Capacitance Patents (Class 73/335.04)
  • Patent number: 10365241
    Abstract: A humidity sensor that includes a humidity sensitive material. A sensing circuit associated with the humidity sensitive material estimates the ambient humidity based upon the humidity sensitive material. A heating element is associated with the humidity sensitive material. A temperature circuit increases the temperature proximate the humidity sensitive material and thereafter the sensing circuit estimates the ambient humidity.
    Type: Grant
    Filed: April 13, 2016
    Date of Patent: July 30, 2019
    Assignee: Veris Industries, LLC
    Inventor: Dieter Jarofski
  • Patent number: 10317356
    Abstract: A resistance-based humidity sensor including a moisture sensitive composite comprising a cellulose acetate and copper(II) oxide and a first electrode and a second electrode each in direct contact with the composite. Each electrode is connected to a circuit which can correlate a resistance of the composite to a measurement of a relative humidity. The method by which the sensor may measure a relative humidity in an environment includes applying a frequency through the first electrode, across the moisture sensitive composite, and through a second electrode to measure a change in the frequency that correlates to a resistance of the moisture sensitive composite and correlates to the relative humidity of the environment. A method of producing a resistance-based humidity sensor in the form of a film or in the form of a cell.
    Type: Grant
    Filed: March 13, 2017
    Date of Patent: June 11, 2019
    Assignee: King Abdulaziz University
    Inventors: Abdullah Mohamed Asiri, Muhammad Tariq Saeed Chani
  • Patent number: 10031006
    Abstract: In a module in which a circuit board is integrally insert molded with a housing while semiconductor parts mounted on the circuit board are exposed, deformation of the circuit board caused by pressure on the circuit board by a mold for blocking the molding resin is reduced. In the module in which the circuit board is integrally insert molded with the housing while the semiconductor parts mounted on the circuit board are exposed, the deformation of the circuit board is reduced by placing a material, which has an elastic modulus smaller than the elastic modulus of the printed circuit board, in the projection area of the mold holding portion on the circuit board.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: July 24, 2018
    Assignee: HITACHI AUTOMOTIVE SYSTEMS, LTD.
    Inventors: Tsubasa Watanabe, Tsutomu Kono, Hiroaki Hoshika, Takayuki Yogo, Takahiro Miki
  • Patent number: 9762329
    Abstract: An optical transmission module includes: a photoelectric conversion element that converts an electrical signal to an optical signal; a photoelectric conversion element-driving IC that drives the photoelectric conversion element; an optical fiber that transmits the optical signal; a guide holding member that holds the optical fiber; a cable that supplies power to at least one of the photoelectric conversion element and the photoelectric conversion element-driving IC; and a substrate on which the photoelectric conversion element and the photoelectric conversion element-driving IC are mounted. The substrate has first and second planes which are perpendicular to each other. The photoelectric conversion element is mounted on the first plane. The optical fiber is connected to a back side of the first plane. An optical axis of the optical fiber is perpendicular to the first plane. The cable is connected to the second plane in parallel with the optical axis of the optical fiber.
    Type: Grant
    Filed: July 10, 2015
    Date of Patent: September 12, 2017
    Assignee: OLYMPUS CORPORATION
    Inventor: Hiroyuki Motohara
  • Patent number: 9052267
    Abstract: Disclosed is an integrated circuit comprising a substrate (10) including at least one light sensor (12); an interconnect structure (20) over the substrate; at least one passivation layer (30) over the interconnect structure, said passivation layer including a first area over the at least one light sensor; and a gas sensor such as a moisture sensor (50) at least partially on a further area of the at least one passivation layer, wherein the gas sensor comprises a gas sensitive layer (46?) in between a first electrode (42) and a second electrode (44), the gas sensitive layer further comprising a portion (46?) over the first area. A method of manufacturing such an IC is also disclosed.
    Type: Grant
    Filed: October 14, 2014
    Date of Patent: June 9, 2015
    Assignee: NXP, B.V.
    Inventors: Youri Victorovitch Ponomarev, David Tio Castro, Roel Daamen
  • Patent number: 9027400
    Abstract: A capacitive humidity sensor includes a first electrode, a humidity sensitive dielectric layer, and a second electrode. The humidity sensitive dielectric layer is between the first and the second electrodes. The humidity sensitive dielectric layer is etched at selected regions to form hollow regions between the first and second electrodes.
    Type: Grant
    Filed: December 2, 2011
    Date of Patent: May 12, 2015
    Assignees: STMicroelectronics Pte Ltd., STMicroelectronics Asia Pacific Pte Ltd., STMicroelectronics S.R.L.
    Inventors: Olivier Le Neel, Suman Cherian, Ravi Shankar, Boon Nam Poh, Sebastien Marsanne, Michele Vaiana
  • Publication number: 20150068302
    Abstract: Provided is a capacitive humidity sensor. The capacitive humidity sensor includes an upper electrode disposed on a first plane, a plurality of first electrodes included in the upper electrode, a plurality of second electrodes disposed between the first electrodes, and a humidity sensitive layer surrounding the second electrodes.
