Stored Charge Erasure Patents (Class 438/972)
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Patent number: 8927956Abstract: A resistance type memory device is provided. The resistance type memory device includes a first and a second conductors and a metal oxide layer. The metal oxide layer is disposed between the first and the second conductors, and the resistance type memory device is defined in a first resistivity. The resistance type memory device is defined in a second resistivity after a first pulse voltage is applied to the metal oxide layer. The resistance type memory device is defined in a third resistivity after a second pulse voltage is applied to the metal oxide layer. The second resistivity is greater than the first resistivity, and the first resistivity is greater than the third resistivity.Type: GrantFiled: March 12, 2009Date of Patent: January 6, 2015Assignee: MACRONIX International Co., Ltd.Inventors: Ming-Daou Lee, Chia-Hua Ho, Erh-Kun Lai, Kuang-Yeu Hsieh
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Patent number: 8298890Abstract: A semiconductor memory element is described, including a substrate including a source region, a drain region, and a channel region, a tunnel oxide over the channel region of the substrate, a charge storage layer over the tunnel oxide, a charge blocking layer over the charge storage layer, and a control gate over the charge blocking layer. The charge blocking layer further includes a first layer including a transition metal oxide, a second layer including a metal silicate, a third layer including the transition metal oxide of the first layer.Type: GrantFiled: September 3, 2009Date of Patent: October 30, 2012Assignee: Intermolecular, Inc.Inventors: Ronald John Kuse, Monica Sawkar Mathur, Wen Wu
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Patent number: 7179706Abstract: The present teachings describe a container capacitor that utilizes an etchant permeable lower electrode for the formation of single or double-sided capacitors without excessive etching back of the periphery of the use of sacrificial spacers. The present teachings further describe a method of forming at least one capacitor structure on a substrate. For example, the method comprises forming at least one recess in the substrate, depositing a first conductive layer on the substrate so as to overlie the at least one recess, and defining at least one lower electrode within the at least one recess formed in the substrate by removing at least a portion of the first conductive layer. The method further comprises diffusing an etchant through the at least one lower electrode so as to remove at least a portion of the substrate to thereby at least partially isolate the at least one lower electrode.Type: GrantFiled: June 24, 2004Date of Patent: February 20, 2007Assignee: Micron Technology, Inc.Inventors: Robert D. Patraw, Michael A. Walker
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Patent number: 6383870Abstract: A transistor 10 is formed on an outer surface of a substrate 12. The transistor comprises a floating gate 18 and a control gate 20. An outer encapsulation layer 22 and sidewall bodies 26 and 28 comprise silicon nitride that is deposited in such a manner such that the material is transmissive to ultraviolet radiation. In this manner, the sidewall bodies 26 and 28 and the layer 22 can be used as an etch stop during the formation of a drain contact 38. These layers will also permit the transmission of ultraviolet radiation to the floating gate 18 to enable the erasure of floating gate 18.Type: GrantFiled: June 28, 2001Date of Patent: May 7, 2002Assignee: Texas Instruments IncorporatedInventors: Kemal Tamer San, Wei William Lee, Cetin Kaya
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Patent number: 6329246Abstract: A method of fabricating a flash memory. A P-well is formed in an n-type substrate and an N-well is formed in the P-well. Thus, a bipolar junction transistor is made of the substrate, the P-well and the N-well. A source region and a drain region are formed in the N-well. A tunneling oxide layer, a floating gate, a dielectric layer and a control gate are formed in sequence on the substrate between the source region and the drain region. An erasure method of a flash memory is also disclosed.Type: GrantFiled: December 20, 1999Date of Patent: December 11, 2001Assignee: United Microelectronics Corp.Inventor: Hao-Ming Lee
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Patent number: 6214678Abstract: A method of making material layers for semiconductor devices by metal organic vapor phase epitaxy includes the steps of wafer preparation, oxide desorption, growth and post growth with an accompanying reduction of a residual sheet charge at the substrate-epitaxy interface. During the oxide desorption step, a substrate is heated to a temperature minimlly necessary to remove oxide from the substrate. In accordance with such method, material layers for a low noise high electron mobility transistor (HEMT) can be grown without a bulk, buffer layer immediately adjacent the substrate. Rather, a super lattice structure is immediately adjacent to and between the substrate and a channel layer.Type: GrantFiled: May 21, 1997Date of Patent: April 10, 2001Inventors: Daniel P. Docter, Kenneth R. Elliott
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Patent number: 6077762Abstract: Disclosed is a method for making reliable interconnect structures on a semiconductor substrate having a first dielectric layer. The method includes plasma patterning a first metallization layer that lies over the first dielectric layer. Forming a second dielectric layer over the first metallization layer and the first dielectric layer. Forming a plurality of tungsten plugs in the second dielectric layer, such that each of the plurality of tungsten plugs are in electrical contact with the first metallization layer. Plasma patterning a second metallization layer over the second dielectric layer and the plurality of tungsten plugs, such that at least a gap over at least one of the tungsten plugs is not covered by the second metallization layer and a positive charge is built-up on at least part of the second metallization layer. The method further includes contacting the second metallization layer with a conductive liquid that is electrically grounded.Type: GrantFiled: December 22, 1997Date of Patent: June 20, 2000Assignee: VLSI Technology, Inc.Inventors: Victor C. Liang, Subhas Bothra, Harlan Lee Sur, Jr.
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Patent number: 5656521Abstract: The failure rate of semiconductor devices containing UPROM transistors is improved by erasing the UPROM transistors using X-rays. The semiconductor devices are subsequently exposed to UV radiation to erase other transistors charged during X-ray exposure.Type: GrantFiled: January 12, 1995Date of Patent: August 12, 1997Assignee: Advanced Micro Devices, Inc.Inventors: Darlene Hamilton, Issac H. Yamasaki