Having Imagewise Portion Removal Of Radiation-sensitive Imaging Layer (e.g., Dissolving, Transfer, Plasma Etching, Etc.) Patents (Class 430/49.4)
Removal of portion under imaging layer of toner area only (Class 430/49.41)
Includes etching substrate (Class 430/49.42)
By wet removal (e.g., solvent, surface active agent solution, alkaline solution, etc.) (Class 430/49.43)
  • Imprint lithography
    Patent number: 7490547
    Abstract: An imprinting method is provided that, according to an embodiment, involves contacting an imprintable medium on a substrate with a template to define an imprint area in the medium, removing at least some of any imprintable medium present outside the imprint area, and separating the template from the medium.
    Type: Grant
    Filed: December 30, 2004
    Date of Patent: February 17, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Helmar Van Santen, Aleksey Yurievich Kolesnychenko