Dimension, Shape, Or Size Patents (Class 73/37.5)
  • Patent number: 10883907
    Abstract: A multiaxial fatigue machine comprising a rotational mechanism; a driven shaft arranged collinearly with a first power shaft of the rotational mechanism and a reciprocating mechanism. The rotational mechanism has a first motor and a first fastening element configured to be connected to a test element that can be also connected to a second fastening element of the driven shaft to transmit to said test element a rotational force produced by the first motor. The reciprocating mechanism has a second power shaft, a second motor, and a linear rotational transmission, wherein the reciprocating mechanism is configured to apply an alternating force on the test element.
    Type: Grant
    Filed: December 14, 2017
    Date of Patent: January 5, 2021
    Assignee: Universidad Industrial de Santander
    Inventor: Alberto David Pertuz Comas
  • Patent number: 10775162
    Abstract: A pneumatic plug gauge has been developed in the context of the invention. This plug gauge comprises a first measuring channel which can be connected to a pressure medium source and opens into a first outlet for the pressure medium, which outlet can be directed to a surface of the workpiece to be tested. According to the invention, this plug gauge is designed to determine the tilt angle between a section on the surface thereof and a region opposite this section on the surface of the workpiece by virtue of the first outlet being arranged at one end of the section and at least one second outlet being provided, which second outlet is arranged at the other end of the section. It has been recognized that the admittedly high precision of pneumatic length measurements can be converted in a particularly advantageous manner to high precision of the angle measurement in this manner. The tilt angle can be measured at least with an accuracy of less than one tenth of a degree.
    Type: Grant
    Filed: October 27, 2015
    Date of Patent: September 15, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Andreas Schruefer, Christoph Schmidtlein, Herbert Beck, Johannes Weickmann
  • Patent number: 10414243
    Abstract: The disclosed embodiments include a vehicular ventilation module having control circuitry, a return air duct, a fresh air duct, a heat exchanger, and a door joining an upstream portion of the return air duct upstream of the heat exchanger and an upstream portion of the fresh air duct upstream of the heat exchanger. The fresh air duct has an air inlet and an air outlet downstream of the air inlet. The heat exchanger is thermally coupled to the return air duct upstream of the return air outlet and to the fresh air duct downstream of the return air inlet. The door selectively opens to enable air to pass between the fresh air duct and the return air duct. The control circuitry is configured to operate in a first mode of operation, including having the door open. The return air outlet is configured to provide air to the HVAC system.
    Type: Grant
    Filed: October 23, 2017
    Date of Patent: September 17, 2019
    Assignee: BERGSTROM, INC.
    Inventor: Brett Sean Connell
  • Patent number: 10352796
    Abstract: Systems and methods are provided for preventing foreign objects from entering a nozzle of a pressure sensor. Example pressure sensor assemblies include a housing for a pressure sensor, a nozzle coupled to the housing and configured to permit airflow into the housing, and a nozzle cover including a plurality of surface openings configured to permit airflow into the nozzle. Other example assemblies include a shield enclosing a nozzle of the pressure sensor, the shield including a plurality of surface openings to permit airflow into the nozzle, and an attachment mechanism configured to couple the shield to an open end of the nozzle.
    Type: Grant
    Filed: July 28, 2014
    Date of Patent: July 16, 2019
    Inventors: Mahmoud Yousef Ghannam, Jayagopal Appukutty, Kam Hage, Abraham G. Philip, Paul Kevin Kula
  • Patent number: 9529282
    Abstract: Apparatus are disclosed for measuring the position of an object surface along an axis. An exemplary apparatus has at least one actuator coupled to a fixed member such as a metrology frame. At least one analog proximity sensor is coupled to the at least one actuator. The at least one actuator is controllably operated to position the at least one proximity sensor at a fixed distance along the axis from a surface that is fixed relative to the fixed me+mber. A controller, coupled to the actuator and to the proximity sensor, is configured to compute a position of the object surface along the axis based on a known location of the fixed surface along the axis, the fixed distance from the fixed surface, and position signals from the at least one proximity sensor.
    Type: Grant
    Filed: April 24, 2014
    Date of Patent: December 27, 2016
    Assignee: Nikon Corporation
    Inventors: Michael R. Sogard, Motofusa Ishikawa
  • Patent number: 9404779
    Abstract: A position detecting device is equipped with a device main body into which a pressure fluid supplied from a pressure fluid supply source is introduced, and an attaching/detaching mechanism that enables attachment and detachment with respect to the device main body. The attaching/detaching mechanism includes an internal nozzle that delivers, toward the side of a detection nozzle, the pressure fluid supplied to the device main body, and a detection port that supplies, to the detection nozzle, the pressure fluid delivered from the internal nozzle.