    Type: Application
    Filed: February 24, 2014
    Publication date: March 12, 2015
    Applicant: MagnaChip Semiconductor, Ltd.
    Inventors: Sang Geun KOO, Kwan Soo KIM
  • Publication number: 20150047430
    Abstract: An integrated humidity sensor includes at least one measuring capacitor and one humidity-sensitive polymer as a dielectric that is also suited for use in a dirty, i.e., particle-laden measurement environment. The measuring capacitor of the humidity sensor is in the form of a plate capacitor in the layered structure of the sensor element, the outer of two electrodes being located at the surface of the layered structure. Disposed between the two electrodes of the measuring capacitor is a humidity-sensitive polymer layer that is in direct contact with the measurement environment via humidity-permeable paths in the outer electrode of the measuring capacitor. These humidity-permeable paths extend from the surface of sensor element to the polymer layer, and are so small in lateral extent that they do not significantly affect the electrical conductivity within the outer electrode.
    Type: Application
    Filed: October 4, 2012
    Publication date: February 19, 2015
    Inventor: Tim Benzel
  • Patent number: 8925371
    Abstract: A sensor (2) for sensing a first substance and a second substance, the sensor comprising first (3) and second (5) sensor components each comprising a first material (20), the first material being sensitive to both the first substance and the second substance, the sensor further comprising a barrier (18) for preventing the second substance from passing into the second sensor component (5).
    Type: Grant
    Filed: July 16, 2010
    Date of Patent: January 6, 2015
    Assignee: NXP, B.V.
    Inventors: Aurelie Humbert, Youri Victorovitch Ponomarev, Roel Daamen, Matthias Merz
  • Patent number: 8917096
    Abstract: A mechanism is provided for determining an isoelectric point of a molecule. A first group of capacitance versus voltage curves of a capacitor is measured. The capacitor includes a substrate, dielectric layer, and conductive solution. The first group of curves is measured for pH values of the solution without the molecule bound to a functionalized material on the dielectric layer of the capacitor. A second group of capacitance versus voltage curves of the capacitor is measured when the molecule is present in the solution, where the molecule is bound to the functionalized material of the dielectric layer of the capacitor. A shift is determined in the second group of curves from the first group of curves at each pH value. The isoelectric point of the molecule is determined by extrapolating a pH value corresponding to a shift voltage being zero, when the shift is compared to the pH values.
    Type: Grant
    Filed: November 15, 2012
    Date of Patent: December 23, 2014
    Assignee: International Business Machines Corporation
    Inventors: Ali Afzali-Ardakani, Christopher P. D'Emic, Ashish Jagtiani, Sufi Zafar
  • Publication number: 20140366630
    Abstract: A micromechanical moisture sensor device includes: a substrate having a front side and a rear side; an interdigital printed conductor track arrangement provided above and/or below the front side of the substrate; and a moisture-sensitive polymer layer situated above and in the gaps of the interdigital printed conductor track arrangement. The moisture-sensitive polymer layer extends below the front side into the substrate.
    Type: Application
    Filed: June 13, 2014
    Publication date: December 18, 2014
    Applicant: ROBERT BOSCH GMBH
    Inventors: Jochen FRANZ, Uwe SCHILLER
  • Patent number: 8838404
    Abstract: A pressure detector detecting a pressure of cold or hot water; a temperature detector detecting a temperature of a pressure sensor; correcting equation storage storing, cold water correcting equation information applied when the temperature detected by the temperature detector is included in a cold water temperature range, and hot water correcting equation information applied when the temperature detected by the temperature detector is included in a hot water temperature range; a temperature range determiner determining the temperature range that includes the temperature detected by the temperature detector as either a cold water temperature range or a hot water temperature range; and a correction calculating portion using the correcting equation corresponding to the temperature range determined by the temperature range determiner correcting the detection signal by the pressure detector, and outputting the post-correction signal as a measurement signal.
    Type: Grant
    Filed: June 14, 2011
    Date of Patent: September 16, 2014
    Assignee: Azbil Corporation
    Inventor: Tomohisa Sasaki
  • Publication number: 20140216153
    Abstract: A gas sensing device that includes humidity compensation.
    Type: Application
    Filed: January 15, 2014
    Publication date: August 7, 2014
    Inventor: Albert PION
  • Publication number: 20140210897
    Abstract: A circuit includes a capacitive-type humidity sensor. The circuit provides start and stop signals to a processor in accordance with a charge voltage across the sensor. The processor performs a counting function to derive an integer count value in response to the start and stop signals. The processor uses the integer count value to determine parameters for controlling an ink-jetting print engine. Printing speed can be controlled in accordance with ambient humidity and/or temperature so that the printed media are sufficiently dried before handling by a user or other operations.
