Planar Waveguides Patents (Class 65/386)
  • Publication number: 20080289366
    Abstract: A production method of an optical waveguide includes: preparing a laminated body that includes a first clad layer and at least a core layer laminated on the first clad layer; forming a light propagating optical waveguide core by cutting the core layer by use of a dicing saw from a side where the core layer is laminated while intruding an edge of a blade portion of the dicing saw into the first clad layer so as to partially cut the first clad layer; and embedding at least a cut portion of the laminated body with a second clad layer.
    Type: Application
    Filed: March 14, 2008
    Publication date: November 27, 2008
    Applicant: Fuji Xerox Co., Ltd.
    Inventors: Toshihiko SUZUKI, Keishi Shimizu, Kazutoshi Yatsuda, Shigemi Ohtsu, Akira Fujii, Eiichi Akutsu
  • Publication number: 20080285307
    Abstract: A backlight apparatus for directing light toward a display panel and the resulting display device comprises a solid lightguide comprising opposite TIR surfaces, containing a desired pattern of light redirecting surface features located between the TIR surfaces and interrupting one of the TIR surfaces, the features having a refractive index differing from that of the solid material of the light guide. Such an apparatus provides a more even light distribution to the display.
    Type: Application
    Filed: May 16, 2007
    Publication date: November 20, 2008
    Inventors: Peter T. Aylward, Robert P. Bourdelais, Qi Hong
  • Publication number: 20080282741
    Abstract: A production method of an optical waveguide includes: preparing a laminated body that includes a first clad layer and, on the first clad layer, a core layer and a second clad layer alternately laminated in this order so that two or more of the core layer are included in the laminated body; forming a light-propagating waveguide core by cutting the laminated body so as to reach but not cut through the first clad layer from a side where the core layer and the second clad layer are laminated; and embedding at least a cut portion of the laminated body with a third clad layer.
    Type: Application
    Filed: March 11, 2008
    Publication date: November 20, 2008
    Applicant: Fuji Xerox Co., Ltd.
    Inventors: Keishi SHIMIZU, Akira Fujii, Toshihiko Suzuki, Kazutoshi Yatsuda, Shigemi Ohtsu, Eiichi Akutsu
  • Patent number: 7448233
    Abstract: A method for manufacturing an optical waveguide includes the steps of forming a liquid-repellent region upon a substrate, and forming the optical waveguide in a region upon the substrate other than the liquid-repellent region.
    Type: Grant
    Filed: June 9, 2004
    Date of Patent: November 11, 2008
    Assignee: Seiko Epson Corporation
    Inventors: Atsushi Takakuwa, Takayuki Kondo
  • Patent number: 7440653
    Abstract: A method of simultaneously defining a waveguide and grating in a sample of photosensitive material comprises providing a sample of material (24) having a region which is photosensitive to light of a specific wavelength, generating a spot of light (22) at the specific wavelength, the spot having a periodic intensity pattern of high and low intensity fringes, and a width which is related to the width of the channel, positioning the spot within the photosensitive region and causing relative movement between the sample and the light spot along the desired path of the waveguide/grating define a channel of altered refractive index by exposing parts of the photosensitive region to the light spot. Modulation of the light spot to produce multiple exposures produces a grating, while continuous exposure results in a uniform waveguide. These structures can be written in straight lines or around curves, and can be accurately overwritten, so that complex optical devices can be produced in a single fabrication step.
    Type: Grant
    Filed: May 19, 2003
    Date of Patent: October 21, 2008
    Assignee: University of Southampton
    Inventors: Peter George Robin Smith, Richard Bird Williams, Vassilios Albanis, Corin Barry Edmund Gawith, Samuel Paul Watts, Gregory Daniel Emmerson
  • Publication number: 20080253728
    Abstract: The invention provides a waveguide with a waveguide core having longitudinal sidewall surfaces, a longitudinal top surface, and a longitudinal bottom surface that is disposed on a substrate. An interface layer is disposed on at least one longitudinal sidewall surface of the waveguide core. A waveguide cladding layer is disposed on at least the waveguide core sidewall and top surfaces, over the interface layer. The waveguide of the invention can be produced by forming a waveguide undercladding layer on a substrate, and then forming a waveguide core on the undercladding layer. An interface layer is then formed on at least a longitudinal sidewall surface of the waveguide core, and an upper cladding layer is formed on a longitudinal top surface and on longitudinal sidewall surfaces of the waveguide core, over the interface layer.
