Abstract: A hygiene management device for an entrance space is proposed. In the hygiene management device, an air discharger for discharging air toward the bottom of an entrance space operates within a predetermined angle range in an entering/exiting direction of a person, and air to be discharged through a discharge hole of the air discharger is guided to an air guide unit. A plurality of vanes are installed in a row in the air guide unit to control the direction of the air to be discharged through the discharge hole.

Abstract: Systems and methods for creating a germicidal partition. A germicidal partition system including at least one negative ion generator including at least one negative high-voltage source, at least one high-voltage conductor electrically connected to the at least one negative high-voltage source, and at least one anode electrically connected to the at least one high-voltage conductor, and at least one fan configured to draw air into the system, direct the air through the at least one negative ion generator, and output the air through at least one manifold, wherein the air outputted through the at least one manifold is configured to create a barrier between a first air mass and a second air mass, such that the outputted air reduces at least one of the transfer of contaminants or the concentration of viable contagions between the first air mass and the second air mass.

Abstract: There are disclosed systems and methods for managing object configurations within a structure. For one embodiment, a fixed object profile including dimensions and locations of ventilation of a building space and a non-fixed object profile including dimensions and a location of a non-fixed object are identified. One or more contaminant risk locations of the building space are determined in response to determining the air flow within the building space associated with an HVAC unit. The air flow is determined based on incoming air flow streams to the building space and outgoing air flow streams away from the building space. One or more object positions are provided at an output device based on the contaminant risk location(s). For another embodiment, the contaminant risk location(s) are selected from possible people locations. A person position is displayed at an output device, in proximity to the building space, based on the contaminant risk location(s).

Abstract: A system, method and apparatus for sensor-based air quality metrics for ventilation performance and infection risk. Virus pathogens can be transmitted through the air, as they attach to airborne droplets or particles (bio-aerosols). A ventilation performance and infection risk can be determined using dynamic air exchange rates based on measured changes in air contaminant levels.

Abstract: A container includes a container body and an air processing system. The container body includes a plurality of walls defining an interior space for receiving wafers. The air processing system is attached to the container body. The air processing system includes an exchange module, an air extraction module, a first contaminant removal module, a processing module, a second contaminant removal module, a controller module and a power module. The exchange module is coupled to one of the walls of the container body. The air extraction module extracts air from the container body. The first contaminant removal module is coupled to the air extraction module and the exchange module. The processing module is coupled to the air extraction module. The second contaminant removal module is coupled to the processing module and the exchange module. The controller module is configured to turn the air extraction module on and off.

Abstract: Electronic device processing assemblies including an EFEM with at least one side storage pod attached thereto. The side storage pod has a side storage pod container. A supply conduit extends between an upper plenum of the EFEM to the side storage pod container. A fan causes purge gas to simultaneously flow into the EFEM chamber and into the side storage pod container. The fan also causes recirculation of the purge gas from the EFEM chamber. Methods of operating EFEMs and EFEMs are also disclosed.

Abstract: A treatment machine comprises at least two successive zones in an extraction direction of the material web between which a neutral zone is provided. In the neutral zone, a nozzle arrangement is provided adjacent to a zone exit wall and/or to a leading neutral zone wall on the one hand, and/or adjacent to the chamber inlet wall and/or a trailing neutral zone wall on the other hand, via which nozzle arrangement a gaseous fluid flow reaching a material web is generated. The nozzle arrangement is designed as follows: the respective gaseous fluid flow is directed at a blowing angle in the direction of the adjacent zone exit wall and/or the leading neutral zone wall or the zone inlet wall and/or the trailing neutral zone wall; and the gaseous fluid flow flows as far as the material web, following the zone exit wall, the leading neutral zone wall or the zone inlet wall and/or the trailing neutral zone wall.

