Forming Base Region Of Specified Dopant Concentration Profile (e.g., Inactive Base Region More Heavily Doped Than Active Base Region, Etc.) Patents (Class 438/350)
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Patent number: 11183587Abstract: Various embodiments of the present disclosure are directed towards a method for forming a bipolar junction transistor (BJT). A dielectric film is deposited over a substrate and comprises a lower dielectric layer, an upper dielectric layer, and an intermediate dielectric layer between the lower and upper dielectric layers. A first semiconductor layer is deposited over the dielectric film and is subsequently patterned to form an opening exposing the dielectric film. A first etch is performed into the upper dielectric layer through the opening to extend the opening to the intermediate dielectric layer. Further, the first etch stops on the intermediate dielectric layer and laterally undercuts the first semiconductor layer. Additional etches are performed to extend the opening to the substrate. A lower base structure and an emitter are formed stacked in and filling the opening, and the first semiconductor layer is patterned to form an upper base structure.Type: GrantFiled: July 9, 2020Date of Patent: November 23, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun-Tsung Kuo, Jiech-Fun Lu
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Patent number: 11081452Abstract: A field effect transistor includes: a semiconductor region including a first inactive region, an active region, and a second inactive region arranged side by side in a first direction; a gate electrode, a source electrode, and a drain electrode on the active region; a gate pad on the first inactive region; a gate guard on and in contact with the semiconductor region, the gate guard being apart from the gate pad and located between an edge on the first inactive region side of the semiconductor region and the gate pad; a drain pad on the second inactive region; a drain guard on and in contact with the semiconductor region, the drain guard being apart from the drain pad and located between an edge on the second inactive region side of the semiconductor region and the drain pad; and a metal film electrically connected to the gate guard.Type: GrantFiled: February 26, 2020Date of Patent: August 3, 2021Assignee: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.Inventor: Chihoko Akiyama
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Patent number: 9716117Abstract: The invention relates to the field of display technologies, and discloses a method for producing a via, a method for producing an array substrate, an array substrate and a display device to prevent a chamfer from being formed in producing the via, to promote the product quality and improve the display effect of the display device. The method for producing a via comprises: employing a first etching process to partially etch a top film layer in an area that needs to form a via above an electrode, wherein the vertical etching amount achieved by employing the first etching process is less than the thickness of the top film layer; and employing a second etching process for which the vertical etching rate is larger than the lateral etching rate to etch the remaining part in the area that needs to form a via, until the electrode is exposed.Type: GrantFiled: June 18, 2015Date of Patent: July 25, 2017Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventors: Changjiang Yan, Kai Lu, Jian Guo, Zhenyu Xie
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Patent number: 9053939Abstract: A heterojunction bipolar transistor (HBT) may include an n-type doped crystalline collector formed in an upper portion of a crystalline silicon substrate layer; a p-type doped crystalline p+Si1-xGex layer, formed above the n-type doped collector, that forms a p-type doped internal base of the HBT; a crystalline silicon cap formed on the p-type doped crystalline p+Si1-xGex layer, in which the crystalline silicon cap includes an n-type impurity and forms an n-type doped emitter of the HBT; and an n-type doped crystalline silicon emitter stack formed within an opening through an insulating layer to an upper surface of the crystalline silicon cap.Type: GrantFiled: November 23, 2011Date of Patent: June 9, 2015Assignee: International Business Machines CorporationInventors: Thomas N. Adam, David L. Harame, Qizhi Liu, Alexander Reznicek
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Patent number: 9048280Abstract: A vertical heterojunction bipolar transistor (HBT) includes doped polysilicon having a doping of a first conductivity type as a wide-gap-emitter with an energy bandgap of about 1.12 eV and doped single crystalline Ge having a doping of the second conductivity type as the base having the energy bandgap of about 0.66 eV. Doped single crystalline Ge having of doping of the first conductivity type is employed as the collector. Because the base and the collector include the same semiconductor material, i.e., Ge, having the same lattice constant, there is no lattice mismatch issue between the collector and the base. Further, because the emitter is polycrystalline and the base is single crystalline, there is no lattice mismatch issue between the base and the emitter.Type: GrantFiled: June 21, 2013Date of Patent: June 2, 2015Assignee: International Business Machines CorporationInventors: Jin Cai, Kevin K. Chan, Wilfried E. Haensch, Tak H. Ning