    Type: Application
    Filed: September 5, 2007
    Publication date: October 16, 2008
    Applicant: Massachusetts Institute of Technology
    Inventors: Daniel K. Sparacin, Anuradha M. Agarwal, Pradip K. Roy, Lionel C. Kimerling
  • Publication number: 20080253727
    Abstract: An optical waveguide and method of making are disclosed. The method of making includes forming a layer on a substrate of a substantially optically transparent material. The layer includes an inner area and an outer area. A sufficient number of voids can be created in the inner area to form a first index of refraction. A plurality of the voids have a dimension that is less than a wavelength of the light beam. A sufficient number of voids can be created in the outer area to form a second index of refraction less than the first index.
    Type: Application
    Filed: April 11, 2007
    Publication date: October 16, 2008
    Inventors: Wei Wu, Shih-Yuan Wang
  • Publication number: 20080246961
    Abstract: Biosensors are disclosed which include a surface for binding to sample molecule to the biosensor in the form of a porous, thin film of dielectric material, e.g., TiO2. In one example the porous, thin film is in the form of a multitude of sub-micron sized rod-like structures (“nanorods”) projecting therefrom. In one embodiment, the biosensor is in the form of a photonic crystal biosensor. The approach of depositing a thin film of dielectric nanorods may be applied to any enhanced fluorescence biosensor surface structure, including 1-dimensional photonic crystals, 2-dimensional photonic crystals, 3-dimensional photonic crystals, surface plasmon resonance surfaces, planar waveguides, and grating-coupled waveguides. The dielectric nanorod structures can be fabricated on the surface of a biosensor by the glancing angle deposition technique (GLAD).
    Type: Application
    Filed: March 24, 2008
    Publication date: October 9, 2008
    Inventors: Wei Zhang, Brian T. Cunningham
  • Publication number: 20080245108
    Abstract: There is provided a method of manufacturing an optical waveguide, the method including: allowing a beam to be incident in an optical waveguide direction of an optical waveguide material; generating an optical solution in the optical waveguide material by adjusting intensity of the incident beam according to the optical waveguide material; allowing the incident beam to be re-incident at an intensity higher than an intensity of the incident beam after checking generation of the optical solution in the optical waveguide material; and increasing a refractive index of an optical solution-generating area of the optical waveguide material by the re-incident beam to thereby form an optical waveguide.
    Type: Application
    Filed: April 3, 2008
    Publication date: October 9, 2008
    Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Hong Ki Kim, Bae Kyun Kim, June Sik Park, Dong Hoon Kang, Sang Su Hong, Chang Yun Lee, Tak Gyun Kim
  • Publication number: 20080240654
    Abstract: The present invention relates to a hybrid planar lightwave circuit in which a silicon reflective diffraction grating etched with a highly accurate deep reactive ion etching process is mounted in a trench formed in a high optical performance silica on silicon waveguide device.
    Type: Application
    Filed: October 1, 2007
    Publication date: October 2, 2008
    Inventors: Matt Pearson, Ashok Balakrishnan, Serge Bidnyk
  • Patent number: 7421858
    Abstract: Provided is an optical transmission substrate including: a first substrate; an optical waveguide which has clad covering a core and a periphery of the core and extends on an upper surface of the first substrate; a second substrate provided parallel to the first substrate so that a lower surface thereof contacts an upper surface of the optical waveguide; a reflection surface which is provided on a cross section of the core at an end of the optical waveguide and reflects light, which travels through the core of the optical waveguide, toward the second substrate; and a light guide which is provided in the second substrate and guides the light, which is reflected toward the second substrate, toward an upper surface of the second substrate from a position closer to the core than an upper surface of the clad.
    Type: Grant
    Filed: February 27, 2007
    Date of Patent: September 9, 2008
    Assignee: International Business Machines Corporation
    Inventors: Tadashi Fukuzawa, Masaki Hasegawa
  • Patent number: 7406244
    Abstract: The present invention provides an ultra-thin high-precision glass optic and method of manufacturing the same. The optic has an axial thickness that is less than 1,000 microns. A pattern and/or coating is disposed on a surface of the optic to provide attenuation of light in an optical system. In an embodiment, the optic is manufactured by disposing a pattern on a surface of a reticle. The pattern is covered with a first protective coating to protect the pattern. Individual optics are cut from the reticle so that each optic includes a portion of the pattern. The optic is thinned by removing material until it has an axial thickness of less than 1,000 microns. The optic is cleaned after thinning and covered with an anti-reflective coating.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: July 29, 2008
    Assignee: ASML Holding N.V.
    Inventor: Nicholas A. DeLuca
  • Patent number: 7406243
    Abstract: An optical fiber array substrate 11 has, in one surface thereof, eight V-grooves 12 for securing eight optical fibers 14 aligned in parallel to each other, and V-shaped side grooves 13 formed outside of the respective outermost V-grooves 12 located at the opposite sides of the substrate 11. The apexes of the outside ridges 12c and 12d defining the outermost V-grooves 12 are at the same height as the apexes of the inside ridges 12a and, the height of the bottom 13a of the side groove 13 is lower than that of a contact point 12e between the ridge line of the V-groove 12 and optical fiber 14.
