Abstract: A vapor compression air conditioning system, including a heat pump embodiment, provides enhanced dehumidification of supply air to an enclosed space. The refrigerant fluid circuit includes an evaporator and a reheat heat exchanger for controlling temperature and dehumidification of supply air. A variable speed fan motor controls air flow over an outdoor condenser heat exchanger whereby condenser heat exchange may be shifted progressively between the reheat heat exchanger and the condenser heat exchanger. One alternate embodiment includes a thermosiphon system for heat transfer to and from the reheat heat exchanger. Another embodiment includes a bypass air flow control damper for controlling flow of supply air through the evaporator and the reheat heat exchanger.

Abstract: A humidity controller for an air handling unit of a space, room or zone. The controller may be a dehumidification system integrated with a constant volume air handling unit. The system may have separate actuator control of a mixed air damper and other actuator control for both an outdoor air intake damper and an indoor air exhaust damper. Humidity and temperature sensors may be placed outdoors and indoors in the space having air to be dehumidified, temperature controlled and/or mixed with outdoor air. An economizer controller may be connected to the sensors and actuators for controlling various properties of the air in the space. The air may be dehumidified by slowing down the movement of air across the cooling coil of the air handling unit.

Abstract: The present invention discloses an apparatus and method for controlling louver blades of an outdoor unit which can improve efficiency of the outdoor unit according to a state of the louver blades and peripheral conditions. The apparatus for controlling the louver blades of the outdoor unit includes: a louver blade member including louver blades having a pair of connecting protrusions at their both ends, and first to fourth levers for rotatably connecting the connecting protrusions of the louver blades formed in the same positions; a driving member for opening/closing the louver blades by moving the first to fourth levers in the vertical direction to the louver blades by a predetermined distance; and a microcomputer for controlling the driving member, and opening/closing the louver blades by generating a control command.

Abstract: An intake air dehumidification system for an internal combustion engine includes a peltier junction device responsive to at least one control signal to cool, and therefore condense moisture from, ambient air supplied by an air intake conduit to an intake manifold of the engine. Specific humidity of the ambient air supplied to the intake manifold is determined, and a control circuit is provided to produce the at least one control signal as a function of the specific humidity to maintain the specific humidity of the ambient air supplied to the intake manifold near a target humidity value.

Abstract: A process for controlling the volume of dry air, dried to a predetermined degree of dryness, from a sweep manifold of an air dryer system, flowing over a plurality of gas/liquid fluid separating membranes, comprising: diverting a predetermined volume of dried air to the manifold; sensing one of the flow volume and humidity values of the remainder of the dried air or the pressure differential within the system; and utilizing one of the differential pressure to control the predetermined volume of dried air and utilizing a controller for achieving the predetermined degree of dryness by controlling at least one solenoid valve which, in turn, controls the flow volume of the predetermined volume of dried air diverted to the manifold.

Abstract: A control system for a HVAC unit for controlling the humidity and temperature of interior building space at desired levels regardless of the outside temperature and humidity conditions. This system is more efficiently so that it operates with less energy consumption than current HVAC systems. The control system employs a combination of modulated return air bypass, modulated capacity compressor, and modulating hot gas reheat to maintain proper interior space humidity, and temperature while maintaining adequate ventilation within the interior building space. The system employs feed forward control to prevent overheating the interior building space with reheat and also, once humidity requirements are met, resets low pressure limit settings at the exit of the evaporator to minimize use of reheat in the operation of the unit.

Abstract: The present invention provides low temperature zone forming equipment having a storage function capable of controlling temperature and humidity and a method and equipment for maintaining the quality of hauled fishes in an auction market of marine products such as fishes shellfishes, which constitute a low temperature distribution system closely linked with a purchase and sale system in consideration of the characteristics of the market. The low temperature zone forming equipment used in the low temperature distribution system is composed of a chilled air generator 1 and an enclosure wall 3 of flexible hollow structure, said enclosure wall having openings for entrance and exit of water at an end part thereof and openings for supplying chilled air produced in said chilled air generator and having exhaust openings formed of knitted cloth along the inside of the enclosure wall.

