Laser Evaporative (i.e., Ablative) Coating Patents (Class 505/474)
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Patent number: 5508255Abstract: The present invention comprises a high quality, epitaxial thallium-based HTS thin film on MgO and other substrates and methods of providing the same. The present invention is achieved using a nucleation layer which provides a template for subsequent growth. Specifically, YBCO and/or YBCO analog films (films having growth characteristics and physical structures analogous to YBCO) are used as nucleation layer(s) on MgO and other substrates to enable the growth of epitaxial thallium-based HTS films.Type: GrantFiled: July 5, 1994Date of Patent: April 16, 1996Assignee: Superconductor Technologies, Inc.Inventor: Michael M. Eddy
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Patent number: 5468806Abstract: Disclosed is a method of manufacturing a thin film of an oxide superconductor represented by formula Sr.sub.1-x Nd.sub.x CuO.sub.2 on a substrate. The oxide superconductor has a tetragonal crystal structure, the lattice constant in a-axis falling within a range of between 0.385 nm and 0.410 nm, and the lattice constant in c-axis being an integer number of times as much as a level falling within a range of between 0.310 nm and 0.350 nm. The method includes the steps of forming by epitaxial growth a film of a crystal having lattice constants close to those of the crystal of said oxide superconductor on a substrate, and forming a thin film of the oxide superconductor of a tetragonal crystal structure represented by general formula (I) by a thin film-forming technique.Type: GrantFiled: December 1, 1994Date of Patent: November 21, 1995Assignees: The Furukawa Electric Co., Ltd., Hitachi Ltd., Kabushiki Kaisha Toshiba, Central Research Institute of Electric Power Industry, International Superconductivity Technology CenterInventors: Kiyoshi Yamamoto, Nobuyuki Sugii, Koichi Kubo, Michiharu Ichikawa, Hisao Yamauchi
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Patent number: 5462921Abstract: A method of fabricating a thin-film Hg-containing oxide superconductor is disclosed, which comprises forming a thin film on a substrate, said thin film containing mercury, an alkaline earth element, and copper as main components thereof; and subjecting said substrate with the thin film to a heat treatment in an oxygen-containing atmosphere at an oxygen partial pressure of 1/500 to 1/10 atm, to convert said thin film to the thin-film superconductor.Type: GrantFiled: May 9, 1994Date of Patent: October 31, 1995Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Hideaki Adachi, Kentaro Setsune, Koichi Mizuno
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Patent number: 5447910Abstract: An oxide superconducting film is formed using laser deposition of applying an excimer laser beam (1, 21) onto a target (3, 23) through a converging lens (2, 22) and depositing atoms and/or molecules scattered from the target (3, 23) on the base material (5). The converging lens (2) is prepared by a cylindrical lens, or the converging lens (22) is moved, so that a portion (4, 25) irradiated with the laser beam (1, 21) on the target (3, 23) is linearized. Thus, it is possible to form an oxide superconducting film which is homogeneous over a region having a relatively large area on the base material (5) not only in film thickness but also in property.Type: GrantFiled: October 4, 1993Date of Patent: September 5, 1995Assignee: Sumitomo Electric Industries, Ltd.Inventors: Noriki Hayashi, Noriyuki Yoshida
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Patent number: 5432151Abstract: A process for depositing a biaxially aligned intermediate layer over a non-single crystal substrate is disclosed which permits the subsequent deposition thereon of a biaxially oriented superconducting film. The process comprises depositing on a substrate by laser ablation a material capable of being biaxially oriented and also capable of inhibiting the migration of substrate materials through the intermediate layer into such a superconducting film, while simultaneously bombarding the substrate with an ion beam. In a preferred embodiment, the deposition is carried out in the same chamber used to subsequently deposit a superconducting film over the intermediate layer. In a further aspect of the invention, the deposition of the superconducting layer over the biaxially oriented intermediate layer is also carried out by laser ablation with optional additional bombardment of the coated substrate with an ion beam during the deposition of the superconducting film.Type: GrantFiled: July 12, 1993Date of Patent: July 11, 1995Assignee: Regents of the University of CaliforniaInventors: Richard E. Russo, Ronald P. Reade, Stephen M. Garrison, Paul Berdahl
