Abstract: A method is provided for planarizing a structure such as a shallow trench isolation region on a semiconductor substrate. A semiconductor substrate is provided having raised and lowered regions with substantially vertical and horizontal surfaces. The lowered regions may correspond to trench regions. Filler material such as non-conformal high density plasma oxide may be deposited over the horizontal surfaces to at least a thickness equal to a predetermined height so as to provide raised and lowered regions of the filler material. The raised regions of the filler material may then be selectively removed without removing the filler material in the lowered regions.
Type:
Grant
Filed:
June 7, 1999
Date of Patent:
August 7, 2001
Assignee:
International Business Machines Corporation
Inventors:
John W. Andrews, Bao T. Hwang, Howard S. Landis, Shaw-Ning Mei, James M. Tyler, Edward J. Vishnesky
Abstract: A flexible writing surface including a coated flexible substrate having a dust collecting cuff around the perimeter thereof to prevent the scattering of chalk dust during use.