Abstract: Methods and apparatus for controlling the cooling set point value of a climate control system are provided. In one illustrative embodiment, a humidity error is determined as a function of the actual humidity in the inside space and a humidity set point value. The cooling set point value is then adjusted by a cooling offset that is a function of the humidity error. Under humid conditions, and when insufficient dehumidification occurs during a normal cooling cycle, lowering the cooling set point may provide further dehumidification, which may improve comfort in the inside space. Under less humid conditions, and when the humidity level in the inside space is already below the humidity set point value, increasing the cooling set point value may lower the energy usage of the climate control system while still providing comfort.

Abstract: Outside air is treated to remove moisture before it enters the conditioned air space of a store or other building containing refrigeration furniture. The sensible air temperature and relative humidity measurements are taken to allow microprocessor calculations of the wet bulb temperature. A pair of unequal sized compressors of the HVAC system are then cycled in stages for peak efficiency and minimum compressor horsepower usage for low cost operation and minimal energy consumption both of the HVAC system and the refrigeration furniture. The wet bulb temperature is converged by the microprocessor which iterates a known polynomial approximately every 6 seconds to derive the wet bulb temperature. A time delay circuitry set at approximately 30 minutes prevents unnecessary staging of the compressors.

Abstract: A temperature control output branch unit D_MV_Temp outputs a manipulated variable to a heating actuator Act1 when the manipulated variable output MVT of a temperature controller PID_Temp is in a heating mode, and outputs it to a cooling actuator Act2 when the output MVT is in a cooling mode. A humidity control output branch unit D_MV_Hum outputs a manipulated variable to a humidifying actuator Act3 when the manipulated variable output MVH of a humidity controller PID_Hum is in a humidifying mode, and outputs it to the actuator Act2 when the output MVH is in a dehumidifying mode. A cooling output maximum value operation unit C_MAX gives whichever is larger of respective manipulated variable outputs from the branch units D_MV_Temp and D_MV_Hum to the actuator Act2.

Abstract: A humidity controller for an air handling unit of a space, room or zone. The controller may be a dehumidification system integrated with a constant volume air handling unit. The system may have separate actuator control of a mixed air damper and other actuator control for both an outdoor air intake damper and an indoor air exhaust damper. Humidity and temperature sensors may be placed outdoors and indoors in the space having air to be dehumidified, temperature controlled and/or mixed with outdoor air. An economizer controller is connected to the sensors and actuators for controlling various properties of the air in the space. The air may be dehumidified by slowing down the movement of air across the cooling coil of the air handling unit. Also, a temperature controller may be connected to a space temperature sensor, cooling coil or its associated air conditioner system, air supply fan, and heating coil or heat exchanger, for maintaining the temperature of the air in the space.

Abstract: A device and method is provided for sensing or predicting when condensation having a given physical state is present or imminent and for suppressing such condensation from a surface, such as a vehicle windscreen, eyewear, goggles, helmet visor, computer monitor screen, window, electronic equipment, etc, by preventing or removing it. A first thermal sensor is in thermally conductive contact with the surface. A second thermal sensor is in an environment separated from the surface. A humidity sensor is in the environment of the second thermal sensor. A circuit causes a condensation suppression mechanism to be activated for preventing or removing condensation having the given physical state from the surface when a temperature sensed by the first thermal sensor, a temperature sensed by the second thermal sensor, and a humidity sensed by the humidity sensor indicate that a condensation condition is either present or imminent and requires prevention or removal at the surface.