    Type: Application
    Filed: January 28, 2013
    Publication date: July 31, 2014
    Applicant: Hewlett-Packard Development Company, L.P.
    Inventors: Duane KOEHLER, Algird M. Gudaitis, Mark Westlund
  • Patent number: 8783101
    Abstract: A rapid response relative humidity sensor based on nano-structured aluminum oxide thin film is disclosed. The main body of the sensor is an anodic aluminum oxide thin film of about 2-20 ?m thick formed from an Al substrate which serves as one electrode. A porous metal layer of about 20-200 nm thick is formed over the anodic aluminum oxide thin film and functions as a second electrode. The alumina thin film contains nano-sized channels of about 10-100 nm in diameter, serving as a capacitive relative humidity sensor having high sensitivity and short response time. Thermal annealing at elevated temperature improves the linearity of the capacitance versus humidity curve, giving a full range humidity sensing range. Hysteresis and degradation are negligible for the humidity sensors.
    Type: Grant
    Filed: December 22, 2010
    Date of Patent: July 22, 2014
    Assignee: Nano and Advanced Materials Institute Limited
    Inventors: Chun Zhang, Jianying Miao, Ning Wang
  • Patent number: 8776597
    Abstract: A capacitive type humidity sensor is provided, where a sensor chip substrate, with a sensor section where electrostatic capacitance changes in accordance with humidity, a reference section where electrostatic capacitance does not change, and a plurality of pads which are output terminals of each section, and an IC substrate, which is electrically connected to the pads and which outputs the difference in capacitance between the sections as a voltage, are fixed to the same support substrate, where a protective member, which forms a sealed region surrounding the sensor section and which covers the reference section, is provided on the sensor chip substrate, the support substrate is covered by a sealing resin except for the region which is covered by the protective member, the sensor section is exposed to air at the region which is surrounded by the protective member, and the other constituent elements are covered by the sealing resin.
    Type: Grant
    Filed: September 14, 2011
    Date of Patent: July 15, 2014
    Assignee: Alps Electric Co., Ltd.
    Inventors: Satoshi Waga, Sumihito Morita, Masaru Sakurai, Masaya Yamatani, Hideki Kamimura
  • Patent number: 8739622
    Abstract: A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor.
    Type: Grant
    Filed: June 22, 2009
    Date of Patent: June 3, 2014
    Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
    Inventors: Hubert Grange, Jean-Sébastien Danel, Brigitte Desloges, Vincent Jousseaume
  • Patent number: 8739623
    Abstract: A moisture sensor includes a first electrode (a conductive substrate) having a first sensor portion and a first terminal portion as well as a second electrode having a second sensor portion and a second terminal portion. The moisture sensor also includes a layer of porous dielectric material sandwiched between the first sensor portion and the second sensor portion. Further the moisture sensor includes a layer of dense insulating material sandwiched between the first terminal portion and the second terminal portion. Leads are then connected to the two terminal portions.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: June 3, 2014
    Assignee: The University of Kentucky Research Foundation
    Inventors: Zhi David Chen, Ibrahim Yucedag
  • Patent number: 8707781
    Abstract: A sensor senses a magnitude of a physical parameter of the sensor's environment. The sensor has first and second electrodes, and a material layer between them. The material has an electrical property, e.g., capacitance or resistance, whose value depends on the magnitude of the physical parameter. The first electrode is formed in a first layer, and the second electrode is formed in a second layer, different from the first layer. The first layer has a trench and an elevation next to the trench. The trench has a bottom wall and a side wall. The material is positioned on the bottom wall and on the side wall and on top of the elevation. The trench accommodates at least a part of the second electrode. The second electrode leaves exposed the material formed on top of the elevation.
    Type: Grant
    Filed: September 10, 2009
    Date of Patent: April 29, 2014
    Assignee: NXP, B.V.
    Inventors: Aurelie Humbert, Matthias Merz
  • Publication number: 20140076048
    Abstract: A humidity sensor element includes a dielectric substrate, a nonporous conductive electrode disposed on the dielectric substrate, a permeable conductive electrode having a thickness in a range of from 4 to 10 nanometers and permeable by water vapor, and a detection layer sandwiched between the nonporous conductive electrode and the permeable conductive electrode. The permeable conductive electrode is parallel to the nonporous electrode. Both conductive electrodes have respective conductive leads attached thereto. The detection layer includes a copolymer having monomeric units comprising wherein M represents H, or an alkali metal. A humidity sensor including the humidity sensor element is also disclosed.
    Type: Application
    Filed: May 30, 2012
    Publication date: March 20, 2014
    Inventors: Stefan H. Gryska, Michael C. Palazzotto, Krzysztof A. Lewinski
  • Patent number: 8671741
    Abstract: A moisture content sensing system is described comprising a collar mechanically coupled with a clean grain transport system. An extendable support extends through the collar and has an extendable capacitive sensor element disposed at one end. The extendable support is configured to be located at a first position in which the extendable capacitive sensor element is disposed adjacent to clean grain conveyed by the clean grain transport system and moved to a second position wherein the extendable capacitive sensor element is disposed at least partially within the clean grain of the clean grain transport system.