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Patent number: 5422338Abstract: A thin film device comprising a substrate and an oxide superconductor film formed thereon, wherein said oxide superconductor film comprises atomic monolayers each composed of at least one kind of element of the oxide superconductor, which are deposited substantially in a vertical direction to the substrate so that the pereodicy of the lattice structure of the oxide superconductor is substantially maintained, and at an intermediate portion of the oxide superconductor film, at least a part of the atoms of the oxide superconductor is substituted by other element in the lattice structure of the oxide superconductor to form a non-superconductor interlayer, and the pereodicy of the lattice structure of the oxide superconductor film is substantially maintained across the interface between the oxide superconductor and said non-superconductor interlayer.Type: GrantFiled: January 10, 1994Date of Patent: June 6, 1995Assignee: Mitsubishi Chemical CorporationInventor: Yukio Watanabe
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Patent number: 5418216Abstract: A structure having a silicon substrate with an epitaxially grown magnesium oxide layer on a surface onto which is epitaxially grown, either directly or on an intermediary layer, a layer of high temperature superconducting material.Type: GrantFiled: May 15, 1992Date of Patent: May 23, 1995Inventor: David K. Fork
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Patent number: 5413988Abstract: An oxide superconductor thin film of Y.sub.1.+-..alpha. Ba.sub.2.+-..beta. Cu.sub.3.+-..gamma. O.sub.7-.delta. with a smooth surface having a low density of particles being generated without decreasing superconductivity is produced by the steps of applying a pulsed laser beam to the target formed of an oxide material having an apparent density of 95% or more, substantially composed of Y.sub.1.+-..alpha. Ba.sub.2.+-..beta. Cu.sub.3.+-..gamma. O.sub.7-.delta., which is obtained from a molded body of an amorphous powder by subjecting it to partial melting, followed by gradual cooling, depositing and accumulating an irradiated and evaporated oxide material of the target on a substrate.Type: GrantFiled: April 13, 1994Date of Patent: May 9, 1995Assignees: International Superconductivity Technology Center, Mitsubishi Materials CorporationInventors: Kunihiko Hayashi, Shuichi Fujino, Youichi Enomoto, Shoji Tanaka
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Patent number: 5403818Abstract: A Bi--Sr--Ca--Cu--O ceramic superconductor contains 0112 phases which are finely dispersed in a 2212-phase matrix with its c-axis oriented perpendicular to a growth direction.A method of preparing a Bi--Sr--Ca--Cu--O ceramic superconductor comprises the steps of growing crystals under conditions satisfying:G/R.gtoreq.1 and G.R.gtoreq.10000where G (K/cm) represents the temperature gradient at a solid-liquid interface and R (mm/h) represents the rate of crystal growth, and annealing the grown crystals in an atmosphere having oxygen partial pressure of at least 0.05 atm. within a temperature-range of 800.degree. to 860.degree. C. for at least 2 hours.Type: GrantFiled: March 19, 1993Date of Patent: April 4, 1995Assignee: Engineering Research Association For Superconductive Generation Equipment and MaterialsInventor: Kazuhiko Hayashi
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Patent number: 5389606Abstract: An in-situ process for preparing thin films which contain relatively volatile and involatile oxides is disclosed, in particular, crystalline thin films of oxides of conductors, superconductors or ferroelectric materials, wherein separate sources of the relatively volatile and involatile oxides during depositon of the thin film are employed.Type: GrantFiled: November 12, 1993Date of Patent: February 14, 1995Assignee: E. I. du Pont de Nemours and CompanyInventor: Dean W. Face
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Patent number: 5372089Abstract: Disclosed herein is a method of forming a single-crystalline thin film having excellent crystallinity on a base material without depending on the material for and crystallinity of the base material. In this method, a base material is provided thereon with a mask which can prevent chemical species contained in a vapor phase from adhering to the base material. The base material is continuously moved along arrow A, to deliver a portion covered with the mask into the vapor phase for crystal growth. Thus, a thin film is successively deposited on the portion of the base material, which is delivered from under the mask, from the vapor phase. A crystal growth end is formed on a boundary region between a portion of the base material which is covered with the mask and that which is exposed to the vapor phase, so that a crystal having the same orientation as the growth end is grown on a portion of the base material newly exposed by the movement.Type: GrantFiled: July 26, 1993Date of Patent: December 13, 1994Assignees: Sumitomo Electric Industries, Ltd., The Tokyo Electric Power Company IncorporatedInventors: Noriyuki Yoshida, Satoshi Takano, Kousou Fujino, Shigeru Okuda, Tsukushi Hara, Hideo Ishii
