Abstract: A monolithic sensor arrangement, a manufacturing method and a measurement method are disclosed. In an embodiment a monolithic gas sensor arrangement includes a sensor including a first transducer with a first sensitive layer and a second transducer with a second sensitive layer, and a readout circuit configured to generate a first measurement signal and a second measurement signal depending on the first and second transducers, wherein the sensor arrangement is a humidity sensor arrangement, wherein the first and second sensitive layers are configured to absorb water molecules, and wherein the first and second sensitive layers differ from each other in at least one property.

Abstract: A moisture sensor comprises a carrier element comprises an insulating material, a first and a second electrode structure at a distance from one another at the carrier element, a moisture-sensitive, dielectric layer element at a first main surface region of the carrier element and adjacent to the first and second electrode structures and a third electrode structure on a first main surface region of the moisture-sensitive, dielectric layer element, such that the moisture-sensitive, dielectric layer element is between the third electrode structure and the first electrode structure and between the third electrode structure and the second electrode structure. The first electrode structure is a first capacitor electrode and the second electrode structure is a second capacitor electrode of a measurement capacitor for capacitive moisture measurement, wherein the third electrode structure is a floating electrode structure.

Abstract: A moisture sensor comprises a carrier element comprises an insulating material, a first and a second electrode structure at a distance from one another at the carrier element, a moisture-sensitive, dielectric layer element at a first main surface region of the carrier element and adjacent to the first and second electrode structures and a third electrode structure on a first main surface region of the moisture-sensitive, dielectric layer element, such that the moisture-sensitive, dielectric layer element is between the third electrode structure and the first electrode structure and between the third electrode structure and the second electrode structure. The first electrode structure is a first capacitor electrode and the second electrode structure is a second capacitor electrode of a measurement capacitor for capacitive moisture measurement, wherein the third electrode structure is a floating electrode structure.

Abstract: The present invention relates to a sensor device (10) for detection of liquid and/or humidity. The sensor device comprises a resonance circuit comprising an inductor (13) connected to a capacitor (11), wherein the capacitor comprises a first electrode (11a) and a second electrode (11b) together sandwiching at least a portion of a dielectric substrate (14). The first and second electrodes are configured to provide an overlap mismatch relative to each other, and the overlap mismatch area (ma) is at least 0.1% of the overlapping area (oa) of the two electrodes. The present invention further relates to a system (70) for reading a sensor device and a method (100, 200) for reading a sensor device.

Abstract: A humidity sensor includes a lower electrode formed above a substrate, a first humidity sensing film covering the lower electrode, an upper electrode formed above the first humidity sensing film, and a second humidity sensing film covering the upper electrode and making contact with the first humidity sensing film through openings of the upper electrode. The upper electrode has a predetermined opening pattern. The area of the upper electrode is larger than the area of the lower electrode, and is smaller than the area of the first humidity sensing film.

Abstract: The detecting device includes a detecting unit including a first electrode and a second electrode, the first electrode and the second electrode being used as a first capacitor. The detecting device includes a drive unit configured to apply a first drive signal to the first drive terminal such that the first drive signal is alternately inverted between a first period and a second period. The detecting device includes a converting unit configured to convert a charge charged at the signal terminal into a voltage and includes a difference processing unit configured to obtain a difference between the first output voltage and the second output voltage.

Abstract: A measurement circuitry (MC) for evaluating a resistance of a resistive gas sensor (GS) comprises a first current path (P1), wherein a first logarithmic compression circuit (LC1) is arranged in the first current path (P1). A reference resistor (Rreference) and a second logarithmic compression circuit (LC2) is arranged in a second current path (P2) of the measurement circuitry (MC). A voltage generator (VG) provides a fixed voltage excitation for the resistive gas sensor (GS) and the reference resistor (Rreference). A first current (I1) received from the resistive gas sensor (GS) flows from the gas sensor (GS) via the first current path (P1) into the first logarithmic compression circuit (LC1). An evaluation circuit (EC) determines the resistance (Rs) of the resistive gas sensor (GS) in dependence on a first and second output signal (Ve1, Ve2) of the first and the second logarithmic compression circuit (LC1, LC2).

