Plasma-formed Carbon Overcoat Patents (Class 428/835.2)
  • Patent number: 11969752
    Abstract: The present invention discloses an organic polymer film and a manufacturing method thereof. The organic polymer film is mainly manufactured by the following steps. Firstly, the step (A) provides a xylene precursor and a substrate, and the step (B) places the substrate inside of a plasma equipment. After that, the step (C) evacuates the plasma equipment while introducing a carrier gas which carries vapor of the xylene precursor, and the step (D) turns on a pulse power supply system of the plasma equipment, generating a short pulse for plasma ignition. Finally, the step (E) forms the organic polymer film on the substrate. In the aforementioned steps, the frequency of the short pulse plasma is between 1 Hz˜10,000 Hz, and the pulse period of the short pulse plasma is between 1 ?s˜60 ?s.
    Type: Grant
    Filed: December 17, 2021
    Date of Patent: April 30, 2024
    Assignee: FENG CHIA UNIVERSITY
    Inventors: Ping-Yen Hsieh, Xuan-Xuan Chang, Ying-Hung Chen, Chu-Liang Ho
  • Patent number: 11898248
    Abstract: A coating apparatus includes a chamber body having a reaction chamber, a supporting rack, a monomer discharge source and a plasma generation source. The supporting rack has a supporting area for supporting the substrate. The monomer discharge source has a discharge inlet for introducing a coating forming material into the reaction chamber. The plasma generation source is arranged for exciting the coating forming material, wherein the supporting area of the supporting rack is located at a position between the monomer discharge source and the plasma generation source, so that the coating is evenly formed on the surface of the substrate, and the deposition velocity is increased.
    Type: Grant
    Filed: March 10, 2020
    Date of Patent: February 13, 2024
    Assignee: JIANGSU FAVORED NANOTECHNOLOGY CO., LTD.
    Inventor: Jian Zong
  • Patent number: 11705333
    Abstract: Methods and systems for forming a structure including multiple carbon layers and structures formed using the method or system are disclosed. Exemplary methods include forming a first carbon layer and a second carbon layer, wherein a density and/or other property of the first carbon layer differs from the corresponding property of the second carbon layer.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: July 18, 2023
    Assignee: ASM IP Holding B.V.
    Inventors: Yoshio Susa, Ryo Miyama, Yoshiyuki Kikuchi
  • Patent number: 11348603
    Abstract: A slider comprises an air bearing surface having a leading edge at a first end of the air bearing surface; a trailing edge at a second end of the air bearing surface, wherein the first end is opposite to the second end; a first region adjacent to the trailing edge, wherein the first region comprises one or more transducer elements; and a second region adjacent to the first region and the leading edge. The air bearing surface has a protective overcoat layer as an outermost layer, wherein the protective overcoat layer extends across the entire air bearing surface. The air bearing surface comprises a lapped surface and a plurality of milled surfaces, wherein a surface potential difference between the lapped surface and a milled surface is 0+/?50 milliVolts or less as measured according to Kelvin Probe Force Microscopy (KPFM).
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: May 31, 2022
    Assignee: Seagate Technologv LLC
    Inventors: Amy Jo Bergerud, Iris Cheng Xiong
  • Publication number: 20150044510
    Abstract: A method of protecting a magnetic information storage medium is described. The method includes fabricating a film over a surface of the magnetic information storage medium. The film includes an amorphous, uniform, homogeneous solid solution of carbon, hydrogen, silicon, and oxygen. A magnetic storage medium with such a protective film is described.
    Type: Application
    Filed: September 15, 2014
    Publication date: February 12, 2015
    Inventors: Robert W. Carpick, Kumar Sridharan
  • Patent number: 8771850
    Abstract: A substrate having a carbon-deuterium protective overcoat layer, and method for making the same. In some embodiments, the substrate includes a recording structure having a magnetic recording layer. A protective overcoat layer is Formed on the recording structure, the protective overcoat layer composed of carbon-carbon (C—C) and carbon-deuterium (C-D) bonds and having no carbon-hydrogen (C—H) bonds.
    Type: Grant
    Filed: March 16, 2012
    Date of Patent: July 8, 2014
    Assignee: Seagate Technology LLC
    Inventors: Paul Max Jones, Christopher Loren Platt, Emil John Catoc Esmenda, Lang Nhu Dinh, Junwei Huang, James Dillon Kiely
  • Publication number: 20130196177
    Abstract: A protective film for a magnetic recording medium is composed of amorphous carbon containing fluorine and nitrogen, the fluorine and nitrogen being present in a region 0.5 nm deep from a surface of the protective film. A magnetic recording medium includes a substrate; a metal film layer placed on the substrate; and the protective film placed on the metal film layer. A method for producing the protective film for a magnetic recording medium includes providing a stacked body containing a substrate and a metal film layer formed on the substrate; forming the protective film on the stacked body; and plasma-processing the protective film in a fluorine-containing gas and a nitrogen-containing gas. The protective film of the present invention simultaneously accomplishes reduction in film thickness, improvement of durability and corrosion resistance, and improvement of the bonding strength of the surface of the protective film to a lubricating film.
