Abstract: One embodiment of the invention includes an accelerometer sensor system. The system includes a sensor comprising a proofmass and electrodes and being configured to generate acceleration feedback signals based on control signals applied to the electrodes in response to an input acceleration. The system also includes an acceleration component configured to measure the input acceleration based on the acceleration feedback signals. The system further includes an acceleration controller configured to generate the control signals to define a first scale-factor range associated with the sensor and to define a second scale-factor range associated with the sensor. The control system includes a calibration component configured to calibrate the accelerometer sensor system with respect to range-dependent bias error based on a difference between the measured input acceleration at each of the first scale-factor range and the second scale-factor range.

Abstract: A multi-axis microelectromechanical-systems (MEMS) inertial measurement unit (IMU) is fabricated in a vacuum sealed single packaged device. An FM vibratory gyroscope and an FM resonant accelerometer both for generating FM output signals is fabricated in the silicon chip using MEMS. A signal processor is coupled to the an FM vibratory gyroscope and to the FM resonant accelerometer for receiving the FM gyroscopic output signals and the FM accelerometer output signals. The signal processor generates simultaneous and decoupled measurement of input acceleration, in put rotation rate, and temperature and/or temperature distribution within the IMU, self-calibration of the biases and scale factors of the IMU and its support electronics against temperature variations and other common mode errors, and reduction of the cross axis sensitivity by reducing acceleration errors in the gyroscope and rotation errors in the accelerometer.

Abstract: A signal processing module (50) comprises a difference signal generating module (60) for generating at least one difference signal (?) from a first and a second acceleration measurement vector signal (S1, S2), the first and the second acceleration measurement vector signal (S1, S2) respectively comprising a first and a second sequence of vector signal samples, the vector signal samples comprising at least a first and a second linearly independent acceleration measurement signal component, wherein the vector signal samples represent a measurement result of an acceleration sensor having a variable orientation as a function of time, wherein samples in the first sequence have a corresponding sample in the second sequence.

Abstract: A system is provided for the continuous reduction, in real time, of bias in a force rebalanced accelerometers having a proof mass coupled to an accelerometer housing by a flexure suspension. The system comprises a closed loop, force rebalance servo that provides control voltage to the proof mass to null an electrical pickoff signal that indicates the motion of the proof mass with respect to the accelerometer housing, wherein a time varying disturbance signal is injected into the force rebalance servo that results in the generation of a time varying voltage in the output of the force rebalance servo that corresponds to a magnitude of the net positive spring of the combined flexure suspension and electrostatic springs acting on the proofmass. The system also comprises a negative electrostatic spring servo that applies a negative electrostatic spring DC voltage to each of a pair of negative electrostatic forcer electrodes.

Abstract: An inertial sensor includes an oscillator, a drive unit for oscillating the oscillator, a sensor for sensing the amount of inertia applied to the oscillator, and a failure diagnosis unit disposed between the oscillator and the drive unit. The drive unit includes a reference potential supply unit for supplying a reference potential to the oscillator, and a drive signal supply unit for supplying a drive signal to the oscillator based on a monitor signal received from the oscillator. The failure diagnosis unit includes a diagnosis unit for diagnosing a failure based on the value of a current supplied by the reference potential supply unit to the oscillator. The inertial sensor having this structure can detect a failure in the drive unit or the oscillator.

Abstract: Inertial measurement units attached to a non-rigid body may measure a common motion event when the body changes direction of travel. Acceleration measurements made by the inertial measurement units of the event are used to determine a common reference direction which in turn can be used to derive, individually for each inertial measurement unit, a new orientation intended to be a better representation of the actual orientation of the inertial measurement unit.

Abstract: A micro-electromechanical device includes a semiconductor substrate, in which a first microstructure and a second microstructure of reference are integrated. The first microstructure and the second microstructure are arranged in the substrate so as to undergo equal strains as a result of thermal expansions of the substrate. Furthermore, the first microstructure is provided with movable parts and fixed parts with respect to the substrate, while the second microstructure has a shape that is substantially symmetrical to the first microstructure but is fixed with respect to the substrate. By subtracting the changes in electrical characteristics of the second microstructure from those of the first, variations in electrical characteristics of the first microstructure caused by changes in thermal expansion or contraction can be compensated for.