Abstract: The present invention relates to a method of manufacturing a relative humidity sensor comprising the step of; a) providing a first electrode on or over a substrate, b) providing a non-porous inorganic dielectric layer over the first electrode, c) providing a second electrode over the inorganic dielectric layer, and d) forming a pattern of voids in the second electrode and the inorganic dielectric layer through the second electrode. The invention also relates to a relative humidity sensor, in particular one obtained by the inventive method.

Abstract: A capacitive relative humidity sensor includes a first electrode and a second electrode, where at least the one of the electrodes is a water-permeable electrode. The electrodes act in conjunction with a water-sensitive hygroscopic dielectric material. The design enables low-cost and simple fabrication of fast-responding and stable relative humidity sensors using digital fabrication techniques.

Abstract: A vehicle battery safety sensor system providing liquid detection inside a battery pack includes a battery pack having a structure defining a battery cell bay receiving a battery. A first sensor is mounted to the structure proximate to a low point area of the battery cell bay for sensing an operating condition within the low point area of the battery cell bay. A second sensor is mounted to the structure elevated above the first sensor for sensing an operating condition above the low point area of the battery cell bay. A safety module processes signals received from the first sensor and the second sensor and identifies if the operating condition within the low point area of the battery cell bay defines a fluid present in the low point area of the battery cell bay.

Abstract: A power transistor is provided with at least one transistor finger that lies within a semiconductor material. The gate oxide is segmented into a set of segments with thick field oxide between each segment in order to reduce gate capacitance and thereby improve a resistance times gate charge figure of merit.

Abstract: Provided is a temperature sensor including a carrier substrate; a sensor unit positioned on the carrier substrate and including a base layer and an electric conductive layer, the base layer having surface hygroscopicity, and the electric conductive layer being on an external surface of the base layer; a pad unit electrically connected to opposite ends of the sensor unit; and a cover unit positioned on the sensor unit and configured to cover the sensor unit.

Abstract: A humidity sensor including a lower electrode formed on a substrate, a plastic deformation inhibiting film formed on the lower electrode to inhibit plastic deformation of the lower electrode, a humidity sensitive film covering the lower electrode through the plastic deformation inhibiting film, and an upper electrode formed on the humidity sensitive film.

Abstract: A physical quantity sensor includes a substrate, an element portion disposed so as to overlap the substrate, a conductor pattern disposed on the substrate so as to face the element portion, and a protection film covering at least a part of an exposed portion of the conductor pattern exposed from element portion in a plan view from a direction in which the substrate and the element portion overlap.

Abstract: A polymerase chain reaction (PCR) module is detachably combined with a reader system. The reader system includes a central processing unit (CPU) receiving a photo sensing signal to calculate gene amplification amount in real time and generating a temperature control signal based on a temperature signal and a temperature control information. The PCR module includes a photo sensor assembly, a partition wall, and an interface module. The photo sensor assembly includes a plurality of photo sensors and a temperature sensor. The photo sensors are arranged in an array shape to sense emission light generated from a specimen to generate the photo sensing signal. The partition wall is protruded from the photo sensor assembly to define a reaction space in which the specimen is received. The interface module is electrically connected to the photo sensor assembly to transmit the photo sensing signal and the temperature signal to the reader system.

Abstract: An illustrative humidity sensor may include a substrate having a source and a drain, wherein the drain is laterally spaced from the source. A gate stack is provided in the space between the source and the drain to form a transistor. The gate stack may include a gate insulator situated on the substrate to form a gate insulator/substrate interface. The gate stack may further include a barrier layer above the gate insulator. The barrier layer may be configured to act as a barrier to mobile charge, humidity and/or other contaminates, and may help prevent such contaminates from reaching the gate insulator/substrate interface. The gate stack may further include a humidity sensing layer above the barrier layer. The humidity sensing layer, when exposed to humidity, may modulate the conduction channel in the substrate under the gate insulator and between the source and the drain. In some cases, the humidity level may be determined by monitoring the current flowing between the source and drain.

Abstract: A humidity sensor that includes a humidity sensitive material. A sensing circuit associated with the humidity sensitive material estimates the ambient humidity based upon the humidity sensitive material. A heating element is associated with the humidity sensitive material. A temperature circuit increases the temperature proximate the humidity sensitive material and thereafter the sensing circuit estimates the ambient humidity.

