrounded by a collar (11a); and a pin (22) protruding from the diaphragm toward the wobble plate and having a recess (22a) for mating with the post (11) and also having an outer portion (22b) surrounding the recess (22a) and able to resiliently deform so as to squeeze through the collar (11a) when the pin (22) is pushed onto the post (11). The outer portion (22b) of the pin typically includes a locking feature (22c) for holding the pin (22) on the post (11). The pin (22) and the diaphragm are typically made from thermoplastic materials, with the pin (22) typically made from a harder material than the diaphragm.

Abstract: A pump according to the present invention has a circular diaphragm 4 placed at the bottom of a casing 2. At the bottom of the diaphragm 4, a piezoelectric element 6 is installed in contact with the diaphragm 4. A narrow space between the diaphragm 4 and the top wall of the casing 2 constitutes a pumping chamber 8. An inlet flow path 12 and an outlet flow path 14 are open to the pumping chamber 8, wherein a check valve 10 is installed in the inlet flow path 12. Immediately downstream of the pumping chamber, the outlet flow path 14 has a narrow segment 16. The narrow segment 16 of the outlet flow path has ½ the diameter and ¼ the cross sectional area of the outlet flow path 14. The outlet flow path 14 has a return inlet 22, which is connected to a return outlet 23 in the inlet flow path via an active valve 24. The active valve 24 is opened and closed freely by an actuator 26 made of shape-memory alloy.

Abstract: A valve for regulating the flow of fluids (gas or liquid) using two flexible diaphragms in which an additional element is added to promote rolling contact between the diaphragms. The valve operates in a normally open configuration where fluid flows into the valve, passed through holes or openings in two electrostatically operative diaphragms and out of the valve. The holes or openings in one diaphragm are offset from the holes or openings in the other diaphragm, so that upon electro-static actuation, the diaphragms will seal together, closing the valve.

Abstract: An actuating device for hydraulically securing a camshaft of an engine of a motor vehicle in a start position has a solenoid valve controlling the flow of a pressure medium to a camshaft adjuster with a rotary slide valve that is fixedly connected to the camshaft and moves the camshaft into the required start position according to the pressure medium supplied to it by the solenoid valve.

Abstract: The metering pump comprises a synchronous motor which is stepped down via a mechanical gear and the rotation movement of the motor is converted into a stroke movement which drives the membrane pump. To the motor there is allocated an electronic control which may be activated by external impulses with regard to the delivery quantity. At the same time the control operates such that one always passes through a complete operating cycle of the pump if the nominal delivery quantity resulting on account of the received impulses is as large or larger than the quantity which the pump delivers in an operating cycle.

Abstract: Servo controlled solenoids provide actuation of a pump piston and valves, and electronic LC resonance measurements to determine liquid volume and gas bubble volume. Third order nonlinear servo control is split into nested control loops: a fast nonlinear first-order inner loop causing flux to track a target by varying a voltage output, and a slower almost linear second-order outer loop causing magnetic gap to track a target by controlling the flux target or the inner loop. The inner loop uses efficient switching regulation, preferably based on controlled feedback instabilities, to control voltage output. The outer loop achieves damping and accurate convergence using proportional, time-integral, and time-derivative gain terms. The time-integral feedback may be based on measured and target solenoid drive currents, adjusting the magnetic gap for force balance at the target current.

Abstract: An integrated mesopump-sensor suitable for disposition in two- and three-dimensional arrays having small dimensions is disclosed. One mesopump is formed of an electrostatically attractable flexible diaphragm disposed through cavities or pumping chambers formed between two opposing electrostatically chargeable material layers. Fluid is pumped through the chambers by sequentially moving the diaphragm toward the first chargeable layer, then towards the second chargeable layer, which can pull and push the fluid through a series of chambers, and past the sensor. One group of sensors utilizes multiple and varied chemoresistive sensors which can vary in resistance differently in response to the presence of various analytes. Another group of sensors utilizes chemo-fluorescent sensors that fluoresce in the presence of particular analytes.

