Resistance Or Conductivity Patents (Class 73/335.05)
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Patent number: 10816498Abstract: A humidity meter includes a humidity sensor, a heating device oriented towards the humidity sensor, a signal generator capable of modulating a power output of the heating device, and a lock-in amplifier capable of demodulating a response signal of the humidity sensor as induced by the modulated heating device. A method of measuring humidity includes the steps of providing a humidity sensor positioned along a channel, a heating device positioned opposite the humidity sensor along the channel, and a controller including a signal generator and a lock-in amplifier; providing an airflow along the channel; modulating a power supply to the heating device using the signal generator; and demodulating a response signal of the humidity sensor induced by the modulated heating device.Type: GrantFiled: May 25, 2018Date of Patent: October 27, 2020Inventor: Raymond Hoheisel
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Patent number: 9841393Abstract: A sensor of volatile substances including: a sensitive layer, of a sensitive material that is permeable to a volatile substance and has an electrical permittivity depending upon a concentration of the volatile substance absorbed; a first electrode structure and a second electrode structure capacitively coupled together and arranged so that a capacitance between the first electrode structure and the second electrode structure is affected by the electrical permittivity of the sensitive material; and a supply device, configured to supply a heating current through one between the first electrode structure and the second electrode structure in a first operating condition, so as to heat the sensitive layer.Type: GrantFiled: January 30, 2015Date of Patent: December 12, 2017Assignee: STMicroelectronics S.r.l.Inventors: Antonello Santangelo, Salvatore Cascino, Roberto Modica, Viviana Cerantonio, Maurizio Moschetti
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Patent number: 9547270Abstract: An image forming apparatus includes a humidity sensor element, a resistor, a clock supply section, a detection section and a determination section. The detection section detects a humidity on the basis of a divided voltage value obtained by the humidity sensor element and the resistor. The determination section acquires the divided voltage value at a first timing within a period from a rising edge to a falling edge of a first clock signal and at a second timing within a period from a falling edge to a rising edge of the first clock signal, and determines, on the basis of the divided voltage values thus acquired, whether or not the humidity detected by the detection section is normal.Type: GrantFiled: March 27, 2014Date of Patent: January 17, 2017Assignee: KYOCERA Document Solutions Inc.Inventor: Shinichi Omoya
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Patent number: 9417202Abstract: Provided is a sensor including an insulating layer, at least two heater patterns separated in one direction in the insulating layer and electrically connected to each other, at least two sensing electrode patterns insulated form the heater patterns, separated in the one direction in the insulating layer, and electrically connected to each other, and a sensing material, at least a part of which is buried in the insulating layer to contact the sensing electrode patterns.Type: GrantFiled: April 4, 2015Date of Patent: August 16, 2016Assignee: INNOCHIPS TECHNOLOGY CO., LTD.Inventors: In Kil Park, Tae Hyung Noh, Sung Cheol Park, Ki Beom Kwon, Seung Hwan Lee, Jun Ho Jung
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Patent number: 9224252Abstract: A method of diagnosing rationality of a humidity sensor output signal determines that the humidity sensor output signal has passed a rationality diagnostic if the output signal is changing sufficiently. If the output signal is not changing sufficiently, the method determines whether it should be changing sufficiently by whether a humidity capacity index determined based on temperature and pressure local to the humidity sensor is changing sufficiently. If the humidity capacity index is changing sufficiently and the humidity sensor output signal is not, the method determines that the humidity sensor output signal has failed a diagnostic check. Upon determining that the humidity sensor output signal has failed the diagnostic check a predetermined number of times, the method determines that the humidity sensor output signal has failed the rationality diagnostic.Type: GrantFiled: July 23, 2014Date of Patent: December 29, 2015Assignee: FCA US LLCInventors: Yichao Guo, Robert Stack
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Patent number: 9086363Abstract: Disclosed is a dewpoint and icing condition detection apparatus that includes a sensor, a signal conditioner and a data acquisition device. The sensor is a carbon nanotube sensor having a resistance that varies in proportion to a change in humidity of a gas flow across the sensor.Type: GrantFiled: September 8, 2009Date of Patent: July 21, 2015Assignee: THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK.Inventor: Vladimir Samuilov
