Abstract: A soot sensing system includes a soot sensor having a first element, and circuitry to an amount of soot accumulated on the element and to control heating of the element in response to the soot accumulation. An electrostatic repelling voltage (ERV) may be applied to a sensor/heater element(s) during a contamination prevention mode (CPM) to repel ash and reduce contamination of the sensor. A pulsed heating voltage (PHV) may be applied to the elements during the CPM and a pulsed ERV may be applied to the elements during the “off” period of the PHV. All voltage to the elements may be turned off during the CPM and the elements may be floating/ground. A PHV may be applied to the elements during the CPM and no voltage may be applied to the elements during the “off” period of the PHV. A heating voltage may be applied to the elements during a CPM corresponding to a cold start.

Abstract: A biosensor device includes a porous substrate, where the substrate comprises semiconductor elements functionalized to conjugate with a particular analyte, the semiconductor elements are embedded within at least a portion of the substrate, and the substrate is to absorb fluid capable of carrying the particular analyte. The device further includes two or more electrodes attached to the substrate to correspond to the portion of the substrate, where the portion of the substrate further comprises Room-Temperature Ionic Liquid (RTIL).

Abstract: A method of managing smell sensibility according to a route of a moving object includes checking a planned travel route of the moving object, determining whether a bad-smell area is included in the planned travel route, determining whether a bad-smell level of the bad-smell area is equal to or greater than an unpleasantness level of a user of the moving object when the bad-smell area is included, and performing a suppression process for blocking introduction of a bad smell into the moving object when the bad-smell level is equal to or greater than the unpleasantness level of the user and maintaining the planned travel route when the bad-smell level is less than the unpleasantness level of the user.

Abstract: An air data system includes an air data probe and a surface acoustic wave (SAW) sensor attached to the air data probe for detecting particulate accumulation. The air data probe includes a probe head, a strut connected to the head, and a mounting plate connected to the strut. The probe head has an inlet, an interior surface extending from the inlet, and an exterior surface extending from the inlet.

Abstract: A sensor system that combines the sensing application of surface acoustic wave (SAW) sensor and sensor signal transfer though the enclosure wall via acoustic means. The sensor system includes SAW sensor placed inside the enclosure and at least one pair of bulk acoustic wave (BAW) transducers, one mounted inside and second outside the enclosure wall, allowing the interrogation of SAW sensor from outside the enclosure. The external BAW transducer converts interrogation electrical pulse into acoustic pulse which travels though the enclosure wall to the internal BAW transducer. The internal BAW transducer converts the interrogation electrical pulse to electrical pulse and transfers it to SAW sensor. The response of the SAW transducer containing series of electric pulses is converted to the series of acoustic pulses by internal BAW transducer which propagates though enclosure wall.

Abstract: In an electronic nose apparatus and method based on spectrum analysis, 1) a gaseous sample is dissolved into a solvent in an impinger, and the sample dissolved into the solvent is introduced into an RF resonator, and 2) RF having various absorption spectra according to materials are generated in the RF resonator, and the type of gas is determined through spectrum analysis so that an electronic nose is implemented. In this way, it is possible to overcome the resolution of gas chromatography (GC) and a sensor array and a limited number of multi-channel sensors (the number of channels).

Abstract: Methods and systems enabling the real-time monitoring of a light-induced procedure in a biological medium, and/or the acquisition of information related to this biological medium are provided. In some implementations, the light beam used for the procedure is modulated at a modulation frequency selected in view of the photoacoustic frequency response associated with the procedure. The photoacoustic feedback signal from the medium during the procedure is then monitored. This monitoring may involve filtering the photoacoustic feedback signal around the selected feedback modulation frequency. Ratiometric comparisons of the contribution of different frequencies to the photoacoustic feedback signal are also considered.