Abstract: An integrated calibration system and process for a three-axis (X, Y, Z) accelerometer estimates Z-axis bias, Z-axis bias drift and determines X, Y, and Z-axes error sources based on measurements taken when the accelerometer is static, i.e., sensing only the earth's gravitational acceleration. Optimal on-the-fly error estimates for the three-axis accelerometer are obtained so that the measurements provided by the three-axis accelerometer remain error-free.

Abstract: The transduction scale factor for a MEMS gyroscope is calibrated without moving the MEMS device based on measurements of the resonator resonance frequency and the accelerometer resonance frequency as well as a distance value that may be a fixed distance value or a measured distance value. The measured distance value may be obtained by measuring the quality factor of the resonator or accelerometer and deriving the measured distance value from the quality factor measurement.

Abstract: One embodiment includes a method for dynamic self-calibration of an accelerometer system. The method includes forcing a proof-mass associated with a sensor of the accelerometer system in a first direction to a first predetermined position and obtaining a first measurement associated with the sensor in the first predetermined position via at least one force/detection element of the sensor. The method also includes forcing the proof-mass to a second predetermined position and obtaining a second measurement associated with the sensor in the second predetermined position via the at least one force/detection element of the sensor. The method further includes calibrating the accelerometer system based on the first and second measurements.

Abstract: A method and system for calibrating a rotational accelerometer. The method includes attaching a rotational accelerometer to be tested to a plate fitted with and second linear accelerometers and vibrating the plate. Angular acceleration measurements from the rotational accelerometer and linear acceleration measurements from the first and second linear accelerometers are obtained during the vibrating. The linear acceleration measurements are converted into angular acceleration values, and data representing, or usable for, a comparison of the angular acceleration measurements from the rotational accelerometer and the converted angular acceleration values is generated.

Abstract: A calibration system (20) configured for communication with an inertial sensor (22) includes a signal generator (24) and processing system (26). A calibration process (60) performed using the calibration system (20) includes applying (90) an electrical stimulus (44) to the inertial sensor (22), receiving an output signal (46) from the sensor (22) produced in response to the electrical stimulus (44) and determining a sensitivity (108) of the inertial sensor (22) to the electrical stimulus (44) in response to the output signal (46) and an applied voltage of the electrical stimulus (44). A sensitivity (112) of the inertial sensor (22) to an inertial stimulus is calculated using the sensitivity (108) and a measured resonant sensitivity (114) of the inertial sensor (22), and the calculated sensitivity (112) is utilized to adjust a gain value (56) for the inertial sensor (22) to calibrate the sensor (22).

Abstract: A testing system tests or calibrates an electronic test subject while rotating the test subject within a thermally controlled chamber. The testing system includes a stationary thermal chamber, a test subject, testing electronics that receive electronic data from the test subject, and a rotating platform inside the thermal chamber to which both the test subject and the testing electronics are mounted. The testing system further includes a platform cover for the rotatable platform that rotates with the rotatable platform, and exposes the test subject to the temperature inside the thermal chamber and insulates the testing electronics from the temperature inside the thermal chamber.

Abstract: A short duration test activation signal is applied to the test activation port of a motion sensor module and the test activation status port observed with an error flag being set if a corresponding signal does not appear at the test activation status port within a predetermined time period.

Abstract: A method for self-testing a dual-mass linear accelerometer in which a self-test voltage is applied to urge the two masses to move in opposite directions. Self-test signals are then applied to obtain a differential mode signal to detect masses repositioned in opposing directions. During testing, common disturbances to the two masses are rejected as common mode signals.

Abstract: A method and system for testing and calibrating an accelerometer of an electronic device are provided. In accordance with one embodiment, there is a method of testing and calibrating an accelerometer of an electronic device, comprising: detecting the electronic device within a nest of a test fixture; calculating an offset value for each sensing axis of the accelerometer in response to detecting the electronic device within the nest; and storing the offset values in a memory of the electronic device.

Abstract: Disclosed herein are an apparatus and a method for controlling an automatic gain of an inertial sensor. The automatic gain control apparatus of an inertial sensor includes: an inertial sensor; a driving unit; a detection unit; a state determination unit generates an AGC control signal according to the state of the driving mass; and a control unit that includes an AGC controlling to compensate for the driving displacement of the driving mass when the state of the driving mass is abnormal and performs a control to wake-up the AGC or convert the AGC into a sleep mode according to the AGC control signal input from the state determination unit to operate the AGC at the corresponding driving rate.