Abstract: An actively cooled system includes a heat generating device and at least one heat transfer device. The heat transfer device includes a refrigerant loop including a compressor for providing a superheated vapor state from a vapor stream, a condenser comprising a membrane coupled to an actuator, the condenser including a condensing surface for condensing the superheated vapor into a plurality of droplets, and an evaporator for receiving the droplets. An expansion structure is interposed between the condenser and the evaporator, wherein the membrane ejects the plurality of droplets toward the evaporator during refrigerant cycle intervals when the expansion structure is open. At least a portion of the heat generating device is in thermal contact with the evaporator.

Abstract: A hydraulically driven diaphragm pump with a diaphragm clamped at its edge between a pump body and a pump cover separating a delivery chamber from a hydraulic chamber and pretensioned in the direction of its intake stroke by spring force. A hydraulic diaphragm drive in the form of an oscillating displacement piston is displaceable in the pump body between a reservoir chamber for the hydraulic fluid and the hydraulic chamber. The diaphragm is so strongly pretensioned by spring force that it exerts a substantial compressive force on the hydraulic fluid in the hydraulic chamber. Therefore a substantial hydrostatic pressure is built up in the hydraulic chamber relative to the delivery chamber.

Abstract: A pump for gases to be measured having a pump housing in which a pump chamber is located. The pump chamber is sealed off by a working membrane that is connected to a crank drive by a connecting rod or similar lifting mechanism. A heating device is provided in an upper area of the pump housing, particularly in the pump head. Heat insulation covering at least the pump head is provided. The heat insulation is in the form of an insulating housing having an inner wall spaced apart from the pump head in order to form a gas insulation layer.

Abstract: An aquarium includes a pump disposed in a chamber of a container to circulate water and having a spindle. An air supplying device is coupled to the spindle of the pump and driven by the spindle of the pump, to pump air into the water contained in the chamber of the container. The pump may thus be used to pump or circulate the water in the aquarium, and to simultaneously supply air into the water contained in the aquarium. The air supplying device includes a valve housing having two check valve members disposed in a recess and a depression, and a membrane attached to the valve housing and forced by the pump to actuate the check valve members.

Abstract: A pump which has a diaphragm main body integrally connected at a planar portion to a diaphragm portion forming a pump chamber and performs a pumping action by reciprocating a driving portion disposed integrally with the diaphragm portion; the pump being configured compact by disposing a suction valve at the planar portion of the diaphragm main body and further using a planar discharge valve.

Abstract: The present invention provides a membrane with magnetic particles. In one embodiment the membrane is created by mixing particles in a non-magnetic base. The membrane may act as an actuator, a sensor, a pump, a valve, or other device. A magnet is operatively connected to the membrane. The magnet acts on and changes the shape of the membrane.

Abstract: It is sought to provide a small-size and highly safe bellows pump dealing with an explosive gas or the like as pump feed fluid, which can prevent hazards due to reaching of a drive motor or like drive part by the pump feed fluid caused to leak out when the bellows is broken. A flexible partition membrane is stretched between the movable end of the bellows and the pump housing to make the outside-bellows region to be a sealed chamber. The flexible partition membrane can follow the reciprocation of the bellows and does not interfere with the operation thereof. When the pump feed fluid leaks out from the pump chamber due to breakage of the bellows during operation thereof, it is retained in the sealed outside-bellows region, and does not reach the drive part including the drive motor. Also, the flexible partition membrane prevents dust intrusion to the bellows side, thus preventing such troubles as the breakage of the bellows otherwise stemming from the dust intrusion.

Abstract: A micropump comprising a pump body including a fluid inlet channel, a fluid outlet channel and pumping reservoir, the fluid inlet channel and the fluid outlet channel communicating with the pumping reservoir, a diaphragm covering the pumping reservoir, a piezoelectric strip actuator attached to the diaphragm such that by applying a voltage to the actuator, the diaphragm can be raised or lowered relative to the pumping chamber, a valve on the inlet channel and the outlet channel, the valve opening and closing the inlet and the outlet channel in response to the raising and lowering of the diaphragm.