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Patent number: 5360785Abstract: In a method of preparing an oxide superconducting thin film having a composition of Y-Ba-Cu-O, for example, using laser ablation, which comprises the steps of applying a laser beam to a target containing components of an oxide superconductive material and depositing particles, being thereby scattered from the target, on a substrate, the oxygen gas flow rate during film deposition is set to be at least 50 SCCM, the oxygen gas pressure during film deposition is set to be 10 to 1000 mTorr, the distance between a target 9 and a substrate 10 is set to be 40 to 100 mm, the temperature of the substrate 10 is set to be 600.degree. to 800.degree. C., the energy density of a laser beam 7 on the surface of the target 9 is set to be at least 1 J/cm.sup.2, and the laser pulse energy is set to be at least 10 mJ.Type: GrantFiled: May 7, 1993Date of Patent: November 1, 1994Assignees: Sumitomo Electric Industries, Ltd., The Toyko Electric Power Company, IncorporatedInventors: Noriyuki Yoshida, Satoshi Takano, Shigeru Okuda, Noriki Hayashi, Tsukushi Hara, Kiyoshi Okaniwa, Takahiko Yamamoto
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Patent number: 5356872Abstract: An evaporation method of producing a new high Tc superconducting material using fullerene molecules as artificial pinning sites for any magnetic flux that may enter the material.Type: GrantFiled: March 17, 1994Date of Patent: October 18, 1994Assignee: The United States of America as represented by the Secretary of the NavyInventors: Walter Eidelloth, deceased, James T. Busch, legal representative, Richard J. Gambino, Rodney Ruoff, Claudia D. Tesche
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Patent number: 5334579Abstract: A process for producing a superconducting material comprising a compound oxide represented by the general formula:(Ba, Ca).sub.x (.alpha., Dy).sub.1-x Tl.sub.y Cu.sub.1-y O.sub.3-zwherein ".alpha." represents Y or La; the atomic ratio of Ca to Ba is between 1% and 90%; the atomic ratio of Dy to .alpha. is between 1% and 90%; x, y and z are within the ranges of 0.ltoreq.x.ltoreq.1, 0.ltoreq.y.ltoreq.1, and 0.ltoreq.z<1 respectively; and the expression of (Ba, Ca) and (.alpha., Dy) means that the respective elements occupy predetermined sites in a crystal in a predetermined proportion. The process comprises preparing a material powder, compacting the material powder and then subjecting the resulting compact to a final sintering operation and is characterized in that the material powder is(A) a powder mixture composed of powders selected from a group comprising (i) powders of elemental Ba, Cu, Ca, .alpha., Dy and Tl and (ii) powders of compounds each containing at least one of said elements Ba, Cu, Ca, .Type: GrantFiled: December 31, 1992Date of Patent: August 2, 1994Assignee: Sumitomo Electric Industries, Ltd.Inventors: Hideo Itozaki, Saburo Tanaka, Nobuhiko Fujita, Shuji Yazu, Tetsuji Jodai
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Patent number: 5334252Abstract: In order to enable formation of a smooth and dense oxide superconducting film with no clear appearance of grain boundaries in a fine structure even at a high film forming rate, a laser ablation method is employed to apply a laser beam 2 to a target 1 containing components of an oxide superconductive material and deposit particles, which are thus scattered from the target 1, on a substrate 3, while gaseous oxygen is supplied from a gaseous oxygen inlet 7 toward laser plasma 6, which is generated by the application of the laser beam 2.Type: GrantFiled: September 25, 1992Date of Patent: August 2, 1994Assignee: Sumimoto Electric Industries, Ltd.Inventors: Noriyuki Yoshida, Satoshi Takano, Shigeru Okuda, Noriki Hayashi, Tsukushi Hara, Kiyoshi Okaniwa, Takahiko Yamamoto