    Type: Grant
    Filed: June 29, 2011
    Date of Patent: March 18, 2014
    Assignee: Trimble Navigation Limited
    Inventors: Michael Cash, D'Anne Beukelaur Hanks, Arthur F. Lange, Brian Jackman, Brian A. Jackson
  • Publication number: 20140026653
    Abstract: Stacked layers of non-continuous opaque layer structures are disclosed herein that may be configured to block radiation such as visible light or other forms of light, while at the same time allowing penetration of ambient gases. In one example, such non-continuous opaque layer structures may be configured as stacked non-continuous metal layer structures that together fully block penetration of radiation while at the same provide sufficient open spaces between and/or within the metal layer segments of a given integrated circuit layer to meet maximum metal spacing rules. In another example, such non-continuous opaque layer structures may be configured as capacitive structures.
    Type: Application
    Filed: March 14, 2013
    Publication date: January 30, 2014
    Applicant: SILICON LABORATORIES INC.
    Inventors: Bruce P. Del Signore, John O. O'Connell
  • Publication number: 20140026652
    Abstract: A humidity sensor is provided having humidity levels approaching 100% relative humidity can be measured, as well as condensation measurements which appear as RH values “above 100%”. The humidity sensor is a capacitance based sensor. The capacitor(s) of the sensor is dimensioned so that substantial electric fields of the capacitor extend to the sensor/ambient air interface so that the conditions at the ambient side of the interface provide data for the sensor. In particular, the capacitance effects of moisture formation on the ambient side of the sensor/ambient air interface are utilized as part of the measurements so that relative humidity levels below and above 100% can be detected. The capacitor(s) of the sensor is dimensioned so that substantial electric fields of the capacitor extend to the air interface so that the conditions at ambient side of the interface provide data for the sensor.
    Type: Application
    Filed: July 25, 2012
    Publication date: January 30, 2014
    Inventors: Timothy Cummins, John O. O'Connell
  • Patent number: 8621924
    Abstract: A humidity sensing circuit with temperature compensation includes a wave producing module, a phase processing module, a sensing module and a detecting module. The wave producing module outputs a wave signal. The phase processing module outputs an oscillatory wave and an invert oscillatory wave according to the wave signal. The sensing module has a temperature sensor and a humidity sensor which are connected in series. The temperature sensor and the humidity sensor respectively receive the oscillatory wave and the invert oscillatory wave. The sensing module outputs a parameter signal according to the oscillatory wave and the invert oscillatory wave. The detecting module outputs a detection signal according to the parameter signal. Hence, the humidity sensing circuit with temperature compensation senses the temperature and humidity by the simple circuit design. Moreover, it is feasible for circuit design and application.
    Type: Grant
    Filed: December 2, 2010
    Date of Patent: January 7, 2014
    Assignee: Delta Electronics, Inc.
    Inventors: Te-Chung Liu, Yi-Hua Lee
  • Patent number: 8573052
    Abstract: A capacitive humidity sensor, and more particularly, to a capacitive humidity sensor and a manufacturing method thereof capable of increasing reliability of the sensor by forming a dehumidification layer of a polymer material having a large surface area between a lower electrode layer and an upper electrode layer while miniaturizing the humidity sensor by forming a sensor unit on an ROIC substrate.
    Type: Grant
    Filed: November 12, 2009
    Date of Patent: November 5, 2013
    Assignee: Korea Electronics Technology Institute
    Inventors: Sung Min Hong, Kun Nyun Kim, Young Chang Jo, Won Hyo Kim
  • Patent number: 8475740
    Abstract: A liquid dispensing apparatus is provided which makes it possible to correctly and easily detect a dispensing operation judgment failure with high accuracy without particularly using a complicated detection mechanism or means. The liquid dispensing apparatus includes a nozzle which sucks a solution in a cassette and dispenses the sucked solution into another cassette; and a cassette holder which holds the another cassette, and the nozzle is used as a first electrode and the cassette holder as a second electrode. Further, the liquid dispensing apparatus has measurement means for measuring a capacitance between the first and second electrodes during a solution dispensing operation.
    Type: Grant
    Filed: May 14, 2008
    Date of Patent: July 2, 2013
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Atsushi Watanabe, Shigeki Matsubara, Takuya Yamaguchi, Masaaki Odakura
  • Publication number: 20130160518
    Abstract: A device having an integrated circuit that includes a relative humidity sensor as well as a memory element for storing calibration information for the relative humidity sensor. Because of the nature of fabrication of an integrated circuit for a relative humidity sensor, variances in the creation of electronic components therein may lead to a need to calibrate the sensor after assembly. Such calibration information may be ascertained at the time of fabrication and stored in a memory component disposed on the integrated circuit chip. By storing the calibration information, which may be determined at the time of fabrication, one does not need to determine such calibration information later at assembly or store the already determined calibration information in a remote location until assembly if it was, in fact, ascertained at fabrication. Then, at assembly, one needs only to read the calibration information in order to calibrate the relative humidity sensor.