Abstract: A dosing pump is provided comprising a working membrane defining a working area, and a pump drive for creating an oscillating movement of the working membrane. The direction of the pump drive can be inverted and the displacement element can be moved back and forth. The inventive dosing pump also comprises a position sensor for detecting the position of the pump drive, an electronic control system for the same, and a pump head in which an inlet valve and an outlet valve are arranged. The pump drive comprises a positioning motor and can be displaced back and forth in an oscillating manner, with the part thereof connected to the displacement element, in any range of its entire working displacement, according to a pre-determinable course, for a reduced pump capacity in relation to the maximum pump capacity. At least the inlet valve is externally controlled and comprises a motor-driven valve drive.

Abstract: A method, system and apparatus for performing peritoneal dialysis are provided. To this end, in part, a pump for a dialysis system is provided. The pump includes a first chamber wall including a first aperture, a second chamber wall including a second aperture, a piston, at least a portion of which can move through the second aperture, the piston including a third aperture, and first and second membranes disposed between the first and second chambers walls. A vacuum can be applied through the first aperture to pull the first membrane towards the first chamber wall and can be applied through the third aperture to pull the second membrane towards the piston. The piston can thereafter move the second membrane.

Abstract: A diaphragm pump includes a pressure sensor disposed in the housing thereof, and which is used as an expansion tank for protecting the pressure sensor. To avoid excess pressure on the pressure sensor, the pressure sensor membrane is directly disposed in the pump head, i.e., above the pump membrane of the diaphragm pump, such that the increase in volume of the reducing agent during the freezing of the reducing agent inside the diaphragm pump is detected by deflection of the pump membrane against the force of a spring, and the pressure sensor membrane is protected from damage.

Abstract: This disclosure relates to a highly durable positive displacement pump capable of dry-priming and pumping of a liquid containing abrasive non-soluble material. The pump assembly comprises an internally pressurized diaphragm assembly secured to a pump bowl and a pump bowl tube. A suction inlet and discharge outlet are located at opposite ends of the pump bowl tube, the inlet and outlet are each configured to receive a valve that limits flow of the liquid to a single direction. The internally pressurized diaphragm assembly comprises an upper diaphragm positioned atop a lower diaphragm wherein a cavity is formed between the diaphragms that is pressurized thereby reducing fatigue failure inducing stresses. Reciprocating axial movement of the internally pressurized diaphragm assembly, produced by a drive means, suctions the liquid in through the suction inlet and then discharges the liquid through the discharge outlet.

Abstract: Methods and apparatus for electrostatically pumping fluids without passing the fluids through the electric field of the pump are contemplated. Electrostatic forces are preferably used to move the diaphragms in one direction, while elastic and/or other restorative forces are used to move the diaphragms back to their original un-activated positions. In some embodiments, this may allow fluid to be pumped without passing the fluid between actuating electrodes. This may be particularly useful when the fluids have dielectric, conductive, polar or other qualities that may affect traditional electrostatic pump performance. Pumps having various elementary cells are contemplated, including two-celled pumps disposed within a single chamber and pumps having greater numbers of cells wherein each cell is disposed within a different chamber.

Abstract: A micropump includes a body (10) of semiconductor material, accommodating fluid-tight chambers (32), having an internal preset pressure, lower than atmospheric pressure. The fluid-tight chambers (32), sealed by a diaphragm (35) that can be electrically opened, are selectively openable using a first electrode (37) and second electrodes (38), accommodating between them portions of the diaphragm (35).

Abstract: A casing body is formed with a vent hole. The casing body has an inner face formed with a plurality of grooves respectively communicated with the vent hole. A plurality of diaphragms are respectively inserted into the grooves to form a plurality of pump chambers. An actuator actuates the diaphragms to compress or decompress the pump chambers.

Abstract: The invention concerns an AC electric motor (1) comprising a stator magnetic circuit including a first part (2) whereon are mounted electrical windings (7 and 8) and a second recessed part (10) wherein is mounted a rotor (14). The invention is characterized in that the first part (2) of the stator magnetic circuit and the electrical windings (7 and 8) are mounted inside a stator chamber (20) with sealed wall, the second part (10) of the stator magnetic circuit, the cylindrical rotor (14) being located outside said chamber. The invention is applicable in the oil industry for pumping fluids in bottom holes producing hydrocarbons in liquid, gas or polyphase form and in chemical and nuclear industries for pumping dangerous or chemically harmful fluids.