Abstract: Reference oscillators are ubiquitous in timing applications generally, and in modern wireless communication devices particularly. Microelectromechanical system (MEMS) resonators are of particular interest due to their small size and potential for integration with other MEMS devices and electrical circuits on the same chip. In order to support their use in high volume low cost applications it would be beneficial for MEMS designers to have MEMS resonator designs and manufacturing processes that whilst employing low cost low resolution semiconductor processing yield improved resonator performance thereby reducing the requirements of the oscillator circuitry. It would be further beneficial for the oscillator circuitry to be able to leverage the improved noise performance of differential TIAs without sacrificing power consumption.

Abstract: A micro-device structure comprises a source substrate comprising sacrificial portions laterally spaced apart by anchors. Each sacrificial portion is exposed through an opening. A micro-device is disposed on each sacrificial portion and laterally attached to an anchor by a multi-layer tether. In certain embodiments, a micro-device structure is constructed by providing the source substrate, disposing micro-devices on each sacrificial portion, depositing a first tether layer over at least a portion of the source substrate and the micro-device, depositing a second tether layer over the first tether layer, and patterning the first tether layer and the second tether layer to form (i) a multi-layer tether for each of the micro-devices such that the multi-layer tether laterally attaches the micro-device to one of the anchors, and (ii) an opening exposing each of the sacrificial portions.

Abstract: A thermal flowmeter includes a casing, a ferrule, a measuring tube penetrating through the ferrule, a sensor for flow rate detection, a joint shaft movably supported by end portions of the casing, one end portion of the joint shaft being connected to the measuring tube and the ferrule with a through hole of the joint shaft and a hollow portion of the measuring tube communicating with each other, the other end portion of the joint shaft sticking out of the casing, and a screw thread-fitted to each of the end portions of the casing, and including a pressing portion pressing the joint shaft into an inside of the casing. A seal structure includes a first tapered surface formed on the ferrule and a second tapered surface formed on the joint shaft and fitting the first tapered surface, and is provided between the ferrule and the joint shaft.

Abstract: A multi-component fluid composition and concentration sensor system and method. The system can be configured with multiple sensing elements whereby each specifically responds to different combinations and concentrations of multiple fluid component mixtures. Because these responses can be captured and committed to a lookup table during an initial calibration sequence, subsequent measurements of unknown mixtures of the same gases will match known states found in the lookup table and the fluid concentrations can be deduced. The number of sensing elements with unique responses to the fluid mixtures should equal the number of unknown fluids that are active on the sensing surfaces, similar to how solving for multiple variables requires no fewer equations than there are unknowns, i.e. “3 equations and 3 variables.

Abstract: A sample in a gas state to be measured is forced to impinge on a structure in which a change in a characteristic including a mechanical deformation, an optical change, an electric change and a magnetic change is exerted due to the impingement of a gaseous sample, a gasified liquid sample or solid sample to cause at least one of changes in characteristics including a mechanical deformation, an optical change, an electric change and a magnetic change; and the molecular weight of the sample in a gas state is obtained.

Abstract: An integrated system for monitoring a chemical concentration in an ionic liquid, comprising: a. an online FTIR instrument with an ATR window; b. a sample conditioning station that removes light hydrocarbons and produces a degassed ionic liquid that is analyzed by FTIR; and c. a solvent flushing system that flows solvent across the ATR window. Also, a process for monitoring the chemical concentration, comprising: a. degassing the ionic liquid in the sample conditioning station; b. passing the degassed ionic liquid over an ATR window; c. periodically redirecting a flow of the degassed ionic liquid via a bypass line or an on-off valve that isolates the ATR window from the process unit that elutes the ionic liquid; and d. flowing a solvent and a purging gas over the ATR window during the periodically redirecting step c); and e. resuming the passing of the degassed ionic liquid over the ATR window.

Abstract: A gas detection apparatus (1) which includes a gas detection element (3) including a heat generation resistor (34); an energization control section (7) which switches the energization state of the heat generation resistor to alternately assume one of two resistance values corresponding to one of two set temperatures set in advance; and a casing member (90) which accommodates the gas detection element and has a gas inlet opening (92h). The gas detection apparatus further includes a humidity computation section (7) which computes the humidity of the object atmosphere based on a ratio of a high-temperature-time voltage VH to a low-temperature-time voltage VL; and a clogging determination section (7) which determines the degree of clogging of the gas inlet opening based on a change in the humidity computed by the humidity computation section.