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Patent number: 9018069Abstract: A semiconductor structure and a method for manufacturing the same are provided. The semiconductor structure comprises a diode. The diode comprises a first doped region, a second doped region and a third doped region. The first doped region and the third doped region have a first conductivity type. The second doped region has a second conductivity type opposite to the first conductivity type. The second doped region and the third doped region are separated from each other by the first doped region. The third doped region has a first portion and a second portion adjacent to each other. The first portion and the second portion are respectively adjacent to and away from the second doped region. A dopant concentration of the first portion is bigger than a dopant concentration of the second portion.Type: GrantFiled: September 9, 2013Date of Patent: April 28, 2015Assignee: Macronix International Co., Ltd.Inventors: Chieh-Chih Chen, Cheng-Chi Lin, Shih-Chin Lien, Shyi-Yuan Wu
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Patent number: 9012291Abstract: The present invention discloses a bipolar transistor with an embedded epitaxial external base region, which is designed to solve the problem of the TED effect with the prior art structures. The bipolar transistor with an embedded epitaxial external base region of the present invention comprises at least a collector region, a base region and an external base region on the collector region, an emitter on the base region, and sidewalls at both sides of the emitter. The external base region is grown through an in-situ doping selective epitaxy process and is embedded in the collector region. A portion of the external base region is located beneath the sidewalls. The present invention discloses a method of forming a bipolar transistor with an embedded epitaxial external base region.Type: GrantFiled: July 18, 2014Date of Patent: April 21, 2015Assignee: Tsinghua UniversityInventors: Yu-dong Wang, Jun Fu, Jie Cui, Yue Zhao, Zhi-hong Liu, Wei Zhang, Gao-qing Li, Zheng-li Wu, Ping Xu
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Patent number: 9006864Abstract: A semiconductor device containing an NPN bipolar junction transistor may be formed by forming a p-type radiation induced diode structure (RIDS) region in an intrinsic p-type base region of the NPN bipolar junction transistor at a boundary of the intrinsic p-type base region with a dielectric layer over a substrate of the semiconductor device, between an emitter of the NPN bipolar junction transistor and an extrinsic p-type base region of the NPN bipolar junction transistor. The p-type RIDS region has a doping density high enough to prevent inversion of a surface of the p-type RIDS region adjacent to the dielectric layer when trapped charge is accumulated in the dielectric layer, while the intrinsic p-type base region may invert from the trapped charge forming the radiation induced diode structure. The p-type RIDS region is separated from the emitter and from the extrinsic base region by portions of the intrinsic base region.Type: GrantFiled: November 6, 2013Date of Patent: April 14, 2015Assignee: Texas Instruments IncorporatedInventors: James Fred Salzman, Richard Guerra Roybal, Randolph William Kahn
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Patent number: 8946035Abstract: A replacement channel and a method for forming the same in a semiconductor device are provided. A channel area is defined in a substrate which is a surface of a semiconductor wafer or a structure such as a fin formed over the wafer. Portions of the channel region are removed and are replaced with a replacement channel material formed by an epitaxial growth/deposition process to include a first dopant concentration level less than a first dopant concentration level. A subsequent doping operation or operations is then used to boost the average dopant concentration to a level greater than the first dopant concentration level. The replacement channel material is formed to include a gradient in which the upper portion of the replacement channel material has a greater dopant concentration than the lower portion of replacement channel material.Type: GrantFiled: September 27, 2012Date of Patent: February 3, 2015Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yu-Lien Huang, Ming-Huan Tsai, Clement Hsingjen Wann
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Patent number: 8927972Abstract: A current-amplifying transistor device is provided, between an emitter electrode and a collector electrode, with two organic semiconductor layers and a sheet-shaped base electrode. One of the organic semiconductor layers is arranged between the emitter electrode and the base collector electrode, and has a diode structure of a p-type organic semiconductor layer and an n-type p-type organic semiconductor layer. A current-amplifying, light-emitting transistor device including the current-amplifying transistor device and an organic EL device portion formed in the current-amplifying transistor device is also disclosed.Type: GrantFiled: September 3, 2010Date of Patent: January 6, 2015Assignees: Dainichiseika Color & Chemicals Mfg. Co., Ltd.Inventors: Ken-ichi Nakayama, Junji Kido, Yong-Jin Pu, Fumito Suzuki, Naomi Oguma, Naoki Hirata
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Publication number: 20140329368Abstract: The present invention discloses a bipolar transistor with an embedded epitaxial external base region, which is designed to solve the problem of the TED effect with the prior art structures. The bipolar transistor with an embedded epitaxial external base region of the present invention comprises at least a collector region, a base region and an external base region on the collector region, an emitter on the base region, and sidewalls at both sides of the emitter. The external base region is grown through an in-situ doping selective epitaxy process and is embedded in the collector region. A portion of the external base region is located beneath the sidewalls. The present invention discloses a method of forming a bipolar transistor with an embedded epitaxial external base region.Type: ApplicationFiled: July 18, 2014Publication date: November 6, 2014Inventors: Yu-dong Wang, Jun Fu, Jie Cui, Yue Zhao, Zhi-hong Liu, Wei Zhang, Gao-qing Li, Zheng-li Wu, Ping Xu