Abstract: A support housing for a flexible bioprocess bag, the housing comprising at least one side wall having a first segment and a second segment, the first segment movable in relation to the second segment between an open and a closed position, wherein at least a supporting part of the housing is translatable from an operating position to a bag loading position, wherein the supporting part comprises one or more retainers for holding the flexible bioprocess bag upon re-translation of the supporting part to the operating position and movement of the first segment to the closed position, and wherein the first segment comprises a first drive unit for connecting and driving a first mixing unit in the flexible bioprocess bag.

Abstract: Electronic device processing assemblies including an equipment front end module (EFEM) with at least one side storage pod attached thereto are described. The side storage pod has a side storage container. In some embodiments, an exhaust conduit extends between the chamber and a pod plenum that can contain a chemical filter proximate thereto. A supplemental fan may draw purge gas from the pod plenum through the chemical filter and route the gas through a return duct to an upper plenum of the EFEM. Methods and side storage pods in accordance with these and other embodiments are also disclosed.

Abstract: The invention relates to an enclosure for refrigerating chambers, suitable for closing an access (3) to a refrigerating chamber and comprising: —a sliding refrigerating door (1), and —a quick-opening door (2), both assembled on the same side of the chamber, comprising a frame with vertical posts (4), comprising: —on an outer face, at least one mouth (42) wherein a fan (6) is coupled which introduces air in the corresponding vertical post (4); —on the inside thereof, a deflector plate (61) which directs the air towards electrical resistors (7) for heating the air, situated underneath the deflector plate and, —on an inner face, an outlet (43) for supplying hot air on one of the surfaces, inner or outer, of the flexible sheet (21) exposed to the cold of the chamber and removing frost from said flexible sheet (21).

Abstract: Hygiene regulations and social distancing are very effective in blocking short distance infections. During the lockdown, the distance rules can usually be adhered to, but what happens when the actual lockdown is over and the people meet again in a confined space? Then additional effective and efficient protection is essential to stabilize infection rates. Since the viruses are spread by contact and droplet infection, technical devices are required that effectively intervene in the chain of infection and effectively block infection. An effective protection is the respiratory mask as known since 100 years. An alternative to mask is an aerosol protection system for various applications in environment. The protection system consists of adjustable air sucking device and air blowing device in different form factors based on application. The aerosol protection system uses either an air curtain or air shield to prevent the aerosol going from one side of the curtain or shield to the other side.

Abstract: Tools, strategies, and techniques are provided for enhancing the control and operation of air curtain devices. The air curtain device can be provided with a computer system programmed to receive input data from various sensors and to communicate the sensor data to a wireless mesh computer architecture. An algorithm module can be programmed to determine adjusted settings or parameters for the air curtain device in response to the sensor data and/or other data sources such as external data sources. Data may be obtained from multiple air curtain devices configured for cooperative performance, and operating parameters or settings may be adjusted in connection with one or more of the multiple air curtain devices. A control device of the air curtain may be provided with a unitary structure suitable for efficient installation of multiple control harness connectors thereon to supply power and/or to establish data connectivity with multiple components of the control device.

Abstract: A showcase includes: a casing having a front opening through which a product is picked up; a product storage located in the casing and including a shelf on which the product is displayed; a first airflow generator that sends air for a first air curtain to flow outside along the product storage; a second airflow generator that sends air for a second air curtain to flow outside along the first air curtain; and a controller that causes the first airflow generator to operate and causes the second airflow generator to reduce an output of the second airflow generator from an output at a first timing, upon arrival of a second timing when a break of the second air curtain due to disturbance is greater than a break of the second air curtain at the first timing.

Abstract: A plenum pressure controlled cabinet includes a sideways cooled component mounted so as to define gaps between the cabinet and the component. Baffles block some of the gaps. A negative pressure maintained within the cabinet causes makeup air to be drawn into the cabinet through a gap not blocked by baffles between one side of the cabinet and a cool air intake of the component. Thus, cool air is provided to the cool air intake of the component. A plenum pressure controlled enclosure includes an equipment rack maintained at a neutral pressure, a plenum maintained at a slightly negative pressure or a neutral pressure, and a cooling unit. The plenum takes in air from the rack and expels it into the cooling unit. By controlling differential pressures in the rack and the plenum, air is efficiently drawn from the equipment rack and cooled utilizing the cooling unit.

