Abstract: A fan motor with constant speed control comprises a microprocessor system, a bus control logic, a register for actual fan speed, a register for fan state, a register for speed set-up, a linear variable voltage circuit control logic, and a braking/running enabling control logic. The microprocessor system is connected via the bus control logic to the register for actual fan speed, the register for fan state, and the register for speed set-up. The register for fan state sets up enabling of braking and running by means of controlling output voltage by the braking/running enabling control logic. The register for speed set-up sets up speed values by the microprocessor system. After comparing a speed value to an actual fan speed signal by the linear variable voltage circuit control logic, the linear variable voltage circuit control logic generates a linear variable voltage (drive voltage) which is outputted to the fan via the braking/running enabling control logic.

Abstract: Fluid pump control modes in a medical perfusion system include a Back Off Response Mode, a Flow Servo Mode, a Pressure Servo Mode, and a Master-Slave Servo Mode. In the Back Off Response Mode, pump's speed is decremented to a new speed when an excessive flow rate or pressure condition is detected. The new speed is maintained until an additional decrement is required or until the Back Off Response Mode is exited. In the Flow Servo Mode, a pump's speed is controlled to maintain a fluid flow rate indicated by a user as a setpoint. In the Pressure Servo Mode, a pump's speed is controlled to maintain a pressure indicated by the user as a setpoint. In the Master-Slave Servo Mode, a slave pump receives an indication of a master pump's speed, and the slave pump speed is controlled to maintain a specified percentage of the master pump's speed.

Abstract: A tan having a fan wheel and an electric motor driving it, and a control unit for controlling the motor output as a function of fan-specific parameters. An actual-value signal corresponding to an actual rotational speed of the fan is measured and compared with a control signal corresponding to a required speed, and the actual speed is adjusted to the required speed by means of the control unit, wherefore the actual speed and the actual motor current or supply current are measured and conducted to a microcontroller as input signal variables, whereby the fan-specific data such as wheel diameter, density of the conveying medium, fan coefficients, motor coefficients, and a preset artificial characteristic curve ps=ƒ({dot over (V)}s ) are stored in the microcontroller as default values.

Abstract: The present invention involves a dynamic brake for use in a peristaltic (i.e., roller) pump. The dynamic brake avoids backlash, due to counter rotation. In addition, it does not preclude the option of hand operating the roller pump. This is achieved by initiating the braking operation after the roller pump set-point has been set to zero and only after the roller pump has decelerated below a predefined speed (e.g., 20 rpm). In addition, the braking operation is activated for only a very brief period of time (i.e., a period of time required for the pressure in the roller pump fluid conduit to subside).

Abstract: A piston pump propels liquid through a lumen of a flexible tube segment. The pump includes a first tube clamping member, a first set of tube squeezing members, a second tube clamping member, a second set of tube squeezing members and a synchronizing arrangement for activating the members in a sequential order such that fluid in the tube is displaced in a downstream direction.

Abstract: A fan motor with constant speed control comprises a microprocessor system, a bus control logic, a register for actual fan speed, a register for fan state, a register for speed set-up, a linear variable voltage circuit control logic, and a braking/running enabling control logic. The microprocessor system is connected via the bus control logic to the register for actual fan speed, the register for fan state, and the register for speed set-up. The register for fan state sets up enabling of braking and running by means of controlling output voltage by the braking/running enabling control logic. The register for speed set-up sets up speed values by the microprocessor system. After comparing a speed value to an actual fan speed signal by the linear variable voltage circuit control logic, the linear variable voltage circuit control logic generates a linear variable voltage (drive voltage) which is outputted to the fan via the braking/running enabling control logic.

Abstract: A system, such as a computer system, has cooling fans, each having a fan motor and fan blades. The fan motor operates to rotate the fan blades at a variable rotational speed. A frequency generator generates a reference speed signal having a reference frequency and a reference phase. Tachometers measure the variable rotational speeds of the fan blades of corresponding fans and provide corresponding fan speed signals representative of the variable rotational speeds of the corresponding fans. Each fan speed signal has a fan frequency and a fan phase. Motor controllers control the variable rotational speed of corresponding fan blades of corresponding fans based on the reference speed signal and the corresponding fan speed signals.