Abstract: Devices, systems, and methods for sensing one or more odorants are disclosed. The device may include an oscillator crystal coated with a polymer. The oscillator crystal may typically oscillate at a known first frequency. The coated crystal may respond to exposure to an odorant by oscillating at one or more alternative frequencies. The coated crystal response may depend on the polymer composition, polymer concentration, coating geometry, and/or odorant to which it may be exposed. The system may include one or more oscillator crystals, each coated with a different polymer composition, polymer concentration, and/or coating geometry. The system may include non-coated crystals. The system may also include additional electronics to measure the frequencies of the one or more coated or non-coated crystals and to analyze their frequencies. The method may include the use of such devices and/or systems to identify and/or determine the concentration of one or more odorants.

Abstract: An acoustic sensor includes a side wall, closed at each end by an end wall, to form a substantially cylindrical cavity, a transmitter and a receiver operatively associated with first and second respective end walls. Properties of the relative dimensions of the cavity are configured to create a desired oscillatory motion of the end walls, and oscillations of a fluid pressure in the cavity, to generate an electrical signal via the receiver to be output from the sensor. An array of acoustic sensors can be connected to allow calibration of one of the array of sensors.

Abstract: An electronic device may include a housing and a printed circuit board, where the housing has a front cover and a back cover that at least substantially enclose the printed circuit board. In some instances, the back cover may include an outer shell and one or more inward extending walls that extend inwardly toward the printed circuit board. In some cases, the inward extending walls, the outer shell, and the printed circuit board define two or more internal pockets within the housing. The pockets may, in some cases, separate one region of the printed circuit board from another region of the printed circuit board. In some instances, the one or more inward extending walls may be configured to provide support to a back side of the printed circuit board, which may be particularly useful when a touch screen display is mounted on a front side of the printed circuit board.

Abstract: A piezoelectric resonator for use in a sensor arrangement for detecting or measuring an analyte in a medium, comprises a quartz crystal plate, having a first crystal surface and a second crystal surface. The first crystal surface is provided with a first electrode, which has a surface area of less than 15 mm2 and the second crystal surface is provided with a second electrode. The first electrode may have a rectangular surface shape. A flow cell for use in an apparatus for detecting or measuring an analyte in a medium, comprises walls that form a sensing chamber together with the resonator, and inlet and outlet openings for leading a fluid through the sensing chamber. A part of the resonator constitutes one of the walls of the sensing chamber and is arranged such that the first electrode is situated inside the sensing chamber.

Abstract: In general, the present disclosure is directed toward a novel hybrid spintronic device for converting chemical absorption into a change in magnetoresistance. This device uses a novel magnetic material which depends on the attachment of an organic structure to a metallic film for its magnetism. Changes in the chemical environment lead to absorption on the surface of this organometallic bilayer and thus modify its magnetic properties. The change in magnetic properties, in turn, leads to a change in the resistance of a magnetoresistive structure or a spin transistor structure, allowing a standard electrical detection of the chemical change in the sensor surface.

Abstract: The present disclosure relates to a carbon dioxide sensor able to function in harsh environment, conditions. The carbon dioxide sensor can include a gate-less field effect transistor including a synthetic, quasi-intrinsic, hydrogen-passivated, single-crystal diamond layer exhibiting a 2-dimension hole gas effect, and a sensing layer comprising both a polymer and a hygroscopic material deposited onto a surface of the gate-less field effect transistor.

Abstract: A quantitative sensor and manufacture method thereof are disclosed. This quantitative sensor has a dual-mode film bulk acoustic resonator structure to achieve desirable performances in sensitivity, accuracy and efficiency. Furthermore, this quantitative sensor serves as a fluid sensor when a fluid detection metal layer is formed in a sample-receiving chamber; and this quantitative sensor may also serve as a bio sensor when biocompatible metal layer and a bio-sensing layer are formed in the sample-receiving chamber instead of the fluid detection metal layer.

