Plasma-formed Carbon Overcoat Patents (Class 428/835.2)
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Patent number: 11969752Abstract: The present invention discloses an organic polymer film and a manufacturing method thereof. The organic polymer film is mainly manufactured by the following steps. Firstly, the step (A) provides a xylene precursor and a substrate, and the step (B) places the substrate inside of a plasma equipment. After that, the step (C) evacuates the plasma equipment while introducing a carrier gas which carries vapor of the xylene precursor, and the step (D) turns on a pulse power supply system of the plasma equipment, generating a short pulse for plasma ignition. Finally, the step (E) forms the organic polymer film on the substrate. In the aforementioned steps, the frequency of the short pulse plasma is between 1 Hz˜10,000 Hz, and the pulse period of the short pulse plasma is between 1 ?s˜60 ?s.Type: GrantFiled: December 17, 2021Date of Patent: April 30, 2024Assignee: FENG CHIA UNIVERSITYInventors: Ping-Yen Hsieh, Xuan-Xuan Chang, Ying-Hung Chen, Chu-Liang Ho
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Patent number: 11898248Abstract: A coating apparatus includes a chamber body having a reaction chamber, a supporting rack, a monomer discharge source and a plasma generation source. The supporting rack has a supporting area for supporting the substrate. The monomer discharge source has a discharge inlet for introducing a coating forming material into the reaction chamber. The plasma generation source is arranged for exciting the coating forming material, wherein the supporting area of the supporting rack is located at a position between the monomer discharge source and the plasma generation source, so that the coating is evenly formed on the surface of the substrate, and the deposition velocity is increased.Type: GrantFiled: March 10, 2020Date of Patent: February 13, 2024Assignee: JIANGSU FAVORED NANOTECHNOLOGY CO., LTD.Inventor: Jian Zong
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Patent number: 11705333Abstract: Methods and systems for forming a structure including multiple carbon layers and structures formed using the method or system are disclosed. Exemplary methods include forming a first carbon layer and a second carbon layer, wherein a density and/or other property of the first carbon layer differs from the corresponding property of the second carbon layer.Type: GrantFiled: May 18, 2021Date of Patent: July 18, 2023Assignee: ASM IP Holding B.V.Inventors: Yoshio Susa, Ryo Miyama, Yoshiyuki Kikuchi
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Patent number: 11348603Abstract: A slider comprises an air bearing surface having a leading edge at a first end of the air bearing surface; a trailing edge at a second end of the air bearing surface, wherein the first end is opposite to the second end; a first region adjacent to the trailing edge, wherein the first region comprises one or more transducer elements; and a second region adjacent to the first region and the leading edge. The air bearing surface has a protective overcoat layer as an outermost layer, wherein the protective overcoat layer extends across the entire air bearing surface. The air bearing surface comprises a lapped surface and a plurality of milled surfaces, wherein a surface potential difference between the lapped surface and a milled surface is 0+/?50 milliVolts or less as measured according to Kelvin Probe Force Microscopy (KPFM).Type: GrantFiled: July 14, 2021Date of Patent: May 31, 2022Assignee: Seagate Technologv LLCInventors: Amy Jo Bergerud, Iris Cheng Xiong
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Publication number: 20150044510Abstract: A method of protecting a magnetic information storage medium is described. The method includes fabricating a film over a surface of the magnetic information storage medium. The film includes an amorphous, uniform, homogeneous solid solution of carbon, hydrogen, silicon, and oxygen. A magnetic storage medium with such a protective film is described.Type: ApplicationFiled: September 15, 2014Publication date: February 12, 2015Inventors: Robert W. Carpick, Kumar Sridharan
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Patent number: 8771850Abstract: A substrate having a carbon-deuterium protective overcoat layer, and method for making the same. In some embodiments, the substrate includes a recording structure having a magnetic recording layer. A protective overcoat layer is Formed on the recording structure, the protective overcoat layer composed of carbon-carbon (C—C) and carbon-deuterium (C-D) bonds and having no carbon-hydrogen (C—H) bonds.Type: GrantFiled: March 16, 2012Date of Patent: July 8, 2014Assignee: Seagate Technology LLCInventors: Paul Max Jones, Christopher Loren Platt, Emil John Catoc Esmenda, Lang Nhu Dinh, Junwei Huang, James Dillon Kiely