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Patent number: 8828835Abstract: An integrated circuit containing a bipolar transistor including an emitter diffused region with a peak doping density higher than 1ยท1020 atoms/cm3, and an emitter-base junction less than 40 nanometers deep in a base layer. A process of forming the bipolar transistor, which includes forming an emitter dopant atom layer between a base layer and an emitter layer, followed by a flash or laser anneal step to diffuse dopant atoms from the emitter dopant atom layer into the base layer.Type: GrantFiled: March 5, 2010Date of Patent: September 9, 2014Assignee: Texas Instruments IncorporatedInventors: Rick L. Wise, Hiroshi Yasuda
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Publication number: 20140134820Abstract: Instability and drift sometimes observed in bipolar transistors, having a portion of the base extending to the transistor surface between the emitter and base contact, can be reduced or eliminated by providing a further doped region of the same conductivity type as the emitter at the transistor surface between the emitter and the base contact. The further region is desirably more heavily doped than the base region at the surface and less heavily doped than the adjacent emitter. In another embodiment, a still or yet further region of the same conductivity type as the emitter is provided either between the further region and the emitter or laterally within the emitter. The still or yet further region is desirably more heavily doped than the further region. Such further regions shield the near surface base region from trapped charge that may be present in dielectric layers or interfaces overlying the transistor surface.Type: ApplicationFiled: January 16, 2014Publication date: May 15, 2014Inventors: XIN LIN, DANIEL J. BLOMBERG, HONGNING YANG, JIANG-KAI ZUO
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Publication number: 20140124895Abstract: A semiconductor device containing an NPN bipolar junction transistor may be formed by forming a p-type radiation induced diode structure (RIDS) region in an intrinsic p-type base region of the NPN bipolar junction transistor at a boundary of the intrinsic p-type base region with a dielectric layer over a substrate of the semiconductor device, between an emitter of the NPN bipolar junction transistor and an extrinsic p-type base region of the NPN bipolar junction transistor. The p-type RIDS region has a doping density high enough to prevent inversion of a surface of the p-type RIDS region adjacent to the dielectric layer when trapped charge is accumulated in the dielectric layer, while the intrinsic p-type base region may invert from the trapped charge forming the radiation induced diode structure. The p-type RIDS region is separated from the emitter and from the extrinsic base region by portions of the intrinsic base region.Type: ApplicationFiled: November 6, 2013Publication date: May 8, 2014Applicant: Texas Instruments IncorporatedInventors: James Fred SALZMAN, Richard Guerra ROYBAL, Randolph William KAHN
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Publication number: 20130307122Abstract: The present invention discloses a bipolar transistor with an embedded epitaxial external base region, which is designed to solve the problem of the TED effect with the prior art structures. The bipolar transistor with an embedded epitaxial external base region of the present invention comprises at least a collector region, a base region and an external base region on the collector region, an emitter on the base region, and sidewalls at both sides of the emitter. The external base region is grown through an in-situ doping selective epitaxy process and is embedded in the collector region. A portion of the external base region is located beneath the sidewalls. The present invention discloses a method of forming a bipolar transistor with an embedded epitaxial external base region.Type: ApplicationFiled: September 24, 2012Publication date: November 21, 2013Applicant: TSINGHUA UNIVERSITYInventors: Yu-dong Wang, Jun Fu, Jie Cui, Yue Zhao, Zhi-hong Liu, Wei Zhang, Gao-qing Li, Zheng-li Wu, Ping Xu
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Patent number: 8581327Abstract: A memory having isolated dual memory cells is provided. A first isolation wall and a second isolation wall are separately disposed between a source and a drain on a substrate. An isolation bottom layer and a polysilicon layer are orderly disposed on the substrate between the first and the second isolation walls. A first charge storage structure and a first gate are orderly disposed on the substrate between the first isolation wall and the source. A second charge storage structure and a second gate are orderly disposed on the substrate between the second isolation wall and the drain. A word line disposed on the polysilicon layer, the first gate, the second gate, the first isolation wall and the second isolation wall is electrically connected to the first gate, the second gate and the polysilicon layer.Type: GrantFiled: December 21, 2010Date of Patent: November 12, 2013Assignee: Macronix International Co., Ltd.Inventors: Erh-Kun Lai, Yen-Hao Shih, Ling-Wu Yang, Chun-Min Cheng
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Publication number: 20130193557Abstract: The invention relates to an electronic device with a bipolar transistor having an emitter, a base and a collector. The base has a first region of a first concentration of the first dopant for forming an electrically active region of the base and a second region of a second concentration of the first dopant close to the surface of the base region. The first region is separated from the second region by a region of a third concentration of the first dopant and the third concentration is lower than the first and the second concentration.Type: ApplicationFiled: July 25, 2012Publication date: August 1, 2013Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Philipp MENZ, Berthold STAUFER, Yasuda HIROSHI
