Abstract: A chemical mechanical polishing apparatus includes a polishing pad, a wafer carrier, a first ring, a second ring, a pad conditioning unit and at least one cleaning solution supply pipe. The first ring surrounds the semiconductor wafer and the edge of the wafer carrier. The second ring surrounds the first ring. The cleaning solution supply pipes are connected to the second ring and/or to the pad conditioning unit to supply the cleaning solution into the gaps between the rings, the wafer carrier and portions of the pad conditioning unit to remove solidified slurry from the gaps.

Abstract: The plunger of a baler for making parallelepiped bales is driven by an extensible and retractable hydraulic actuator that is connected for oscillating a link forming a crank coupled to the plunger by a connecting link. The dimensions and locations of the crank and connecting link relative to the hydraulic actuator results in the plunger being moved in the baling chamber through a distance which is about twice the stroke of the actuator when the plunger is moved from a fully retracted position, at one side of an inlet used for introducing crop into the chamber, to a fully extended position at an opposite side of the inlet from the fully retracted position.

Abstract: A square baler has a generally horizontally disposed baling chamber, a reciprocating plunger within the chamber, and an underslung loading duct projecting downwardly and forwardly from the bottom of the chamber to a pickup apparatus. A stuffer is operable through successive stuffing strokes within the duct to both transfer material from the pickup apparatus into the baling chamber and precompress the material within the duct. The stuffer includes a pair of fore-and-aft mutually spaced apart forks presenting a leading fork and a trailing fork with respect to the direction of travel of the stuffer during a stuffing stroke. The leading fork has a generally kidney-shaped path of travel that begins its upstroke rearwardly of the forwardly facing inlet of the duct, while the trailing fork has a generally kidney-shaped path of travel that begins its upstroke forwardly of the inlet of the duct.