Abstract: A multiple stage dehumidification and cooling system wherein a first stage direct expansion dehumidifier operating at its optimum dew point to an entering high humidity, high temperature air stream and effecting a first lowering of the temperature and humidity of the air stream, with the conditioned air stream being serially conveyed to a second stage chilled liquid dehumidifier operating at its optimum dew point to effect a second lowering of the temperature and humidity, and thereafter to a third stage reheat coil for providing an exiting air stream of desired temperature and humidity conditioning. The synergistic coupling provides significant power saving over the prior alternatives of desiccant and chilled liquid systems and the stages are individually modulated to reduce power consumptions as the load temperature and humidity set points are approached.

Abstract: Disclosed is a heating and/or air-conditioning system for a vehicle and a method for adjusting a recirculating air fraction of the inlet air delivered to a passenger compartment of a vehicle in order to avoid exceeding a predetermined limit value of at least one air parameter, in particular the carbon dioxide fraction and/or the humidity in the passenger compartment air. The method provides that one or more secondary parameters be obtained and analyzed for indirect determination of the air parameter, and that the recirculating air fraction be adjusted as a function of the analysis.

Abstract: A method for controlling a vehicle air-conditioning system for cooling an interior of a vehicle is disclosed. The vehicle air conditioning system has a compressor coupled to an electronic control valve.

Abstract: Device for detecting a risk of misting of a motor-vehicle window, and installation including such a device. Measurements are taken and associated with chosen models giving access to an average temperature (on the surface) of the window, for instance the windscreen, and to a dew temperature of the air in the passenger compartment of the vehicle. A comparison between the two temperatures represents a risk of misting of the window.

Abstract: An object of the invention is to provide a low-cost in-car sensor equipped with an aspirator fan motor, which is capable of detecting temperature and humidity. A thermistor for detecting temperature and a humidity sensor are arranged at desired positions on a mounting board, and the temperature and humidity of air drawn from an air inlet port and exhausted from an air outlet port are detected. At the same time, the use of electronic circuit components forming a voltage regulator circuit and a filter circuit for coping with electromagnet interference which have been employed in a brushless motor drive circuit for the aspirator fan motor is shared by the humidity sensor. This makes it possible to reduce the number of electronic circuit components necessary for the humidity sensor, and provide a low-cost in-car sensor equipped with an aspirator fan motor, enabling construction of a more inexpensive automotive air conditioner.

Abstract: A method for controlling a vehicle air-conditioning system for cooling an interior of a vehicle is disclosed. The vehicle air conditioning system has a compressor coupled to an electronic control valve.

Abstract: A refrigeration system for cooling a logic module includes an evaporator housing including an evaporator block in thermal communication with the logic module. The evaporator housing includes a humidity sensor for detecting a humidity within the evaporator housing. The system further comprises a controller for controlling a refrigeration unit supplying cold refrigerant to the evaporator block in response to the operating conditions of the logic module and the temperature of the evaporator block. In another aspect of the invention, two modular refrigeration units are independently operable to cool the evaporator block, and each refrigeration unit is controllable in various modes of operation including an enabled mode in which it is ready to cool the evaporator and an on mode in which it is actively cooling the evaporator. In another aspect of the invention, the evaporator block and a heater on a reverse side of the circuit board are particularly controlled during concurrent repair operations.

Abstract: The present invention provides low temperature zone forming equipment having a storage function capable of controlling temperature and humidity and a method and equipment for maintaining the quality of hauled fishes in an auction market of marine products such as fishes shellfishes, which constitute a low temperature distribution system closely linked with a purchase and sale system in consideration of the characteristics of the market.

Abstract: A controller for a climate control system has a humidity temperature sensor as well as a dry-bulb temperature sensor. A humidity temperature value is used in connection with a dry-bulb temperature value to generate an error signal that is a function of either the dry-bulb or the humidity temperature values. This permits control of both enclosure temperature and enclosure humidity without abnormal cycling of the climate control system. The humidity temperature can synthesized from the relative humidity and dry-bulb temperature within the enclosure.