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Publication number: 20150075280Abstract: A water content sensor is disclosed. The sensor includes a wire filament configured with a Péclet number of 1 or less. The wire filament has an electrically conductive material with an electrical resistance that varies as a function of temperature. The sensor includes a pair of electrically conductive prongs coupled to opposite ends of the wire filament. Electrically conductive stubs may be coupled to the prongs. A structural support may be coupled to the prongs. The structural support structure may be comprised of silicon. The wire filament may be coupled to driving circuitry configured to supply an electric current to the wire filament to maintain the wire filament at one of an approximately constant current, an approximately constant voltage and an approximately constant temperature. The wire filament may be platinum or titanium.Type: ApplicationFiled: August 11, 2014Publication date: March 19, 2015Applicant: THE TRUSTEES OF PRINCETON UNIVERSITYInventors: Marcus Hultmark, Gilad Arwatz, Yuyang Fan, Margit Vallikivi
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Publication number: 20150059471Abstract: An apparatus including a first sensor including a sensing material that is sensitive to a first parameter and a second parameter, wherein sensitivity to the first parameter changes sensitivity to the second parameter. The sensitivity of the first sensor to one of the first and the second parameters may be controlled by maintaining, as a constant, the other of the first and the second parameters. The apparatus may include a second sensor sensitive to at least one of the first parameter and the second parameter. The first parameter may be deformation and the second parameter may be a concentration of a gaseous analyte such as, for example, humidity. The second sensor may include the sensing material that is sensitive to the first parameter and the second parameter.Type: ApplicationFiled: August 28, 2014Publication date: March 5, 2015Inventors: Samiul HAQUE, Stefano Marco Borini, Richard White
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Publication number: 20140366630Abstract: A micromechanical moisture sensor device includes: a substrate having a front side and a rear side; an interdigital printed conductor track arrangement provided above and/or below the front side of the substrate; and a moisture-sensitive polymer layer situated above and in the gaps of the interdigital printed conductor track arrangement. The moisture-sensitive polymer layer extends below the front side into the substrate.Type: ApplicationFiled: June 13, 2014Publication date: December 18, 2014Applicant: ROBERT BOSCH GMBHInventors: Jochen FRANZ, Uwe SCHILLER
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Publication number: 20140298904Abstract: Disclosed is a humidity sensor including: a conductive material in which electric charges are charged; a charger which charges the electric charges in the conductive material; and a measurer which measures a change amount of the electric charges charged in the conductive material.Type: ApplicationFiled: February 15, 2012Publication date: October 9, 2014Inventors: Jun Bo Yoon, Hyun Ho Yang, Seok Ho Song
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Publication number: 20140283597Abstract: To detect humidity, used are a first series connection circuit connecting a thermistor and a fixed resistor via a node, a second series connection circuit connecting a resistance change type humidity sensor and the thermistor via the node, and a third series connection circuit connecting the humidity sensor and the fixed resistor via the node. A predetermined voltage is applied across the first circuit to detect a first voltage indicating temperature through the node, and secondly across the second circuit to detect a second voltage indicating a first humidity through the node, and finally across the third circuit to detect a third voltage indicating a second humidity through the node. Then, the first voltage is compared with a reference voltage and judgment is made, based on a comparison result, to determine which of the second voltage and the third voltage is relevant to use as a basis for outputting the humidity as detected.Type: ApplicationFiled: March 25, 2014Publication date: September 25, 2014Applicant: BROTHER KOGYO KABUSHIKI KAISHAInventors: Jie Zheng, Ryo Ito, Kenji Kanazawa, Osamu Takahashi
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Publication number: 20140216153Abstract: A gas sensing device that includes humidity compensation.Type: ApplicationFiled: January 15, 2014Publication date: August 7, 2014Inventor: Albert PION
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Patent number: 8783101Abstract: A rapid response relative humidity sensor based on nano-structured aluminum oxide thin film is disclosed. The main body of the sensor is an anodic aluminum oxide thin film of about 2-20 ?m thick formed from an Al substrate which serves as one electrode. A porous metal layer of about 20-200 nm thick is formed over the anodic aluminum oxide thin film and functions as a second electrode. The alumina thin film contains nano-sized channels of about 10-100 nm in diameter, serving as a capacitive relative humidity sensor having high sensitivity and short response time. Thermal annealing at elevated temperature improves the linearity of the capacitance versus humidity curve, giving a full range humidity sensing range. Hysteresis and degradation are negligible for the humidity sensors.Type: GrantFiled: December 22, 2010Date of Patent: July 22, 2014Assignee: Nano and Advanced Materials Institute LimitedInventors: Chun Zhang, Jianying Miao, Ning Wang