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Patent number: 8486797Abstract: Bipolar junction transistors are provided in which at least one of an emitter contact, a base contact, or a collector contact thereof is formed by epitaxially growing a doped SixGe1-x layer, wherein x is 0?x?1, at a temperature of less than 500ยฐ C. The doped SixGe1-x layer comprises crystalline portions located on exposed surfaces of a crystalline semiconductor substrate and non-crystalline portions that are located on exposed surfaces of a passivation layer which can be formed and patterned on the crystalline semiconductor substrate. The doped SixGe1-x layer of the present disclosure, including the non-crystalline and crystalline portions, contains from 5 atomic percent to 40 atomic percent hydrogen.Type: GrantFiled: May 25, 2012Date of Patent: July 16, 2013Assignee: International Business Machines CorporationInventors: Bahman Hekmatshoartabari, Tak H. Ning, Devendra K. Sadana, Ghavam G. Shahidi, Davood Shahrjerdi
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Publication number: 20130168822Abstract: Vertical bipolar junction structures, methods of manufacture and design structures. The method includes forming one or more sacrificial structures for a bipolar junction transistor (BJT) in a first region of a chip. The method includes forming a mask over the one or more sacrificial structures. The method further includes etching an opening in the mask, aligned with the one or more sacrificial structures. The method includes forming a trench through the opening and extending into diffusion regions below the one or more sacrificial structures. The method includes forming a base region of the BJT by depositing an epitaxial material in the trench, in contact with the diffusion regions. The method includes forming an emitter contact by depositing a second epitaxial material on the base region within the trench. The epitaxial material for the emitter region is of an opposite dopant type than the epitaxial material of the base region.Type: ApplicationFiled: January 4, 2012Publication date: July 4, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: William F. CLARK, JR., John J. PEKARIK, Yun SHI, Yanli ZHANG
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Patent number: 8343841Abstract: A method for fabricating a semiconductor device includes forming a first semiconductor layer on a front side of the semiconductor substrate. Additional semiconductor layers may be formed on a font side of the first semiconductor layer. The substrate is subsequently removed. In some embodiments, one or more additional semiconductor layers may be formed on the back side of the first semiconductor layer after the semiconductor substrate has been removed. Additionally, in some embodiments, a portion of the first semiconductor layer is removed along with the semiconductor substrate. In such embodiments, the first semiconductor layer is subsequently etched to a known thickness. Source regions and device electrodes may be then be formed.Type: GrantFiled: December 6, 2010Date of Patent: January 1, 2013Assignee: Purdue Research FoundationInventors: James A. Cooper, Xiaokun Wang
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Patent number: 8319282Abstract: A bipolar transistor structure includes an epitaxial layer on a semiconductor substrate, a bipolar transistor device formed in the epitaxial layer and a trench structure formed in the epitaxial layer adjacent at least two opposing lateral sides of the bipolar transistor device. The trench structure includes a field plate spaced apart from the epitaxial layer by an insulating material. The bipolar transistor structure further includes a base contact connected to a base of the bipolar transistor device, an emitter contact connected to an emitter of the bipolar transistor device and isolated from the base contact and an electrical connection between the emitter contact and the field plate.Type: GrantFiled: July 9, 2010Date of Patent: November 27, 2012Assignee: Infineon Technologies Austria AGInventors: Christoph Kadow, Thorsten Meyer, Norbert Krischke
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Patent number: 8263469Abstract: A bipolar transistor, comprising a collector, a base and an emitter, in which the collector comprises a relatively heavily doped region, and a relatively lightly doped region adjacent the base, and in which the relatively heavily doped region is substantially omitted from an intrinsic region of the transistor.Type: GrantFiled: October 6, 2011Date of Patent: September 11, 2012Assignee: Analog Devices, Inc.Inventors: Bernard Patrick Stenson, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuiness, William Allan Lane
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Patent number: 8216910Abstract: A wafer comprising at least one high Ft HBT and at least one high BVceo HBT having various collector profiles on a common III-V compound semiconductor based wafer. The N+ implant in the collector varies the collector profiles of individual HBTs on the wafer. The method for preparing the device comprises forming of HBT layers up to and including collector layer on non-silicon based substrate, performing ion implantation, annealing for implant activation, and forming remaining HBT layers.Type: GrantFiled: June 4, 2009Date of Patent: July 10, 2012Assignee: HRL Laboratories, LLCInventors: Mary Chen, Marko Sokolich