Abstract: A pump (10) has a housing which forms a pump chamber (17) having a wall (18). Inlet and outlet valve assemblies (19, 20) communicate with the chamber (17) and, respectively, allow fluid to be received in, and discharged from, the chamber (17). An armature (27) carries a plunger (28) and is reciprocatably moved by an electromagnetic coil assembly (25). A coil spring (44) biases the plunger (28) toward a stop surface (41) positioned adjacent to the plunger (28). Upon activation of the coil assembly (25), the plunger. (28) is moved against the force of the spring (44) such that a diaphragm (31) carried by the plunger (28) moves into the chamber (17) without engaging the wall (18) to discharge fluid through the outlet valve assembly (20). When the coil assembly (25) is deactivated, the spring (44) moves the plunger (28) toward the stop surface (41) without allowing it to engage the stop surface (41) to draw fluid in through the inlet valve assembly (19).

Abstract: The apparatus (10) for generating a mixture of reducing agent and air has a feed pump (16), by which reducing agent is pumped and which has a pump housing (22, 32). The apparatus (10) furthermore has a mixing chamber (50), into which reducing agent and air pumped by the feed pump (16) can be introduced; the mixing chamber (50) is embodied in a mixing chamber body (36). The mixing chamber body (36) communicates directly with the pump housing (22, 32) of the feed pump (16) and forms a cap of the pump housing (22, 32). The feed pump (16) has a drive shaft (24) for a feed element (30), which protrudes into the pump housing (22) of the feed pump (16), and the mixing chamber body (36) is disposed at least approximately radially to the drive shaft (24). The apparatus (10) has a compact structural size and only a slight reducing agent-filled idle volume.

Abstract: A method and system for dispensing a precise amount of a chemical used in the fabrication of semiconductors utilizes rolling membrane pump and calculates an amount by which to change a dispense based at least in part on a predicted membrane flex. Membrane flex is predicted, at least in part, by the shape of the membrane, a volume of liquid to be dispensed and a pressure during dispense.

Abstract: A micro-electro-mechanical vibrating pumping stage comprises a silicon substrate (15) on which there are formed a single-layer or multilayer oscillating assembly (27; 127; 227; 327) with a vibrating membrane and a device controlling the membrane in order to provide its oscillation with respect to the substrate. A molecular vacuum pump incorporates this vibrating pumping stage.

Abstract: To reduce number of parts, reduce the weight, make easy and quick to start, and reduce consuming quantity of electric power of a diaphragm pump, a con rod is made of a synthetic resin material, and the con rod has an annular groove made next to its enlarged end. A diaphragm is of rubber, and is integrally connected to the enlarged end of the con rod by fitting into the annular groove, wrapping the enlarged end of the con rod.

Abstract: An apparatus for electrostatically pumping fluids without passing the fluids through the electric field of the pump is contemplated. Electrostatic forces are preferably used to move the diaphragms in one direction, while elastic and/or other restorative forces are used to move the diaphragms back to their original un-activated positions. In some embodiments, this may allow fluid to be pumped without passing the fluid between actuating electrodes. This may be particularly useful when the fluids have dielectric, conductive, polar or other qualities that may affect traditional electrostatic pump performance. Pumps having various elementary cells are contemplated, including two-celled pumps disposed within a single chamber and pumps having greater numbers of cells wherein each cell is disposed within a different chamber.

Abstract: A constant rate discharge pump comprises a rotary shaft which is rotatable together with a rotary driving source, a piston which is displaceable in an axial direction in a pump chamber of a body by the rotation of the rotary shaft and which has a tapered surface having diameters reduced downwardly on an outer circumference thereof, and a skirt section which is disposed on the piston and which extends radially outwardly. The constant rate discharge pump further includes a valve plug membrane of a resin material which is displaceable together with the piston, and a pressure sensor installed in the body which detects a pressure of a fluid flowing through the pump chamber.