Abstract: An electronic discriminating device incorporating a non-contact electronic sensor array, a controller, and a signaling device that may indicate the presence of urine and/or bowel movement is disclosed. In particular, the electronic discriminating device can discriminate between an insult of urine only and an insult containing bowel movement. The device can then generate different alerts based on the type of insult. The electronic discriminating device may also emit a signal at or near the opening of an absorbent article or transmit the alert wirelessly to a radio, computer device, or smartphone.

Abstract: A gas detector can be releasibly coupled to one of a group of elongated probes each of the probes includes a detector connecting end and a gas in flow/outflow end. The connecting end includes a helical attaching feature which when coupled to the detector defies a plurality of spaced apart angular locking positions. A locking position is selected in response to a flow of air in an adjacent duct to which the detector is being attached. Where the detector carries an elongated display device, the locking position can be selected so that the display device exhibits a desired presentation.

Abstract: The present disclosure relates to a valproic acid biosensor. In some embodiments, the valproic acid biosensor may comprise a microcantilever, a self-assembly monolayer, and a valproic acid antibody layer. The self-assembly monolayer may immobilize on the microcantilever surface. The valproic acid antibody layer may immobilize on the self-assembly monolayer. The valproic acid antibody layer may be used to bind with valproic acid drug samples. The present disclosure further relates to methods for measuring the concentration of valproic acid drug samples.

Abstract: An environmental measurement apparatus includes an operation unit which calculates a first change in a first oscillation frequency of a first QCM sensor and a second change in a second oscillation frequency of a second QCM sensor. The operation unit corrects the second change based on the first change in a first period and the second change in the first period.

Abstract: A kit for detecting the presence of an explosive includes a pulsed focused energy source located at a target distance away from a substrate, the energy having a magnitude sufficient to release the internal energy of an explosive if present on the substrate and thereby generate an acoustic wave. The kit also includes a detector adapted to detect the acoustic wave at a detection distance away from the substrate.

Abstract: A sensing device is provided that has satisfactory sensing accuracy when a crystal unit where an excitation electrode is formed on both upper and lower surfaces of a piezoelectric piece is used to sense a sensing object. Adsorption regions are arranged in two places so as to intersect a direction of flow of a fluid, thus each of the adsorption regions senses the sensing object and reference regions are individually provided in these adsorption regions. A difference ?f1 between the oscillation frequencies of the regions and a difference ?f2 between the oscillation frequencies of the regions are added, and based on the result of the addition, whether the sensing object is present or not and its concentration are detected.

Abstract: The invention relates to a sensor (1) and a method for measuring pressure, variation in sound pressure, a magnetic field, acceleration, vibration, or the composition of a gas. The sensor (1) comprises an ultrasound transmitter (2), and a cavity (4) arranged in connection with it. According to the invention, the sensor (1) comprises a passive sensor element (3, 3?) located at the opposite end of the cavity (4) to the ultrasound transmitter (2), the distance of which from the ultrasound transmitter (2) is selected in such a way that the resonance condition is met at the ultrasound frequency used, the ultrasound transmitter (2) comprises a light-construction diaphragm oscillator (9), which is thus well connected to the surrounding medium, and the sensor includes means for measuring the interaction between the ultrasound transmitter (2) and the cavity (4).

Abstract: Device for detecting a gas having an excitation device for exciting the gas by an electromagnetic wave having a wavelength corresponding approximately to that of the gas; and a detection device for detecting the excitation of the gas, the detection device having a waveguide connected to the excitation device, a part of which forms a movable element designed to be in contact with the gas and capable of being set into vibration by the impact of the excited gas molecules; and a measurement sensor, for measuring the vibration of the element, the measurement sensor and the element forming the detection device.