Abstract: A resistance-based humidity sensor including a moisture sensitive composite comprising a cellulose acetate and copper(II) oxide and a first electrode and a second electrode each in direct contact with the composite. Each electrode is connected to a circuit which can correlate a resistance of the composite to a measurement of a relative humidity. The method by which the sensor may measure a relative humidity in an environment includes applying a frequency through the first electrode, across the moisture sensitive composite, and through a second electrode to measure a change in the frequency that correlates to a resistance of the moisture sensitive composite and correlates to the relative humidity of the environment. A method of producing a resistance-based humidity sensor in the form of a film or in the form of a cell.

Abstract: In a module in which a circuit board is integrally insert molded with a housing while semiconductor parts mounted on the circuit board are exposed, deformation of the circuit board caused by pressure on the circuit board by a mold for blocking the molding resin is reduced. In the module in which the circuit board is integrally insert molded with the housing while the semiconductor parts mounted on the circuit board are exposed, the deformation of the circuit board is reduced by placing a material, which has an elastic modulus smaller than the elastic modulus of the printed circuit board, in the projection area of the mold holding portion on the circuit board.

Abstract: An optical transmission module includes: a photoelectric conversion element that converts an electrical signal to an optical signal; a photoelectric conversion element-driving IC that drives the photoelectric conversion element; an optical fiber that transmits the optical signal; a guide holding member that holds the optical fiber; a cable that supplies power to at least one of the photoelectric conversion element and the photoelectric conversion element-driving IC; and a substrate on which the photoelectric conversion element and the photoelectric conversion element-driving IC are mounted. The substrate has first and second planes which are perpendicular to each other. The photoelectric conversion element is mounted on the first plane. The optical fiber is connected to a back side of the first plane. An optical axis of the optical fiber is perpendicular to the first plane. The cable is connected to the second plane in parallel with the optical axis of the optical fiber.

Abstract: Disclosed is an integrated circuit comprising a substrate (10) including at least one light sensor (12); an interconnect structure (20) over the substrate; at least one passivation layer (30) over the interconnect structure, said passivation layer including a first area over the at least one light sensor; and a gas sensor such as a moisture sensor (50) at least partially on a further area of the at least one passivation layer, wherein the gas sensor comprises a gas sensitive layer (46?) in between a first electrode (42) and a second electrode (44), the gas sensitive layer further comprising a portion (46?) over the first area. A method of manufacturing such an IC is also disclosed.

Abstract: A capacitive humidity sensor includes a first electrode, a humidity sensitive dielectric layer, and a second electrode. The humidity sensitive dielectric layer is between the first and the second electrodes. The humidity sensitive dielectric layer is etched at selected regions to form hollow regions between the first and second electrodes.

Abstract: Provided is a capacitive humidity sensor. The capacitive humidity sensor includes an upper electrode disposed on a first plane, a plurality of first electrodes included in the upper electrode, a plurality of second electrodes disposed between the first electrodes, and a humidity sensitive layer surrounding the second electrodes.

Abstract: An integrated humidity sensor includes at least one measuring capacitor and one humidity-sensitive polymer as a dielectric that is also suited for use in a dirty, i.e., particle-laden measurement environment. The measuring capacitor of the humidity sensor is in the form of a plate capacitor in the layered structure of the sensor element, the outer of two electrodes being located at the surface of the layered structure. Disposed between the two electrodes of the measuring capacitor is a humidity-sensitive polymer layer that is in direct contact with the measurement environment via humidity-permeable paths in the outer electrode of the measuring capacitor. These humidity-permeable paths extend from the surface of sensor element to the polymer layer, and are so small in lateral extent that they do not significantly affect the electrical conductivity within the outer electrode.

Abstract: A sensor (2) for sensing a first substance and a second substance, the sensor comprising first (3) and second (5) sensor components each comprising a first material (20), the first material being sensitive to both the first substance and the second substance, the sensor further comprising a barrier (18) for preventing the second substance from passing into the second sensor component (5).

Abstract: A mechanism is provided for determining an isoelectric point of a molecule. A first group of capacitance versus voltage curves of a capacitor is measured. The capacitor includes a substrate, dielectric layer, and conductive solution. The first group of curves is measured for pH values of the solution without the molecule bound to a functionalized material on the dielectric layer of the capacitor. A second group of capacitance versus voltage curves of the capacitor is measured when the molecule is present in the solution, where the molecule is bound to the functionalized material of the dielectric layer of the capacitor. A shift is determined in the second group of curves from the first group of curves at each pH value. The isoelectric point of the molecule is determined by extrapolating a pH value corresponding to a shift voltage being zero, when the shift is compared to the pH values.