Abstract: A cooling system incorporates a semiconductor IC device having an abnormality detector for detecting the occurrence of an abnormal condition by receiving clock signals and more or less periodically outputted signals from a system being monitored. An AND gate receives the clock signals and generates sequentially increasing count signals. During a normal operation of the system, another AND gate receives the signals from the system being monitored. These signals serve to initialize the clock count signals. These signals are received under a normal condition of operation such that the count signal is initialized before reaching a specified value. An abnormality-indicating signal is outputted when the clock count number reaches the specified value. The AND gates are so connected that the first AND gate serves to prohibit input of clock signals, the second AND gate serves to stop initialization of the count signal when an abnormality indicating signal is received.

Abstract: An apparatus and method for controlling an induction motor having a variable frequency drive in a blower system so that the blower system provides a specific fluid flow. A start-up program causes the motor to ramp up to approximately a predetermined steady state speed. A required blower torque is calculated by operating on a table of blower constants, a selected flow rate and a motor speed which is read from a speed sensor in the motor/blower system. A developed motor torque is calculated by operating on a table of motor specific constants, a voltage-frequency index and the motor speed taken from the speed sensor. The calculated required blower torque is repeatedly compared with the calculated developed motor torque. The voltage-frequency index to the variable frequency drive is modified to force the developed motor torque to converge with the required blower torque in a steady state.

Abstract: An apparatus and method for controlling an induction motor having a variable frequency drive in a blower system so that the blower system provides a specific fluid flow. A start-up program causes the motor to ramp up to approximately a predetermined steady state speed. A required blower torque is calculated by operating on a table of blower constants, a selected flow rate and a motor speed. The motor speed is calculated by operating on a table of motor specific constants, a voltage-frequency index and a measured direct current bus current. A developed motor torque is calculated by operating on a table of motor specific constants, a voltage-frequency index and the calculated motor speed. The calculated required blower torque is repeatedly compared with the calculated developed motor torque. The voltage-frequency index to the variable frequency drive is modified to force the developed motor torque to converge with the required blower torque in a steady state.

Abstract: The present invention provides a compressor that enables the increase of compression efficiency, the prevention of abnormal temperature rising in the discharge, and the reduction of power loss.

Abstract: An intelligent fan system includes a microcontroller having memory and an interface which provides a connection to a host computer system. The host computer system dynamically provides a plurality of controlled instructions to the microcontroller which are stored in the memory of the microcontroller. The system also includes a temperature sensing device which is connected to the microcontroller. A fan responsive to the communication signal provided by the microcontroller adjusts the speed of the fan in accordance with the plurality of control instructions.

Abstract: An automatic device to regulate and maintain stable the vacuum pressure varying the rotation speed of a vacuum pump. The device controls frequency variation of the current that powers its operation motor. The device may be used in installations of machine oerdeñadoras de animales, fixed and portable and other vacuum operated equipment or installations.

Abstract: A semiconductor device manufacturing apparatus. The semiconductor device manufacturing apparatus includes: a tank having an inlet and an outlet, for storing a chemical solution; a pump interposed between the inlet and outlet of the tank, for circulating the chemical solution contained in the tank; a filter interposed between the pump and the inlet of the tank; at least one main body connected to an outlet of the filter; a pumping cycle sensor for changing the pumping operation of the pump into a pulse signal; and a controller for measuring the cycle time of the pulse signals generated by the pumping cycle sensor to determine the level of deterioration of the filter.

Abstract: A cooling system for cooling components of a computer is provided. The cooling system includes a DC fan which operates at a speed which is substantially proportional to the voltage that is applied to the fan. A zener diode voltage divider is connected in series between a voltage source and a first input of the fan. The second input of the fan is connected to a reference voltage source. A switch is also connected in series between the voltage source and the first voltage input of the fan so as to be connected in parallel with the zener diode voltage divider. When the switch is in a first position, the voltage produced by the voltage source is applied directly to the fan allowing the fan to operate at a first speed. When the switch is in a second position, the voltage from the voltage source is applied to the first input of the fan through the zener diode such that the first input of the fan receives a second voltage that is less than the first voltage thereby causing the fan to operate at a second speed.

Abstract: A method is presented to prevent compressor damage by reducing compressor load when operating speed either is too low or too high as can be the case at extremes of line frequency and voltage. The speed of the compressor is deduced from the knowledge of compressor load, frequency and voltage. If the compressor speed is too high or too low for a given suction and discharge pressure, the compressor load is reduced to boost the operating speed or to reduce force acting on the bearings. The compressor load reduction may be achieved by actuating an unloader valve, a suction throttling device, or some other load reduction mechanism.

