Abstract: A respiratory flow sensor is provided with two identical or substantially identical first and second wires arranged at spaced locations from one another in a housing through which the respiratory flow flows. The first and second wires can be heated by a respective associated power source. An air resistance body is arranged in the vicinity of the second wire. A third wire is arranged in the housing at a spaced location from the first and second wires and is used to determine the temperature of the respiratory flow via an associated measuring device for the temperature-dependent electric resistor. A central control and evaluating unit is connected to the power sources and to the measuring device and compensates a temperature change of the respiratory flow. The change is detected with the third wire by a change in the heating current flowing through the first and second wires, so that these wires have an operating temperature that is above the temperature of the respiratory flow by a defined amount.

Abstract: Mass flowmeter comprising a hollow conduit of a heat-conducting material for transporting in a determined flow direction a fluid with a mass flow rate to be measured, a first temperature-sensitive resistor element at a first position in thermal contact with this conduit for supplying heat to said fluid, a temperature sensor and measuring and control means connectable to the resistor element and the temperature sensor, wherein the temperature sensor is provided in thermal contact with the conduit at a second position upstream in relation to said first position, and the measuring and control means are adapted to maintain a constant difference in temperature at said first and second positions.

Abstract: An assembly for measuring the mass flow and flow rate of gases such as are used in semiconductor fabrication processes. The assembly includes an axial flow passage, viz., a capillary tube with a bore of about 0.050 inch diameter and a wall thickness of about 0.002 inch, having a downstream end connected to a diffuser section having an axially symmetric, diverging passage. Gas exiting the diffuser section has a low pressure drop because the gas has expanded at a low, controlled rate, converting velocity head into pressure head, and because the tube and diffuser section passage are in-line, eliminating right-angle turns. The assembly also includes two resistance thermometers, coils of iron-nickel alloy wire about 0.0004 inch in diameter, providing a differential temperature measurement with a time constant of less than 4 seconds.

Abstract: A thermal dispersion switch/transmitter for determining flow rate and liquid level in a non-contacting apparatus. A special preparation of one or more small spots in the outside surface of the wall of the conduit, standpipe or container enables one or more thermally sensitive elements to reside very close to the fluid on the opposite side of the wall. A temperature sensor is formed of a raster pattern electrical conductor deposited on a thin, electrically insulative, thermally conductive flat chip. One temperature sensor is time-shared and is periodically self heated and functions as the reference as well as the active or heated sensor of the invention. One alternative is to employ two temperature sensors, one being a reference sensor and the other being the active sensor. An alternative embodiment employs the same construction of one or more small, very thin membrane surfaces to which multiple detectors are mounted inside a probe inserted into the conduit.