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Publication number: 20140182372Abstract: A water vapour sensor comprises a substrate and a film of carbon nanotubes impregnated with surfactant on the substrate. The substrate is of material which is inert relative to the film. Two or more electrical conductors are in contact with in spaced apart zones of the film, whereby the impedance of the film may be measured. The sensor is housed in housing which protects the sensor but also allows exposure of the film to water vapour.Type: ApplicationFiled: September 19, 2011Publication date: July 3, 2014Inventors: Graeme Scott, Richard Coull, Vittorio Scardaci
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Patent number: 8673649Abstract: A wireless chemical sensor includes an electrical conductor and a material separated therefrom by an electric insulator. The electrical conductor is an unconnected open-circuit shaped for storage of an electric field and a magnetic field. In the presence of a time-varying magnetic field, the first electrical conductor resonates to generate harmonic electric and magnetic field responses. The material is positioned at a location lying within at least one of the electric and magnetic field responses so-generated. The material changes in electrical conductivity in the presence of a chemical-of-interest.Type: GrantFiled: May 11, 2009Date of Patent: March 18, 2014Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventors: Stanley E. Woodard, Donald M. Oglesby, Bryant Douglas Taylor
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Patent number: 8519446Abstract: A gas sensor for sensing chemical gases utilizes a metal oxynitride as the sensing material, which changes its conductivity when exposed to the analyte gas. The change in conductivity is measured for the sensor output. The metal may be either tungsten or molybdenum.Type: GrantFiled: December 12, 2008Date of Patent: August 27, 2013Assignee: Applied Nanotech Holdings, Inc.Inventors: Ronald I. Dass, James Novak
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Publication number: 20130133420Abstract: The present invention provides a humidity sensor including a first conductor, a second conductor, a power supply unit, and a current sensing unit. The first and the second conductors are separated from each other for a predetermined distance and are placed at a predetermined place. The power supply unit supplies high voltage to the first conductor, and the current sensing unit senses a change of current in the conductor and generate a signal in association with the change of the current. Therefore, the humidity sensor may operate in any environment, such as high temperature and high pressure.Type: ApplicationFiled: November 30, 2011Publication date: May 30, 2013Applicant: GRAND MATE CO., LTD.Inventors: CHUNG-CHIN HUANG, Chin-Ying Huang, Hsin-Ming Huang, Hsing-Hsiung Huang
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Patent number: 8448511Abstract: A system for improving operation of an engine having a particulate matter sensor is presented. The system may be used to improve engine operation during cold starts especially under conditions where water vapor or entrained water droplets are present in vehicle exhaust gases. In one embodiment, particulate sensor degradation is indicated in response to an output of said particulate matter sensor staying below a threshold as engine temperature increases past the dewpoint temperature.Type: GrantFiled: December 21, 2009Date of Patent: May 28, 2013Assignee: Ford Global Technologies, LLCInventors: Garry Anthony Zawacki, Robert F. Novak, Roberto Teran, Jr., Dave Charles Weber, Michiel J. Van Nieuwstadt, Michael Hopka, William Charles Ruona
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Patent number: 8413505Abstract: The present invention provides a temperature and humidity measuring and recording device deployed on substrate for measuring and recording temperature and humidity of the interior of any station for reticles and of any SMIF POD. The temperature and humidity measuring and recording device comprises a substrate with a first surface and a second surface opposite to the first surface on another side of the substrate, a first measurement unit embedded in and fixed to the first surface of the substrate for measuring the temperature and humidity of the surrounding environment, and a second measurement unit embedded in and fixed to the second surface of the substrate for measuring the temperature and humidity of the interior between the substrate and the pellicle film.Type: GrantFiled: October 28, 2010Date of Patent: April 9, 2013Assignee: Gudeng Precision Industrial Co, LtdInventors: Ke-Chih Chien, Ming-Long Chiu, Pao-Yi Lu
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Patent number: 8394330Abstract: The present invention provides a class of sensors prepared from regions of conducting organic materials and conducting materials that show an increase sensitivity detection limit for amines. The present class of sensors have applications in the detection of spoiled food products and in testing for diseases, such as cholera and lung cancer, which have amines as biomarkers.Type: GrantFiled: October 1, 1999Date of Patent: March 12, 2013Assignee: The California Institute of TechnologyInventors: Nathan S. Lewis, Carol Lewis, Robert Grubbs, Gregory Allen Sotzing
