Abstract: An apparatus of storing container includes a stocker including shelves being configured to support containers, respectively, a purging unit being configured to provide a purge gas for each of the shelves to purge the containers when the stocker is in a purge mode, and to provide the purge gas only for each of the shelves when the stocker is in a normal mode, an inspection unit being configured to inspect a purge quality of the purge gas provided to each of the shelves while the stocker is in the normal mode, and a control unit being configured to change the stocker between in the purge mode and in the normal mode, and being configured to control the purging unit according to a switch between the purge mode and the normal mode. Thus, the apparatus has improved operation efficiency.

Abstract: An airflow detection device is capable of detecting airflow issues associated with a transport carrier, such as a blockage of a diffuser in a transport carrier or leakage of a transition bracket, among other examples. The airflow detection device includes an air tunnel through which a gas in a transport carrier may flow. The airflow detection device includes an airflow sensor configured to generate airflow data based on a flow of the gas through the air tunnel. In some implementations, the airflow detection device is included in an airflow detection system to perform automated measurements and to determine, identify, and/or detect airflow issues associated with a transport carrier. In this way, the airflow detection system may perform one or more automated actions (or may cause one or more other devices to perform one or more automated actions) based on a detection of a diffuser blockage or a transition bracket leak.

Abstract: A purge device includes: a plurality of mounts on which containers are to be placed and that are grouped, a nozzle that is structured such that when a container is placed on the corresponding mount, a flow path to supply a purge gas to the container is opened, and a flow rate controller that adjusts a flow rate of the purge gas supplied into a group based on a number of containers in the group.

Abstract: A flow rate measurement system measures, by using a flow rate measurement device, a flow rate of cleaning gas in a container storage facility including: a storage rack including supporting portions; a transport device that transports a container to the supporting portions; and a gas supply device that supplies the cleaning gas to the container supported by the supporting portions. The transport device and the flow rate measurement device are connected via a power line communicatively by wire or wireless. The flow rate measurement device measures the flow rate of the cleaning gas in a state in which the transport device has transported the flow rate measurement device and the flow rate measurement device is placed on a target supporting portion.

Abstract: An environment providing device having a test chamber; a spraying device for receiving the supply of a gas flow to spray, into the test chamber, a fluid that contains particles; a flow meter for measuring a measured value for the flow rate of the gas flow that is supplied to the spraying device; a flow rate controlling device for controlling to a prescribed value, based on the measured value, the flow rate of the gas flow that is supplied to the spraying device; a timer for measuring a time interval over which the fluid that includes the particles has been sprayed into the test chamber; and a spraying-device-controlling device for stopping the spraying of the fluid that contains the particles after spraying a prescribed quantity of particles into the test chamber.

Abstract: An environment sensor is mounted in a measurement unit. The measurement unit is adapted to be transported by a transportation apparatus. Measurement data from the environmental sensor is stored in a data format suitable for associating the measurement data with a state of the measurement unit.

Abstract: Various methods are described for measuring parameters of a stratified flow using at least one spatial array of sensors disposed at different axial locations along the pipe. Each of the sensors provides a signal indicative of unsteady pressure created by coherent structures convecting with the flow. In one aspect, a signal processor determines, from the signals, convection velocities of coherent structures having different length scales. The signal processor then compares the convection velocities to determine a level of stratification of the flow. The level of stratification may be used as part of a calibration procedure to determine the volumetric flow rate of the flow. In another aspect, the level of stratification of the flow is determined by comparing locally measured velocities at the top and bottom of the pipe. The ratio of the velocities near the top and bottom of the pipe correlates to the level of stratification of the flow. Additional sensor arrays may provide a velocity profile for the flow.

Abstract: A lithographic apparatus includes a projection system configured to project a patterned beam of radiation onto a target portion of a substrate. The projection system includes a first gas-conditioned sub-environment and a second gas-conditioned sub-environment. The apparatus includes a gas control unit configured to control the feeding of conditioned gas into the first sub-environment and into the second sub-environment via the first sub-environment so as to prevent contamination from the second sub-environment to the first sub-environment. The apparatus includes a gate configured to leak the conditioned gas at a rate from the second sub-environment to ambient atmosphere, and a detector configured to detect at least one property of the second gas-conditioned environment.

Abstract: A stocker 1 includes a storage FOUP 20, plural purge units 50, a measurement FOUP 30 and a stacker crane 60. The storage FOUP 20 stores a semiconductor wafer inside. The measurement FOUP 30 includes a flow meter inside. The purge unit 50 includes a purge shelf 51 having plural purge tables 54 for placing the storage FOUP 20, and a nitrogen gas is supplied into the storage FOUP 20 placed on the purge table 54. The stacker crane 60 transports the storage container 20 onto the purge table 54, and the measurement FOUP 30 is transported between the plural purge tables 54.