    Type: Application
    Filed: December 22, 2011
    Publication date: June 27, 2013
    Applicant: STMICROELECTRONICS ASIA PACIFIC PTE LTD.
    Inventors: Olivier LENEEL, Ravi SHANKAR
  • Publication number: 20130139587
    Abstract: A capacitive humidity sensor includes a first electrode, a humidity sensitive dielectric layer, and a second electrode. The humidity sensitive dielectric layer is between the first and the second electrodes. The humidity sensitive dielectric layer is etched at selected regions to form hollow regions between the first and second electrodes.
    Type: Application
    Filed: December 2, 2011
    Publication date: June 6, 2013
    Applicants: STMicroelectronics Pte Ltd., STMicroelectronics S.r.I., STMicroelectronics Asia Pacific Pte Ltd.
    Inventors: Olivier Le Neel, Suman Cherian, Ravi Shankar, Boon Nam Poh, Sebastien Marsanne, Michele Vaiana
  • Publication number: 20130098151
    Abstract: The present invention relates to capacitive sensors for measuring humidity and moisture and to an improved process for making the same. The fabrication process for a capacitive sensor having a multi-layer electrodes for measuring humidity and moisture comprising disposing the multi-layer interdigitated electrodes in a multi-layer polyimides; providing a plurality of trenches on the surface of the electrode by lift off process; and covering the sensor with photosensitive negative polyimide.
    Type: Application
    Filed: September 3, 2009
    Publication date: April 25, 2013
    Inventors: Suraya Sulaiman, Agus Santoso Tamsir, Azrif Manut, Dzuzlindah Muhamad Alias, Azlina Mohd Zain
  • Patent number: 8421482
    Abstract: An anti-pinching device (18) for a pivotable actuating element (6) of a motor vehicle (2) is specified. Said device comprises a capacitive sensor (8) which is intended to contactlessly detect an obstacle in the path of the actuating element (6) and has an electrode (14) for generating an external electric field opposite a counterelectrode (16), wherein the electrode (14) extends in a radial direction (R) of the pivoting movement of the actuating element (6), and a control unit (10) which is set up to interpret a change in a measurement capacitance (CM), which is formed between the electrode (14) and the counterelectrode (16), as pinching when the changed measurement capacitance (CM) exceeds a triggering threshold (A) which is predefined on the basis of an opening angle (?) of the pivotable actuating element (6) and to track the triggering threshold (A).
    Type: Grant
    Filed: July 28, 2007
    Date of Patent: April 16, 2013
    Assignee: Brose fahrzeugteile GmbH & Co. Kommanditgesellschaft
    Inventors: Holger Wuerstlein, Thomas Weingaertner, Wolf-Christian Mueller
  • Patent number: 8413505
    Abstract: The present invention provides a temperature and humidity measuring and recording device deployed on substrate for measuring and recording temperature and humidity of the interior of any station for reticles and of any SMIF POD. The temperature and humidity measuring and recording device comprises a substrate with a first surface and a second surface opposite to the first surface on another side of the substrate, a first measurement unit embedded in and fixed to the first surface of the substrate for measuring the temperature and humidity of the surrounding environment, and a second measurement unit embedded in and fixed to the second surface of the substrate for measuring the temperature and humidity of the interior between the substrate and the pellicle film.
    Type: Grant
    Filed: October 28, 2010
    Date of Patent: April 9, 2013
    Assignee: Gudeng Precision Industrial Co, Ltd
    Inventors: Ke-Chih Chien, Ming-Long Chiu, Pao-Yi Lu
  • Patent number: 8381587
    Abstract: A gas sensor, which is extremely compact to be arranged for separated gas piping in semiconductor device manufacturing equipment, a gas measuring system using such gas sensor, and a gas detection module for the gas measuring system. The gas sensor has a gas detection device containing a dielectric semiconductor, the electric conductivity of the gas detection device varying in response to the degree of adsorption of gases to the gas detection device, a capacitive element connected in series to the gas detection device, and a pair of electrodes which are connected to electric terminals of an electric element comprising the gas detection device and the capacitive element, wherein the gas sensor is capable of detecting the degree of adsorption of gases to the gas detection device from an electrical response to a voltage which is applied to the electrodes and which periodically varies and reverses in polarity.
    Type: Grant
    Filed: May 8, 2008
    Date of Patent: February 26, 2013
    Assignee: Ideal Star Inc.