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Patent number: 5330968Abstract: A laser ablation process for preparing an oxide superconducting thin film characterized in that an electrode is arranged between a substrate and a target. While the film is formed by laser ablation, a bias voltage of 75-100 V is applied between the electrode and the target.Type: GrantFiled: June 12, 1992Date of Patent: July 19, 1994Assignee: Sumitomo Electric Industries, Ltd.Inventors: Tatsuoki Nagaishi, Nobuhiro Ota, Naoji Fujimori
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Patent number: 5330966Abstract: An oxide superconducting layer is formed on a base material of silver, whose single side is coated with MgO, or single-crystalline MgO for depositing a Bi.sub.2 Sr.sub.2 Ca.sub.2 Cu.sub.3 phase in a crystallographically oriented state by sputtering, CVD or laser ablation. Metal lead or lead oxide is then laid thereon by sputtering to obtain a two-layer structure, and the two-layer structure is heat treated in the atmospheric air. Thus, a bismuth oxide superconducting film, which is excellent in crystal orientation as well as denseness and thereby having high critical current density, is formed on the base material.Type: GrantFiled: June 26, 1992Date of Patent: July 19, 1994Assignees: Sumitomo Electric Industries, Inc., The Kansai Electric Power Co., Inc.Inventors: Noriki Hayashi, Satoshi Takano
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Patent number: 5322817Abstract: In situ vapor phase growth of thallium containing superconductors is achieved by controlling thallium volatility. Thallium volatility is controlled by providing active oxygen at the surface of the growing material and by avoiding collisions of energetic species with the growing material. In the preferred embodiment, a thallium containing superconductor is grown by laser ablation of a target, and by provision of oxygen during growth. More specifically, a source of thallium, calcium, barium, copper and oxygen is created by laser ablation of a thallium rich target, generating an ablation plume that is directed onto a heated substrate through the oxygen, with the plume passing through oxygen having a pressure from 10.sup.-2 to ten torr. Epitaxial superconducting thin films of thallium, calcium, barium, copper and oxygen have been grown by this technique. Various superconducting phases may be engineered through use of this method.Type: GrantFiled: December 16, 1991Date of Patent: June 21, 1994Assignee: Superconductor Technologies, Inc.Inventors: Timothy W. James, Boo J. L. Nilsson
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Patent number: 5321004Abstract: A Josephson break junction device suitable for highly sensitive electronic detecting systems. A superconductor film such as YBa.sub.2 Cu.sub.3 O.sub.7 is deposited on a substrate such as a simple-crystal MgO. The film is fractured across a narrow strip by at least one indentation in the substrate juxtaposed from the strip to form a break junction. A transducer is affixed to the substrate for applying a bending movement to the substrate to regulate the distance across the gap formed at the fracture to produce a Josephson turned junction effect. Alternatively, or in addition to the transducer, a bridge of a novel metal is applied across the gap to produce a weak-link junction.Type: GrantFiled: September 17, 1992Date of Patent: June 14, 1994Assignee: The United States of America as represented by the Secretary of the NavyInventors: Ignacio M. Perez, William R. Scott
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Patent number: 5314867Abstract: A process of making high temperature Tl-based superconductors. The process includes the steps of reacting solid Ba--Ca--Cu-oxides with Tl.sub.2 O.sub.3 vapor. The process allows high quality Tl-based superconductors to be easily fabricated.Type: GrantFiled: July 25, 1991Date of Patent: May 24, 1994Assignee: University of ArkansasInventors: Allen M. Hermann, Zhengzhi Sheng
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Patent number: 5300485Abstract: In order to enable formation of a smooth and dense oxide superconducting film with no clear appearance of grain boundaries in a fine structure even at a high film forming rate, a laser ablation method is employed to apply a laser beam 2 to a target 1 containing components of an oxide superconductive material and deposit particles, which are thus scattered from the target 1, on a substrate 3, while gaseous oxygen is supplied from a gaseous oxygen inlet 7 toward laser plume 6, which is generated by the application of the laser beam 2, and to a portion of the target irradiated with said laser.Type: GrantFiled: September 25, 1992Date of Patent: April 5, 1994Assignee: Samitomo Electric Industries, Ltd.Inventors: Noriyuki Yoshida, Satoshi Takano, Shigeru Okuda, Noriki Hayashi, Tsukushi Hara, Kiyoshi Okaniwa, Takahiko Yamamoto