Abstract: The disclosure relates to a flange for a process tube in an apparatus for processing substrates, e.g., a vertical furnace. The flange may be provided with an opening for in use giving access to the process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange. A material with a heat conductivity between 0.1 and 40 W/m K may be at least partially provided in between the cooling fluid and the rest of the flange.

Abstract: A conveyor unit for moving products in a conveying direction is disclosed. The unit comprises first beams extending along the conveying direction substantially parallel to each other. The first beams are slidably mounted on rollers and are displaceable in a back-and-forth reciprocating motion along the conveying direction between an upstream position and a downstream position. The unit further comprises second beams extending along the conveying direction and arranged interleaved with the first beams. The second beams are configured to be displaceable in an up-and-down reciprocating motion between a lower vertical position and an upper vertical position along a vertical direction that is defined in a plane substantially perpendicular to a plane of the conveying direction, wherein an upper working surface of the first beams is positioned along the vertical direction, between the lower vertical position and the upper vertical position.

Abstract: An apparatus for sealing a fan drive shaft in a vacuum heat treating furnace is disclosed. The sealing apparatus includes a housing having an annular body and a central opening. An inflatable first seal surrounds the central opening of the annular body. A second seal surrounds the central opening and is adjacent to the inflatable first seal. The sealing apparatus also includes a channel formed in the annular body adjacent to the second seal for conducting a purging fluid into the central opening. A means for injecting the purging fluid into the central opening is operably connected to the channel. A vacuum heat treating furnace and a fan drive system incorporating the sealing apparatus are also described.

Abstract: A substrate processing apparatus includes a substrate holding part configured to hold and support a substrate, a heating module configured to heat a substrate, and a cooling module configured to cool the substrate heated in the heating module. The substrate processing apparatus further includes a substrate transfer mechanism configured to take out the substrate from the substrate holding part and to sequentially transfer the substrate to the heating module and the cooling module, and a control unit configured to set a cooling time of the substrate in the cooling module based on a transfer history of the substrate while the substrate heated in the heating module is loaded into the cooling module.

Abstract: The inventive subject matter is directed toward a pyrolytic waste treatment system comprising a pyrolysis chamber having a chamber wall with a hole through which a shaft passes. An insulating mechanism is used at the hole to inhibit heat from escaping through the opening in the chamber wall.

Abstract: A CVD device has a reaction furnace (39) for processing a wafer (1); a seal cap (20) for sealing the reaction furnace (39) hermetically; an isolation flange (42) opposite to the seal cap (20); a small chamber (43) formed by the seal cap (20), the isolation flange (42), and the wall surface in the reaction furnace (39); a feed pipe (19b) for supplying a first gas to the small chamber (43); an outflow passage (42a) provided in the small chamber (43) for allowing the first gas to flow into the reaction furnace (39); and a feed pipe (19a) provided downstream from the outflow passage (42a) for supplying a second gas into the reaction furnace (39). Byproducts such as NH4Cl are prevented from adhering to low temperature sections such as the furnace opening and therefore the semiconductor device production yield is therefore increased.

Abstract: A CVD device has a reaction furnace (39) for processing a wafer (1); a seal cap (20) for sealing the reaction furnace (39) hermetically; an isolation flange (42) opposite to the seal cap (20); a small chamber (43) formed by the seal cap (20), the isolation flange (42), and the wall surface in the reaction furnace (39); a feed pipe (19b) for supplying a first gas to the small chamber (43); an outflow passage (42a) provided in the small chamber (43) for allowing the first gas to flow into the reaction furnace (39); and a feed pipe (19a) provided downstream from the outflow passage (42a) for supplying a second gas into the reaction furnace (39). Byproducts such as NH4Cl are prevented from adhering to low temperature sections such as the furnace opening and therefore the semiconductor device production yield is therefore increased.

Abstract: A CVD device has a reaction furnace (39) for processing a wafer (1); a seal cap (20) for sealing the reaction furnace (39) hermetically; an isolation flange (42) opposite to the seal cap (20); a small chamber (43) formed by the seal cap (20), the isolation flange (42), and the wall surface in the reaction furnace (39); a feed pipe (19b) for supplying a first gas to the small chamber (43); an outflow passage (42a) provided in the small chamber (43) for allowing the first gas to flow into the reaction furnace (39); and a feed pipe (19a) provided downstream from the outflow passage (42a) for supplying a second gas into the reaction furnace (39). Byproducts such as NH4Cl are prevented from adhering to low temperature sections such as the furnace opening and therefore the semiconductor device production yield is therefore increased.