    Type: Application
    Filed: February 23, 2011
    Publication date: August 1, 2013
    Applicant: FUJI ELECTRIC CO., LTD.
    Inventors: Naruhisa Nagata, Ryoji Kobayashi, Yoshihisa Suzuki
  • Patent number: 8092931
    Abstract: A protection layer containing carbon as a major component is deposited by plasma CVD. The protection layer has film quality such that, when a spectrum is obtained by excluding photoluminescence from a Raman spectrum in a wavenumber band from 900 cm?1 to 1800 cm?1 obtained by exciting the protection layer with an argon ion laser beam having a wavelength of 514.5 nm and the spectrum is subjected to waveform separation by the Gaussian function to split a D peak appearing around 1350 cm?1 and a G peak appearing around 1520 cm?1, the ratio Dw/Gw between a half width Dw of the D peak and a half width Gw of the G peak exceeds 0 and is not greater than 2.7.
    Type: Grant
    Filed: June 18, 2008
    Date of Patent: January 10, 2012
    Assignee: WD Media (Singapore) Pte. Ltd.
    Inventors: Masafumi Ishiyama, Kenji Ayama
  • Publication number: 20110256426
    Abstract: In a vacuum arc evaporation apparatus, to stably maintain vacuum arc discharge at an arc source when depositing a cathode material on a substrate, namely a magnetic recording medium, an ungrounded anode of a coil-type tube is placed inside an arc source discharge vacuum chamber. A DC arc power supply is connected between the cathode and the anode to cause an arc current to flow in the anode to generate a first magnetic field in one direction, from the cathode toward the anode. A second magnetic field is generated in the opposite direction, from the anode to the cathode by feeding a specified current to an external coil positioned around the discharge chamber. The external coil includes an around-cathode coil and an around-anode coil. The arc discharge can be started by operating a striker to carry out the deposition.
    Type: Application
    Filed: June 29, 2011
    Publication date: October 20, 2011
    Applicant: FUJI ELECTRIC CO. LTD.
    Inventor: Naruhisa NAGATA
  • Patent number: 7573663
    Abstract: A master for magnetic transfer is provided that obtains favorable close contact with a slave medium, is capable of good positioning therewith, and prevents positional misalignment, damage, and separation failures. The master carrier is formed to have surface properties such that a frictional characteristic value F/P·A is within a range from 173 to 24/cm2, and preferably within a range from 112 to 45/cm2, when the master carrier and the slave medium are placed in uniform close contact with a contact area A, a vertical load P is applied, the master carrier and the slave medium are pulled in their planar directions, and the maximum static friction at this time is designated as F. It is also preferable that a hard protective layer of DLC film is formed on the surface of the master carrier, and that a lubricant is provided on the hard protective layer, as necessary.
    Type: Grant
    Filed: March 11, 2005
    Date of Patent: August 11, 2009
    Assignee: FUJIFILM Corporation
    Inventor: Naoto Fujiwara
  • Publication number: 20080268294
    Abstract: A protection layer containing carbon as a major component is deposited by plasma CVD. The protection layer has film quality such that, when a spectrum is obtained by excluding photoluminescence from a Raman spectrum in a wavenumber band from 900 cm?1 to 1800 cm?1 obtained by exciting the protection layer with an argon ion laser beam having a wavelength of 514.5 nm and the spectrum is subjected to waveform separation by the Gaussian function to split a D peak appearing around 1350 cm?1 and a G peak appearing around 1520 cm?1, the ratio Dw/Gw between a half width Dw of the D peak and a half width Gw of the G peak exceeds 0 and is not greater than 2.7.
    Type: Application
    Filed: June 18, 2008
    Publication date: October 30, 2008
    Inventors: Masafumi Ishiyama, Kenji Ayama
  • Patent number: 7070871
    Abstract: A method of manufacturing a metallic thin film type magnetic recording medium is provided. The method comprises the steps of arranging an initial substance of said recording medium in opposition to a plasma discharge electrode, said initial substance comprising a non-magnetic support base, a metallic layer capable of functioning as a metallic electrode formed on said non-magnetic support base and a metallic magnetic layer formed on said metallic layer, and forming a protection film on a surface of said initial substance of said recording medium by way of generating plasma discharge while feeding raw material gas between said metallic layer/said metallic magnetic layer and said plasma discharge electrode.
    Type: Grant
    Filed: June 27, 2002
    Date of Patent: July 4, 2006
    Assignee: Sony Corporation
    Inventors: Ryoichi Hiratsuka, Ichiro Kanagawa, Kasumi Suzuki, Tomoe Ozaki