    Inventors: Yasuhiko Kasama, Kenji Omote, Kuniyoshi Yokoo, Yuzo Mizobuchi, Haruna Oizumi, Morihiko Saida, Hiroyuki Sagami, Kazuaki Mizokami, Takeo Furukawa
  • Patent number: 8357958
    Abstract: A single chip wireless sensor comprises a microcontroller connected to a transmit/receive interface, which is coupled to a wireless antenna by an L-C matching circuit. The sensor senses gas or humidity and temperature. The device is an integrated chip manufactured in a single process in which both the electronics and sensor components are manufactured using standard CMOS processing techniques, applied to achieve both electronic and sensing components in an integrated process. A Low-K material with an organic polymer component is spun onto the wafer to form a top layer incorporating also sensing electrodes. This material is cured at 300° C., which is much lower than CVD temperatures. The polyimide when cured becomes thermoset, and the lower mass-to-volume ratio resulting in K, its dielectric constant, reducing to 2.9. The thermoset dielectric, while not regarded as porous in the conventional sense, has sufficient free space volume to admit enough gas or humidity for sensing.
    Type: Grant
    Filed: March 18, 2011
    Date of Patent: January 22, 2013
    Assignee: Silicon Laboratories Inc.
    Inventor: Timothy Cummins
  • Patent number: 8324913
    Abstract: The invention relates to a moisture sensor which comprises a receiving area on its surface for a moisture film, the layer thickness of which is dependent on the relative humidity in the surrounding of the receiving area. The moisture sensor has a signal source which is connected to at least one control electrode at at least one infeed, the electrode abutting the receiving area, for providing a control voltage to the moisture film. The moisture sensor comprises at least one potential sensor which has at least one sensor area, under the receiving area, which is spaced apart from the at least one infeed. The sensor area is electrically insulated from the receiving area by an insulation layer, located between the sensor area and the receiving area, in such a way that an electrical potential can be capacitively detected by means of the potential sensor, the potential being dependent on the layer thickness of the moisture film and the control voltage.
    Type: Grant
    Filed: April 2, 2008
    Date of Patent: December 4, 2012
    Assignee: Micronas GmbH
    Inventors: Mirko Lehmann, Heinz-Peter Frerichs, Ingo Freund
  • Publication number: 20120255354
    Abstract: A humidity measurement device comprises a capacitance measurement unit (101) and a microcontroller (102). The capacitance measurement unit (101) is used to output a frequency signal of a humidity-sensitive capacitor (C1) by the humidity-sensitive capacitor (C1) and a frequency signal of a reference capacitor (C2) by the reference capacitor (C2) respectively. The microcontroller (102) is used to obtain a frequency value of the humidity-sensitive capacitor (C1) and a frequency value of the reference capacitor (C2) based on the frequency signal of the humidity-sensitive capacitor (C1) and the frequency signal of the reference capacitor (C2), and obtain a current ambient humidity value by using a linear function relationship of a frequency difference between the humidity-sensitive capacitor (C1) and the reference capacitor (C2) and a humidity value. A humidity measurement method includes using the said humidity measurement device to measure a current ambient humidity value.
    Type: Application
    Filed: April 26, 2010
    Publication date: October 11, 2012
    Applicant: BEIJING POLYMER SENSING TECHNOLOGY CO., LTD.
    Inventors: Jun Fu, Wei Chang, Lianbo Yu
  • Publication number: 20120247203
    Abstract: A rapid response relative humidity sensor based on nano-structured aluminum oxide thin film is disclosed. The main body of the sensor is an anodic aluminum oxide thin film of about 2-20 ?m thick formed from an Al substrate which serves as one electrode. A porous metal layer of about 20-200 nm thick is formed over the anodic aluminum oxide thin film and functions as a second electrode. The alumina thin film contains nano-sized channels of about 10-100 nm in diameter, serving as a capacitive relative humidity sensor having high sensitivity and short response time. Thermal annealing at elevated temperature improves the linearity of the capacitance versus humidity curve, giving a full range humidity sensing range. Hysteresis and degradation are negligible for the humidity sensors.
    Type: Application
    Filed: December 22, 2010
    Publication date: October 4, 2012
    Applicant: NANO AND ADVANCED MATERIALS INSTITUTE LIMITED
    Inventors: Chun Zhang, Jianying Miao, Ning Wang
  • Patent number: 8256286
    Abstract: This invention relates to a system and method that can quickly and accurately detect and measure ethyl alcohol in the blood of a motorized vehicle driver transdermally and non-invasively within minutes of ethanol consumption and in the presence of interferents. The system includes an array of sensors embedded into the steering mechanism of a motorized vehicle, a data base of patterns produced through empirical testing of various analytes in various combinations and concentrations, neural net based pattern recognition algorithms to ascertain the driver's transdermal alcohol concentration and a database derived from human testing, correlating the driver's transdermal alcohol concentration with the driver's blood alcohol concentration. The detection system is integrated with a motor vehicle decision module which can prevent the operation of a motorized vehicle by a driver whose BAC exceeds a preset limit.