Abstract: A method of controlling a reciprocating compressor comprising of starting the reciprocating compressor at a minimum speed in which a frequency of 45-52 Hz is applied, operating the reciprocating compressor at a frequency of 52˜60 Hz and operating the reciprocating compressor at a predetermined rotational speed. Therefore, an optimum amount of lubricating oil is supplied to a sliding part of the reciprocating compressor so that the reliability of parts thereof is secured.

Abstract: An automatic control device for an air compressor is disclosed. The air compressor controlled by the automatic control device is provided with two operation modes, one is the idle-running/heavy-running operation mode and the other one is the auto-stop/start operation mode.

Abstract: An air compressor system having an unloader valve which is directly mechanically activated by an air compressor motor's centrifugal mechanism to allow the motor to reach a predetermined speed before a load is applied is disclosed. The unloader valve is mounted directly on an end flange of the motor and communicates with an outlet conduit of the air compressor to allow the compressed air from the air compressor to vent to atmosphere until the motor reaches the predetermined speed.

Abstract: A system and a method are provided for velocity modulation to create pulseless delivery of a fluid by a pump, particularly a piston pump. The system and method require input of data, such as a user-entered dispense rate or analog current or voltage input proportional to a desired output rate. A timer or counter is pre-loaded from a lookup table stored in a processor. The time or counter is started and, upon detection of an overflow condition, the motor and table pointer are incremented one step. As a result, pulseless operation of a pump is achieved.

Abstract: The present invention provides a system and a method for controlling and detecting faults in a pump system for use in a gas detection device. The system comprises a power source and a switch in operative or electrical connection with the power source. The system further comprises a pump motor in operative connection with the switch such that the pump motor receives energy from the power source when the switch in a first state, and the pump motor does not receive energy from the power source when the switch in a second state. The system preferably also comprises regeneration circuitry in operative connection with the pump motor. The regeneration circuitry operates to redirect energy produced from momentum of the pump motor while the switch is in the second state back to the pump motor. Transmitting circuitry is preferably provided to transmit a motor signal proportional to the speed of the pump motor during the second state of the switch.

Abstract: A pump unit is provided which sucks a material having a high viscosity contained in a container and to pump it to a nozzle under pressure. An axial member which performs sucking and pumping of the material is connected with the pump unit. The axial member is axially slidable by the pressure of air supplied to the cylinder. The material which is sucked into the pump unit is discharged from the nozzle by the increase in pressure occurred when the axial member descends. A sensor is provided in the vicinity of the axial member. A result of detection of the sensor is supplied to a controller. A reference speed when constant rate application is performed is presettable in the controller. Correction of pressure is conducted by comparing the actual moving speed of the axial member with the reference speed.

Abstract: A d.c. controller pump includes electronic control mechanisms that permit regulated control within a fluid flow system. A pump head is coupled to a housing allowing the fluid to infiltrate the region surrounding a permanent magnet rotor. Stator windings and control electronics fixed to a plurality of printed circuit boards are isolated from the fluid by means of a solid body that encapsulates the stator windings and seals the rear of the cavity. Hall effect sensor-generators and other assemblies are fixed within the solid body to enhance integrity and reduce parts count. Associated electronics includes a readily-removable circuit board for housing auxiliary electronic functions. The board is mounted in parallel at the rear of the pump housing with boards of sensor and controller electronics. The auxiliary function electronics pump configurations enable both fixed and variable speed operation in accordance with fluid flow system design and parameters.

Abstract: A submergible pumping unit for raising viscous fluids from a well is driven by an electronic drive and control system, a first portion of which is located above the well, and a second portion of which is coupled to the submergible pumping unit. The drive and control system includes a power supply circuit located above the well for converting AC power from a source to DC power having current and voltage levels. The DC power is transmitted to the pumping unit via a two-conductor DC bus cable. The pumping unit includes a switching circuit which receives the DC power for driving a submergible motor, such as a permanent magnet brushless motor. The speed of the motor, and of a pump coupled thereto, is proportional to the voltage of the DC power applied to the pumping unit. The pump is preferably a progressive cavity pump, and the drive and control circuitry provides sufficient torque to start the pump from a static condition.