Abstract: A micromechanical moisture sensor device includes: a substrate having a front side and a rear side; an interdigital printed conductor track arrangement provided above and/or below the front side of the substrate; and a moisture-sensitive polymer layer situated above and in the gaps of the interdigital printed conductor track arrangement. The moisture-sensitive polymer layer extends below the front side into the substrate.

Abstract: A pressure detector detecting a pressure of cold or hot water; a temperature detector detecting a temperature of a pressure sensor; correcting equation storage storing, cold water correcting equation information applied when the temperature detected by the temperature detector is included in a cold water temperature range, and hot water correcting equation information applied when the temperature detected by the temperature detector is included in a hot water temperature range; a temperature range determiner determining the temperature range that includes the temperature detected by the temperature detector as either a cold water temperature range or a hot water temperature range; and a correction calculating portion using the correcting equation corresponding to the temperature range determined by the temperature range determiner correcting the detection signal by the pressure detector, and outputting the post-correction signal as a measurement signal.

Abstract: A gas sensing device that includes humidity compensation.

Abstract: A circuit includes a capacitive-type humidity sensor. The circuit provides start and stop signals to a processor in accordance with a charge voltage across the sensor. The processor performs a counting function to derive an integer count value in response to the start and stop signals. The processor uses the integer count value to determine parameters for controlling an ink-jetting print engine. Printing speed can be controlled in accordance with ambient humidity and/or temperature so that the printed media are sufficiently dried before handling by a user or other operations.

Abstract: A rapid response relative humidity sensor based on nano-structured aluminum oxide thin film is disclosed. The main body of the sensor is an anodic aluminum oxide thin film of about 2-20 ?m thick formed from an Al substrate which serves as one electrode. A porous metal layer of about 20-200 nm thick is formed over the anodic aluminum oxide thin film and functions as a second electrode. The alumina thin film contains nano-sized channels of about 10-100 nm in diameter, serving as a capacitive relative humidity sensor having high sensitivity and short response time. Thermal annealing at elevated temperature improves the linearity of the capacitance versus humidity curve, giving a full range humidity sensing range. Hysteresis and degradation are negligible for the humidity sensors.

Abstract: A capacitive type humidity sensor is provided, where a sensor chip substrate, with a sensor section where electrostatic capacitance changes in accordance with humidity, a reference section where electrostatic capacitance does not change, and a plurality of pads which are output terminals of each section, and an IC substrate, which is electrically connected to the pads and which outputs the difference in capacitance between the sections as a voltage, are fixed to the same support substrate, where a protective member, which forms a sealed region surrounding the sensor section and which covers the reference section, is provided on the sensor chip substrate, the support substrate is covered by a sealing resin except for the region which is covered by the protective member, the sensor section is exposed to air at the region which is surrounded by the protective member, and the other constituent elements are covered by the sealing resin.

Abstract: A moisture sensor includes a first electrode (a conductive substrate) having a first sensor portion and a first terminal portion as well as a second electrode having a second sensor portion and a second terminal portion. The moisture sensor also includes a layer of porous dielectric material sandwiched between the first sensor portion and the second sensor portion. Further the moisture sensor includes a layer of dense insulating material sandwiched between the first terminal portion and the second terminal portion. Leads are then connected to the two terminal portions.

Abstract: A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor.

Abstract: A sensor senses a magnitude of a physical parameter of the sensor's environment. The sensor has first and second electrodes, and a material layer between them. The material has an electrical property, e.g., capacitance or resistance, whose value depends on the magnitude of the physical parameter. The first electrode is formed in a first layer, and the second electrode is formed in a second layer, different from the first layer. The first layer has a trench and an elevation next to the trench. The trench has a bottom wall and a side wall. The material is positioned on the bottom wall and on the side wall and on top of the elevation. The trench accommodates at least a part of the second electrode. The second electrode leaves exposed the material formed on top of the elevation.