Abstract: A sensor device for analyzing fluidic samples is provided. The sensor device includes a stacked sensing arrangement having at least three sensing layers and a multilayer structure. The multilayer structure has a hole formed therein which is adapted to let pass the fluidic sample and the stacked sensing arrangement is formed in the multilayer structure in such a way that the fluidic sample passes the stacked sensing arrangement when the fluidic sample passes the hole.

Abstract: A circuit for detecting air, a related system, and a related method are provided. The circuit for detecting air includes a receiver connection and an air-detection circuit. The receiver connection is configured to provide a receiver signal. The air-detection circuit is in operative communication with the receiver connection to process the receiver signal to generate a processed signal corresponding to detected air. The air-detection circuit includes one or more active-rectifying elements configured to actively rectify the receiver signal to provide the processed signal.

Abstract: A QCM (Quartz Crystal Microbalance) sensor includes a quartz crystal vibrator for measurement having a first electrode which contacts a measurement sample to be detected and a first quartz substrate in which is formed the first electrode, and a quartz crystal vibrator for reference having a second electrode which contacts a reference sample serving as a reference when detecting the physical quantity of the measurement sample and a second quartz substrate in which is formed the second electrode. A housing accommodates the quartz crystal vibrators and confines the reference sample in a state of contacting the second electrode. The QCM sensor is capable of detecting a physical quantity of the measurement sample accurately at the time of measuring the physical quantity of the sample in an atmosphere of the sample.

Abstract: A single-input multi-output surface acoustic wave (“SAW”) device contains two or more output inter-digital transducers (“IDTs”) arranged in a longitudinal direction of a single input IDT. The detection sensitivity and reliability of the SAW device may be improved by eliminating the deviation and signal interference between multiple input IDTs.

Abstract: A support for a thin element in an electrically conducting or semi-conducting material, one face of which is intended to be put into contact with a liquid or gas medium, the support has a first part provided with a central through-passage with a longitudinal axis, said passage including at least one first and one second portion with a different diameter connected to each other through a shoulder, said shoulder being intended for supporting said thin element; a second part penetrating into the passage with the end opposite to the one intended to be exposed to the liquid solution, capable of maintaining the thin element on the shoulder; and a seal between the thin element and the shoulder.

Abstract: There is disclosed a method of determining the phase compositions of a multiphase fluid flow in a fluid line, including obtaining a vibration signal from the fluid flow using a vibration sensor comprising a target disposed in the fluid flow which vibrates in response to fluid flow in the fluid line. The vibration signal is analysed to determine a first energy parameter which is related to the energy of the vibration signal within a first frequency band, and a second energy parameter which is related to the energy of the vibration signal within a second frequency band; and a phase composition parameter, such as a dryness parameter, relating to the phase compositions of the fluid flow is determined using the first and second energy parameters. There is also disclosed an apparatus for determining the phase compositions of a multiphase fluid flow in a fluid line.

Abstract: An atmospheric environment measuring apparatus including a filter disposed in a casing and adsorbing a component of a gas to be detected; a first mass sensor disposed in the casing between an inlet of the casing and the filter, including a first piezoelectric vibration element and changing a resonance frequency according to a mass of a substance adhered on a surface of the first piezoelectric vibration element; a second mass sensor disposed in a stage following the filter in the casing, including a second piezoelectric vibration element and changing a resonance frequency according to a mass of a substance adhered on a surface of the second piezoelectric vibration element; and a fan disposed in a stage following the second mass sensor in the casing and fluidizing atmosphere from the inlet toward an outlet of the casing.

Abstract: A sulfur dioxide sensor comprising a first beam having a functionalized sensing surface capable of sensing sulfur dioxide, the first beam capable of producing a first resonant frequency; and a second beam having a functionalized reference surface not capable of sensing sulfur dioxide, the second beam capable of producing a second resonant frequency, wherein differential sensing of sulfur dioxide may be performed, further wherein the first beam is functionalized with a liquid phase of a first polymeric compound and the second beam is functionalized with a liquid phase of a second polymeric compound is provided. In one embodiment, the sensor is a nano-sensor capable of low drift accurately detecting sulfur dioxide levels at the zeptograms level. Methods of making and using a sulfur dioxide sensor are also provided.