    Type: Grant
    Filed: April 23, 2010
    Date of Patent: September 4, 2012
    Assignee: Sober Steering Sensors, LLC
    Inventors: John Carroll, Catherine Carroll, Dennis Bellehumeur
  • Patent number: 8180575
    Abstract: A process for on-line and in situ counting of cells in a biological culture medium, including a plurality of steps of measuring the capacitance of the medium or a plurality of steps of measuring the conductance of the medium, at distinct frequencies varying within a predetermined range of measurement frequencies. The process includes an extraction of information on the variation of permittivity due to the ?-dispersion in the medium, from the capacitance measurements, and processing of the variation of this information on the variation of permittivity as a function of the frequency, in order to provide information regarding the counting of cells in the medium.
    Type: Grant
    Filed: June 9, 2008
    Date of Patent: May 15, 2012
    Assignee: Nanotec Solution
    Inventors: Geoffrey Esteban, Bruno Luong, Frédéric Ossart
  • Patent number: 8132457
    Abstract: A nano-sensor including a substrate including pores formed thereon and a detecting mechanism for detecting changes in capacitance due to the presence of a substance. A method of measuring humidity by sampling air with the nano-sensor, detecting changes in capacitance, and determining the relative humidity of air. A method of detecting the presence of a substance by taking a sample with the nano-sensor, detecting changes in capacitance, and determining the presence of a substance. A method of making the nano-sensor by forming nano-pores on a substrate, and forming, on the surface of the substrate, a detecting mechanism for detecting changes in capacitance due to the presence of a substance.
    Type: Grant
    Filed: August 11, 2008
    Date of Patent: March 13, 2012
    Assignee: Northern Illinois University
    Inventors: Michael Haji-Sheikh, Anima Bose, Leonard Wardzala
  • Publication number: 20120000285
    Abstract: A capacitive type humidity sensor is provided, where a sensor chip substrate, with a sensor section where electrostatic capacitance changes in accordance with humidity, a reference section where electrostatic capacitance does not change, and a plurality of pads which are output terminals of each section, and an IC substrate, which is electrically connected to the pads and which outputs the difference in capacitance between the sections as a voltage, are fixed to the same support substrate, where a protective member, which forms a sealed region surrounding the sensor section and which covers the reference section, is provided on the sensor chip substrate, the support substrate is covered by a sealing resin except for the region which is covered by the protective member, the sensor section is exposed to air at the region which is surrounded by the protective member, and the other constituent elements are covered by the sealing resin.
    Type: Application
    Filed: September 14, 2011
    Publication date: January 5, 2012
    Inventors: Satoshi Waga, Sumihito Morita, Masaru Sakurai, Masaya Yamatani, Hideki Kamimura
  • Publication number: 20120000284
    Abstract: A humidity sensor package includes: a humidity sensor that is mounted on a main surface of a package substrate and that have a humidity-sensing area; a control IC that is mounted on the main surface of the package substrate; a sealing resin that seals at least an external connection portion of the humidity sensor; and a partition member that partitions a sealing area of the sealing resin and the humidity-sensing area from each other so as to expose the humidity-sensing area to an external environment. Here, a first distance in the thickness direction from the package substrate to the top surface of the partition member is smaller than a second distance in the thickness direction from the package substrate to the top surface of the sealing resin.
    Type: Application
    Filed: June 27, 2011
    Publication date: January 5, 2012
    Inventors: Shinya Yokoyama, Satoshi Waga, Atsushi Tondokoro, Tadashi Sakashita, Hideki Hasegawa, Sumihito Morita, Hideki Kamimura, Masaya Yamatani
  • Publication number: 20110308313
    Abstract: A humidity sensor having a pair of electrodes spaced adjacent each other and defining an air gap therebetween such that the electrodes provide a capacitor with air as dielectric material, and, circuitry for sensing capacitance connected to the electrodes such that changes in permittivity of the air in the air gap caused by changes in humidity, cause changes in capacitance, wherein, the circuitry generates a signal indicative of humidity in the air in response to sensed capacitance of the electrodes.
    Type: Application
    Filed: June 1, 2011
    Publication date: December 22, 2011
    Inventors: Mehdi Azimi, Kia Silverbrook
  • Patent number: 8079256
    Abstract: In a gas sensor with at least two electrodes and with a sensor body which is connected thereto and is composed of a gas-sensitive material, in addition to pores which may already be present, second cavities are provided in the sensor body. The second cavities may be suitable on account of their size to facilitate and accelerate the distribution of gas molecules in the sensor body and to thus improve the time response of the gas sensor.
    Type: Grant
    Filed: February 22, 2006
    Date of Patent: December 20, 2011
    Assignee: Testo AG
    Inventors: Markus Langenbacher, Juergen Hall, Ulrich Demisch, Peer Loebmann
  • Publication number: 20110259099
    Abstract: A capacitive humidity sensor, and more particularly, to a capacitive humidity sensor and a manufacturing method thereof capable of increasing reliability of the sensor by forming a dehumidification layer of a polymer material having a large surface area between a lower electrode layer and an upper electrode layer while miniaturizing the humidity sensor by forming a sensor unit on an ROIC substrate.