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Patent number: 8211785Abstract: A shallow p-n junction diffusion layer having a high activation rate of implanted ions, low resistivity, and a controlled leakage current is formed through annealing. Annealing after impurities have been doped is carried out through light irradiation. Those impurities are activated by annealing at least twice through light irradiation after doping impurities to a semiconductor substrate 11. The light radiations are characterized by usage of a W halogen lamp RTA or a flash lamp FLA except for the final light irradiation using a flash lamp FLA. Impurity diffusion may be controlled to a minimum, and crystal defects, which have developed in an impurity doping process, may be sufficiently reduced when forming ion implanted layers in a source and a drain extension region of the MOSFET or ion implanted layers in a source and a drain region.Type: GrantFiled: June 29, 2007Date of Patent: July 3, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Takaharu Itani, Takayuki Ito, Kyoichi Suguro
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Patent number: 8168504Abstract: An integrated circuit includes a bipolar transistor comprising a substrate and a collector formed in the substrate. The collector includes a highly doped lateral zone, a very lightly doped central zone and a lightly doped intermediate zone located between the central zone and the lateral zone 4a of the collector. The substrate includes a lightly doped lateral zone and a highly doped central zone. The dopant species in the zone of the substrate are electrically inactive.Type: GrantFiled: March 9, 2010Date of Patent: May 1, 2012Assignee: STMicroelectronics SAInventors: Damien Lenoble, Thierry Schwartzmann, Laurence Boissonnet
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Patent number: 8168505Abstract: A method of fabricating a transistor is provided. The transistor includes a SiGe epitaxial layer formed in a recess region of a substrate at both side of a gate electrode and a SiGe capping layer formed on the SiGe epitaxial layer. The transistor further includes a SiGe seed layer formed under the SiGe epitaxial layer and a silicon capping layer formed on the SiGe capping layer.Type: GrantFiled: May 13, 2011Date of Patent: May 1, 2012Assignee: Jusung Engineering Co., Ltd.Inventors: Cheol Hoon Yang, Yong Han Jeon
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Publication number: 20120007176Abstract: A bipolar transistor structure includes an epitaxial layer on a semiconductor substrate, a bipolar transistor device formed in the epitaxial layer and a trench structure formed in the epitaxial layer adjacent at least two opposing lateral sides of the bipolar transistor device. The trench structure includes a field plate spaced apart from the epitaxial layer by an insulating material. The bipolar transistor structure further includes a base contact connected to a base of the bipolar transistor device, an emitter contact connected to an emitter of the bipolar transistor device and isolated from the base contact and an electrical connection between the emitter contact and the field plate.Type: ApplicationFiled: July 9, 2010Publication date: January 12, 2012Applicant: INFINEON TECHNOLOGIES AGInventors: Christoph KADOW, Thorsten MEYER, Norbert KRISCHKE
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Patent number: 8058704Abstract: A bipolar transistor, comprising a collector, a base and an emitter, in which the collector comprises a relatively heavily doped region, and a relatively lightly doped region adjacent the base, and in which the relatively heavily doped region is substantially omitted from an intrinsic region of the transistor.Type: GrantFiled: November 2, 2009Date of Patent: November 15, 2011Assignee: Analog Devices, Inc.Inventors: Bernard Patrick Stenson, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuiness, William Allan Lane
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Patent number: 8022506Abstract: A semiconductor on insulator device has an insulator layer, an active layer (40) on the insulator layer, a lateral arrangement of collector (10), emitter (30) and base (20) on the active layer, and a high Base-dose region (70) extending under the emitter towards the insulator to suppress vertical current flowing under the emitter. This region (70) reduces the dependence of current-gain and other properties on the substrate (Handle-wafer) voltage. This region can be formed of the same doping type as the base, but having a stronger doping. It can be formed by masked alignment in the same step as an n type layer used as the body for a P-type DMOS transistor.Type: GrantFiled: December 15, 2005Date of Patent: September 20, 2011Assignee: NXP B.V.Inventor: Adrianus W. Ludikhuize
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Publication number: 20110143513Abstract: The disclosed subject matter provides a method of forming a bipolar transistor. The method includes depositing a first insulating layer over a first layer of material that is doped with a dopant of a first type. The first layer is formed over a substrate. The method also includes modifying a thickness of the first oxide layer based on a target dopant profile and implanting a dopant of the first type in the first layer. The dopant is implanted at an energy selected based on the modified thickness of the first insulating layer and the target dopant profile.Type: ApplicationFiled: February 15, 2011Publication date: June 16, 2011Inventors: Thomas J. Krutsick, Christopher J. Speyer
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Publication number: 20110121428Abstract: An improved bipolar transistor (40, 40?) is provided, manufacturable by a CMOS IC process without added steps. The improved transistor (40, 40?) comprises an emitter (48) having first (482) and second (484) portions of different depths (4821, 4841), a base (46) underlying the emitter (48) having a central portion (462) of a first base width (4623) underlying the first portion (482) of the emitter (48), a peripheral portion (464) having a second base width (4643) larger than the first base width (4623) partly underlying the second portion (484) of the emitter (48), and a transition zone (466) of a third base width (4644) and lateral extent (4661) lying laterally between the first (462) and second (464) portions of the base (46), and a collector (44) underlying the base (46). The gain of the transistor (40, 40?) is much larger than a conventional bipolar transistor (20) made using the same CMOS process.Type: ApplicationFiled: November 20, 2009Publication date: May 26, 2011Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: Xin Lin, Daniel J. Blomberg, Jiang-Kai Zuo