Abstract: An anti-stiction method is proposed in an inertial micro-electro-mechanical device. The device includes: a mobile mass, suspended to an armature via a spring, and having at least one mobile electrode; and at least one fixed electrode rigidly attached to the armature, each fixed electrode cooperating with one of the at least one mobile electrode to form a pair of electrodes. The anti-stiction method carries out a step of detecting, for at least one stuck pair of electrodes, a stiction associated to a stiction force and a step of applying, during a predetermined time period, a predetermined voltage between the electrodes of at least one of the pair or pairs of electrodes, so as to create an electrostatic force which generates a displacement of the mobile mass according to the direction of the stiction force.

Abstract: A method of processing signals from an accelerometer/gyroscopic-based input device includes providing the input device within a vehicle. An accelerometer/gyroscopic-based second device is also provided within the vehicle. The input device is manually actuated while the vehicle is in motion. First signals are transmitted from the input device in response to the manually actuating step. Second signals are transmitted from the second device in response to the motion of the vehicle. The first signals are adjusted dependent upon the second signals.

Abstract: Hybrid terrain-adaptive lower-extremity apparatus and methods that perform in a variety of different situations by detecting the terrain that is being traversed, and adapting to the detected terrain. In some embodiments, the ability to control the apparatus for each of these situations builds upon five basic capabilities: (1) determining the activity being performed; (2) dynamically controlling the characteristics of the apparatus based on the activity that is being performed; (3) dynamically driving the apparatus based on the activity that is being performed; (4) determining terrain texture irregularities (e.g., how sticky is the terrain, how slippery is the terrain, is the terrain coarse or smooth, does the terrain have any obstructions, such as rocks) and (5) a mechanical design of the apparatus that can respond to the dynamic control and dynamic drive.

Abstract: A system and method automatically calibrate a posture sensor, such as by detecting a walking state or a posture change. For example, a three-axis accelerometer can be used to detect a patient's activity or posture. This information can be used to automatically calibrate subsequent posture or acceleration data.

Abstract: An electronic device can include an inertial measurement unit (IMU) operative to monitor the movement of the electronic device. The IMU used in the device can be inaccurate due to the manufacturing process used to construct the IMU and to incorporate the IMU in the electronic device. To correct the IMU output, the electronic device in which the IMU is incorporated can be placed in a testing apparatus that moves the device to known orientations. The IMU output at the known orientations can be compared to an expected true IMU output, and correction factors (e.g., sensitivity and offset matrices) can be calculated. The correction factors can be stored in the device, and applied to the IMU output to provide a true output. The testing apparatus can include a fixture placed in a gimbal movable around three axes.

Abstract: A method for self-adjustment of a triaxial acceleration sensor during operation includes: calibrating the sensor; checking the self-adjustment for an interfering acceleration, with the aid of a measurement equation and estimated values for sensitivity and offset; repeating the adjustment if an interfering acceleration is recognized; and accepting the estimated values for sensitivity and offset as calibration values if an interfering acceleration is not recognized. The step of checking the self-adjustment includes: estimating sensitivity and/or offset and the variance thereof; determining an innovation as the difference between a measured value of the measurement equation and an estimated value of the measurement equation; testing the innovation for a normal distribution; and recognizing the interfering acceleration in the event of a deviation from the normal distribution.

Abstract: In certain examples, a quadrature cancellation apparatus can include a drive charge amplifier configured to couple to a proof mass of a MEMS device and to provide oscillation motion information, a first sense charge amplifier configured to couple to the proof mass and to provide first sense information of a first movement of the MEMS device, a first programmable amplifier configured to receive the oscillation motion information and provide amplified oscillation motion information, a first summer configured to cancel quadrature error of the first sense information using the first sense information and the amplified oscillation motion information to provide quadrature-corrected first sense information, a phase shifter configured to receive the oscillation motion information and to provide carrier information, and a first multiplier configured to provide demodulated first sense information using the quadrature-corrected first sense information and the carrier information.

Abstract: A method and system for testing and calibrating an accelerometer of an electronic device are provided. In accordance with one embodiment, there is a test system for an electronic device having an accelerometer with three mutually orthogonal sensing axes, the test system comprising: a test fixture having: a nest defining a cavity for receiving an electronic device; wherein the nest is configured so that, when the test fixture is substantially horizontal, a two-dimensional sensing plane defined by two of the sensing axes of the accelerometer is substantially horizontal and the third sensing axis is perpendicular to the two-dimensional sensing plane and substantially parallel to the force of gravity.