Abstract: A dust removing device includes: a dust position estimating unit which estimates a position of a dust area which is an area in which there is dust; an air blow determining unit which determines, based on the estimated position, an air blow mode which causes a predetermined airflow in the dust area; an air blower which performs an air blow in the determined air blow mode; and an air intake unit which takes in air from a space in which the air blow is performed. Note that the dust removing device may include an information storage which stores a control table in which air blow control information defining the air blow mode is written for a position of each dust area, and the air blow determining unit may determine, based on the control table, the air blow mode in accordance with the air blow control information corresponding to the estimated position of the dust area.

Abstract: An indoor dust collecting system includes an air conditioner having an indoor unit that generates an air current, a dust collector, and a controller for controlling the air current from the indoor unit. A moving body detector is provided to detect a moving body such as, for example, a person, a pet, a cleaning robot, and the like. The air current from the indoor unit is controlled by the controller based on the position of the indoor unit, the position of a spot of occurrence of dust detected by the moving body detector, and the position of the dust collector such that the air current from the indoor unit reaches the dust collector via the spot of occurrence of dust in order for the dust collector to effectively suck the dust.

Abstract: A module with a flow channel for providing a fluid curtain, such as an air curtain, between different environments, comprises an inlet for introducing a fluid flow through said flow channel of the module and an outlet for introducing said fluid curtain. In addition the module comprises a honeycomb structure with plurality of parallel conduits before the outlet in order to laminarize the flow for the fluid curtain, and guiding the flow and suppressing instabilities in the flow downstream of it. Furthermore the module comprises a mechanical structure before the outlet. The mechanical structure is configured to change the velocity profile of the flow before the honeycomb structure or during the honeycomb structure so that the velocity profile of the flow after the honeycomb structure or outlet is a smooth skewed parabolic velocity profile with a peak shifted from the centre line of the symmetrical parabolic velocity profile.

Abstract: One or more embodiments of a standoff chamber system configured to generate aerosolized clouds, useful in testing or calibrating standoff detectors in a laboratory environment, includes a chamber body having vertically recirculating vortices for generation of the clouds. The standoff chamber further includes a pair of aero-windows configured to surround a pair of apertures in the chamber body, filtering and preventing escape of the cloud, while allowing direct observation of the cloud by standoff detectors.

Abstract: Disclosed is an air distribution control unit or a filtration/ventilation unit which is portable and/or can be mounted on or integrated in furniture e.g. as a cabinet of at the head region of a bed. The filtration/ventilation unit cleanses air from a person/patient by aspirating the person's/patient's exhalation air into the filtration/ventilation unit. To construct an at least partly isolated area around the patient, filtered air can be directed e.g. vertically out of the filtration/ventilation unit to perform an air curtain. Use of the filtration/ventilation unit reduces the risk of dissipation of air-borne diseases and health hazardous matter, and reduces the amount of air to ventilate a room with patients.

Abstract: A method of and system for preventing particulate matter, such as debris, precipitation, and condensation from occupying a space or accumulating upon a surface by directly engaging the surface or creating an air-curtain effect adjacent the space utilizing a selectively actuated gaseous flow.

Abstract: Described herein are various embodiments of a modified hexagonal perforated pattern and objects within which the pattern is formed. For example, according to one representative embodiment, an apparatus includes an object and a perforated pattern formed in the object. The perforated pattern includes a plurality of perforations through which matter is flowable. Each of the perforations includes a modified hexagonal shape including a hexagon having six rounded corners.