Abstract: A low temperature storage cabinet wherein a heater is embedded in an opening frame structure of the cabinet to prevent the occurrence of dewfall on a surface of the frame structure to be brought into contact with a door hinged to the cabinet body, and wherein operation of a compressor is controlled in accordance with an inside temperature of the cabinet to maintain the inside temperature of the cabinet at a predetermined value. In the storage cabinet, the heater is activated synchronously in response to operation of the compressor and is activated in accordance with outside humidity or inside temperature of the cabinet during stopping of the compressor.

Abstract: An object of the invention is to provide a low-cost in-car sensor equipped with an aspirator fan motor, which is capable of detecting temperature and humidity. A thermistor for detecting temperature and a humidity sensor are arranged at desired positions on a mounting board, and the temperature and humidity of air drawn from an air inlet port and exhausted from an air outlet port are detected. At the same time, the use of electronic circuit components forming a voltage regulator circuit and a filter circuit for coping with electromagnet interference which have been employed in a brushless motor drive circuit for the aspirator fan motor is shared by the humidity sensor. This makes it possible to reduce the number of electronic circuit components necessary for the humidity sensor, and provide a low-cost in-car sensor equipped with an aspirator fan motor, enabling construction of a more inexpensive automotive air conditioner.

Abstract: Algorithmically linked (“ganged”), multiple air conditioners in a paint booth temperature control system effecting a continuous running of at least one conditioner during an operational demand phase, or cycle, of the booth. All of the air conditioners have an independent temperature sensor that is placed at a discrete location in the air stream so that between the sensor physical placements there is effectively established a differential that is applied by the automatic control system to maintain a comfortable difference between the booth coolest and warmest work environments.

Abstract: A method and apparatus are described for responding to a fire emergency at a facility by analyzing a plurality of fire threat conditions to determine possible responses to a fire emergency and selecting a response to the fire emergency for minimizing human casualties within the facility. The present invention may be characterized in one embodiment as a method for generating an automated response to an emergency that includes the steps of (a) receiving as input fire threat condition data for a facility; (b) analyzing the fire threat condition data to determine a matrix of possible responses to a fire emergency; and (c) selecting a response from the matrix of possible responses to minimize human casualties.

Abstract: A method for refrigeration system control according to the invention includes identifying a lead circuit having a lowest temperature set point from a plurality of circuits, wherein each circuit includes at least one refrigeration case. The suction pressure set point for a compressor rack is initialized based upon the identified lead circuit, and a change in suction pressure set point is determined based on measured parameters from the lead circuit. The suction pressure set point is updated based upon the change in suction pressure set point. A first valve position for a first electronic evaporator pressure regulator associated with a first refrigeration circuit is determined based on the determined change in suction pressure set point, which is based upon the measured parameters from the lead circuit. A second valve position for a second electronic evaporation pressure regulator associated with a second refrigeration circuit is based upon a second measured parameter.

Abstract: An improved vehicle climate control system develops a fog factor indicative of the relative potential of windglass fogging, and uses the index to schedule offsets to normal control settings of the system. The air dewpoint temperature at the front windglass is estimated based on relative humidity and a reference temperature, and the fog factor is determined as a function of the estimated air dewpoint temperature and a measure of the windglass temperature. The fog factor is used to offset an air inlet door, mode doors, refrigerant compressor capacity, discharge air temperature, and blower motor speed.

Abstract: The present invention concerns a method for cool-drying gas containing water vapor, whereby this gas is guided through the secondary part of a heat exchanger (1) whose primary part is the evaporator (2) of a cooling circuit (3) which also contains a compressor (5) which is driven by an electric motor (4), a condenser (6), an expansion means (7) between the outlet of the condenser (6) and the inlet of the evaporator (2), and whereby the above-mentioned cooling circuit (3) is thus controlled as a function of the load that the cooling capacity is adjusted without any ice being formed in the evaporator (2), characterized in that the cooling circuit is controlled by adjusting the rotational speed of the motor (4).