Abstract: The diaphragm suction pump has a pump chamber (7) located in a base plate (6), the wall of said chamber extending in a conical manner from a central flat base section ( 7′) to the lateral edge (8). The elastic pump diaphragm (5), which spans the pump chamber (7), is configured in such a way that it lies tightly against the entire pump chamber wall at the top dead center point of the drive connecting rod (4). The diaphragm (5) consists of a self-supporting elastic material with rear recesses (9; 10), which form hinges that can be elastically pretensioned during the operation of the diaphragm (5).

Abstract: A working-fluid moving device is a laminate of ceramic sheets, which constitute a channel. One of the ceramic sheets is formed to serve as a diaphragm. A piezoelectric/electrostrictive film is formed on the diaphragm. The channel houses first and second working fluids. The first working fluid is inferior to the second working fluid in wettability to the inner wall surface of the channel. When voltage is applied to the piezoelectric/electrostrictive film, the diaphragm is deformed, and the cross-sectional area of the channel at the central portion is reduced. The first working fluid which is present in the form of a single fluid mass at the central portion of the channel receives a repulsive force from the wall surface of the channel due to inferior wettability. As a result, the first working fluid is split into two fluid masses, which then move in the channel.

Abstract: A vibratory pump has a frame, a solenoid located in the frame, a moving transmission including a transmission member, a pumping set cooperating including an oscillating cover, an auxiliary pumping chamber between the oscillating cover and the frame, a cupping arranged at an end of the transmission member, an admission chamber, an auxiliary chamber, a vane-type valve for opening and closing inlets of the admission chamber, a pass in which water circulates and a inverted tubular cup in which the solenolid enclosed constitute means for heat exchange that provide cooling of the solenoid, and the pump can be used without auxiliary accessories or with auxiliary accessories, so that the inlets for opening and closing of the admission chamber are exposed to provide a water collection, or the pump is connected to a base for operating as a suction pump, or an adaptor is provided for connecting the inlets to an outlet of another pump to provide a series of pumps located vertically or horizontally near one another.

Abstract: A fluid discharging device is provided with diaphragm members 20 and 30. The diaphragm member 30 being a valve member comprises an outlet 35 and a suction passage opening and closing portion 33, and can be moved forward and backward relative to the diaphragm member 20 being a pump member. The diaphragm member 20 comprises an outlet opening and closing portion 25 capable of opening and closing the outlet 35 and a measuring portion 26 capable of changing the volume of a measuring space 42. An outlet opening and closing means 50 opens and closes the outlet 35 by moving the outlet opening and closing portion 25 backward and forward relative to the outlet 35, and opens a liquid suction passage 40 by detaching the suction passage opening and closing portion 33 from the diaphragm member 20. A diaphragm moving means 55 changes the volume of the measuring space 42 by moving the measuring portion 26 forward and backward.

Abstract: A valve actuator based on a conductive polymer gel is disclosed. A nonconductive housing is provided having two separate chambers separated by a porous frit. The conductive polymer is held in one chamber and an electrolyte solution, used as a source of charged ions, is held in the second chamber. The ends of the housing a sealed with a flexible elastomer. The polymer gel is further provide with electrodes with which to apply an electrical potential across the gel in order to initiate an oxidation reaction which in turn drives anions across the porous frit and into the polymer gel, swelling the volume of the gel and simultaneously contracting the volume of the electrolyte solution. Because the two end chambers are sealed the flexible elastomer expands or contracts with the chamber volume change. By manipulating the potential across the gel the motion of the elastomer can be controlled to act as a “gate” to open or close a fluid channel and thereby control flow through that channel.

Abstract: A MEMS-fabricated microvacuum pump assembly is provided. The pump assembly is designed to operate in air and can be easily integrated into MEMS-fabricated microfluidic systems. The pump assembly includes a series of pumping cavities with electrostatically-actuated membranes interconnected by electrostatically-actuated microvalves. A large deflection electrostatic actuator has a curved fixed drive electrode and a flat movable polymer electrode. The curved electrodes are fabricated by buckling the electrode out-of-plane using compressive stress, and the large deflection parallel-plane electrostatic actuators are formed by using the curved electrode. The curved electrode allows the movable electrode to travel over larger distances than is possible using a flat electrode, with lower voltage. The movable electrode is a flat parylene membrane that is placed on top of the curved electrode using a wafer-level transfer and parylene bonding process.