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Publication number: 20130196177Abstract: A protective film for a magnetic recording medium is composed of amorphous carbon containing fluorine and nitrogen, the fluorine and nitrogen being present in a region 0.5 nm deep from a surface of the protective film. A magnetic recording medium includes a substrate; a metal film layer placed on the substrate; and the protective film placed on the metal film layer. A method for producing the protective film for a magnetic recording medium includes providing a stacked body containing a substrate and a metal film layer formed on the substrate; forming the protective film on the stacked body; and plasma-processing the protective film in a fluorine-containing gas and a nitrogen-containing gas. The protective film of the present invention simultaneously accomplishes reduction in film thickness, improvement of durability and corrosion resistance, and improvement of the bonding strength of the surface of the protective film to a lubricating film.Type: ApplicationFiled: February 23, 2011Publication date: August 1, 2013Applicant: FUJI ELECTRIC CO., LTD.Inventors: Naruhisa Nagata, Ryoji Kobayashi, Yoshihisa Suzuki
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Patent number: 8092931Abstract: A protection layer containing carbon as a major component is deposited by plasma CVD. The protection layer has film quality such that, when a spectrum is obtained by excluding photoluminescence from a Raman spectrum in a wavenumber band from 900 cm?1 to 1800 cm?1 obtained by exciting the protection layer with an argon ion laser beam having a wavelength of 514.5 nm and the spectrum is subjected to waveform separation by the Gaussian function to split a D peak appearing around 1350 cm?1 and a G peak appearing around 1520 cm?1, the ratio Dw/Gw between a half width Dw of the D peak and a half width Gw of the G peak exceeds 0 and is not greater than 2.7.Type: GrantFiled: June 18, 2008Date of Patent: January 10, 2012Assignee: WD Media (Singapore) Pte. Ltd.Inventors: Masafumi Ishiyama, Kenji Ayama
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Publication number: 20110256426Abstract: In a vacuum arc evaporation apparatus, to stably maintain vacuum arc discharge at an arc source when depositing a cathode material on a substrate, namely a magnetic recording medium, an ungrounded anode of a coil-type tube is placed inside an arc source discharge vacuum chamber. A DC arc power supply is connected between the cathode and the anode to cause an arc current to flow in the anode to generate a first magnetic field in one direction, from the cathode toward the anode. A second magnetic field is generated in the opposite direction, from the anode to the cathode by feeding a specified current to an external coil positioned around the discharge chamber. The external coil includes an around-cathode coil and an around-anode coil. The arc discharge can be started by operating a striker to carry out the deposition.Type: ApplicationFiled: June 29, 2011Publication date: October 20, 2011Applicant: FUJI ELECTRIC CO. LTD.Inventor: Naruhisa NAGATA
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Patent number: 7573663Abstract: A master for magnetic transfer is provided that obtains favorable close contact with a slave medium, is capable of good positioning therewith, and prevents positional misalignment, damage, and separation failures. The master carrier is formed to have surface properties such that a frictional characteristic value F/P·A is within a range from 173 to 24/cm2, and preferably within a range from 112 to 45/cm2, when the master carrier and the slave medium are placed in uniform close contact with a contact area A, a vertical load P is applied, the master carrier and the slave medium are pulled in their planar directions, and the maximum static friction at this time is designated as F. It is also preferable that a hard protective layer of DLC film is formed on the surface of the master carrier, and that a lubricant is provided on the hard protective layer, as necessary.Type: GrantFiled: March 11, 2005Date of Patent: August 11, 2009Assignee: FUJIFILM CorporationInventor: Naoto Fujiwara
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Publication number: 20080268294Abstract: A protection layer containing carbon as a major component is deposited by plasma CVD. The protection layer has film quality such that, when a spectrum is obtained by excluding photoluminescence from a Raman spectrum in a wavenumber band from 900 cm?1 to 1800 cm?1 obtained by exciting the protection layer with an argon ion laser beam having a wavelength of 514.5 nm and the spectrum is subjected to waveform separation by the Gaussian function to split a D peak appearing around 1350 cm?1 and a G peak appearing around 1520 cm?1, the ratio Dw/Gw between a half width Dw of the D peak and a half width Gw of the G peak exceeds 0 and is not greater than 2.7.Type: ApplicationFiled: June 18, 2008Publication date: October 30, 2008Inventors: Masafumi Ishiyama, Kenji Ayama
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Patent number: 7070871Abstract: A method of manufacturing a metallic thin film type magnetic recording medium is provided. The method comprises the steps of arranging an initial substance of said recording medium in opposition to a plasma discharge electrode, said initial substance comprising a non-magnetic support base, a metallic layer capable of functioning as a metallic electrode formed on said non-magnetic support base and a metallic magnetic layer formed on said metallic layer, and forming a protection film on a surface of said initial substance of said recording medium by way of generating plasma discharge while feeding raw material gas between said metallic layer/said metallic magnetic layer and said plasma discharge electrode.Type: GrantFiled: June 27, 2002Date of Patent: July 4, 2006Assignee: Sony CorporationInventors: Ryoichi Hiratsuka, Ichiro Kanagawa, Kasumi Suzuki, Tomoe Ozaki