    Type: Grant
    Filed: March 14, 2003
    Date of Patent: July 29, 2008
    Assignee: Nippon Electric Glass Co., Ltd.
    Inventors: Hirokazu Takeuchi, Nobuo Funabiki, Kazuya Saito
  • Patent number: 7383702
    Abstract: Embodiments of the present invention provide a highly uniform low cost production worthy solution for manufacturing low propagation loss optical waveguides on a substrate. In one embodiment, the present invention provides a method of forming a PSG optical waveguide on an undercladding layer of a substrate that includes forming at least one silicate glass optical core on said undercladding layer using a plasma enhanced chemical vapor deposition process including a silicon source gas, an oxygen source gas, and a phosphorus source gas, wherein the oxygen source gas and silicon source gas have a ratio of oxygen atoms to silicon atoms greater than 20:1.
    Type: Grant
    Filed: June 5, 2006
    Date of Patent: June 10, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Hichem M'Saad, Anchuan Wang, Sang Ahn
  • Patent number: 7340121
    Abstract: An optoelectric composite substrate of the present invention includes an insulating film, an optical waveguide embedded in the insulating film in a state that an upper surface is exposed from the insulating film, a via hole formed to pass through the insulating film, a conductor formed in the via hole, and a connection terminal on which an optical device is mounted and which is connected to an upper end side of the conductor, wherein the connection terminal is embedded in an upper-side portion of the via hole or is projected from the insulating film.
    Type: Grant
    Filed: February 22, 2005
    Date of Patent: March 4, 2008
    Assignee: Shinko Electric Industries Co., Ltd.
    Inventors: Hideki Yonekura, Tadashi Kodaira
  • Patent number: 7333703
    Abstract: The present invention intends to provide a two-dimensional photonic crystal having a high level of mechanical strength and functioning as a high-efficiency resonator. The two-dimensional photonic crystal according to the present invention includes a slab layer 31 under which a clad layer 32 is located. In the slab layer 31, areas 35 having a refractive index different from that of the slab layer 31 are cyclically arranged to create a two-dimensional photonic crystal. A portion of the cyclic arrangement of the areas 35 are omitted to form a point-like defect 36. This defect 36 functions as a resonator at which a specific wavelength of light resonates. An air-bridge cavity 37 facing the point-like defect 36 is formed over a predetermined range of the clad layer 32. In this construction, the clad layer 32 supports the slab layer 31 except for the range over which the air-bridge space 37 is formed. Therefore, the two-dimensional photonic crystal has a high level of mechanical strength.
    Type: Grant
    Filed: August 27, 2004
    Date of Patent: February 19, 2008
    Assignees: Kyoto University, TDK Corporation
    Inventors: Ranko Hatsuda, Susumu Noda, Takashi Asano, Yoshinori Tanaka, Eiji Miyai
  • Publication number: 20080037929
    Abstract: An optical printed circuit board which can transfer optical signal and electric signals simultaneously, and a method of fabricating the optical printed circuit board. An optical printed circuit board which includes an upper cladding layer, a core layer positioned in the upper cladding layer that has a first reflecting surface and a second reflecting surface at both ends to guide optical signals, a lower cladding layer of which one side is in contact with the upper cladding layer and which has a circuit pattern and light connecting bumps on the other side corresponding to the first reflecting surface and the second reflecting surface, may provide the advantage of high optical connection efficiency.
    Type: Application
    Filed: August 10, 2007
    Publication date: February 14, 2008
    Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Joon-Sung Kim, Je-Gwang Yoo, Han-Seo Cho, Sang-Hoon Kim
  • Patent number: 7325419
    Abstract: Embodiments of the present invention provide a highly uniform low cost production worthy solution for manufacturing low propagation loss optical waveguides on a substrate. In one embodiment, the present invention provides a method of forming a PSG optical waveguide on an undercladding layer of a substrate that includes forming at least one silicate glass optical core on said undercladding layer using a plasma enhanced chemical vapor deposition process including a silicon source gas, an oxygen source gas, and a phosphorus source gas, wherein the oxygen source gas and silicon source gas have a ratio of oxygen atoms to silicon atoms greater than 20:1.
    Type: Grant
    Filed: June 5, 2006
    Date of Patent: February 5, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Hichem M'Saad, Anchuan Wang, Sang Ahn
  • Patent number: 7290407
    Abstract: A method for forming an optical waveguide is disclosed. The method comprises first forming a lower cladding layer having at least one waveguide support. Next, a core material is formed onto the waveguide support using a high density plasma chemical vapor deposition (HDPCVD) process. Finally, an upper cladding layer is formed over the core material, such that the upper cladding layer and the lower cladding layer surround the core material.