Abstract: Provided herein is a portable device useful for providing ventilation to a selected area via circulation of ambient air. A device according to the present invention is especially well-suited to provide ventilating air to a person resting on a bed, by directing air from the room to the volume defined by the top surface of the mattress of the bed and a bed covering disposed thereon. Use of the present invention increases the ability of persons to achieve restful sleep by enabling convenient control of the air surrounding the person to a comfortable level.

Abstract: A food container includes an interior chamber sized to contain food items, the interior chamber having a first temperature zone and a second temperature zone. The food container further includes an opening providing access to the interior chamber, a fan configured to supply an air stream to a duct system, and a heater configured to heat the air stream, where the duct system is configured to deliver a portion of the air stream across the opening, creating an air curtain. The food container further includes a diverter disposed in the air curtain to divert a portion of the air stream out of the air curtain and into the interior chamber, the diverter configured to cause the second temperature zone to maintain a second temperature different from the first temperature.

Abstract: A mount for a bezel/air filter assembly for use in mounting the bezel/air filter assembly directly to the rack or cabinet in which electrical equipment is mounted or contained. The mount is affixed to the rack or cabinet rather than to the electrical equipment mounted or contained in the rack or cabinet, making use of the normally unused frontal area along the rail forming the front of the rack or cabinet, maximizing air flow to the equipment mounted in the rack or contained in the cabinet and allowing greater packaging density. Also, by using the rack or cabinet (rather than the equipment) as a support element, the mount is substantially stronger than if the mount was affixed to the chassis.

Abstract: A device for generating an air wall comprises a primary blower slit for generating a flat primary air stream in a passage opening mutually separating two spaces with different temperatures. Two adjacent air streams with the same direction and speed are added to the primary air stream. The primary air stream has a temperature between those of the secondary air streams. The absolute humidity of the air of the primary air stream is at least equal to that of the cold secondary air stream and lower than that of the warm secondary air stream. The air speed of the primary air stream amounts to at least 15 m/s. The width of the primary blower slit lies in the range of 15-40 mm. The length of the primary blower slit in the direction of the air stream lies roughly in the range of 5-40 cm, preferably 10-30 cm.

Abstract: Environmental containment systems, and in certain embodiments, systems and methods involving vessels and unit operations or components of cell culture, cell containment, bioreactor, chemical manufacturing, or pharmaceutical manufacturing systems provided with environmental containment are provided. Certain vessels, unit operations, devices, and components may be used to perform all or part of biological, chemical, and/or pharmaceutical manufacturing processes therein. In some embodiments, an environmental containment system includes a multi-level containment apparatus. For instance, a first substantially closed environmental containment enclosure may be contained within a second substantially closed environmental containment enclosure; the first and second enclosures may be contained in a third substantially closed environmental containment enclosure, etc.

Abstract: A container configured to hold a plurality of substrates lined up vertically with space therebetween, which includes a container main unit formed in a tube shape having a quadrangular cross section as a whole that includes a first opening provided on one end side and a second opening provided on the other end side of the container spaced apart in the horizontal direction from the first opening, the first opening serving as an entrance for loading and unloading the substrates, a fan filter unit that is provided in an area of the second opening and that causes movement of air from the second opening toward the first opening, and a lid configured to be attached in an area of the entrance of the container main unit, the lid having an open state and a closed state, and forming a ventilation opening that allows air to pass in the closed state.

Abstract: A reversed pressure relief valve that is used in connection with a computer hard disk drive so as to vent pressurized gases contained within the disk drive while not permitting debris to enter the drive mechanism or the valve. More specifically, the present invention is a reversed direction valve which includes at least one passageway defined by at least a lifter ring, a dry strap, a pressure sensitive adhesive (“PSA”)/body film and a filter media.

Abstract: A filter including a base portion along with a flange extending from the base and a top surface plus a bottom surface is disclosed. The filter also includes an outlet. During use the filter is placed within an electronic enclosure, generally with the bottom surface in contact with the wall of the enclosure. The wall of the enclosure has an inlet through which gases can travel into the interior of the filter, and then eventually leaving the filter by way of the outlet, which is within the interior of the electronic enclosure.