Abstract: A heat-treating apparatus capable of realizing a highly precise processing maintaining a high degree of safety, and a method of producing substrates are provided. The heat-treating apparatus comprises a reaction tube for treating substrates; a manifold for supporting the reaction tube; and a heater provided surrounding the reaction tube to heat the interior of reaction tube; wherein the reaction tube and the manifold are in contact with each other as their continuous flat surfaces come in contact with each other; a cover member is provided to cover the contact portion between the reaction tube and the manifold from the outer side; and the cover member is provided with at least either a gas feed port or an exhaust port communicated with a space formed among the cover member, the reaction tube and the manifold.

Abstract: An apparatus for sealing a fan drive shaft in a vacuum heat treating furnace is disclosed. The sealing apparatus includes a housing having an annular body and a central opening. An inflatable first seal surrounds the central opening of the annular body. A second seal surrounds the central opening and is adjacent to the inflatable first seal. The sealing apparatus also includes a channel formed in the annular body adjacent to the second seal for conducting a purging fluid into the central opening. A means for injecting the purging fluid into the central opening is operably connected to the channel. A vacuum heat treating furnace and a fan drive system incorporating the sealing apparatus are also described.

Abstract: A system used in a vertical furnace is provided that includes a tube. The tube includes a tube flange at its lower end. The tube flange provides a first sealing surface at its lower end. Further, there is a structural member at the lower surface of the tube flange. This structural member extends vertically away from the lower surface of the tube flange at a position that is displaced inwardly from the first sealing surface. The system also includes a removable door plate that provides a second sealing surface at its upper surface. The second sealing surface of the removable door plate is sealed with the first sealing surface of the tube flange.

Abstract: The inventive subject matter is directed toward a pyrolytic waste treatment system comprising a pyrolysis chamber having a chamber wall with a hole through which a shaft passes. An insulating mechanism is used at the hole to inhibit heat from escaping through the opening in the chamber wall.

Abstract: A pedestal for use in a high temperature vertical furnace for the processing of semiconductor wafers provides a closure and heat insulation for the lower end of the furnace and is a wafer boat support. The pedestal, comprising quartz-enveloped insulation material, supports a wafer boat at a boat support level and is provided with an upper section disposed above the boat support level. The upper section comprises enveloped insulating material. The envelope of the upper section is also formed of quartz and the insulating material in the upper section has a lower thermal conductance than the insulating material in a lower quartz enveloped section.

Abstract: A support sleeve for supporting a high temperature process tube comprises one or more circumferential channels, each channel connected to either a feed for gas or a vacuum exhaust. One circumferential channel opens to the top surface of the sleeve, on which the process tube is supported to provide a gas/vacuum seal between the process tube and support sleeve. Another circumferential channel is connected to a gas feed and provided with gas injection holes, evenly distributed along the support sleeve perimeter to provide a cylindrically symmetrical injection of process gas into the process tube. Another circumferential channel is connected to an exhaust for gas and provided with gas exhaust holes, evenly distributed along the circumference of the support sleeve, to provide a cylindrically symmetric exhaust of process gases from the process tube.

Abstract: A multiple-piece seal is used for a cure oven circulating fan. The seal may be readily positioned along the length of the shaft to control the small clearance between the rotating seal and the oven such that there is no contact between the seal and the oven, but the flow of heated air from the oven is substantially reduced and redirected away from the bearings of the circulating fan. The multiple-piece design permits seal replacement without having to disassemble the shaft, so that the seal may be replaced entirely from the outside of the oven, saving substantial down-time.

Abstract: A continuous microwave furnace (10) with furnace modules (12) is described, which modules, in a series of sequential placement, one after the other, form a heated zone. On the respective housing casing (14) is provided at least one microwave radiating source (30) located at a corresponding radiation window (31). In each respective furnace module (12) a sheet steel bottom (26) is furnished, this being adjustable as to height and is constructed with secondary radiating openings (28). In the continuous microwave furnace (10) is provided a transport apparatus (33), which is constructed of a conveyor belt or transport rollers. Air openings (35) can be supplied, neighboring the radiation window (31) of the respective microwave radiation source (30). The respective radiation source (30) is then combined with an air regulating apparatus (45).

Abstract: A heat treatment apparatus having a heat treatment furnace into which a hydrocarbon gas and an oxidization gas are introduced, wherein an outlet opening of a valve through which a pusher for pushing a work to be heat treated in the heat treatment furnace is movable is hermetically connected to a pusher insertion port formed on a wall of the heat treatment furnace, and a seal box is connected hermetically to an inlet opening of the valve, the pusher being movable hermetically through the seal box. An elevator door for opening and closing the heat treatment furnace has a guide pin projected therefrom, and a jam having an upper hook surface for receiving the guide pin thereon, the jam being pivotally supported so that when the elevator door is lowered, the elevator door is moved by the jam toward a seal surface of the opening of the heat treatment furnace.