Abstract: A space conditioning system for controlling the temperature and humidity of air within an enclosed space includes a vapor compression refrigeration unit having a reheat coil disposed downstream of the system evaporator coil to reheat return air after cooling and condensation of excess water vapor in the return air by the evaporator coil. The system includes a damper for controlling inflow of ambient outdoor air, depending on the total enthalpy of the outdoor air, so as to satisfy cooling and the dehumidification requirements without operating the refrigeration unit when the enthalpy of the outdoor air is suitable. The system includes a programmable controller for controlling air temperature and humidity within the enclosed space by sensing outdoor air enthalpy, temperature and humidity of air within the enclosed space and temperature or enthalpy of supply air being admitted to the enclosed space.

Abstract: Dehumidification is achieved using an air conditioning system, by employing an independent humidity control signal to direct ambient air through a heat exchanger and a bypass to the heat exchanger. The air passing through the heat exchanger is dehumidified and mixed with the bypassed air before returning dehumidified air to a controlled space.

Abstract: The invention relates to a stable comprising a floor, upright walls bounding said floor, in which walls one or more fans are present, and a roof covering a space bounded by said floor and said walls, in which roof means for exhausting spent air are present, which spent air is used for controlling the temperature of the air to be supplied, wherein said fans supply conditioned air essentially at floor level, wherein the amount of air to be supplied and the temperature thereof can be controlled for each fan individually.

Abstract: An air conditioning (A/C) system and method of controlling same is provided for a vehicle. The A/C system includes an evaporator, a desiccant dryer located downstream of the evaporator, and a compressor fluidly connected to the air evaporator. The A/C system also includes a plurality of sensors to provide inputs relating to temperature of the evaporator and relative humidity of an occupant compartment of the vehicle. The A/C system further includes an electronic control unit electrically connected to the sensors to receive the inputs therefrom and electrically connected to the desiccant dryer and the compressor to turn the desiccant dryer and the compressor On and Off to control the temperature and relative humidity of air to the occupant compartment.

Abstract: A temperature and humidity sensor assembly for a heating, ventilation and air conditioning (HVAC) system of a vehicle includes a housing for connection to the HVAC system. The temperature and humidity sensor also includes a humidity sensor disposed within the housing and a temperature sensor disposed within the housing. The temperature and humidity sensor further includes a circuit board disposed in the housing and electrically connected to the humidity sensor and the temperature sensor and for connection to an electronic controller to control the HVAC system.

Abstract: A substrate-processing apparatus comprising a processing chamber in which a substrate is processed, an air-supplying device for supplying air having controlled temperature and humidity into the processing chamber, an air passage having an inlet port and an outlet port connected to the processing chamber, for guiding the air from the inlet port to the outlet port, a cooling/dehumidifying section arranged in the air passage and having a thermoelectric cooling device, for cooling and dehumidifying the air introduced from the inlet port, a heating section arranged in the air passage, for heating the air that has been cooled and dehumidified by the cooling/dehumidifying section, a humidifying section provided in the air passage, for humidifying the air heated by the heating section and guiding the air to the outlet port, a temperature-humidity sensor provided at a position in the air passage, and a control device for controlling the cooling/dehumidifying section, the heating section and the humidifying section, in

Abstract: A method is provided for controlling the evaporator temperature in a vehicle air conditioner having an evaporator, a compressor, a condenser and an expansion element, in which the evaporator temperature is adjusted as a function of operating conditions. An evaporator temperature control, in conjunction with an optimizing of consumption and comfort, is achieved in that a first evaporator temperature value (TV—F) is determined with respect to a desired air humidity, a second evaporator temperature value (TV—F) is continuously determined for ensuring a sufficient cooling capacity, and the lowest of the two evaporator temperature values is selected as the evaporator temperature (TV) to be set.