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Patent number: 7943969Abstract: A transistor and a method of fabricating the same are provided. The transistor includes a SiGe epitaxial layer formed in a recess region of a substrate at both side of a gate electrode and a SiGe capping layer formed on the SiGe epitaxial layer. The transistor further includes a SiGe seed layer formed under the SiGe epitaxial layer and a silicon capping layer formed on the SiGe capping layer.Type: GrantFiled: October 27, 2008Date of Patent: May 17, 2011Assignee: Jusung Engineering Co. Ltd.Inventors: Cheol Hoon Yang, Yong Han Jeon
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Patent number: 7939414Abstract: Methods for forming a bipolar junction transistor device are described herein. A method for forming the bipolar junction transistor device may include doping a first portion of a substrate with a first dopant to form a base pick-up region, and after doping the first portion of the substrate, doping a second portion of the substrate with a second dopant to form at least one emitter region. A bipolar junction transistor device may include a floating collector, in which case the bipolar junction transistor device may be operated as a diode for improved emitter current.Type: GrantFiled: October 4, 2010Date of Patent: May 10, 2011Assignee: Marvell International Ltd.Inventors: Pantas Sutardja, Albert Wu, Chien-Chuan Wei, Runzi Chang, Winston Lee, Peter Lee
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Patent number: 7879706Abstract: A memory having isolated dual memory cells is provided. A first isolation wall and a second isolation wall are separately disposed between a source and a drain on a substrate. An isolation bottom layer and a polysilicon layer are orderly disposed on the substrate between the first and the second isolation walls. A first charge storage structure and a first gate are orderly disposed on the substrate between the first isolation wall and the source. A second charge storage structure and a second gate are orderly disposed on the substrate between the second isolation wall and the drain. A word line disposed on the polysilicon layer, the first gate, the second gate, the first isolation wall and the second isolation wall is electrically connected to the first gate, the second gate and the polysilicon layer.Type: GrantFiled: October 31, 2007Date of Patent: February 1, 2011Assignee: Macronix International Co., Ltd.Inventors: Erh-Kun Lai, Yen-Hao Shih, Ling-Wu Yang, Chun-Min Cheng
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Patent number: 7880272Abstract: Aspects of the present invention include a semiconductor device and method. In a transition region of a semiconductor material region, a near-surface compensation doping area with a conductivity type, which is different than the conductivity type of a transition doping area of the semiconductor material region, is provided in the surface region of the semiconductor material region. The doping of the near-surface compensation doping area of the semiconductor device at least partially compensates for the doping in the transition doping area.Type: GrantFiled: January 31, 2006Date of Patent: February 1, 2011Assignee: Infineon Technologies AGInventor: Gerhard Schmidt
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Patent number: 7851890Abstract: By a non-selective epitaxial growth method, an SiGe film is grown on the whole surface of a silicon oxide film so as to cover an inner wall of a base opening. Here, such film forming conditions are selected that, inside the base opening, a bottom portion is formed of single crystal, other portions such as a sidewall portion are formed of polycrystalline, and a film thickness of the sidewall portion is less than or equal to 1.5 times the film thickness of the bottom portion. In this non-selective epitaxial growth, monosilane, hydrogen, diborane, and germane are used as source gases. Then, flow rates of monosilane and hydrogen are set to 20 sccm and 20 slm respectively. Also, a growth temperature is set to 650ยฐ C., a flow rate of diborane is set to 75 sccm, and a flow rate of germane is set to 35 sccm.Type: GrantFiled: July 25, 2007Date of Patent: December 14, 2010Assignee: Fujitsu Semiconductor LimitedInventors: Hidekazu Sato, Toshihiro Wakabayashi
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Patent number: 7816706Abstract: The power semiconductor device with a four-layer npnp structure can be turned-off via a gate electrode. The first base layer comprises a cathode base region adjacent to the cathode region and a gate base region adjacent to the gate electrode, but disposed at a distance from the cathode region. The gate base region has the same nominal doping density as the cathode base region in at least one first depth, the first depth being given as a perpendicular distance from the side of the cathode region, which is opposite the cathode metallization. The gate base region has a higher doping density than the cathode base region and/or the gate base region has a greater depth than the cathode base region in order to modulate the field in blocking state and to defocus generated holes from the cathode when driven into dynamic avalanche.Type: GrantFiled: January 16, 2008Date of Patent: October 19, 2010Assignee: ABB Technology AGInventors: Munaf Rahimo, Peter Streit