Abstract: A diaphragm pump with a diaphragm (1) of elastic material, which includes a receiving cavity (4) in a reinforced central area (3) for a connecting rod head (5) of a connecting rod which displaces the diaphragm (1). The diaphragm (1) includes a clamping rim (2) for securing the diaphragm to the pump housing. On the upper side (8) of the diaphragm (1) which is proximal to the pump chamber, at least one circularly disposed rib (9) is provided essentially radially outward from and proximal to a central area (3) which area is bounded by the outline of the connecting rod head (5) or by the outline of a part of the diaphragm (1) near to the said connecting rod head (5). A plurality of ribs (9), spaced in a radial direction one from the other are provided and are located where the forces introduced by the connecting rod head (5) spread into the radial, neighboring ring area of the diaphragm.

Abstract: A micromechanical pump has a membrane (2) positioned above a substrate (1). The substrate is provided with a cavity (8) which is formed in an endlessly continuous shape (e.g., circular) to provide a channel for a drive fluid. A cover (9) is positioned above the substrate with the membrane being between the substrate and cover. The cover is provided with an inlet (11) and outlet (10). Electrodes (3, 4) are provided around the floor of the cavity. The electrodes are selectively actuated so as to attract selected areas of the membrane resulting in a gap forming between the cover and the selected areas of the membrane. The areas of the membrane above the non-selected electrodes form a seal with the cover. By selectively actuating the electrodes a peristaltic pumping action results in a pumped fluid traveling from the inlet, through the gaps and out the outlet.

Abstract: A system for dispensing and filtering fluid is disclosed, in which the fluid flow path is substantially vertical from the fluid inlet through fluid dispense. Substantially all wetted surfaces are Teflon® or some similar non-contaminating fluid, for applications such as cleanroom processes. A valve and a filter chamber are incorporated into a pump head to simplify the flow path and reduce potential contamination points. Preferred methods, and chips or other microelectronic devices fabricated from the apparatus or methods, are also disclosed.

Abstract: An electromagnetic micropump for pumping small volumes of liquids and gases comprises a magnetic actuator assembly, a flexible membrane and a housing defining a chamber and a plurality of valves. The magnetic actuator assembly comprises a coil and a permanent magnet for deflecting the membrane to effect pumping of the fluid. A plurality of micropumps may be stacked together to increase pumping capacity.

Abstract: Since many valves are used, pressure loss is large, resulting in low reliability of a pump. Even when the period of increasing and decreasing the volume of a pump chamber is long, and a piezoelectric element is used as an actuator that drives a diaphragm, a driving operation cannot be performed at a high frequency, or a proper flow rate cannot be realized under a high load pressure. In accordance with the invention, the combined inertance value of an entrance passage used to make working fluid flow into a pump chamber is smaller than the combined inertance value of an exit passage used to make the working fluid flow out from the pump chamber. A fluid resistance member is provided at the entrance passage in which fluid resistance when the working fluid flows into the pump chamber is smaller than fluid resistance when the working fluid flows out of the pump chamber.

Abstract: A reciprocating electromagnetic pump comprising a coil wound about a bipolar or tripolar core, a diaphragm structure mechanically coupled to at least one arm with a magnet attached to one end of the arm and a controller electronically connected to the coil. The controller comprises a pulse generator, a solid state switch that interrupts current flow through the pump electromagnet and additional electronic circuitry for signal processing. The arm is vibrated under the influence of a periodic electromagnetic field to produce the flow of gas. The flow of current through the electromagnet is interrupted so that the magnets are impelled during either a vacuum or a pressure stroke, but are not impelled during the reciprocal stroke. A signal produced in the electromagnet coil during the reciprocal is processed to provide feedback to control the pump drive frequency and phase to match the pump mechanical self-resonant frequency and phase under varying pumping loads.

Abstract: A miniature vapor compression cycle thermal management device includes a dropwise condenser and ejector. The device includes a flexible compressor membrane serving as the compressor. The compressor can be stimulated electrostatically and drives refrigerant charge through a closed loop defined by interconnected compressor, condenser, expansion, and evaporator structures. The condenser includes a flexible condensing membrane for dropwise condensation and for propelling condensed droplets of refrigerant from a cooled condensing surface into an expansion chamber. The overall structure and size of the device is similar to microelectronic packages, and it may be combined to operate with similar devices in useful arrays.