Abstract: When an after-evaporation temperature TE remains below the wet-bulb temperature Twet, the compressor 231 is intermittently operated for a predetermined time after the elapse of a first time To from compressor 231 stopping. On the other hand, when the after-evaporation temperature TE is higher than the wet-bulb temperature Twet, the intermittent operation mode stops. This reduces dispersion of offensive smells from the evaporator.

Abstract: A vehicle air conditioner that inhibits re-evaporation of condensed water on the surface of an evaporator that might fog the inner surface of the vehicle windshield during operation of a hot gas heating cycle heating mode. It is possible to switch operation of a cooling mode by an ordinary refrigerating cycle by opening the inlet side of a condenser and closing the inlet side of a hot gas bypass passage. It is also possible to switch the operation of the heating mode by closing the inlet side of the condenser and opening the inlet side of the hot gas bypass passage. When it is determined during operation of the heating mode that the windshield will fog, operation of the air conditioning compressor is interrupted by the air conditioning control unit so that the temperature of an evaporator reaches no more than a predetermined value.

Abstract: An apparatus for controlling temperature and humidity of a conditioned space uses an outside air cooling coil circuit in fluid communication with coolant from a cooling supply. Outside air is introduced over the outside air cooling coil circuit through a damper having open and closed positions. A valve in fluid communication with the coolant supply and the outside air cooling coil circuit has an open setting for permitting and a closed setting for preventing the circulation of coolant through the outside air cooling coil circuit. An HVAC unit control is operatively associated with the valve and the damper for controlling their operation. An occupancy control generates a signal indicating the presence of a human within the conditioned space and is operatively associated with the HVAC unit control.

Abstract: An improved vehicle climate control system in which the passenger compartment temperature and humidity are controlled without requiring a humidity sensor. The control is based on the recognition that the air temperature at the evaporator outlet represents the dew point of the air supplied to the passenger compartment, and may be specified based on the desired passenger compartment air temperature to achieve a desired relative humidity in the vehicle once the desired passenger compartment temperature has been achieved. In a first mechanization, the desired relative humidity is predetermined, and the corresponding values of evaporator outlet air temperature are determined as a function of the desired passenger compartment temperature.

Abstract: A system and method of control of refrigerant air conditioning including a humidity input sensor, and a coolant velocity sensor, using a control system set with a set point whereby to maintain a maximum evaporator temperature set point varying to suit each heat and moisture load condition over a range of conditions compatible with high engineering standards of performance.

Abstract: A control system for a cooling system for reducing humidity levels in a gas such as ambient air is provided. The cooling unit includes at least one of a compressor and a chiller, and cooling coils are connected to the cooling unit. A fan blows the gas onto the cooling coils. A fan speed controller is connected to the fan and variably controls the speed of the fan. A dry bulb temperature sensor is in thermal communication with the gas and connected to the controller, and a moisture sensor is in communication with the gas and connected to the controller. The speed of the fan is determined by the controller based on signals received from the dry bulb temperature sensor and the moisture sensor. By varying the speed of the fan, the moisture content of the gas can be modified much more precisely than by conventional air conditioning methods.

Abstract: A method of controlling humidity within a space, where the space communicates with humidity control equipment. The method comprises determining a dew-point temperature within the space, and comparing the dew-point temperature to a predetermined desired dew-point temperature. The humidity control equipment is then controlled based upon the difference between the dew-point temperature and the predetermined desired dew-point temperature. The humidity control equipment can be a humidifier, and the dew-point temperature can be determined by sensing the temperature and humidity within the space, or by sensing the temperature and humidity within a duct, such as a return air duct.