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Patent number: 8359919Abstract: Provided is a high-precision, mechanically robust thermal humidity sensor. A detecting element 1 of the thermal humidity sensor of the present invention has a diaphragm (a bridge structure) 2 formed on a planar substrate which is formed from a material with high thermal conductivity such as silicon or ceramic. Formed on the diaphragm 2 are temperature detecting resistors 4, 5, 6, and 7 and a heating resistor 3 arranged in a manner surrounding the temperature detecting resistors. Humidity is detected based on the outputs of the temperature detecting resistors 4, 5, 6, and 7. Accordingly, humidity measurement errors that can possibly occur due to the leakage of heat through the diaphragm 2 to the planar substrate can be reduced.Type: GrantFiled: August 12, 2010Date of Patent: January 29, 2013Assignee: Hitachi Automotive Systems, Ltd.Inventors: Masahiro Matsumoto, Hiroshi Nakano, Keiji Hanzawa, Masamichi Yamada
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Publication number: 20120272728Abstract: A hydrogen sensor comprising: a substrate, a detection film which is formed on the substrate and is composed of a rare earth metal, a protection film which is formed on the detection film and is a dispersion of hydrogen-permeable metal particles in a ceramic material, and a pair of electrodes which is formed apart on the protection film and are electrically connected with the detection film via the protection film. The hydrogen-permeable metal particles are Pd, Pt, Nb, V and Ta and the preferable content thereof is 20 to 70% by mass. It is preferred that the resistance of the protection film between the electrodes is 10 to 100,000 ? and that the resistance of the detection film in the interelectrode direction is smaller than the resistance of the protection film in the interelectrode direction.Type: ApplicationFiled: September 18, 2007Publication date: November 1, 2012Applicant: Mikuni CorporationInventors: Katsuhiko Fukui, Toshinori Hirayama
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Publication number: 20120260732Abstract: A sensor (2) for sensing a first substance and a second substance, the sensor comprising first (3) and second (5) sensor components each comprising a first material (20), the first material being sensitive to both the first substance and the second substance, the sensor further comprising a barrier (18) for preventing the second substance from passing into the second sensor component (5).Type: ApplicationFiled: July 16, 2010Publication date: October 18, 2012Applicant: NXP B.V.Inventors: Aurelie Humbert, Youri Victorovitch Ponomarev, Roel Daamen, Matthias Merz
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Publication number: 20120155504Abstract: A method for improved handling of a blended fuel includes obtaining a sample of the blended fuel from a storage tank; cooling the same until the sample separates into phases; and determining a risk that the fuel in the storage tank will separate based on the cooling step. An apparatus for assessing the risk of phase separation of a blended fuel includes a test cavity for holding a sample of the blended fuel from a storage tank; a heat transfer device for cooling the sample in the test cavity; and at least one sensor for indicating when the sample in the test cavity has separated into phases.Type: ApplicationFiled: September 27, 2011Publication date: June 21, 2012Applicant: DELAWARE CAPITAL FORMATION, INC.Inventors: Ian F. Jarvie, Przemyslaw Olaf Iwaszczyszyn
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Publication number: 20110296912Abstract: Disclosed is an integrated circuit comprising an electrode arrangement for detecting the presence of a liquid, said electrode arrangement comprising a first electrode and a second electrode, wherein, prior to exposure of the electrode arrangement to said liquid, a surface of at least one of the first electrode and second electrode is at least partially covered by a compound that is soluble in the liquid; the electrical properties of the electrode arrangement being dependent on the amount of the compound covering said surface. An package and electronic device comprising such an IC and a method of manufacturing such an IC are also disclosed.Type: ApplicationFiled: December 7, 2010Publication date: December 8, 2011Applicant: NXP B.V.Inventors: Matthias Merz, Roel Daamen, Aurelie Humbert, Youri Victorovitch Ponomarev
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Patent number: 8047074Abstract: Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.Type: GrantFiled: November 12, 2009Date of Patent: November 1, 2011Assignee: Electronics and Telecommunications Research InstituteInventors: Chi Hoon Jun, Sang Choon Ko, Chang Auck Choi, Byoung Gon Yu
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Patent number: 7927010Abstract: Disposable, pre-sterilized, and pre-calibrated, pre-validated conductivity sensors are provided. These sensors are designed to store sensor-specific information, such as calibration and production information, in a non-volatile memory chip on the sensor. The sensors are calibrated using 0.100 molar potassium chloride (KCl) solutions at 25 degrees Celsius. These sensors may be utilize with in-line systems, closed fluid circuits, bioprocessing systems, or systems which require an aseptic environment while avoiding or reducing cleaning procedures and quality assurance variances.Type: GrantFiled: July 20, 2007Date of Patent: April 19, 2011Assignee: SenCal, LLCInventors: Karl G. Schick, David Uhen