    Type: Grant
    Filed: December 19, 2001
    Date of Patent: November 6, 2007
    Inventor: Jesse Chienhua Shan
  • Publication number: 20070227193
    Abstract: The present invention relates to a process for producing an optical waveguide, which comprises forming an undercladding layer on a surface of a substrate; forming a photosensitive resin composition layer on the undercladding layer; irradiating a surface of the photosensitive resin composition layer with ultraviolet through a photomask having a given pattern to conduct an exposure; removing an unexposed area of the photosensitive resin composition layer after the exposure by dissolving the unexposed area with a developing liquid to thereby form a core layer; and forming an overcladding layer on the core layer, in which the developing liquid is an aqueous ?-butyrolactone solution having a concentration of from 10 to 99% by weight. According to the process, it is possible to obtain an optical waveguide in which neither the core layer itself nor the interface between the core layer and the undercladding layer cracks and which has a small light loss.
    Type: Application
    Filed: April 4, 2007
    Publication date: October 4, 2007
    Applicant: NITTO DENKO CORPORATION
    Inventor: Yusuke Shimizu
  • Patent number: 7277619
    Abstract: This invention relates to a method for forming a nano-imprinted photonic crystal waveguide, comprising the steps of: preparing an optical film on a substrate; preparing a template having a plurality of protrusions of less than 500 nm in length such that the protrusions are spaced a predetermined distance from each other; heating the film; causing the template to press against the heated film such that a portion of the film is deformed by the protrusions; separating the template from the film; and etching the film to remove a residual layer of the film to form a nano-imprinted photonic crystal waveguide.
    Type: Grant
    Filed: March 4, 2005
    Date of Patent: October 2, 2007
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: James E. Ellenson, Timothy S. Hostetler, William M. Tong
  • Patent number: 7262140
    Abstract: A semiconductor based structure containing substantially smoothed waveguides having a rounded surface is disclosed, as well as methods of fabricating such a structure. The substantially smoothed waveguides may be formed of waveguide materials such as amorphous silicon or stoichiometric silicon nitride. The substantially smoothed waveguides are formed with an isotropic wet etch combined with sonic energy.
    Type: Grant
    Filed: November 24, 2003
    Date of Patent: August 28, 2007
    Assignee: Intel Corporation
    Inventors: Justin K. Brask, Bruce A. Block
  • Patent number: 7228043
    Abstract: An optical waveguide circuit comprising a plurality of first cores (203) arranged at intervals widening as they are away from the branch point or the joining point of optical signal, a clad (205) filling at least these first cores, and second cores (204) provided between the first cores and the clad and formed in the gap between the first cores in the vicinity of the branch point or the joining point while covering the first cores at least partially. Refractive index of the second core is larger than that of the clad, the boundary between the second core and the clad is smooth and the film thickness of the second core formed in the gap between the first cores is decreased as the interval of the plurality of first cores widens.
    Type: Grant
    Filed: June 20, 2003
    Date of Patent: June 5, 2007
    Assignee: NEC Corporation
    Inventor: Tsuyoshi Shimoda
  • Patent number: 7228045
    Abstract: A method of manufacturing an optical waveguide device that is capable of reducing the imbalance in the refractive index profile of a core, and an optical waveguide device that has the reduced imbalance in the refractive index profile are provided. The method of manufacturing an optical waveguide device has the steps of forming a groove in a first cladding layer having a first dopant that lowers the refractive index of the first cladding layer below the refractive index of pure silica glass, forming a core in the groove, and forming a second cladding layer having a second dopant that lowers the refractive index of the second cladding layer below the refractive index of pure silica glass, over the first cladding layer and the core.
    Type: Grant
    Filed: March 24, 2005
    Date of Patent: June 5, 2007
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Chie Fukuda, Tetsuya Hattori, Morihiro Seki
  • Patent number: 7215854
    Abstract: An improved low-loss waveguide crossover uses an out-of-plane, such as vertical, waveguide to bridge over any number of waveguides with very low, or essentially no, optical loss or crosstalk. Optical signals transmitted in a waveguide system having the improved waveguide crossover can cross over one or multiple transverse waveguides with a greatly reduced loss of signal intensity by using a second waveguide (such as a bridge) positioned in a second plane different from the plane containing the transverse waveguides. An optical signal from the input waveguide is coupled efficiently through directional coupling to the bridge waveguide and optionally from the bridge waveguide to the output waveguide. Methods for fabricating the improved waveguide crossover are described.