Abstract: A tunable nanoscale resonator has potential applications in precise mass, force, position, and frequency measurement. One embodiment of this device consists of a specially prepared multiwalled carbon nanotube (MWNT) suspended between a metal electrode and a mobile, piezoelectrically controlled contact. By harnessing a unique telescoping ability of MWNTs, one may controllably slide an inner nanotube core from its outer nanotube casing, effectively changing its length and thereby changing the tuning of its resonance frequency. Resonant energy transfer may be used with a nanoresonator to detect molecules at a specific target oscillation frequency, without the use of a chemical label, to provide label-free chemical species detection.

Abstract: Techniques are generally described for detecting a concentration level of at least one gas. Some example devices may include a sensor including conductive plate on a surface of dielectric including a nanotube layer formed thereon. The conductive plate and the nanotube layer form a resonator that resonates at a frequency in response to an interrogation signal. The nanotube layer may be configured to associate with one or more gas molecules. The frequency at which the resonator resonates may shift according to which gas molecules are associated with the nanotube layer to identify a particular gas. An amount of resonance may be exhibited as a resonant response signal. An amplitude of the resonant response signal may be indicative of the concentration level of the detected gas.

Abstract: Switching a transmitting and receiving direction of two transducers (2,3) in the forward and the reverse direction, a time differential memory part (17b) storing a propagation time differential every K times a unit measurement process being executed, the propagation time differential being a differential between a propagation time of the ultrasonic wave signal in a forward direction and in a reverse direction, a flow rate calculating part (15) calculating a flow rate of a passing fluid based on a lump sum of propagation times in both the forward and the reverse directions obtained at least every K times of a unit measurement process being executed, an estimating part (18) estimating a change in a momentary flow rate of the fluid based on the time differential obtained every K times of the unit measurement process being executed and storing thereof in a time differential memory part (17b), thus obtaining an accurate flow rate and detecting the change in the momentary flow rate.

Abstract: A system for locking a laser with a resonant optical cavity includes a laser that emits a laser beam, a resonant optical cavity having at least two cavity mirrors, one of which is a cavity coupling mirror, mode matching optics configured to couple the laser beam to the cavity via the cavity coupling mirror, means for applying a periodic dither or modulation waveform signal to the optical frequency of the incident laser beam or to the laser itself to thereby induce modulation of the intracavity optical power, and means for enabling a portion of the light emerging from the cavity coupling mirror to enter a cavity of the laser while maintaining an optical phase that results in periodic optical feedback locking whereby a mean optical frequency of the laser matches a resonance peak of the cavity.

Abstract: The invention provides a chemical detection system for detecting at least one target chemical species, including a self-sensed cantilevered probe array having a plurality of self-sensed cantilevered probes, at least one chemical-sensitive coating material applied to at least one cantilevered probe in the cantilevered probe array, and an interface circuit that is coupled to the cantilevered probe array. At least one cantilevered probe in the cantilevered probe array exhibits a shifted cantilevered probe response when the cantilevered probe array is exposed to the target chemical species and the interface circuit actuates the cantilevered probe. A handheld chemical detection system and a method of operation are also disclosed.

Abstract: An exemplary gas sensing system includes a gas sensing unit, a detecting unit, and a processing unit. The gas sensing unit includes a quartz crystal substrate, a first electrode layer, a second electrode layer, a first activating layer, and a sensor medium layer having adsorption ability and desorption ability to chemical gas. The detecting unit is electrically connected with the first electrode and the second electrode, and is configured for detecting a frequency change of the gas sensing unit before and after adsorbing the chemical gas. The processing unit is electrically connected with the detecting unit, and is configured for obtaining a mass change of the gas sensing unit according to the frequency change.