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Publication number: 20110072899Abstract: The invention relates to a sensor (100) for determining humidity, the sensor comprising a system (10) of layers arranged superpositioned on each other. For rendering a sensor (10) available which allows of the measuring of integral variables necessary for determining the humidity, the invention proposes that the system (10) comprises a diffusion barrier (11) in the form of a water-permeable layer and a storage layer in the form of a water-absorbing and irreversibly water-binding layer, where the diffusion barrier (11) and the storage layer (12) are in direct contact with each other and the diffusion barrier (11) has a temperature-dependent permeability (16).Type: ApplicationFiled: May 27, 2009Publication date: March 31, 2011Applicant: NXP. B.V.Inventors: Martin Hoffmann, Mike Schneider
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Publication number: 20110048127Abstract: Provided is a high-precision, mechanically robust thermal humidity sensor. A detecting element 1 of the thermal humidity sensor of the present invention has a diaphragm (a bridge structure) 2 formed on a planar substrate which is formed from a material with high thermal conductivity such as silicon or ceramic. Formed on the diaphragm 2 are temperature detecting resistors 4, 5, 6, and 7 and a heating resistor 3 arranged in a manner surrounding the temperature detecting resistors. Humidity is detected based on the outputs of the temperature detecting resistors 4, 5, 6, and 7. Accordingly, humidity measurement errors that can possibly occur due to the leakage of heat through the diaphragm 2 to the planar substrate can be reduced.Type: ApplicationFiled: August 12, 2010Publication date: March 3, 2011Applicant: Hitachi Automotive Systems, Ltd.Inventors: Masahiro MATSUMOTO, Hiroshi Nakano, Keiji Hanzawa, Masamichi Yamada
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Patent number: 7899346Abstract: The humidity detecting device includes a detection unit and a controller. The detection unit includes a humidity sensor for producing a humidity detection signal by detecting a humidity, a temperature sensor for producing a temperature detection signal by detecting a temperature surrounding the humidity sensor, and a common power supply line connected to the humidity sensor and the temperature sensor. The controller includes an application circuit for applying a power supply voltage to the humidity sensor and the temperature sensor through the common power supply line, a read circuit for producing a read-out humidity value corresponding to the humidity detection signal and a read-out temperature value corresponding to the temperature detection signal, and a correction circuit for correcting the read-out humidity value based on the read-out temperature value.Type: GrantFiled: January 28, 2009Date of Patent: March 1, 2011Assignee: Brother Kogyo Kabushiki KaishaInventors: Isao Kubo, Kenichi Dan
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Publication number: 20100253733Abstract: A signal processing device is provided including: an alternating voltage generation section that generates a square shaped alternating voltage from plural direct voltages, and applies the square shaped alternating voltage to a sensor that is either a temperature detection sensor or a humidity detection sensor; a current-voltage conversion section that converts current of an output signal output from the sensor to an analog voltage; a selector section that selects a range of the current convertible by the current-voltage conversion section from one or other of plural current ranges; and a resistance value computation section that computes the resistance value of the sensor, based on the voltage value of the analog voltage converted by the current-voltage conversion section, the range of current convertible by the current-voltage conversion section, and the voltage value of the voltage generated by the alternating voltage generation section.Type: ApplicationFiled: March 29, 2010Publication date: October 7, 2010Applicant: FUJIFILM CORPORATIONInventor: Yoshinori KATO
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Patent number: 7803632Abstract: A method for detecting a substance in a liquid with high accuracy and high sensitivity includes recording frequency drifts of output frequencies of oscillator circuit outputs of m sensing oscillator circuits respectively including sensing SAW elements and frequency drifts of output frequencies of oscillator circuit outputs of n reference oscillator circuits respectively including reference SAW elements; determining at least one of the sensing oscillator circuits whose frequency drifts fall within a predetermined range and at least one of the reference oscillator circuits whose frequency drifts fall within the predetermined range to be acceptable; selecting at least one of the sensing oscillator circuits from among the acceptable sensing oscillator circuits and at least one of the reference oscillator circuits from among the acceptable reference oscillator circuits; and comparing an oscillator circuit output of the selected at least one of sensing oscillator circuits with an oscillator circuit output of the seType: GrantFiled: November 19, 2008Date of Patent: September 28, 2010Assignee: Murata Manufacturing Co., LtdInventors: Kenjiro Okaguchi, Michio Kadota