Abstract: A hydraulic power unit for an auto-hoist lift having improved noise characteristics and a more compact design. A motor and pump driving the power unit are located inside a hydraulic fluid reservoir to thereby reduce the amount of noise reaching the immediate vicinity of the power unit. The motor and pump are submerged in the hydraulic fluid to advantageously utilize the hydraulic fluid to cool the motor. The power unit may further incorporate a delay valve for reducing the start-up torque load on the motor, thereby allowing the motor to be sized for normal operating requirements rather than oversized for start-up requirements.

Abstract: A turbo vacuum pump has a rotor and magnetic bearings. The magnetic bearings are held in a housing having a suction port and an exhaust port, and support the rotor rotatably. A peripheral flow pump stage and screw pump stage are formed in the rotor, so that the pressure at the exhaust port can be at or near atmospheric pressure level. Before starting the turbo vacuum pump, the magnetic bearings are operated to displace a rotor position and to scrape off the reaction products which have deposited inside the pump. In addition, before starting the turbo vacuum pump, a stator of the pump is heated up to decrease a binding force of the reaction products. Therefore, the pump can be restarted, even if the rotor has locked by the solidification of deposited reaction products formed during stopping of the pump.

Abstract: A rotary pump system includes a rotary pump, a turbine for driving the pu and a coupling interconnecting a shaft of the turbine and a shaft of the pump. A speed monitoring system determines rotational speed of the pump shaft, is programmed with selected speeds for the pump during operation, and is adapted to send a signal responsive to a difference between the determined speed and the programmed speed. A brake is engageable with the coupling, and a brake valve is adapted to receive the signal and, in response thereto, to operate the brake to conform the speed of the pump to the programmed speed.

Abstract: A vapor compression refrigeration system, such as a water chiller, uses a centrifugal compressor with magnetic bearings and a refrigerant, specifically HFC-227ea and HFC-227ca, to minimize enthalpy rise across the compressor and/or provide compression in a single stage for low cooling capacity. Magnetic bearings eliminate the problem caused by lubricated bearings to support rotating structure during normal compressor operation. The centrifugal compressor can be configured with a pre-defined static surge line.

Abstract: A screw type dry vacuum pump having dual shafts is disclosed, whereby the process gas is transported through three compartments, a gas admittance pump section, a central drive motor section, and a gas discharge pump section. By placing the drive motor in the center of the pump, it becomes possible to design a pump having the dual shafts supported only at one end, thus enabling to mount the rotors at the free ends of the pump which are closed with end plates which can be removed easily for servicing the pump sections. Synchronous operation of the dual shaft pump by magnetic coupling enables to lower power consumption and to extend the range of operable pressures.

Abstract: A method and apparatus for evacuating a vacuum system which includes an evacuating portion comprising first and second vacuum pumps which are connected in series. The method and the apparatus are characterized in that the first vacuum pump is operated in a range from reverse rotation to forward rotation, and the second vacuum pump is rotated unidirectionally, thereby enabling pressure control of the vacuum system over a wide range.

Abstract: Balancing the load between compressors is not trivial. An approach is disclosed to balance loads for compression systems which have the characteristic that the surge parameters, S, change in the same direction with rotational speed during the balancing process. Load balancing control involves equalizing the pressure ratio, rotational speed, or power (or functions of these) when the compressors are operating far from surge. Then, as surge is approached, all compressors are controlled, such that they arrive at their surge control lines simultaneously.

Abstract: Air handling apparatus (10) delivers a volume of air at a generally constant flow rate regardless of changes in the operating conditions of a system with which the apparatus is used. A blower (12) pushes air from one point to another. The blower is operated by a blower motor (14). A switch (16) controls application of power to the motor. Sensors (20) are used to sense the current drawn by the motor and the motor's operating speed. A flow controller (22) establishes a desired air flow rate to be provided by the blower. A processor (18) is responsive to the sensed current (I), motor speed (S), an input (C) from the flow controller, and constants (K1-K4) related to performance characteristics of the blower to determine a torque required by the motor to produce a predetermined air flow rate. The torque value is determined as a function of the combined motor speed input from the sensor and an input from the flow controller.