    Type: Grant
    Filed: August 12, 2005
    Date of Patent: May 8, 2007
    Assignee: Gemfire Corporation
    Inventors: Arthur Telkamp, Randy Bindrup
  • Patent number: 7206480
    Abstract: A method and system of forming vertical optical interconnects in optical integrated circuits is disclosed. The method includes forming a first optical transmission layer over a substrate. A first cladding layer is then formed on the first optical transmission layer and portions of the first cladding layer removed to form an angled sidewall in the first cladding layer. An optical interconnect layer is formed on the angled sidewall of the first cladding layer and on an exposed portion of the first optical transmission layer.
    Type: Grant
    Filed: August 1, 2003
    Date of Patent: April 17, 2007
    Assignee: BAE Systems Information and Electronic Systems Integration Inc.
    Inventors: Thomas J. McIntyre, John C. Rodgers
  • Patent number: 7187817
    Abstract: A single free-beam region for coupling electromagnetic radiation in and out is provided in order in the case of an AWG coupler for spectrally separating electromagnetic radiation to achieve a more stable thermal characteristic and a space-saving layout.
    Type: Grant
    Filed: March 8, 2002
    Date of Patent: March 6, 2007
    Assignee: Schott AG
    Inventors: Andrea Anton, Tobias Kälber, Detlef Wolff, Manfred Lohmeyer, Matthias Brinkmann, Klaus Gerstner
  • Patent number: 7177490
    Abstract: An optical waveguide is formed on a substrate and includes a curved ridge structure, a curved optical path, and a buffer layer. The curved ridge structure is formed on the substrate so as to have a curvature in a longitudinal direction of the curved ridge structure. The curved optical path is formed along the curved ridge structure. The buffer layer covers a side of the ridge structure and has a lower refractive index than a refractive index of the substrate.
    Type: Grant
    Filed: January 30, 2006
    Date of Patent: February 13, 2007
    Assignee: Fujitsu Limited
    Inventors: Masaki Sugiyama, Tadao Nakazawa
  • Patent number: 7159421
    Abstract: Silica sol techniques are described for making thick silica or silica based films useful for planar optical waveguides. The process involves coating of a colloidal silica sol onto a substrate, drying the sol, and consolidating the dried sol to form the planar waveguide. Coating is performed in a simple operation, either by dipping, or preferably by spin coating. In a preferred embodiment the substrate is coated with a wetting agent prior to spin coating. It is found that the wetting agent substantially improves the thickness uniformity of the layer. Thick waveguide layers may be produced by repeating the coating process one or more times to produce a layer with the desired thickness. Buried waveguides are produced by forming a doped core layer, patterning the doped core layer and using the coating technique of the invention to form the cladding material.
    Type: Grant
    Filed: July 16, 2002
    Date of Patent: January 9, 2007
    Assignee: Agere Systems Inc.
    Inventors: Suhas Bhandarkar, Henry Du, David Wilfred Johnson, Deok-Yang Kim, Glen R. Kowach
  • Patent number: 7095935
    Abstract: The present invention provides a method for forming an optical waveguide characterized by applying a paste containing a copper compound to a glass substrate containing an alkali metal as a glass component over the whole surface thereof or in a patterned form, and performing heat treatment at a temperature lower than the softening temperature of the glass substrate. The method of the invention can produce an optical waveguide without the need for a high vacuum as in the thin film deposition method and without the use of a molten salt, and is capable of dispersing Cu+ ions selectively in a glass substrate with excellent controllability.
    Type: Grant
    Filed: December 9, 2002
    Date of Patent: August 22, 2006
    Assignees: Isuzu Glass Co., Ltd., National Institute of Advanced Industrial Science and Technology
    Inventors: Tatsuya Suetsugu, Kohei Kadono, Norimasa Kominami, Takeshi Ohtani, Hiroaki Yokoi, Minoru Takada, Takashi Tarumi, Toshihiko Einishi, Tetsuo Yazawa
  • Patent number: 7085450
    Abstract: A system and method for fabricating structures in an optical substrate. An optical element produces first and second write beams that intersect at a first intersection location at the optical substrate. The first intersection location includes a fringe pattern produced by the first and second write beams. The optical element also produces first and second reference beams that intersect and are recombined at a second intersection location in substantially the same plane as the first intersection location. A controller then controls relative positioning between the optical substrate and the fringe pattern based on a signal derived from the recombined first and second reference beams.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: August 1, 2006
    Assignee: 3M Innovative Properties Company
    Inventors: Levent Biyikli, Jerome C. Porque, James M. Battiato, David B. Stegall
  • Patent number: 7085469
    Abstract: This invention provides a process for producing a three-dimensional polyimide optical waveguide, which comprises: (I) irradiating a polyamic acid film with a laser beam while converging the laser beam at an inside portion of the film and relatively moving the light convergence point, the polyamic acid film containing: (a) a polyamic acid obtained from a tetracarboxylic dianhydride and a diamine; and (b) per 100 parts of the polyamic acid, from 0.5 part by weight to less than 10 parts by weight of a specific 1,4-dihydropyridine derivative represented by formula (I): and then, (II) heating the polyamic acid film to imidize the polyamic acid, thereby obtaining an optical waveguide having a continuous core region where the refraction index has been changed, in the thus formed polyimide film.