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Patent number: 7788047Abstract: Disposable, pre-sterilized, and pre-calibrated, pre-validated conductivity sensors are provided. These sensors are designed to store sensor-specific information, such as calibration and production information, in a non-volatile memory chip on the sensor on in a barcode printed on the sensor. The sensors are calibrated using 0.100 molar potassium chloride (KCl) solutions at 25 degrees Celsius. These sensors may be utilize with in-line systems, closed fluid circuits, bioprocessing systems, or systems which require an aseptic environment while avoiding or reducing cleaning procedures and quality assurance variances.Type: GrantFiled: April 27, 2007Date of Patent: August 31, 2010Assignee: SenCal LLCInventors: Karl G. Schick, David Uhen
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Patent number: 7770449Abstract: A resistive-type humidity sensing structure with microbridge includes a substrate, a sensing portion, and two measuring electrodes. An isolated layer and a bridge are respectively formed on the substrate. The sensing portion includes a resistive and humidity sensing layer. Two measuring electrodes are formed on the resistive sensing layer corresponding to the bridge, so as to fix the sensing portion on the first isolated layer for measuring resistance values of the resistive sensing layer. The material of the humidity sensing layer changes its volume according to humidity, the length of the resistive sensing layer covered by the humidity sensing layer is warped, and the changes of the length of the material for the resistive sensing layer causes variations of the resistance value. Finally, two measuring electrodes are used to measure the humidity value.Type: GrantFiled: June 12, 2007Date of Patent: August 10, 2010Assignee: Industrial Technology Research InstituteInventors: Jung-Tai Chen, Chia-Yen Lee, Yii-Tay Chiou, Chun-Hsun Chu
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Patent number: 7765807Abstract: The invention relates to a method for heating a steam turbine comprising a high-pressure turbine section and a medium-pressure turbine section and/or a low-pressure turbine section. Said method is characterized by the essential aspect that the high-pressure turbine section is impinged upon by steam having relatively great conductivity while the medium-pressure turbine section or the low-pressure turbine section remains closed during said impingement following a cold start. As soon as the conductivity drops below a certain value, the medium-pressure turbine section or the low-pressure turbine section is also impinged upon by steam.Type: GrantFiled: September 27, 2006Date of Patent: August 3, 2010Assignee: Siemens AktiengesellschaftInventors: Henri Diesterbeck, Edwin Gobrecht, Karsten Peters, Rainer Quinkertz
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Patent number: 7741950Abstract: The invention relates to a humidity sensor comprising a sensor element, a molding, which preferably consists of a thermoplastic material or a two-component polyurethane, epoxy or silicone casting and which is adapted to adhere to the sensor element, a dead-space volume, which is arranged in connection with the sensor element and which is covered by a membrane. The membrane is attached to an external surface of the molding and is adapted to protect the sensor element from exposure to ambient moisture and dirt and allowing diffusion of ambient air gas molecules, like water vapor, into the dead-space volume. The dead-space volume is less than 100 mm3.Type: GrantFiled: October 17, 2005Date of Patent: June 22, 2010Assignee: Senmatic A/SInventor: Kristian Ehrhorn
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Publication number: 20100147070Abstract: Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.Type: ApplicationFiled: November 12, 2009Publication date: June 17, 2010Applicant: Electronics and Telecommunications Research InstituteInventors: Chi Hoon JUN, Sang Choon Ko, Chang Auck Choi, Byoung Gon Yu
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Patent number: 7737700Abstract: Detecting air ingredients is obtained, a heater and gas sensitive acting layers are arranged on a substrate, which are connectable to an analyzing unit. Electrical resistances of n acting layers are connected in series; heater is a temperature sensor connected in parallel with this series connection, electrical resistance of heater is smaller than the sum of electrical resistances of acting layers and resistances are connected with a total of n+1 electrical terminals via electrodes so that heater is connected with two terminals and n?1 other terminals are connected with a respective junction that interconnects two acting layers. Heater is intermittently heated so that a predefined constant temperature of acting layers is achieved, temperature of acting layers is acquired by determining electrical resistance of heater; voltages in the series connection of acting layers are analyzed and a concentration of gases are determined from electrical resistances of acting layers.Type: GrantFiled: November 23, 2005Date of Patent: June 15, 2010Assignee: UST Umweltsensortechnik GmbHInventors: Olaf Kiesewetter, Anatolij Ewert, Volkmar Melchert, Sven Kittelmann