Abstract: An apparatus includes a MEMS gyroscope sensor including a first sensing capacitor and a second sensing capacitor and an IC. The IC includes a switch circuit configured to electrically decouple the first sensing capacitor from a first input of the IC and electrically couple the second sensing capacitor to a second input of the IC, and a capacitance measurement circuit configured to measure capacitance of the second sensing capacitor of the MEMS gyroscope sensor during application of a first electrical signal to the decoupled first capacitive element.

Abstract: A microelectromechanical gyroscope includes a body and a sensing mass, which is movable with a degree of freedom in response to rotations of the body about an axis. A self-test actuator is capacitively coupled to the sensing mass for supplying a self-test signal. The capacitive coupling causes, in response to the self-test signal, electrostatic forces that are able to move the sensing mass in accordance with the degree of freedom at an actuation frequency. A sensing device detects transduction signals indicating displacements of the sensing mass in accordance with the degree of freedom. The sensing device is configured for discriminating, in the transduction signals, spectral components that are correlated to the actuation frequency and indicate the movement of the sensing mass as a result of the self-test signal.

Abstract: A device is described for use in performing an inground operation. An accelerometer is supported by the device for generating accelerometer readings that characterize the inground operation subject to a native temperature drift of the accelerometer. A set of compensation data is developed and stored for use in compensating for the native temperature drift. The compensation data is applied to the accelerometer readings to produce compensated accelerometer readings that externally compensate for the native temperature drift to yield an enhanced thermal performance which is improved as compared to a native thermal performance of the accelerometer. A seven position calibration method for a triaxial accelerometer is described. An air module is described which isolates the accelerometer of the device at least from a potting compound that at least fills otherwise unoccupied volumes of the device interior.

Abstract: A method of processing signals from an accelerometer/gyroscopic-based input device includes providing the input device within a vehicle. An accelerometer/gyroscopic-based second device is also provided within the vehicle. The input device is manually actuated while the vehicle is in motion. First signals are transmitted from the input device in response to the manually actuating step. Second signals are transmitted from the second device in response to the motion of the vehicle. The first signals are adjusted dependent upon the second signals.

Abstract: An electronic device can include an inertial measurement unit (IMU) operative to monitor the movement of the electronic device. The IMU used in the device can be inaccurate due to the manufacturing process used to construct the IMU and to incorporate the IMU in the electronic device. To correct the IMU output, the electronic device in which the IMU is incorporated can be placed in a testing apparatus that moves the device to known orientations. The IMU output at the known orientations can be compared to an expected true IMU output, and correction factors (e.g., sensitivity and offset matrices) can be calculated. The correction factors can be stored in the device, and applied to the IMU output to provide a true output. The testing apparatus can include a fixture placed in a gimbal movable around three axes.

Abstract: Embodiments described herein provide for a method for obtaining an inertial measurement. The method includes obtaining multiple contiguous high sample rate readings during a time period from a conventional inertial sensor. Non-contiguous low sample rate reading of accumulated motion are also obtained over the time period from an atomic inertial sensor. One or more observable errors are estimated for the conventional inertial sensor based on comparing the low sample rate reading to the multiple high sample rate readings. A compensated hybrid reading is determined by compensating the high sample rate readings for the one or more observable errors based on the estimating of the one or more observable errors.

Abstract: Representative implementations of devices and techniques provide calibration for a sensor. The calibration includes adapting an output signal of the sensor based on acceleration components at the sensor and a rotational frequency of the sensor.

Abstract: A method for the precise measuring operation of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (qi) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between said trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (?T, ?T,0), a quadrature variable (?T, ?T,0) and a restoring variable (?S).

Abstract: A method for providing acceleration data with reduced substrate-displacement bias includes receiving in an accelerometer an external acceleration, determining the acceleration data with reduced substrate displacement bias in a compensation portion in response to a first and a second displacement indicators from a MEMS transducer, and, in response to substrate compensation factors from a MEMS compensation portion, outputting the acceleration data with reduced substrate displacement bias, wherein the first displacement indicator and the second displacement indicator are determined by the MEMS transducer relative to a substrate in response to the external acceleration and to a substrate displacement, and wherein the substrate compensation factors are determined by the MEMS compensation portion relative to the substrate in response to the substrate displacement.