Abstract: An air shutter of low cost, high efficiency, and easy maintainability is provided, which can interrupt efficiently the flowage of air across a doorway when the door is open based on the consideration of the experimental data of the flowage of air across the opening area of the doorway of a cold storage. The air shutter comprises a gatepost 12 and a gatepost 13 installed at both sides of the opening area of a doorway. The gatepost 12 is provided with a lower slit nozzle 12a, a suction opening 12b, and lower fans 12c and a suction duct 12d inside thereof, on the other hand, the gatepost 13 provided with an upper slit nozzle 13a, a suction opening 13b, and lower fans 13c and a suction duct 13d inside thereof.

Abstract: In one embodiment, a removable air filter is mounted proximate to where electrical equipment is mounted in a case. The filter has at least two sections with different finite air impedances. The filter is constructed of a filter media mounted inside of a frame. When the equipment arrangement is modified, the filter can be replaced with another filter with a different impedance profile, such that the air flow remains optimal for many equipment arrangements. The impedance profile can also be tailored to compensate for the characteristic airflow of the case design. Other embodiments are described and claimed.

Abstract: An air curtain-assisted exhaust method and a device thereof are provided. Air curtain generators are disposed on a worktable to enclose an encircled area in the worktable. A receiving hood is disposed above the worktable, wherein the vertical lower part of the outer edge of the receiving hood completely covers the encircled area. Then, the air curtain generators are started to blow out air curtains toward an opening of the receiving hood, and the receiving hood is started to suck an air flow. A shielding space is defined by the air flow sucked by the receiving hood and the air curtains, so that the air curtains may guide a smoke generated inside the shielding space to the receiving hood to be exhausted, thereby achieving the effect of auxiliary exhaust, and may restrict the smoke in the shielding space to prevent the smoke from diffusing laterally.

Abstract: Disclosed is a method and apparatus for a storage system having an adsorbtive element capable of adsorbing gas home molecules from gas for the storage system. In one configuration the storage system can include an enclosure adapted to contain a plurality of data storage drive devices and data storage media and wherein the data storage drive devices are adapted to functionally operate. The enclosure is capable of containing gas having, among other constituents, gas borne molecules.

Abstract: An air-purifying device for a front-opening unified pod to purify the air in it is provided. The air in the front-opening unified pod 51 is sucked through one of its breathing holes 58a and directed into an air-purifying device (M) that includes a fan-driving means 1, a dust-filtering means 2, and a chemical-filtering means 3. The moisture, chemical gases, and dust in the air are removed by the air-purifying device (M), and then the purified air is forced into the front-opening unified pod 51 through the other breathing hole 58b. Thus the air in the front-opening unified pod 51 is purified, and its purity is maintained by circulating the air.

Abstract: An insect proof wind generating device comprises a body having an wind inlet and a wind outlet; a wind driver being installed within the body; the actuation of the wind driver being controlled by a circuit board; the circuit board being connected to a magnetic sensor; the magnetic sensor serving for detecting the opening and closing of a door or a window. When it is determined that the door or window is opened, the magnetic sensor will actuate wind generating device to blow wind. The wind driver includes a motor electrically connected to the circuit board and at least on fan driven by the motor. The circuit board is installed with a voltage reduction protection unit for reducing a voltage reduction protection unit for reducing a high voltage to a low voltage suitable for the magnetic sensor.

Abstract: An apparatus includes a rigid housing having a plurality of sides removably engaged with the electronic device and a plurality of passageways for effectively channeling air through first and second directions. The apparatus further includes at least one rotary fan moving in a selected radial path situated along one of the sides, a disposable electrostatic filter bifurcating the passageways wherein the contaminants are trapped and a power supply source electrically coupled to the fans.