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Publication number: 20100071460Abstract: Humidity or a gas concentration or a solvent concentration in at least one gas is detected by a field effect transistor-based gas sensor whose sensor signal is generated by the change in the work function on a sensitive film. Detection is to be provided in a simple, effective and inexpensive manner. An additional change in potential is impressed at a gate of the field effect transistor and a variable of the resulting change in the sensor signal relative to the additional change in potential is evaluated. For example, each variable, which is e.g. a ratio, can be assigned a relative humidity, a gas concentration, or a solvent concentration. Sensitive films having at least one polymer are particularly advantageous.Type: ApplicationFiled: September 24, 2009Publication date: March 25, 2010Applicant: Siemens AktiengesellschaftInventors: Maximilian Fleischer, Roland Pohle, Oliver von Sicard
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Patent number: 7642576Abstract: A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the torsion springs, and electrical signal cables connected to the four resistors, wherein at least one of the torsion springs is formed in a <100> direction on an n-type silicon substrate having a (100) plane, and the resistors formed on the at least one of the torsion springs are formed in a <110> group direction.Type: GrantFiled: September 20, 2007Date of Patent: January 5, 2010Assignee: Samsung Electro-Mechanics Co., LtdInventors: Young-chul Ko, Jin-woo Cho, U-hyuk Choi, Seong-ho Shin
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Patent number: 7597001Abstract: A humidity measuring apparatus including: a humidity detecting element whose resistance value changes according to a humidity change; a resistor serially connected to the humidity detecting element; a signal output unit which outputs a clock signal to the humidity detecting element and the resistor; and a measuring unit which detects a voltage of a connecting point of the humidity detecting element and the resistor at predetermined timing from an edge of the clock signal and obtains a humidity based on the detected voltage, wherein an abnormality of the humidity detecting element is detected by detecting the voltage at timing different from the predetermined timing based on the voltage detected by the measuring unit.Type: GrantFiled: February 6, 2007Date of Patent: October 6, 2009Assignee: Canon Kabushiki KaishaInventor: Masahiro Hayakawa
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Patent number: 7594435Abstract: Provided is a humidity sensor whose electrode is set to have an island-like configuration and is enclosed by a humidity sensitive film. As a result, in the humidity sensor, adhesion property between the humidity sensitive films on the electrode is enhanced and thus high reliability is achieved.Type: GrantFiled: January 17, 2007Date of Patent: September 29, 2009Assignee: Seiko Instruments Inc.Inventor: Minoru Sudo
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Publication number: 20090190942Abstract: The humidity detecting device includes a detection unit and a controller. The detection unit includes a humidity sensor for producing a humidity detection signal by detecting a humidity, a temperature sensor for producing a temperature detection signal by detecting a temperature surrounding the humidity sensor, and a common power supply line connected to the humidity sensor and the temperature sensor. The controller includes an application circuit for applying a power supply voltage to the humidity sensor and the temperature sensor through the common power supply line, a read circuit for producing a read-out humidity value corresponding to the humidity detection signal and a read-out temperature value corresponding to the temperature detection signal, and a correction circuit for correcting the read-out humidity value based on the read-out temperature value.Type: ApplicationFiled: January 28, 2009Publication date: July 30, 2009Applicant: Brother Kogyo Kabushiki KaishaInventors: Isao KUBO, Kenichi DAN
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Publication number: 20090188316Abstract: A resistive hydrogen sensor has at least two electrical connections and at least one resistance layer containing at least one suitable material for incorporating hydrogen, via which the electrical connections are connected to each other. The resistance layer adjoins at least one interface on a contact layer, which contains at least one chemical element from the fourth subgroup of the periodic table and/or carbon. The contact layer connected in series between the electrical connections to the resistance layer.Type: ApplicationFiled: January 27, 2009Publication date: July 30, 2009Applicant: Micronas GmbHInventors: Gilbert Erdler, Holger Reinecke, Claas Muller, Mirko Frank