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Patent number: 7811894Abstract: An improved bipolar junction transistor and a method for manufacturing the same are provided. The bipolar junction transistor includes: a buried layer and a high concentration N-type collector region in a P-type semiconductor substrate; a low concentration P-type base region in the semiconductor substrate above the buried layer; a first high concentration P-type base region along an edge of the low concentration P-type base region; a second high concentration P-type base region at a center of the low concentration P-type base region; a high concentration N-type emitter region between the first and second high concentration base regions; and insulating layer spacers between the high concentration base regions and the high concentration emitter regions. In the bipolar junction transistor, the emitter-base distance can be reduced using a trench and an insulating layer spacer. This may improve base voltage and high-speed response characteristics.Type: GrantFiled: May 11, 2009Date of Patent: October 12, 2010Assignee: Dongbu Electronics Co., Ltd.Inventor: Nam Joo Kim
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Patent number: 7807539Abstract: Methods for forming a bipolar junction transistor device are described herein. A method for forming the bipolar junction transistor device may include doping a first portion of a substrate with a first dopant to form a base pick-up region, and after doping the first portion of the substrate, doping a second portion of the substrate with a second dopant to form at least one emitter region. A bipolar junction transistor device may include a floating collector, in which case the bipolar junction transistor device may be operated as a diode for improved emitter current.Type: GrantFiled: March 26, 2008Date of Patent: October 5, 2010Assignee: Marvell International Ltd.Inventors: Pantas Sutardja, Albert Wu, Chien-Chuan Wei, Runzi Chang, Winston Lee, Peter Lee
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Patent number: 7772079Abstract: A vertical organic transistor and a method for fabricating the same are provided, wherein an emitter, a grid with openings and a collector are sequentially arranged above a substrate. Two organic semiconductor layers are interposed respectively between the emitter and the grid with openings and between the grid with openings and the collector. The channel length is simply decided by the thickness of the organic semiconductor layers. The collector current depends on the space-charge-limited current contributed by the potential difference between the emitter and the openings of the grid. And the grid voltage can thus effectively control the collector current. Further, the fabrication process of the vertical organic transistor of the present invention is simple and exempt from using the photolithographic process.Type: GrantFiled: February 20, 2009Date of Patent: August 10, 2010Assignee: National Chiao Tung UniversityInventors: Hsin-Fei Meng, Sheng-Fu Horng, Yu-Chiang Chao
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Publication number: 20100167488Abstract: An integrated circuit includes a bipolar transistor comprising a substrate and a collector formed in the substrate. The collector includes a highly doped lateral zone, a very lightly doped central zone and a lightly doped intermediate zone located between the central zone and the lateral zone 4a of the collector. The substrate includes a lightly doped lateral zone and a highly doped central zone. The dopant species in the zone of the substrate are electrically inactive.Type: ApplicationFiled: March 9, 2010Publication date: July 1, 2010Applicant: STMICROELECTRONICS SA.Inventors: Damien Lenoble, Thierry Schwartzmann, Laurence Boissonnet
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Patent number: 7732256Abstract: A method of fabrication a non-volatile memory is provided. A stacked structure is formed on a substrate, the stacked structure including a gate dielectric layer and a control gate. Then, a first dielectric layer, a second dielectric layer and a third dielectric layer are respectively formed on the top and sidewalls of the stacked structure and the exposed substrate. Thereafter, a pair of charge storage layers are formed over the substrate to respectively cover a portion of the top and sidewalls of the stacked structure, and a gap exists between each of the charge storage layers.Type: GrantFiled: December 21, 2006Date of Patent: June 8, 2010Assignee: MACRONIX International Co., Ltd.Inventor: Ming-Chang Kuo
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Publication number: 20100129975Abstract: An improved base for a NPN bipolar transistor. The base region is formed with Boron and Indium dopants for improved beta early voltage product and reduced base resistance.Type: ApplicationFiled: February 1, 2010Publication date: May 27, 2010Applicant: INTERSIL AMERICAS INC.Inventor: James D. Beasom
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Patent number: 7692269Abstract: A vertical organic transistor and a method for fabricating the same are provided, wherein an emitter, a grid with openings and a collector are sequentially arranged above a substrate. Two organic semiconductor layers are interposed respectively between the emitter and the grid with openings and between the grid with openings and the collector. The channel length is simply decided by the thickness of the organic semiconductor layers. The collector current depends on the space-charge-limited current contributed by the potential difference between the emitter and the openings of the grid. And the grid voltage can thus effectively control the collector current. Further, the fabrication process of the vertical organic transistor of the present invention is simple and exempt from using the photolithographic process.Type: GrantFiled: February 15, 2007Date of Patent: April 6, 2010Assignee: National Chiao Tung UniversityInventors: Hsin-Fei Meng, Sheng-Fu Horng, Yu-Chiang Chao