    Type: Application
    Filed: November 12, 2009
    Publication date: October 27, 2011
    Inventors: Sung-Min Hong, Kun Nyun Kim, Young Chang Jo, Won Hyo Kim
  • Patent number: 8024970
    Abstract: A humidity sensor having temperature sensing includes a substrate and a RLC (damped resonant) circuit formed in or on the substrate. The RLC circuit comprises a capacitor having a first and a second electrically conductive plate and a moisture sensitive dielectric interposed between the first and second plate. An RL network comprising an inductor and a resistor is coupled to the capacitor and comprises a high relative temperature coefficient of resistance (TCR) portion formed from a first material which is coupled to a low relative TCR portion formed from a second material different from the first material. The RLC circuit can be a series RLC circuit. In another embodiment, the RLC circuit can comprises a parallel RLC circuit.
    Type: Grant
    Filed: June 12, 2008
    Date of Patent: September 27, 2011
    Assignee: Honeywell International Inc.
    Inventor: Wenwei Zhang
  • Publication number: 20110185810
    Abstract: A sensor senses a magnitude of a physical parameter of the sensor's environment. The sensor has first and second electrodes, and a material layer between them. The material has an electrical property, e.g., capacitance or resistance, whose value depends on the magnitude of the physical parameter. The first electrode is formed in a first layer, and the second electrode is formed in a second layer, different from the first layer. The first layer has a trench and an elevation next to the trench. The trench has a bottom wall and a side wall. The material is positioned on the bottom wall and on the side wall and on top of the elevation. The trench accommodates at least a part of the second electrode. The second electrode leaves exposed the material formed on top of the elevation.
    Type: Application
    Filed: September 10, 2009
    Publication date: August 4, 2011
    Applicant: NXP B.V.
    Inventors: Aurelie Humbert, Matthias Merz
  • Publication number: 20110179861
    Abstract: A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor.
    Type: Application
    Filed: June 22, 2009
    Publication date: July 28, 2011
    Applicant: Commissariat A L'Energie Atomique et Aux Ene Alt
    Inventors: Hubert Grange, Jean-Sébastien Danel, Brigitte Desloges, Vincent Jousseaume
  • Patent number: 7971482
    Abstract: A capacitive humidity sensor includes: a humidity sensing element with a humidity sensitive film and electrodes; and a processing circuit. The film has a dielectric constant variable in accordance with moisture. The electrodes detect capacitance of the film and outputs a signal corresponding to the capacitance. The processing circuit processes the signal. The film is made of inorganic material having fine pores for adsorbing the moisture. A diameter of the fine pores is set to be a predetermined diameter so that capillary tube aggregation phenomenon occurs at a predetermined relative humidity. The capacitance of the film has a change rate with respect to the relative humidity. The change rate in case of the relative humidity higher than the predetermined relative humidity is larger than that in case of the relative humidity lower than the predetermined relative humidity.
    Type: Grant
    Filed: April 17, 2008
    Date of Patent: July 5, 2011
    Assignees: Denso Corporation, Nippon Soken, Inc.
    Inventors: Toshiki Isogai, Toshikazu Itakura
  • Publication number: 20110146400
    Abstract: A capacitive sensor for detecting the presence of a substance includes a plurality of upstanding conductive pillars arranged within a first layer of the sensor, a first electrode connected to a first group of the pillars, a second electrode connected to a second, different group of the pillars, and a dielectric material arranged adjacent the pillars, for altering the capacitance of the sensor in response to the presence of said substance.
    Type: Application
    Filed: December 16, 2010
    Publication date: June 23, 2011
    Applicant: NXP B.V.
    Inventors: Aurelie HUMBERT, Matthias MERZ, Youri Victorovitch PONOMAREV, Roel DAAMEN, Marcus Johannes Henricus van DAL
  • Publication number: 20110138908
    Abstract: A humidity sensing circuit with temperature compensation includes a wave producing module, a phase processing module, a sensing module and a detecting module. The wave producing module outputs a wave signal. The phase processing module outputs an oscillatory wave and an invert oscillatory wave according to the wave signal. The sensing module has a temperature sensor and a humidity sensor which are connected in series. The temperature sensor and the humidity sensor respectively receive the oscillatory wave and the invert oscillatory wave. The sensing module outputs a parameter signal according to the oscillatory wave and the invert oscillatory wave. The detecting module outputs a detection signal according to the parameter signal. Hence, the humidity sensing circuit with temperature compensation senses the temperature and humidity by the simple circuit design. Moreover, it is feasible for circuit design and application.
    Type: Application
    Filed: December 2, 2010
    Publication date: June 16, 2011
    Inventors: Te-Chung LIU, Yi-Hua Lee