    Type: Grant
    Filed: November 5, 2003
    Date of Patent: August 1, 2006
    Assignee: Nitto Denko Corporation
    Inventors: Kazunori Mune, Ryuusuke Naitou, Amane Mochizuki, Atsushi Hino, Mika Horiike
  • Patent number: 7080528
    Abstract: Embodiments of the present invention provide a highly uniform low cost production worthy solution for manufacturing low propagation loss optical waveguides on a substrate. In one embodiment, the present invention provides a method of forming a PSG optical waveguide on an undercladding layer of a substrate that includes forming at least one silicate glass optical core on said undercladding layer using a plasma enhanced chemical vapor deposition process including a silicon source gas, an oxygen source gas, and a phosphorus source gas, wherein the oxygen source gas and silicon source gas have a ratio of oxygen atoms to silicon atoms greater than 20:1.
    Type: Grant
    Filed: October 23, 2002
    Date of Patent: July 25, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Hichem M'Saad, Anchuan Wang, Sang Ahn
  • Patent number: 7068870
    Abstract: A variable width waveguide useful for mode matching between dissimilar optical waveguides and optical fibers and a method for making the same is described. In one embodiment, a tapered waveguide is etched in a substrate, a cladding material is laid over the upper surface of the substrate and within the waveguide, and the waveguide is then filled with a core material. The core material may be deposited in a single step, or in successive deposition steps.
    Type: Grant
    Filed: October 26, 2001
    Date of Patent: June 27, 2006
    Assignee: Shipley Company, L.L.C.
    Inventors: Dan A. Steinberg, Neal Ricks, Mindaugas F. Dautartas, Hui Luo
  • Patent number: 7062141
    Abstract: Undercladding and uppercladding layers that form part of an optical waveguide are deposited with a thermal CVD technique. The optical waveguide has a structure in which optical cores are formed over the undercladding layer and in which the uppercladding layer is formed over and between the optical cores. Generally, the optical cores have a refractive index greater than a refractive index of the cladding layers. A borophosphosilicate-glass layer may be used as one or both of the cladding layers. Thick cladding layers may be formed by cyclically depositing and annealing portions of the layer.
    Type: Grant
    Filed: December 12, 2002
    Date of Patent: June 13, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Rong Pan, Van Q. Ton
  • Patent number: 7054512
    Abstract: An optical waveguide is formed on a substrate and includes a curved ridge structure, a curved optical path, and a buffer layer. The curved ridge structure is formed on the substrate so as to have a curvature in a longitudinal direction of the curved ridge structure. The curved optical path is formed along the curved ridge structure. The buffer layer covers a side of the ridge structure and has a lower refractive index than a refractive index of the substrate.
    Type: Grant
    Filed: January 29, 2004
    Date of Patent: May 30, 2006
    Assignee: Fujitsu Limited
    Inventors: Masaki Sugiyama, Tadao Nakazawa
  • Patent number: 7050691
    Abstract: A method of manufacturing an optical waveguide having a core and a clad. The method includes forming a first clad by applying a resin on a substrate and curing the resin, applying a core material between a recessed mold which has a recess having a shape identical to a shape of the core and the first clad which is provided on the substrate, curing the core material applied, thereby forming a core pattern having a shape corresponding to that of the recess, and peeling the recessed mold from the core pattern and the first clad.
    Type: Grant
    Filed: June 24, 2004
    Date of Patent: May 23, 2006
    Assignee: Toppan Printing Co., Ltd.
    Inventors: Mamoru Ishizaki, Hatsune Hara, Jun Sasaki, Shinichi Inoue, Takehito Tsukamoto
  • Patent number: 7043133
    Abstract: Silicon-oxycarbide optical waveguides and thermooptic devices include a substrate and a first cladding layer having a first refractive index positioned over a substrate. A first core layer comprising silicon, oxygen, and carbon and having a core refractive index is formed on the first cladding layer by chemical vapor deposition using at least two precursors: one inorganic silicon precursor gas and at least one second precursor gas comprising carbon and oxygen. Alternatively, at least three precursors can be used: one inorganic silicon precursor gas, a second precursor comprising carbon, and a third precursor comprising oxygen. The core layer is lithographically patterned to define waveguide elements. A second cladding layer having a second cladding refractive index is formed to surround the optical core waveguiding element of the first core layer.