Abstract: A system for measuring the permeance of a material. The permeability of the material may also be derived. The system provides a liquid or high concentration fluid bath on one side of a material test sample, and a gas flow across the opposing side of the material test sample. The mass flow rate of permeated fluid as a fraction of the combined mass flow rate of gas and permeated fluid is used to calculate the permeance of the material. The material test sample may be a sheet, a tube, or a solid shape. Operational test conditions may be varied, including concentration of the fluid, temperature of the fluid, strain profile of the material test sample, and differential pressure across the material test sample.

Abstract: A method of monitoring the operation of a gas sensor is disclosed. A system signal is provided in response to sensing first or second system conditions, and a gas concentration signal is provided in response to sensing first or second gas concentration levels of a gas. In response to the system and gas concentration signals, a signal indicating the operating condition of the gas sensor is provided.

Abstract: The real mass flow rate is calculated for a variety of gases. The variety of gases are classified into a plurality of classifications, and representative discharge coefficient relationships are previously determined for the respective classifications. When an upstream pressure and a temperature are detected for a certain gas on an upstream side of the sonic nozzle, a theoretical mass flow rate is calculated. After the theoretical mass flow rate is calculated, reference is made to a theoretical mass flow rate-discharge coefficient correspondence table recorded in a memory corresponding to the classification of the gas, to determine a discharge coefficient based on the relationship appropriate for the gas type. After the discharge coefficient is selected, a real mass flow rate is determined as a product of the determined discharge coefficient and the theoretical mass flow rate.

Abstract: A fan flow sensor for a gas generating proton exchange member electrolysis cell includes a switching device and a sail disposed in communication with the switching device. The sail is pivotally mounted and movable in response to an airflow from a fan. The sail is further configured to actuate the switching device in response to the airflow from the fan.

Abstract: A fan flow sensor for a hydrogen generating proton exchange member electrolysis cell includes a switching device and a sail slideably disposed on the switching device. The sail is configured to actuate the switching device in response to an airflow from a fan. The switching device may be actuatable in response to a magnet disposed on the sail.

Abstract: Detection of an evolving or diffusing gaseous substance emanating from an irradiated or thermolyzed layer of polymeric composition in semiconductor processing or similar processes is disclosed. The evolving or diffusing gaseous substance is detected by spatially disposing from the irradiated or thermolyzed layer a detector layer that includes a compound having leaving groups that are sensitive to the gaseous substance being detected.

Abstract: The invention relates to a method and a microsensor for measurement of transport coefficients like diffusivity or flow velocity. The microsensor has a reservoir provided with a mouth and a transducer. The transducer has a tip placed in the mouth, which can be provided with a membrane or insert. The reservoir contains one or more gases or one or more liquid-dissolved substances intended for the diffusion through the mouth into an area or field of a medium outside the mouth of the reservoir. The transducer measures the partial pressure of the gas or the concentration of the liquid-dissolved substance in the mouth, whereby transport coefficients of diffusivity or flow velocity are determined. Preferably, the gradient of the partial pressure or the concentration is determined.

Abstract: The invention pertains to a method for measuring the concentration of dissolved gases in a liquid [(39)], especially of CO2 in beverages, in which the liquid [(39)] is passed across the retentate side [(140)] of a membrane [(14)] that is at least partially permeable to the dissolved gas, and [in which] the volumetric flow of the permeated gas on permeate side [(16)] of the membrane [(14)] is determined, the temperature of the liquid [(39)] is measured, and the concentration of the dissolved gas in the liquid [(39)] is calculated from these values. In this, the thickness of the membrane [(14)] can be pre-selected as a function of the flow rate of the liquid [(39)] flowing along the retentate side [(140)].

Abstract: An automated, computer-controlled landfill gas recovery system includes a number of equipment vaults, with each vault being associated with one or more wells in the landfill. The wells are in fluid communication with a piping system located in the associated vault, with the piping system including a main pneumatic control valve that can be adjusted to establish gas flow rate through the well or wells. Also, each vault includes a shielded enclosure that holds sensors and a local vault controller for generating signals representative of flow rate, vacuum, and oxygen/methane/carbon dioxide content of the gas being extracted from the well. These signals are sent to a remote computer. Based on the signals generated by the sensors, the computer communicates with each vault controller to control the pneumatic control valve of each vault to establish a gas flow rate from the associated well as appropriate to accord with one of several user-selected process control regimes.