Abstract: The invention relates to a cooler grate for a reciprocating grate cooler, with a plurality of grate plate supports extending transversely with respect to the cooler grate and constructed as hollow bodies, on which in each case grate plates are supported so that they are co-ordinated in transverse rows and sealed by means of screw connections, wherein the grate plates have cooling gas openings and cooling gas connecting channels are constructed between the grate plate support and the cooling gas openings.

Abstract: Apparatus and method for regenerating saturated adsorbents using microwave energy. A saturated adsorbent, such as activated carbon, is fed onto a continuously moving conveyor belt. The conveyor belt transports the carbon to a microwave cavity where the carbon is exposed to microwave energy. The cavity is defined by a containment enclosure which is sealed to prevent radiation leakage. The carbon is heated to a sufficient temperature to cause the contaminants to desorb. The system also includes vents for removing the desorbed contaminants and a holder for receiving the treated carbon discharged from the belt. The microwave cavity may be divided into a number of heating compartments so that the carbon on the belt is heated to different temperatures in each compartment. Each compartment is separately vented, thereby allowing selective recovery of the different contaminants in the carbon.

Abstract: The invention relates to a reciprocating grate cooler in which the drive arrangement is enclosed by a drive housing, the interior of which is closed off so as to be airtight against the atmosphere, but by contrast has a pressure equalization connection to the interior of the cooler housing. Such a reciprocating grate cooler is distinguished by a substantially reduced expenditure for the sealing of the cooler housing and a high degree of freedom from disruption.

Abstract: A vertical heat-treating apparatus which allows effective use of an installation space and improved productivity is disclosed. In this system, a plurality of housings, each accommodated with a vertical reactor, are aligned with each other. A gas feed unit and the like are arranged in front of each housing with a space disposed therebetween for conducting maintenance work. A rail is installed along the rear side of the housings. A boat liner is located on the rail for carrying a boat to the housings. An interface mechanism including a horizontal-vertical conversion handling unit for supplying the boat in a vertical state to the boat liner is disposed near the rail.

Abstract: A heating furnace for heating a porous preform made of fine particles of highly pure quartz glass for an optical fiber, which furnace comprises a cylindrical furnace body, a heater installed in said furnace body and a muffle tube installed inside said heater to separate a heating atmosphere from said heater, wherein said muffle tube is made of highly pure carbon and coated with a gas impermeable carbon, which furnace prevents contamination of the preform with impurities and has long life.

Abstract: There is provided a heating furnace comprising a furnace body, a cylindrical zone heater in the furnace body, a muffle tube installed through the furnace body for thermally treating a porous preform made of high purity quartz glass by moving the preform vertically therethrough and a partition means in the portion of the muffle tube projecting above the furnace body to divide an interior space of the muffle tube into an upper space and a lower one.

Abstract: A roller hearth furnace comprises a thermally insulated housing forming a heating space therein and a plurality of roller modules removably mounted in the housing for transporting parts longitudinally through the heating space. The modules are successively arranged along the direction of transport of the parts. Each module includes a pair of transversely spaced bearing beams removably supported in recesses of the housing, and a plurality of rotatably driven rollers having their ends supported in the bearing beams.

Abstract: An ingot pusher furnace includes means for reducing heat loss from the charging and discharging ends of the furnace so as to produce a more efficient and uniform heating of the ingots. The pusher furnace includes support rails which extend between a first opening in the front wall and a second opening in the rear wall and terminates inside of the charging and discharging doors. The charging and discharging doors extend below the support rails in their closed position so as to provide a positive seal. A first rail drawbridge is arranged adjacent the charging door to facilitate movement of the ingots into the furnace enclosure. The second rail drawbridge is arranged adjacent the discharging door to facilitate movement of the ingots out of the furnace enclosure.

Abstract: A baking oven heated by circulation of hot-air comprising a baking compartment with a turntable at the bottom thereof adapted for receiving a multiple rack cart which carries the material to be baked and which is rotated around a vertical axis. The turntable is provided with a drive gear therebelow coupled to a chain which in turn is coupled to a pinion on a vertical shaft extending outside the baking compartment and driven by a drive motor. A chain box surrounds the chain and includes a portion extending outside the baking compartment which is air-tight to prevent escape of vapor thereat from the baking compartment. The vertical shaft extends into the air-tight portion of the chain box via a seal.

Abstract: In continuous hot dipping of metal strip, the tension of the strip at pre-treatment furnaces and that at air-wiping nozzles are isolated and made independent of each other. For this purpose bridle rolls driven by motors are disposed downstream of the pre-treatment furnaces. The tension at the former is maintained at a lower value, while the tension at the latter is maintained at a higher value. The bridle rolls are mounted in bearings which are covered by seal boxes in which an inert gas is enclosed so as to prevent the intrusion of atmospheric air into the furnaces.