    Type: Grant
    Filed: June 10, 2004
    Date of Patent: May 9, 2006
    Assignee: Little Optics, Inc.
    Inventors: Frederick G. Johnson, Oliver S. King, David M. Gill, Timothy J. Davidson, Warren P. Berk
  • Patent number: 7024086
    Abstract: Polymers of differing refraction indices are embedded within a PCB to provide optical connectivity of the PCB with other circuit boards via an optic backplane. The creation of islands of polymer material of refractive index n1 completely surrounded by polymer material with refractive index n2 where n1 has a higher index than n2 allows the islands of n1 indexed polymer to serve as optical waveguides. A process of forming a multi-layered PCB with the optical waveguide islands using successive laminations and using laser ablation to write the optical connection scheme is taught. Further, the use of uniquely marked targets in a copper layer to align the optical waveguides in production is also taught. Additionally, the use of clearing polymer materials and reinforcing polymer voids with lamination to allow a simple, high tolerance insertion of through-holes is taught.
    Type: Grant
    Filed: December 17, 2004
    Date of Patent: April 4, 2006
    Assignee: Viasystems Group, Inc.
    Inventor: Joseph A. A. M. Tourné
  • Patent number: 7020372
    Abstract: The invention relates to an optical device. The optical device comprises a waveguide core and a nanocomposite material optically coupled to the waveguide core. The nanocomposite material includes a plurality of quantum dots. The nanocomposite material has a nonlinear index of refraction ? that is at least 10?9 cm2/W when irradiated with an activation light having a wavelength ? between approximately 3×10?5 cm and 2×10?4 cm.
    Type: Grant
    Filed: July 16, 2004
    Date of Patent: March 28, 2006
    Assignee: UltraDots, Inc.
    Inventors: Howard Wing Hoon Lee, Alan Hap Chin, William Matthew Pfenninger
  • Patent number: 7013055
    Abstract: A method of manufacturing an optical waveguide device includes providing an optical fiber guide for fixing an optical fiber and optical element placing portions for providing element mounting benches outside a waveguide fixing region of a silicon substrate. A metallic thin film is formed outside the waveguide fixing region of the silicon substrate. After an optical waveguide substrate is bonded to a whole of an upper surface of the silicon substrate through a bonding resin which will become an upper cladding layer, the optical waveguide substrate is diced along an edge of the waveguide fixing region, and the optical waveguide substrate outside the waveguide fixing region is removed to expose the optical fiber guide and the optical element placing portions.
    Type: Grant
    Filed: July 1, 2003
    Date of Patent: March 14, 2006
    Assignee: Omron Corporation
    Inventors: Kazuyuki Hayamizu, Yoshiyuki Komura, Yukari Terakawa, Hayami Hosokawa, Toshiyuki Takahashi, Masayoshi Higuchi, Yoshitaka Tatara, Naru Yasuda, Hiroto Nozawa
  • Patent number: 7000434
    Abstract: A waveguide having an angled surface is created by depositing an optical core material onto a substrate having two levels. In one embodiment, a high density plasma deposition may be used to deposit the optical core material.
    Type: Grant
    Filed: December 19, 2000
    Date of Patent: February 21, 2006
    Assignee: Intel Corporation
    Inventor: Venkatesan Murali
  • Patent number: 6996324
    Abstract: An optical waveguide comprising cladding 1 and core segment 20 buried in cladding 1 and serving as a waveguide, wherein a combination of glass material constituting the core segment 20 and another glass material constituting the cladding 1 is so selected that an absolute value of difference in coefficient of thermal expansion between these materials (?1-?2) is within a range of 0 and 9×10?7° C., where ?1 denotes a coefficient of thermal expansion of the former material and ?2 denotes that of the latter material.
    Type: Grant
    Filed: September 18, 2002
    Date of Patent: February 7, 2006
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Masahiro Hiraka, Shigeo Furukawa
  • Patent number: 6996321
    Abstract: An optical waveguide capable of having various characteristics and a method of manufacture thereof as well as a method of manufacturing a crystal film are provided. An optical functional material KTaxNb1-xO3 is used as an optical waveguide. The input optical signal is transmitted to the KTaxNb1-xO3 film. The KTaxNb1-xO3 film undergoes changes in optical property when an external voltage signal is applied to the electrode. Therefore, as it passes through the KTaxNb1-xO3 film, the input optical signal is modulated by the characteristic change. The modulated optical signal is taken out as an output optical signal.