Abstract: In a magnetically suspended type pump, an operating state of the pump can be obtained without using a pressure gauge and a flowmeter. In addition, in the case where the magnetically suspended type pump is applied to a blood pump, in order to reduce the number of connections in a flow path and to avoid thrombus formation, a correlation between current flowing in a motor and flow or a correlation between current flowing in the motor and pressure is obtained in advance, and the speed of rotation of motor is varied by a speed of rotation control circuit in response to an instruction from a CPU circuit, based on the obtained correlation between current and flow or between current and pressure, whereby flow or pressure is controlled.

Abstract: The position of a rotating pump element is sensed by a reflective object sensor 406 in association with a view disk 412 coupled to the operative element for rotation in synchrony with the operative element. The view disk 412 has first 422 and second 420 surface portions that present themselves in succession to the reflective object sensor during rotation of the operative element. The first surface portion 422 is spaced at or near the optical focus of the reflective object sensor, whereas the second surface portion 422 is not. The reflective object sensor 406 thus generates different outputs, depending upon whether the first surface or second surface portions are in optical alignment with the reflective object sensor.

Abstract: An evacuating apparatus includes a first pump section disposed on a suction opening side, a second pump section for exhausting a smaller amount of gas than the first pump section, the second pump being disposed in an exhaust opening side, a plurality of rotors accommodated in a housing, bearings for supporting rotation of the rotors, a suction opening for drawing fluid and a first exhaust opening thereof both formed on the housing, and a plurality of motors for driving the rotors. In the apparatus, the first pump section is a pump of positive displacement type formed by utilizing a volume change of a space defined by the rotors and the housing, and the second pump section is a viscous-type pump formed by utilizing a relatively moving surface formed in a small gap defined between the rotors and the housing.

Abstract: Method and circuit configuration for controlling the flow rate of an electromotively driven hydraulic pump which is activated by a variable pulse/pulse-break train for controlling the auxiliary pressure supply of a brake system including anti-lock control (ABS) and traction slip control by brake management (BASR). The generator voltage produced by the pump motor during times of pulse break is evaluated as a standard of the rotational speed of the pump. The nominal value of the pump speed is compared with the actual value of the pump speed in a control circuit, and the new correcting variable for the pump activation is derived from the difference.

Abstract: A positive displacement pump includes a plurality of rotors accommodated in a housing, each of the rotors having a non-circular sectional shape, bearings for supporting rotation of the rotors, a fluid inlet formed in the housing on its suction side and a fluid outlet formed in the housing on its discharge side, motors for independently rotating the plurality of rotors, and detecting devices for detecting a rotating angle and/or a rotation frequency of each of the rotors. While the plurality of rotors are controlled to be synchronously rotated basis on of signals from the detecting devices, a change of a volume of a space defined by the rotors and housing from the suction side to the discharge side is utilized to thereby draw in and discharge a fluid.

Abstract: To capacity control a refrigeration system including a compressor, a condenser, and an evaporator all connected in a closed refrigeration circuit, the compressor having a plurality of adjustable inlet guide vanes and driven by an internal combustion engine, signals indicating the condenser pressure; the evaporator pressure; the inlet guide vanes position; the engine speed; the chilled water discharge temperature; and the engine intake manifold pressure are processed by a microprocessor to continuously calculate a surface speed and to equalize engine speed and calculated surface speed utilizing a fuzzy logic algorithm.

Abstract: In a pump in which dual plunger is reciprocated with cams attached to the rotating shaft of a motor, the delivery pressure of liquid is measured during a certain period in each cycle of the pump. By setting the pressure during the certain period as a standard pressure value, the motor is controlled so that the delivery pressure during the remaining period in each cycle approaches to the standard pressure value. In this pump, rotating-speed-priority control and pressure-priority control are alternatingly performed to decrease pulsation during delivering liquid.

Abstract: A method and apparatus for automatically shutting off a dispensing device when the fluid source tank is empty includes a programmed pump controller in communication with the dispensing device and a flowmeter having a pulse generator. Upon startup of the dispensing device, the controller waits for an initial time period, then periodically determines the pulse frequency which correlates to a rate of fluid flow. The pulse frequency is compared to a calculated average pulse frequency and, if the pulse frequency has changed a pre-selected, pre-determined amount or percentage when compared to the average pulse frequency the dispensing device is shut-off. The change in pulse frequency indicates ingestion of air into the pumping system meaning an empty source tank.