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Patent number: 7651919Abstract: A method for fabricating a heterojunction bipolar transistor (HBT) is provided. The method includes providing a substrate including a collector region; forming a compound base region over the collector region; and forming an emitter region over the compound base region including forming a first emitter layer within the emitter region and doping the first emitter layer with a pre-determined percentage of at least one element associated with the compound base region. In one implementation, an emitter region is formed including multiple emitter layers to enhance a surface recombination surface area within the emitter region.Type: GrantFiled: November 4, 2005Date of Patent: January 26, 2010Assignee: Atmel CorporationInventors: Darwin Gene Enicks, Damian Carver
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Patent number: 7629211Abstract: A method of forming a field effect transistor comprises providing a semiconductor substrate, a gate electrode being formed over the semiconductor substrate. At least one cavity is formed adjacent the gate electrode. A strain-creating element is formed in the at least one cavity. The strain-creating element comprises a compound material comprising a first chemical element and a second chemical element. A first concentration ratio between a concentration of the first chemical element in a first portion of the strain-creating element and a concentration of the second chemical element in the first portion of the strain-creating element is different from a second concentration ratio between a concentration of the first chemical element in a second portion of the strain-creating element and a concentration of the second chemical element in the second strain-creating element.Type: GrantFiled: March 9, 2007Date of Patent: December 8, 2009Assignee: Advanced Micro Devices, Inc.Inventors: Sven Beyer, Thorsten Kammler, Rolf Stephan, Manfred Horstmann
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Patent number: 7615457Abstract: A method is provided for making a bipolar transistor which includes a tapered, i.e. frustum-shaped, collector pedestal having an upper substantially planar surface, a lower surface, and a slanted sidewall extending between the upper surface and the lower surface, the upper surface having substantially less area than the lower surface. The collector pedestal can be formed on a surface of a collector active region exposed within an opening extending through first and second overlying dielectric regions, where the opening defines vertically aligned edges of the first and second dielectric regions.Type: GrantFiled: July 25, 2008Date of Patent: November 10, 2009Assignee: International Business Machines CorporationInventors: Hiroyuki Akatsu, Rama Divakaruni, Gregory G. Freeman, David R. Greenberg, Marwan H. Khater, William R. Tonti
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Publication number: 20090250724Abstract: A bipolar transistor is formed on a heavily doped silicon substrate (1). An epitaxially grown collector (12) is formed on the substrate (1) and comprises silicon containing germanium at least at the top of the collector (12). An epitaxial base (13) is formed on the collector (12) to have the opposite polarity and also comprises silicon containing germanium at least at the bottom of the base (13). An emitter is formed at the top of the base (13) and comprises polysilicon doped to have the same polarity as the collector (12).Type: ApplicationFiled: December 14, 2005Publication date: October 8, 2009Applicant: X-FAB SEMICONDUCTOR FOUNDRIES AGInventor: John Nigel Ellis
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Publication number: 20090200577Abstract: The invention relates to a semiconductor device with a substrate (11) and a semiconductor body (11) comprising a bipolar transistor with an emitter region (1), a base region (2) and a collector region (3) comprising a first, a second and a third connection conductor, which emitter region (1) comprises a mesa-shaped emitter connection region (1A) provided with spacers (4) and adjacent thereto a base connection region (2A) comprising a conductive region (2AA) of poly crystalline silicon. In a device (10) according to the invention, the base connection region (2A) comprises a further conducting region (2AB), which is positioned between the conductive region (2AA) of poly crystalline silicon and the base region (2) and which is made of a material with respect to which the conducting region (2AA) of polycrystalline silicon is selectively etchable. Such a device (10) is easy to manufacture by means of a method according to the invention and its bipolar transistor possesses excellent RF properties.Type: ApplicationFiled: June 20, 2006Publication date: August 13, 2009Applicant: NXP B.V.Inventors: Erwin Hijzen, Joost Melai, Francois Neuilly
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Publication number: 20090181513Abstract: A vertical organic transistor and a method for fabricating the same are provided, wherein an emitter, a grid with openings and a collector are sequentially arranged above a substrate. Two organic semiconductor layers are interposed respectively between the emitter and the grid with openings and between the grid with openings and the collector. The channel length is simply decided by the thickness of the organic semiconductor layers. The collector current depends on the space-charge-limited current contributed by the potential difference between the emitter and the openings of the grid. And the grid voltage can thus effectively control the collector current. Further, the fabrication process of the vertical organic transistor of the present invention is simple and exempt from using the photolithographic process.Type: ApplicationFiled: February 20, 2009Publication date: July 16, 2009Inventors: Hsin-Fei Meng, Sheng-Fu Horng, Yu-Chiang Chao