Abstract: A method for adjusting the accuracy of a time-domain inertial sensor comprising the following steps: operatively positioning a harmonic oscillator of the time-domain inertial sensor between two capacitive plates; initiating harmonic oscillation of the oscillator in a first plane by creating with the capacitive plates a capacitively forced pulse; monitoring the harmonic oscillation of the oscillator; and electrostatically biasing both of the two capacitive plates such that a spring constant of the oscillator is effectively altered.

Abstract: The present invention relates to a circuit for correcting a phase error of a gyro sensor, a gyro sensor system and a method for correcting a phase error of a gyro sensor. In accordance with one embodiment of the present invention, the circuit for correcting a phase error of a gyro sensor includes: an offset detecting unit for detecting an offset due to the phase error included in a gyro output signal outputted by being demodulated from an output of the gyro sensor; a variable frequency generating unit for generating a switching frequency varied according to the result detected in the offset detecting unit; and a switched capacitor switched according to the switching frequency generated in the variable frequency generating unit. And also, a gyro sensor system including the circuit and a method for correcting a phase error of a gyro sensor are proposed.

Abstract: A system and method are disclosed for automatically calibrating capacitive transducers to neutralize feed-through capacitance using linear actuation. The method includes starting with an initial neutralization capacitance, applying no electrostatic force and two known electrostatic forces to a proof mass of the transducer, recording the transducer output changes due to the applied forces; and determining how to revise neutralization capacitance based on the changes. The method can use a binary search to find a final neutralization capacitance providing the best linearity. The method can include comparing the final linearity to a threshold linearity. The electrostatic forces can be applied using a charge control method where the electrostatic force is a linear function of the actuation duration. The linear actuation can be used for continuous self-test of capacitive sensors.

Abstract: Aspects of the present disclosure relate generally to indoor localization, for example, where GPS or other localization signals are unavailable. More specifically, aspects relate to using inertial navigation systems (132) such as accelerometers (136) and gyroscopes (134) to aid in the determination of the location of a user. Certain devices such as MEMS gyroscopes found in handheld client devices (104) should be calibrated to ensure accurate location information is obtained. In one aspect, a Vibration Energy Model process (FIG. 4B) is performed on shaking energy generated as a user walks with a mobile device to detect the direction the user is walking in. This information may be used as part of a signal fusion system to perform accurate indoor localization of the user, such as to provide enhanced maps and location services to the user.

Abstract: A method for determining an orientation of a portable or mobile electronic device includes determining an orientation of the device using at least a first inertial motion sensor (e.g., a gyroscope) with which the portable electronic device is equipped. A correction factor is provided to the orientation of the electronic device using a feedback control signal based on motion data obtained from at least a second inertial motion sensor (e.g. an accelerometer) to reduce drift in motion data obtained from the first inertial sensor. Responsive to a loss of valid motion data from the first inertial motion sensor, a rate at which the correction factor is provided to the orientation of the portable electronic device is increased.

Abstract: A calibration system for a MEMS system having at least one overdamped motion axis includes a measurement module for determining a location of a pole of a MEMS device in the overdamped motion axis, a closed-loop feedback system configured to change a first location of the pole to a second location of the pole, and a computation module for calculating a resonant frequency and/or a quality factor using the first and the second location of the pole as determined by the measurement module. The calibration system further includes a calibration module for calibrating the MEMS system based on the calculated resonant frequency and/or the calculated quality factor.

Abstract: An accelerometer with improved calibration features, an electronic device having an accelerometer with improved calibration features, and a method of calibrating an accelerometer of an electronic device are provided. In accordance with one embodiment, there is method of calibrating an accelerometer of an electronic device, the accelerometer having at least a primary sensing axis and a secondary sensing axis, the second sensing axis being oriented parallel to the primary sensing axis and in the opposite direction of the primary sensing axis, the method comprising: measuring acceleration calibration data using the primary sensing axis and the secondary sensing axis of the accelerometer; determining calibration parameters in accordance with measured calibration data from the accelerometer; and storing the calibration parameters in a memory of the electronic device.