Abstract: A diaphragm pump includes a pump housing having an inlet and an outlet for the fluid. The pump housing (2) includes a partition wall (4) which delimits two chambers (3) on a respective side of the partition wall. The two chambers are each closed by a respective diaphragm (9) connected to an electric coil (12) for causing the diaphragm to oscillate in coaction with a magnetic unit (14-16), therewith pumping the fluid.

Abstract: The invention relates to a pump (10) with a proportional-volumetrical dosing unit for conveying a predetermined volume of a liquid in a range of less than about 1 ml in a precisely dosed manner. The pump is provided with a cavity (22) for receiving the liquid and is limited on one side by a membrane (20) that can be displaced by means of a lifting device (18) to change the cavity's volume. The pump (10) further comprises a lockable inlet valve (30) between a liquid reservoir and the cavity (22), a lockable outlet valve (34) between the cavity (22) and a liquid dispenser and a lockable air vent valve (32) between the cavity (22) and the ambient atmosphere. The pump is especially useful for applying a precise, defined and reproducible volume of a lacquer or an adhesive on the surface of a disk-shaped data carrier for generating a thin lacquer or adhesive film.

Abstract: A suspended p-GaN membrane is formed using photochemical etching which membrane can then be used in a variety of MEMS devices. In the illustrated embodiment a pump is comprised of the p-GaN membrane suspended between two opposing, parallel n-GaN support pillars, which are anchored to a rigid substrate below the pillars. The p-GaN membrane bows upward between the pillars in order to relieve stress built up during the epitaxial growth of membrane. This bowing substantially increases the volume of the enclosed micro-channel defined between membrane and substrate below. The ends of membrane are finished off by a gradual transition to the flat underlying n-GaN layer in which fluidic channels may also be defined to provide inlet and outlet channels to microchannel. A traveling wave or sequential voltage applied to the electrodes causes the membrane to deform and provide a peristaltic pumping action in the microchannel.

Abstract: A measuring gas pump (1) including a pump housing (2) with a pump chamber (3) inside which is sealed by a working membrane (5). The membrane (5) is connected by a connecting rod (8) or a similar type of lifting device to a crank mechanism (9). A heating device is provided in the upper area of the pump housing, specifically in the pump head (10). On one hand, in the drive-transmission area between the head of the connecting rod (6) on the membrane side and the crank mechanism (9), there are holes (11) for the reduction of heat transfer to the crank mechanism which are spaced in a longitudinal direction of the connecting rod and which are also diametrically opposed, in peripheral direction, with a resulting reduction in heat conductivity. On the other hand, there is an enlargement of the surface area, at least in the area adjacent to the crank mechanism, for purposes of heat dissipation, specifically through cooling ribs (12).

Abstract: A pump (10) includes a chamber (14) communicating with a fluid inlet (12) and a fluid outlet (13) above the centerline thereof to minimize dead air space where air bubbles might form. A connector (21) having a bend or elbow (26) is formed at the fluid inlet (12). Upon actuation of a solenoid (37), a plunger (39) carrying a diaphragm (42) is moved to draw fluid around the elbow (26), through a valve (19) positioned at the fluid inlet (12), through the chamber (14), and out of the pump (10) through a valve (30) positioned at the fluid outlet (13). The energy of the fluid which might otherwise create a water hammer effect is absorbed by the elbow (26) prior to reaching the pump (10).

Abstract: A double diaphragm pump having an air chamber housing centrally located between two pump chamber housings. The air chamber housing includes a center section and two outwardly facing concave discs. Each pump chamber housing includes a pump chamber shell mating with one of the discs with a flexible diaphragm therebetween. Check valve chambers and inlet and outlet passages associated with each pump chamber and with inlet and exhaust manifolds control flow through the pump. A solenoid actuated valve alternately directs air pressure to each of the two diaphragms for reciprocal pumping action. Inner pistons associated with the diaphragms include stops which limit pump stroke in each direction. The solenoid may be driven by conventional electronics on a timed stroke or responsive to flow considerations.