Abstract: A conditioned vestibule for a cold storage doorway is disclosed. The vestibule includes a frame that supports inner and outer moveable door-forming members. The vestibule also includes a heater that circulates air between the inner and outer door-forming members and a variable-speed fan that varies flow of the air between the inner and outer door-forming members. In one embodiment, the airflow from the fan increases upon the opening of the door-forming members and decreases upon the closing of the door-forming members.

Abstract: A self-cleaning filter and cooling system are disclosed for filtering ambient air used to cool the interior of an equipment enclosure. The system includes an enclosure for housing predetermined equipment to be cooled, the enclosure including an air intake port and an exhaust port. The system includes a blower for causing ambient air to be inducted into the enclosure through the air intake port and expelled from the exhaust port. The system also includes a filter that includes a predetermined filter media that covers the air intake port and the exhaust port. The filter moves relative to the air intake port and the exhaust port. The enclosure and blower are configured so as to create a single air flow path for equipment cooling and for discharging exhaust through the filter media to dislodge any particulate matter entrapped in the filter media.

Abstract: A substrate transport container having a carrier box including a container body and a door hermetically sealably covering an opening provided in the front of the container body. Partitions form a circulating flow path in the carrier box. The circulating flow path has a flow path in which air flows toward substrates and a flow path in which air flows toward a fan. A substrate carrying section is disposed in the flow path in which air flows toward the substrates to carry the substrates in such a way that the principal surfaces of the substrates are approximately parallel to the flow path in which air flows toward the substrates. A particle removing filter and a gaseous impurity trapping filter are placed on the upstream side of the substrate carrying section in the flow path in which air flows toward the substrates. A fan motor for driving the fan is incorporated in the carrier box to form an air current for circulating through the circulating flow path.

Abstract: A method of using a substrate transport pod is provided, which is suitable for manufacturing semiconductor devices with copper wiring and low dielectric insulating film having dielectric constants of less than 3. The method is based on loading the substrates into a pod from an atmosphere of a first process, and circulating a gaseous atmosphere through interior of the pod in such a way to selectively remove at least one contaminant including moisture, particulate substances or chemical substances, and to expose the substrates to a controlled atmosphere intermittently or continually while the substrates are held in the pod before they are unloaded from the pod and introduced into a second process. For a pod that is used to house the substrates for the purpose of retaining or transporting, the pod has a pod main body and a door that provides a hermetic sealing seal, and the pod is made primarily of a materiel that has moisture absorption factor of less than 0.

Abstract: A smoke guiding machine includes a front machine, and left and right machines, and is installed around a gas stove, thereby omnidirectionally isolating smoke produced. Tracks at two ends of the front machine are assembled to protrusions at left and right machines, and the protrusions are capable of displacing in channels at the tracks, so as to adapt to gas stoves having distinct dimensions. The front machine is further provided with a wind speed tuner, and thus appropriate wind speed can be adjusted and obtained for different wind speed requirement of different heights of smoke exhausts in various households.

Abstract: The invention relates to a compartment 10 having a space 32 segregated from air outside the compartment and capable of housing a product apparatus for assembly of, for example, semiconductor devices and integrated circuit packages in a “clean” environment. The compartment 10 includes panels 16 to segregate the air inside the compartment 10 from the surrounding environment. At the front of the compartment 10, there is a top access panel 12 and a bottom access panel 14 to access a production apparatus (not shown) which is houseable or storable within a space 32 for such apparatus defined within the compartment 10. Where it is desired to place a plurality of similar compartments 10 adjacent to one another to provide a production line, an opening 18 can be included in one or both of the side panels 16 for transfer of processed material, such as leadframes for assembling integrated circuit packages, from one production apparatus to another, housed in respective adjacent compartments 10.

