Dielectric Layer Having Refractive Index Specified Patents (Class 428/824.5)
  • Method for manufacturing organic electroluminescent element with bi-layer cathode
    Patent number: 9312488
    Abstract: A method of forming an upper electrode in an organic electroluminescent element is provided. A first film made of a material for the upper electrode is formed on an organic functional layer by magnetron sputtering under a first condition. Thereafter, a second film made of the material for the upper electrode is formed on the first film by magnetron sputtering under a second condition different from the first condition. The second film has a lower film stress than the first film.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: April 12, 2016
    Assignee: JOLED INC.
    Inventors: Masaki Aonuma, Takuya Satoh, Akira Takiguchi, Yoichiro Yashiro