Abstract: The present invention concerns an MEMS sensor and a method for compensation of a quadrature error on an MEMS sensor, which is intended for detection of movements of a substrate, especially accelerations and/or rotation rates. At least one mass arranged on the substrate and mounted to move relative to it is driven by means of drive electrodes. The mass/es execute a movement deviating from the prescribed movement due to a quadrature error. A deflection of the mass/es occurring due to Coriolis force and quadrature error is detected with detection electrodes. It is proposed according to the invention that a capacitance change be detected as a function of drive movement of the mass/es by means of compensation electrodes. A compensation charge dependent on the quadrature error of the MEMS sensor is generated on the compensation electrodes. For compensation, the distorted or incorrect charge generated by the quadrature error in the detection electrodes is compensated with the compensation charge.

Abstract: A method for adjusting the accuracy of a time-domain inertial sensor comprising the following steps: operatively positioning a harmonic oscillator of the time-domain inertial sensor between two capacitive plates; initiating harmonic oscillation of the oscillator in a first plane by creating with the capacitive plates a capacitively forced pulse; monitoring the harmonic oscillation of the oscillator; and electrostatically biasing both of the two capacitive plates such that a spring constant of the oscillator is effectively altered.

Abstract: Detecting and/or mitigating the presence of particle contaminants in a MEMS device involves including MEMS structures that in normal operation are robust against the presence of particles but which can be made sensitive to that presence during a test mode prior to use, e.g.

Abstract: The invention provides a method of measuring an acceleration by means of a vibrating accelerometer including a piezoelectric vibrating cell, the method having the steps: of exciting the vibration cell by means of an excitation signal at a resonant frequency of the vibrating cell; of calculating an acceleration value from a detection signal that results from the excitation signal; of exciting the vibrating cell with a correction excitation signal at a correction frequency that is different from the resonant frequency; of extracting a correction signal from the detection signal, the correction being representative of an electrical characteristic that is to be corrected; and of combining the correction signal with the detection signal so as to reduce the electrical characteristic that is to be corrected.

Abstract: A vehicle monitoring system includes an accelerometer installed in the vehicle in an unknown orientation. The system infers the orientation of the accelerometer in the vehicle from the acceleration signals. The proposed method detects and corrects the orientation in two steps. In the first step, the gravity vector is used to estimate the orientation in the vertical plane. Then, based on the acceleration data collected during the vehicle movement, the heading of the vehicle is estimated and the orientation within the horizontal plane is corrected.

Abstract: A system and method are disclosed for automatically calibrating capacitive transducers to neutralize feed-through capacitance using linear actuation. The method includes starting with an initial neutralization capacitance, applying no electrostatic force and two known electrostatic forces to a proof mass of the transducer, recording the transducer output changes due to the applied forces; and determining how to revise neutralization capacitance based on the changes. The method can use a binary search to find a final neutralization capacitance providing the best linearity. The method can include comparing the final linearity to a threshold linearity. The electrostatic forces can be applied using a charge control method where the electrostatic force is a linear function of the actuation duration. The linear actuation can be used for continuous self-test of capacitive sensors.

Abstract: A game apparatus calculates an orientation of an input device including an acceleration sensor and a gyroscope based on at least acceleration data and angular rate data acquired from the input device. The game apparatus includes a reflection rate setting unit, a first orientation calculation unit, and a second orientation calculation unit. The reflection rate setting unit sets a reflection rate representing a degree by which an acceleration indicated by the acceleration data is reflected in the orientation. The first orientation calculation unit calculates the orientation of the input device based on the acceleration when the reflection rate is equal to or greater than a predetermined first threshold. The second orientation calculation unit calculates the orientation of the input device based on the angular rate when the reflection rate is less than a predetermined second threshold equal to or less than the first threshold.

Abstract: A Coriolis gyroscope comprises a mass system that can be excited to perform vibrations parallel to a first axis, whereby a deflection of the mass system due to a Coriolis force along a second axis perpendicular to the first axis is detectable. At least one first correction unit and at least one second correction unit, which each comprise a plurality of stationary correction electrodes and moving correction electrodes whereby the stationary correction electrodes extend in the direction of the first axis and are firmly connected to the substrate by corresponding anchor structures, and the moving correction electrodes are provided as a part of the mass system. A method for reducing the quadrature bias of a Coriolis gyroscope of this type comprises applying at least temporarily constant corrective voltages to the correction units.

Abstract: A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.