Abstract: Floatable tube sheets are provided for use in a reformer furnace or the like wherein a plurality of vertically oriented catalyst tubes are disposed in the fire box with the upper tube ends extending through the fire box roof. The tube sheets are located proximate apertures or channels in the roof through which the upper tube ends protrude and provide a seal to substantially minimize air leakage through the roof. At the same time, the tube sheet plates permit vertical expansion and contraction of the tubes. The tube sheet plates themselves are moveably mounted to the roof so that they can float vertically upwardly and downwardly through a limited distance so as to compensate for tube movement in those instances in which the tubes become bent or bowed during operation. At least a pair of contiguous tube sheet plates surround each tube to facilitate easy tube sheet removal without resulting in attendant removal of any neighboring tubes or, in some instances, furnace shutoff.

Abstract: A non-contact seal for thin film treating ovens to prevent leakage of gas both into and out of the oven at the film entry and exit points. An inert buffer gas is introduced into a narrow sealing slit defined between a pair of upper and lower sealing members adjacent the oven opening to buffer the oven gas leakage. An eductor passage also communicates with the sealing slit to carry away gas leakage resulting from thermal diffusion. Apparatus for precisely adjusting the height of the sealing slit to compensate for various film thicknesses and widths are provided. The temperature of the sealing members is regulated by the circulation of a fluid within passageways provided therein, thus to prevent thermal distortions of the slit defining surfaces.

Abstract: An insulation structure includes a hollow housing having first and second side walls spaced from each other, defining therebetween the interior of the housing. The walls are provided with a plurality of throughgoing holes. A plurality of rotatable rollers is provided in the housing extending from the first to the second walls. Each of the rollers has a portion which is narrower than that of the respective hole and which extends therethrough to the exterior of the housing. The structure is further provided with insulation to prevent heat leakage from the interior of the housing through the circumferential passage defined between the outer surface of each roller and the inner surface of the respective hole.

Abstract: An apparatus for sealing between edge control machines and forming chamber sidewalls is disclosed. The invention comprises collar means mounted surrounding the barrel of the edge control machine, alignment means fastened to the edge control machine for maintaining the collar aligned with the barrel of the edge control machine, and a flexible sleeve between the collar and the forming chamber sidewall.

Abstract: An improved apparatus for cooling heated metal items such as extrusion billets, and in particular billets of aluminum alloys is disclosed. The apparatus comprises a cooling chamber, means for transporting individual billets into and out of the cooling chamber, and inlet and outlet openings for the ingress and egress of a cooling medium from said chamber. A fan or the like is employed to produce a flow of air through the cooling chamber.

Abstract: A grate chain with a plurality of chain members hingedly joined together by bolts and having lateral edge plates with outwardly directed slide lips by which they are sealingly supported in the traveling grate housing.

Abstract: A furnace for flux-free soldering of aluminum-containing workpieces in a controlled atmosphere has a furnace chamber through which workpieces to be soldered are made to travel. The furnace chamber itself is a gas-tight metallic muffle which is thermally insulated from the outer part of the furnace and has an inlet for the workpieces and an outlet for them. A first lock chamber is interposed between the furnace chamber and the inlet, and a second lock chamber is interposed between the outlet and the furnace chamber. Arrangements are provided for admitting vacuum and protective gas into the lock chambers, and protective gas into the muffle and a heating arrangement is provided for heating the controlled atmosphere in the muffle.

Abstract: A roller hearth furnace having a plurality of horizontally elongated furnace modules aligned with each other in an end-to-end relationship so a roller conveyor may carry glass sheets horizontally through the furnace and thereby heat the glass prior to tempering. Each furnace module has a hollow construction with a circular cross-section defined by a semicircular lower housing portion and a semicircular upper housing portion. A separate counterbalance mechanism associated with each upper housing portion supports it independently of the others for movement between a lower closed position immediately over its associated lower housing portion and an upper open position where the interior of its associated lower housing portion is accessible. The counterbalance mechanisms each include four chains attached to counterweights in a manner that permits counter-balancing of the associated upper housing portion even if one chain should break.

Abstract: A glass tempering system including a roller hearth furnace that has a conveyor with elongated rollers extending through an elongated heating chamber of the furnace and outwardly through elongated slots in the sides of the furnace so as to be supported on drive belts which are slidably driven along support surfaces to thereby frictionally drive the rollers and convey glass sheets over the rollers through the heating chamber. The furnace is of a modular construction and includes upper and lower housing portions with inner layers of refractory material that define the heating chamber. Flanges of the refractory material cooperate to define the elongated slots at the sides of the furnace. Heat seal arrangements extend between the refractory flanges and the conveyor rollers to mitigate heat flow from the furnace during use. A first electric motor drive mechanism drives belt sheaves that receive the drive belt at the end of the furnace where glass enters the heating chamber.