Abstract: A system and method for providing an air curtain for impeding the entry of dust, dirt, debris, smoke, insects and other airborne particulate matter into an interior area of an aircraft without the need for disposing heavy, bulky and high power consuming blower assemblies above the opening in the aircraft. The invention comprises a pair of air intake ducts each having a fan disposed therein. The fans draw an ambient airflow into the air intake ducts. Pressurized air from a power unit associated with the aircraft, such as an engine or auxiliary power unit, is injected into the air intake ducts. This has the effect of significantly accelerating the airflow in the air intake ducts to a velocity suitable for forming an air curtain. The air intake ducts are coupled to a manifold having a length sufficient to substantially span the opening of an aircraft at which the air curtain is formed.

Abstract: An air curtain generator includes a casing with a fan received therein so as to blow an air curtain from opening of the casing. Two arms are pivotally connected to two end members on two ends of the casing. and each arm is pivotally connected to a fixed member. A link is pivotally connected between the fixed member and the end member so that the casing is able to be adjusted by pivoting the arms. The air curtain separates the workers and the source where generates contaminated air.

Abstract: A frost control system for preventing the accumulation of frost on components of a freezer door assembly is disclosed. The system comprises a movable door disposed between a cold space and a warm space, and a header assembly. The header assembly comprises an air mover and an air inlet adapted for drawing air from the cold space to an inlet of the air mover. A conduit is provided for conducting air from an outlet of the air mover to a region of the warm space proximate to the door, and a thermostatically-controlled heater is disposed within the conduit. The conduit includes a heated air exhaust vent. Also provided is control circuitry for managing the operation of the heater and air mover.

Abstract: A clean air system a fan and a filter assembly for producing a flow of clean air and for discharging the clean air from an outlet towards a clean area. A Coanda effect device is located adjacent to the filter assembly about the whole or part of its periphery, and induces movement of air away from the flow of clean air. Any potentially contaminated air must thus overcome the outward flow of air in order to reach the clean area, thereby reducing the likelihood of contamination of the clean area.

Abstract: An improved, low-cost conditioned air vestibule for use on a doorway of a refrigerated storage room permits unobstructed passage of vehicles while effectively reducing the exchange of air through the doorway and substantially eliminating precipitation both inside and outside the doorway.

Abstract: A turbo-axial fan assembly is provided for a clean-air supply system of a substrate handling module of a vacuum processing system. The turbo-axial fan assembly has one or more turbo-axial fans for generating airflow through the substrate handling environment. The turbo-axial fans have tunable vanes for controlling the speed of the airflow and efficiently using the available power.

Abstract: A transport carrier for transporting x-ray masks, wafers and the like, from an ultra-clean environment to another through a lesser clean environment. The apparatus includes a box that is sealed from the outside by an access door, one or more fans, at least one air filter, rechargeable batteries or a continuous voltage supply for powering the fans. It also includes a damper mechanism for maintaining a positive air pressure when the access door opens. The damper also secures recirculating air inside the box when the door closes. The recirculating air is continuously cleaned at a rate of 2,000 times/minute. The air filter is placed horizontally, preferably, over a frame facing the product to be transported to ensure a continuous smooth, laminar flow.

Abstract: A ceiling-mounted ventilation system assembly, where ventilation air from the ventilation system is directed down towards a working area, and where air is supplied to the ventilation system from indoor air (RL) and/or from external ventilation equipment (SL). The ventilation system is divided into at least two sections (1, 2, 3, 4) each with separate air, where at least one of the sections (1, 2) is designed and positioned so that the airflow therefrom will essentially strike a work table (78) in the working area, while the other section or sections (3, 4) are designed and positioned in such a way that the airflow therefrom will strike areas outside the work table, and where the sections are each independently equipped with devices (5, 6, 7, 8, 57, 58, 59) to control the air volume passing through the section, heat exchanger (29, 30, 31, 32, 33, 34, 35, 81, 82) for controlling the temperature of the air issuing from the section, and filters for ensuring a specify purity of the air which is emitted.