Abstract: A humidity sensor element includes a dielectric substrate, a nonporous conductive electrode disposed on the dielectric substrate, a permeable conductive electrode having a thickness in a range of from 4 to 10 nanometers and permeable by water vapor, and a detection layer sandwiched between the nonporous conductive electrode and the permeable conductive electrode. The permeable conductive electrode is parallel to the nonporous electrode. Both conductive electrodes have respective conductive leads attached thereto. The detection layer includes a copolymer having monomeric units comprising wherein M represents H, or an alkali metal. A humidity sensor including the humidity sensor element is also disclosed.

Abstract: A moisture content sensing system is described comprising a collar mechanically coupled with a clean grain transport system. An extendable support extends through the collar and has an extendable capacitive sensor element disposed at one end. The extendable support is configured to be located at a first position in which the extendable capacitive sensor element is disposed adjacent to clean grain conveyed by the clean grain transport system and moved to a second position wherein the extendable capacitive sensor element is disposed at least partially within the clean grain of the clean grain transport system.

Abstract: A humidity sensor is provided having humidity levels approaching 100% relative humidity can be measured, as well as condensation measurements which appear as RH values “above 100%”. The humidity sensor is a capacitance based sensor. The capacitor(s) of the sensor is dimensioned so that substantial electric fields of the capacitor extend to the sensor/ambient air interface so that the conditions at the ambient side of the interface provide data for the sensor. In particular, the capacitance effects of moisture formation on the ambient side of the sensor/ambient air interface are utilized as part of the measurements so that relative humidity levels below and above 100% can be detected. The capacitor(s) of the sensor is dimensioned so that substantial electric fields of the capacitor extend to the air interface so that the conditions at ambient side of the interface provide data for the sensor.

Abstract: Stacked layers of non-continuous opaque layer structures are disclosed herein that may be configured to block radiation such as visible light or other forms of light, while at the same time allowing penetration of ambient gases. In one example, such non-continuous opaque layer structures may be configured as stacked non-continuous metal layer structures that together fully block penetration of radiation while at the same provide sufficient open spaces between and/or within the metal layer segments of a given integrated circuit layer to meet maximum metal spacing rules. In another example, such non-continuous opaque layer structures may be configured as capacitive structures.

Abstract: A humidity sensing circuit with temperature compensation includes a wave producing module, a phase processing module, a sensing module and a detecting module. The wave producing module outputs a wave signal. The phase processing module outputs an oscillatory wave and an invert oscillatory wave according to the wave signal. The sensing module has a temperature sensor and a humidity sensor which are connected in series. The temperature sensor and the humidity sensor respectively receive the oscillatory wave and the invert oscillatory wave. The sensing module outputs a parameter signal according to the oscillatory wave and the invert oscillatory wave. The detecting module outputs a detection signal according to the parameter signal. Hence, the humidity sensing circuit with temperature compensation senses the temperature and humidity by the simple circuit design. Moreover, it is feasible for circuit design and application.

Abstract: A capacitive humidity sensor, and more particularly, to a capacitive humidity sensor and a manufacturing method thereof capable of increasing reliability of the sensor by forming a dehumidification layer of a polymer material having a large surface area between a lower electrode layer and an upper electrode layer while miniaturizing the humidity sensor by forming a sensor unit on an ROIC substrate.

Abstract: A liquid dispensing apparatus is provided which makes it possible to correctly and easily detect a dispensing operation judgment failure with high accuracy without particularly using a complicated detection mechanism or means. The liquid dispensing apparatus includes a nozzle which sucks a solution in a cassette and dispenses the sucked solution into another cassette; and a cassette holder which holds the another cassette, and the nozzle is used as a first electrode and the cassette holder as a second electrode. Further, the liquid dispensing apparatus has measurement means for measuring a capacitance between the first and second electrodes during a solution dispensing operation.

Abstract: A device having an integrated circuit that includes a relative humidity sensor as well as a memory element for storing calibration information for the relative humidity sensor. Because of the nature of fabrication of an integrated circuit for a relative humidity sensor, variances in the creation of electronic components therein may lead to a need to calibrate the sensor after assembly. Such calibration information may be ascertained at the time of fabrication and stored in a memory component disposed on the integrated circuit chip. By storing the calibration information, which may be determined at the time of fabrication, one does not need to determine such calibration information later at assembly or store the already determined calibration information in a remote location until assembly if it was, in fact, ascertained at fabrication. Then, at assembly, one needs only to read the calibration information in order to calibrate the relative humidity sensor.