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Patent number: 7556775Abstract: A microelectro-mechanical chemical sensor includes an active cantilever beam having a chemically selective material layer disposed thereon and at least one, preferably two, resistors with the resistance corresponding to the cantilever beam deflection. The sensor also has at least two, and preferably four, auxiliary cantilever beams adjacent to the active cantilever and attached to the same substrate, each having a piezoresistor disposed thereon. The piezoresistors are elements of a Wheatstone bridge, and the Wheatstone bridge output indicates the amount of a predetermined target chemical sorbed by the chemically selective material layer. The sensor is electrostatically actuated in order to monitor the resonant frequency.Type: GrantFiled: May 25, 2005Date of Patent: July 7, 2009Assignee: The United States of America as represented by the Secretary of the NavyInventors: Robert Andrew McGill, Ioana Voiculescu, Gary K. Fedder
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Humidity sensor capable of self-regulating temperature compensation and manufacturing method thereof
Patent number: 7552635Abstract: A humidity sensor capable of self-regulating temperature compensation and a manufacturing method thereof overcomes the inaccuracy caused by the resistor value of a conventional humidity-sensitive element changing depending due to changes in the temperature. The present invention proposes disposing two different humidity-sensitive elements in a humidity-sensitive substrate, wherein one humidity-sensitive element includes a saturated salt solution. The humidity-sensitive substrate has two different humidity-sensitive elements for achieving a self-regulating temperature compensation feature. The present invention of the humidity-sensitive element having the saturated salt solution can maintain the amount of humidity in the air regardless of the temperature.Type: GrantFiled: June 22, 2007Date of Patent: June 30, 2009Assignee: Fego Precision Industrial Co., Ltd.Inventors: Chin-Hsiung Chang, Yu-Kai Chen -
Patent number: 7550979Abstract: A system and related method are provided to calibrate for wire capacitance during use to minimize error in conductivity measurement of the target fluid. The system includes a signal generator configured to drive the conductivity cell and the temperature element, with an alternating current (AC) drive signal having variable parameter. The system further includes a processor assembly electrically coupled to the conductivity cell and the temperature element to calculate a conductivity value of the fluid. The conductivity value is a function of the values of the temperature measurement, the compensation measurement, and the raw conductivity measurement, thereby compensating the conductivity value for capacitance effects. In this manner, the system effectively compensates for capacitance attributable to wiring extending between the electrode and other electronics of the sensor, usable with wiring of varied and unknown lengths.Type: GrantFiled: May 29, 2007Date of Patent: June 23, 2009Assignee: Georg Fischer Signet LLCInventors: Qinming Zhou, Gert Burkhardt
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Publication number: 20090145220Abstract: In a gas sensor with at least two electrodes and with a sensor body which is connected thereto and is composed of a gas-sensitive material, in addition to pores which may already be present, second cavities are provided in the sensor body The second cavities may be suitable on account of their size to facilitate and accelerate the distribution of gas molecules in the sensor body and to thus improve the time response of the gas sensor.Type: ApplicationFiled: February 22, 2006Publication date: June 11, 2009Inventors: Markus Langenbacher, Juergen Hall, Ulrich Demisch, Peer Loebmann
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Patent number: 7523643Abstract: A humidity sensing structure having a cantilever resistor and a method for fabricating the same are disclosed. The method includes providing a substrate having a first surface and a second surface; performing an oxidation process on the first surface and the second surface to form a first oxide layer and a second oxide layer respectively; forming a resistance sensing layer on the first oxide layer; forming a humidity sensing layer on the resistance sensing layer; forming in the substrate a through-hole penetrating the first oxide layer and the second oxide layer; and forming a cantilever in the through-hole such that both the humidity sensing layer and the resistance sensing layer are secured in position on the cantilever. In response to humidity changes, the humidity sensing layer varies in volume and in consequence the resistance sensing layer varies in length, allowing ambient humidity to be measured.Type: GrantFiled: December 29, 2006Date of Patent: April 28, 2009Assignee: Industrial Technology Research InstituteInventors: Jung-Tai Chen, Chia-Yen Lee, Yii-Tay Chiou, Chun-Hsun Chu
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Publication number: 20080258743Abstract: A sensor arrangement is provided for attachment to an inside of a windshield in a motor vehicle, including at least a sensor element that determines the relative humidity and a printed circuit board that electrically contacts the sensor element, wherein the sensor element is attached to the printed circuit board in the direction of the windshield, and a compensating film that accommodates the curvature of the window is present at least between the sensor element and the windshield, and the compensating film is an adhesive film.Type: ApplicationFiled: January 22, 2008Publication date: October 23, 2008Inventors: Hans-Michael Schmitt, Thomas Polzer, Andrej Afanasjevas