    Type: Grant
    Filed: August 3, 2004
    Date of Patent: February 7, 2006
    Assignee: Nippon Telegraph and Telephone Corporation
    Inventors: Masahiro Sasaura, Kazuo Fujiura, Koji Enbutsu, Tadayuki Imai, Shogo Yagi, Takashi Kurihara, Makoto Abe, Seiji Toyoda, Eishi Kubota
  • Patent number: 6987912
    Abstract: A method to form a semiconductor taper without etching the taper surfaces. In one embodiment, a semiconductor waveguide is formed on a workpiece having an unetched top surface; e.g., using a silicon insulator (SOI) wafer. A protective layer is formed on the waveguide. The protective layer is patterned and etched to form a mask that exposes a portion of the waveguide in the shape of the taper's footprint. In one embodiment, selective silicon epitaxy is used to grow the taper on the exposed portion of the waveguide so that the taper is formed without etched surfaces. Micro-loading effects can cause the upper surface of the taper to slope toward the termination end of the taper.
    Type: Grant
    Filed: March 23, 2004
    Date of Patent: January 17, 2006
    Assignee: Intel Corporation
    Inventor: Michael T. Morse
  • Patent number: 6954570
    Abstract: Optical waveguide composite materials and integrated optical subsystems with low loss connection to optical fibers, are disclosed. The waveguide material has a varying thickness and/or refractive index from one portion (816) to another (820) and can be varied in all three directions. Methods of producing the composite materials and waveguides are also disclosed.
    Type: Grant
    Filed: September 27, 2001
    Date of Patent: October 11, 2005
    Assignee: nGimat Co.
    Inventors: Andrew Tye Hunt, Robert E. Schwerzel, Todd Polley
  • Patent number: 6949392
    Abstract: The integrated optical circuit of the present invention includes a substrate with a first cladding layer. A first core layer having one or more waveguiding elements is formed on the first cladding layer. A second cladding layer surrounds the waveguiding elements of the first core layer; the refractive index of the first and second cladding layers are selected to be less than the refractive index of the waveguiding element(s). Through simultaneous cladding material deposition and cladding material removal, the second cladding layer as deposited is substantially self-planarized, enabling further layers to be positioned on the second cladding layer without necessitating intermediate planarization. Further, the present invention permits planar waveguide cores having submicron core spacings to be covered by a subsequently-deposited cladding layer without cladding gaps, seams or other deleterious cladding defects.
    Type: Grant
    Filed: May 4, 2004
    Date of Patent: September 27, 2005
    Assignee: Little Optics, Inc.
    Inventors: David M. Gill, Frederick G Johnson, Oliver S. King
  • Patent number: 6945078
    Abstract: When an optical waveguide is formed by focused femtosecond laser pulses in a pure silica glass to induce a refractive index increase region, a pulse width of femtosecond laser pulses are changed, a peak power of femtosecond laser pulses at the focal point is changed, or both the pulse width and the peak power are changed simultaneously. Under conditions where a pulse width of the femtosecond laser pulses is in a range of 210 to 420 fs and a peak power at the focal point is not greater than 8.7×1011 W/cm2, an optical waveguide having a mode field of 10 to 14 ?m such that an aspect ratio is 1 (one) can be obtained. By doing this, it is possible to control a mode field diameter of an optical waveguide and an aspect ratio of the mode field diameter.
    Type: Grant
    Filed: August 21, 2003
    Date of Patent: September 20, 2005
    Assignee: Fujikura Ltd.
    Inventors: Takeshi Fukuda, Shimon Ishikawa, Tomoko Fujii, Ken Sakuma, Hideyuki Hosoya
  • Patent number: 6920765
    Abstract: A method for reducing the density of sites on the surface of fused silica optics that are prone to the initiation of laser-induced damage, resulting in optics which have far fewer catastrophic defects, and are better capable of resisting optical deterioration upon exposure to a high-power laser beam.
    Type: Grant
    Filed: April 17, 2002
    Date of Patent: July 26, 2005
    Assignee: The Regents of the University of California
    Inventors: Joseph A. Menapace, John E. Peterson, Bernardino M. Penetrante, Philip E. Miller, Thomas G. Parham, Michael A. Nichols
  • Patent number: RE39535
    Abstract: This invention relates to the production of high purity fused silica glass through oxidation or flame hydrolysis of a vaporizable silicon-containing compound. More particularly, this invention is directed to the use of vaporizable, halide-free compounds in said production. In the preferred practice, a polymethylsiloxane comprises said vaporizable, halide-free compound.
    Type: Grant
    Filed: April 7, 1997
    Date of Patent: April 3, 2007
    Assignee: Corning Incorporated
    Inventors: Michael S. Dobbins, Robert E. McLay