Abstract: A capacitive humidity sensor includes a first electrode, a humidity sensitive dielectric layer, and a second electrode. The humidity sensitive dielectric layer is between the first and the second electrodes. The humidity sensitive dielectric layer is etched at selected regions to form hollow regions between the first and second electrodes.

Abstract: The present invention relates to capacitive sensors for measuring humidity and moisture and to an improved process for making the same. The fabrication process for a capacitive sensor having a multi-layer electrodes for measuring humidity and moisture comprising disposing the multi-layer interdigitated electrodes in a multi-layer polyimides; providing a plurality of trenches on the surface of the electrode by lift off process; and covering the sensor with photosensitive negative polyimide.

Abstract: An anti-pinching device (18) for a pivotable actuating element (6) of a motor vehicle (2) is specified. Said device comprises a capacitive sensor (8) which is intended to contactlessly detect an obstacle in the path of the actuating element (6) and has an electrode (14) for generating an external electric field opposite a counterelectrode (16), wherein the electrode (14) extends in a radial direction (R) of the pivoting movement of the actuating element (6), and a control unit (10) which is set up to interpret a change in a measurement capacitance (CM), which is formed between the electrode (14) and the counterelectrode (16), as pinching when the changed measurement capacitance (CM) exceeds a triggering threshold (A) which is predefined on the basis of an opening angle (?) of the pivotable actuating element (6) and to track the triggering threshold (A).

Abstract: The present invention provides a temperature and humidity measuring and recording device deployed on substrate for measuring and recording temperature and humidity of the interior of any station for reticles and of any SMIF POD. The temperature and humidity measuring and recording device comprises a substrate with a first surface and a second surface opposite to the first surface on another side of the substrate, a first measurement unit embedded in and fixed to the first surface of the substrate for measuring the temperature and humidity of the surrounding environment, and a second measurement unit embedded in and fixed to the second surface of the substrate for measuring the temperature and humidity of the interior between the substrate and the pellicle film.

Abstract: A gas sensor, which is extremely compact to be arranged for separated gas piping in semiconductor device manufacturing equipment, a gas measuring system using such gas sensor, and a gas detection module for the gas measuring system. The gas sensor has a gas detection device containing a dielectric semiconductor, the electric conductivity of the gas detection device varying in response to the degree of adsorption of gases to the gas detection device, a capacitive element connected in series to the gas detection device, and a pair of electrodes which are connected to electric terminals of an electric element comprising the gas detection device and the capacitive element, wherein the gas sensor is capable of detecting the degree of adsorption of gases to the gas detection device from an electrical response to a voltage which is applied to the electrodes and which periodically varies and reverses in polarity.

Abstract: A single chip wireless sensor comprises a microcontroller connected to a transmit/receive interface, which is coupled to a wireless antenna by an L-C matching circuit. The sensor senses gas or humidity and temperature. The device is an integrated chip manufactured in a single process in which both the electronics and sensor components are manufactured using standard CMOS processing techniques, applied to achieve both electronic and sensing components in an integrated process. A Low-K material with an organic polymer component is spun onto the wafer to form a top layer incorporating also sensing electrodes. This material is cured at 300° C., which is much lower than CVD temperatures. The polyimide when cured becomes thermoset, and the lower mass-to-volume ratio resulting in K, its dielectric constant, reducing to 2.9. The thermoset dielectric, while not regarded as porous in the conventional sense, has sufficient free space volume to admit enough gas or humidity for sensing.

Abstract: The invention relates to a moisture sensor which comprises a receiving area on its surface for a moisture film, the layer thickness of which is dependent on the relative humidity in the surrounding of the receiving area. The moisture sensor has a signal source which is connected to at least one control electrode at at least one infeed, the electrode abutting the receiving area, for providing a control voltage to the moisture film. The moisture sensor comprises at least one potential sensor which has at least one sensor area, under the receiving area, which is spaced apart from the at least one infeed. The sensor area is electrically insulated from the receiving area by an insulation layer, located between the sensor area and the receiving area, in such a way that an electrical potential can be capacitively detected by means of the potential sensor, the potential being dependent on the layer thickness of the moisture film and the control voltage.