Abstract: An EMAT that generates horizontally polarized shear ultrasonic waves is combined with a PZT that generates longitudinal ultrasonic waves to provide simultaneous or sequential inspection of a test component material for improved accuracy in estimating properties of the material or detecting and estimating the dimensions of defects in the material. The transducer combination is constructed so that the EMAT and PZT elements are concentric and therefore interrogate approximately the same volume of the test component material. Nonferromagnetic insulators, such as elastomers, are installed on the bottom surface of PZT component to increase the transmission and reception the ultrasonic waves into the test component. Ferromagnetic, acoustic-absorbing materials are installed on the top surface of the EMAT coil component to minimize generation of ultrasonic waves in the bias magnet.

Abstract: The present invention provides a standing wave fiber assembly for the collection and detection of a biological target in a complex biological fluid, including: an oscillator; and an elongated fiber coupled to the oscillator, wherein the elongated fiber is selectively exposed to a fluid potentially containing the biological target, and wherein the resonated elongated fiber attracts the biological target, and wherein a change in a response of the resonated elongated fiber indicates the presence of the biological target. The assembly also includes a top cover plate including one or more electrical connections and a port through which the fluid is introduced. The assembly further includes a bottom cover plate including a well in which the fluid is contained. Optionally, the elongated fiber includes one or more probes homogenously functionalized along its length that bind targeted biological materials.

Abstract: A photoacoustic detection device includes a cylindrical acoustic resonator having an arrangement for guiding light essentially perpendicular to a cylinder axis in such a manner that a second azimuthal resonance of cylinder oscillation is excitable by absorption of the light.

Abstract: An electronic microbalance made in a semiconductor body accommodating an oscillating circuit adjacent to a diaphragm. A stack formed by a first electrode, a second electrode, and a piezoelectric region arranged between the first and the second electrode extends above the diaphragm. Any substance that deposits on the stack causes a change in the mass of the microbalance and thus in the resonance frequency of a resonator formed by the microbalance and by the oscillating circuit and can thus be detected electronically. A chemical sensor is obtained by forming a sensitive layer of a material suitable for binding to target chemicals on the stack. The sensitivity of the microbalance can be increased by making the first electrode of molybdenum so as to increase the piezoelectric characteristics of the piezoelectric region.

Abstract: Cantilever chemical vapor sensors that can be tailored to respond preferentially in frequency by controlling the location of deposition of an adsorbing layer. Cantilever chemical vapor sensor having a base, one or more legs and a tip are fabricated using a gold layer to promote deposition of a sorbing layer of a polymeric material in a desired location, and using a chromium layer to inhibit deposition of the sorbing layer in other locations. Sorbing layers having different glass temperatures Tg and their effects are described. The methods of making such cantilever chemical vapor sensors are described.

Abstract: An electrochemical piezoelectric sensor is disclosed. The sensor includes a piezoelectric substrate, three (or more) electrodes over a first surface of the substrate, and another electrode over a second (opposing) surface of the substrate. An ionic liquid in the form of a film is adhered, bound, immobilized, or otherwise positioned over the substrate and electrodes of the first surface. The ionic liquid film permits the absorption and detection of analytes from a gaseous sample, for environmental gases, example explosive vapors and/or explosive vapor species in the gaseous sample. Detection (optionally including analyte quantitation and qualitative identification) can be performed by both electrochemical and piezoelectric techniques using a single sensor. Systems incorporating and methods of using the electrochemical piezoelectric sensor also are disclosed.

Abstract: A method includes forming a hole in a first wafer and forming a sensor structure in or on a second wafer. The second wafer includes a piezoelectric material. The method also includes bonding the first wafer and the second wafer, where the sensor structure is located between the wafers. The method further includes forming a sensing layer by depositing material between the wafers through the hole in the first wafer. The sensing layer could be formed by depositing a sensing layer material on the second wafer using direct printing. Also, the hole through the first wafer could be formed using ultrasonic milling, micro-drilling, laser drilling, wet etching, and/or plasma etching. A spacer material could be used to bond the wafers together, such as frit glass paste or an organic adhesive. Trenches could be formed in the first wafer to facilitate easier separation of multiple sensors.