Abstract: Improvements in piston-based ventilator design and operation are described. In one aspect, individual compensation of force dissipation within the gas delivery system is effected, so that the desired gas pressure is delivered to the patient airway without the necessity for monitoring the actual pressure and using it as feedback. In another aspect, a piston is dimensioned slightly less than the chamber wall of the pump to define a gap through which an acceptable amount of gas may leak but which eliminates the need for a physical seal, thereby minimizing the frictional resistance within the pump.

Abstract: The present invention is an improved flow-metered pumping system using an air-backed diaphragm pump with load compensation. A variable motor speed controller is used to compensate for flow rate reduction caused by pressure effects. When the output pressure on the pump increases to a point where the load on the pump motor exceeds a specified threshold, the motor speed controller increases the speed of the motor to compensate for pressure induced diaphragm distortion losses and to achieve a substantially constant flow rate across a range of pump output pressures.

Abstract: Devices and methods for perfusing organs by controlling either the perfusion pressure or the perfusate flow rate. The operator may select either method of perfusion control. Also provided are devices and methods for perfusing multiple organs simultaneously on the same device.

Abstract: An axial-flow pump combined with an electric motor coaxially arranged therearound. The rotor (1) and stator (2) are common to both the electric motor and the pump. The rotor comprises a central tubular portion (11) defining a central channel (14) with a wall (15) provided with blades (16). The blades preferable do not extend as far as the channel axis (3) so that they define a central free area therealong. The outer portion of the rotor (1) has pairs of permanent magnets (24, 25) with stator coils (9) therebetween. The coils are actuated and deactuated by an electronic switching device (28) controlled by sensors (36, 37) for sensing markings on the rotor. The length of the rotor is smaller than its outer diameter. Said pump may be used to pump liquids or gases and drive vehicles, particularly submarines.

Abstract: Fluid pounding in a pumpjack is minimized by dictating the length of the run cycles of the pumpjack. The pumpjack is first allowed to pump down until a fluid pounding state is reached, at which time it is shut down. The time it takes to reach this state is monitored. Using the length of time it took to reach the fluid pounding state, the pumpjack is set to run a predetermined number of dictated cycles for a length of time which is 70-99% of the time it took to reach the fluid pounding state. During these predetermined number of cycles if the pumpjack again reaches a fluid pounding state the time is reset based on this new information, and the number of predetermined number of dictated cycles left is finished. After the predetermined number of cycles has finished, the process is repeated by allowing the pumpjack to run to a fluid pounding state.

Abstract: Air handling apparatus (10) for delivering a volume of air at a generally constant flow rate regardless of changes in the operating conditions of a system with which the apparatus is used. A blower (12) pushes air from one point to another. The blower is operated by a blower motor (14). A switch (16) controls application of power to the motor. Sensors (20) are used to sense the voltage supplied to the motor, the current drawn by the motor, and the motor's operating speed. A flow controller (22) establishes a desired air flow rate to be provided by the blower. A processor (18) is responsive to the sensed voltage (V), current (I), and speed (S), an input (C) from the flow controller, and constants (K1-K4) related to performance characteristics of the blower to determine a torque required by the motor to produce a predetermined air flow rate. The torque value is determined as a function of the combined motor speed input from the sensor and an input from the flow controller.

Abstract: A vacuum system comprises, as an integral assembly, a turbomolecular pump with drive motor, a vent valve, a purge valve, a roughing valve, a heater and an electronic control module. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. Proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated.

Abstract: A synchronous rotating apparatus synchronously rotates a plurality of rotary shafts independently driven by corresponding driving devices. The apparatus includes: a mechanical regulating member, arranged on the shafts, for maintaining relative rotating positions of the shafts at a predetermined angular difference; a rotation velocity and phase-detecting member, arranged on each shaft, for detecting rotation velocities of the shafts and phases within a regulated angular difference of the regulating member, and a driving control device for controlling the driving devices of the shafts so as to synchronously rotate the shafts based on a phase difference detected by the detecting member. The apparatus is applied to a fluid rotary apparatus.

Abstract: A fluid rotating apparatus according to the present invention is designed to promptly achieve an extremely high degree of vacuum from atmospheric pressure by its single apparatus. Moreover, high-speed synchronous rotation of the rotary shafts of the apparatus is controlled by use of a rotary position detecting sensor, to thereby avoid control through mechanical contact thereof with a gear or the like. In addition, hydrostatic bearings are employed for supporting the rotary shaft to avoid mechanical abrasion and the use of lubricant oil.