Abstract: The invention concerns a refrigerating fluid circuit capable of operating in three fluid circulation modes, namely an air conditioning mode whereby the fluid circulates successively in the evaporator where it is evaporated by receiving the heat of the air flow to be treated, in the compressor, in the condenser where it is condensed by yielding the heat to another medium and in a pressure reducing valve; a supplementary heating mode whereby the fluid circulates in gaseous state between the evaporator where it yields heat to the air flow and the compressor, without passing through the condenser, and an inoperative mode whereby the fluid does not circulate in the evaporator. The invention is characterized in that the circulation mode is determined taking into account not only the user's choice but also the possible presence of mist on the windscreen, detected by a sensor, so as to promote demisting while optimizing comfort and energy conservation.

Abstract: An air conditioning system (10) for a passenger compartment of a motor vehicle having a windscreen comprises a first heat exchanger (14) positionable outside the passenger compartment; a second heat exchanger (18) positionable inside the passenger compartment; an expansion device (16) positioned in a first fluid passage (22) between the heat exchangers; an electronically controlled variable stroke compressor (12) for pumping fluid into the second fluid passage and either in a first direction (X) or in a second direction (Y); reverse flow means (32) in the second fluid passage for controlling the direction of the flow of fluid; first sensing means (36, 40) providing a first output signal indicative of the dewpoint temperature of the air leaving the second heat exchanger; second sensing means (53; 44,46,48) providing a second output signal indicative of the temperature of the windscreen; and control means (26,30) electrically connected to the first and second sensing means and to the compressor for receiving th

Abstract: An air conditioning system (10) for a passenger compartment of a motor vehicle comprises a first heat exchanger (14) positionable outside the passenger compartment; a second heat exchanger (18) positionable inside the passenger compartment; an expansion device (16) positioned in a first fluid passage (22) between the heat exchangers; an electronically controlled variable stroke compressor (12) for pumping fluid into the second fluid passage and either in a first direction (X) or in a second direction (Y); reverse flow means (32) in the second fluid passage for controlling the direction of the flow of fluid; first sensing means (36) providing a first output signal indicative of the actual temperature of the air leaving the second heat exchanger; second sensing means (40) providing a second output signal indicative of the humidity of the air leaving the second heat exchanger; third sensing means (46) providing a third output signal indicative of the temperature of the air in the passenger compartment; and contr

Abstract: An environmental control system for maintaining a predetermined air temperature and relative humidity level of the interior of an enclosure, such as a wine cellar. A liquid chiller is provided which is adapted to cool liquid being circulated therethrough. An air handler has a cabinet with a heat exchanging unit and a blower disposed therein. The heat exchanging unit is operatively connected to the liquid chiller to receive cooled liquid being discharged therefrom. The blower is adapted to direct air from the enclosure over the heat exchanging unit such that the enclosure air is cooled. A liquid cascade unit has at least one surface with an upper and lower portion and a liquid collection pan attached to that lower portion. The upper portion is operatively connected to the heat exchanging unit such that liquid flows down from the upper portion toward the lower portion and into the liquid collection pan.

Abstract: A fresh air unit. The unit comprises: a housing having an airstream flowing therethrough; a pre-cooling portion, and dehumidification portion. The pre-cooling portion is located within the housing and reduces the temperature and specific humidity of a gas in the airstream to a target zone on a psychrometric chart. The dehumidification portion is also located in the housing downstream of the pre-cooling portion. The dehumidification portion removes a selected amount of moisture from the gas and reheats the gas a selected amount of sensible heat gain.

Abstract: A system and method are provided for controlling temperature and humidity of an environment for a process chamber for semiconductor manufacturing materials. A supply of filtered, temperature and humidity controlled gaseous working fluid is provided to a process chamber, and is controlled by cascade control based upon sensing of environmental parameters to be controlled both upstream and downstream of a chemical filter, which can be a charcoal filter. A controller determines a first control error output by comparing a desired process parameter set point for the controlled environmental parameter of the gaseous working fluid with the first sensed value, determines a second set point from the first control error, and controls the supply of the temperature and humidity controlled gaseous working fluid based upon the second set point.