    Type: Grant
    Filed: August 19, 2013
    Date of Patent: August 2, 2016
    Assignee: SMC KABUSHIKI KAISHA
    Inventors: Atsushi Okamoto, Takaya Toyoda
  • Patent number: 9358696
    Abstract: A fluid proximity sensor for surface measurements having a measurement chamber (210) with a measurement nozzle (205), a reference chamber (220) with a reference nozzle (225), and a diaphragm (215) forming an interface between the reference chamber and the measurement chamber. A shroud (280) that encloses the measurement nozzle and reference nozzle provides a peripheral gap (295) between the shroud and a work surface (290) being measured. By connecting either a partial vacuum supply or a partial fluid supply to the shroud, the internal shroud pressure can be raised or lowered and thus the gain-frequency operating regime of the proximity sensor optimized. Movement of the diaphragm in response to differential pressure changes can be sensed by optical, capacitive or inductive means (275).
    Type: Grant
    Filed: June 15, 2010
    Date of Patent: June 7, 2016
    Assignee: ASML Holding N.V.
    Inventor: Joseph H. Lyons
  • Patent number: 9321666
    Abstract: Embodiments of the invention describe an apparatus, method, and system of wastewater treatment using modular membrane bioreactor (MBR) cartridges. In one embodiment, said method of wastewater treatment includes adjusting the number of activated modular MBR cartridges in a container and adjusting the wastewater processing rate of the container to dynamically change the throughput of a fixed-size wastewater processing container. According to one embodiment, said method can include utilizing modular MBR cartridges to provide for a fault-tolerant wastewater treatment container.
    Type: Grant
    Filed: March 17, 2014
    Date of Patent: April 26, 2016
    Assignee: Liberty Evans, LLC
    Inventors: James Phillip Reilly, Victoria Ann Jelderks
  • Patent number: 9172220
    Abstract: A modular power control system is provided and includes a base enclosure, wherein the base enclosure and a base enclosure door, wherein the base enclosure defines a base enclosure cavity and the base enclosure door defines a base enclosure door cavity. Additionally, a module enclosure is provided and includes a module enclosure top, a module enclosure bottom, and two module enclosure sides, wherein the module enclose defines a module enclosure cavity and a module enclosure internal support, wherein the module enclosure internal support includes a module enclosure internal support rear and two module enclosure internal support sides having a first module guide channel located on one of the two module enclosure internal support sides and a second module guide channel located on the other of the two module enclosure internal support side.
    Type: Grant
    Filed: October 18, 2013
    Date of Patent: October 27, 2015
    Inventors: Robert Luther, Joshua Liposky
  • Publication number: 20150013433
    Abstract: The present invention relates to an air micrometer. The air micrometer includes a target object accommodation slot having a bottom surface and a ceiling surface to accommodate at least one portion of the target object between the bottom surface and the ceiling surface, and an air spray unit including a nozzle opened in the bottom surface or the ceiling surface to spray the air onto the target object that is accommodated between the bottom surface and the ceiling surface.
    Type: Application
    Filed: June 12, 2014
    Publication date: January 15, 2015
    Inventors: Jeoung Hwan KIM, Jung Kyu WOO, Shin Hwa LEE, Woo Yong LEE, Min Su KIM, Hyang Mok LEE
  • Publication number: 20150015870
    Abstract: The present disclosure relates to a method of monitoring wafer topography. A position and orientation of a plurality first alignment shapes disposed on a surface of a wafer are measured. Wafer topography as a function of wafer position is modeled by subjecting the wafer to an alignment which simultaneously minimizes misalignment between the wafer and a patterning apparatus and maximizes a focus of radiation on the surface. A non-correctable error is determined as a difference between the modeled wafer topography and a measured wafer topography. A maximum non-correctable error per field is determined for a wafer, and a mean variation in the maximum non-correctable error across each field within each wafer of a lot is determined, both within a layer and across layers. These values are then verified against a set of statistical process control rules to determine if they are within a specification limit of the manufacturing process.
    Type: Application
    Filed: July 12, 2013
    Publication date: January 15, 2015
    Inventors: Chun-Hsien Lin, Kuo-Hung Chao, Yi-Ping Hsieh, Yen-Di Tsen, Jui-Chun Peng, Heng-Hsin Liu, Jong-I Mou
  • Publication number: 20140320832
    Abstract: Apparatus are disclosed for measuring the position of an object surface along an axis. An exemplary apparatus has at least one actuator coupled to a fixed member such as a metrology frame. At least one analog proximity sensor is coupled to the at least one actuator. The at least one actuator is controllably operated to position the at least one proximity sensor at a fixed distance along the axis from a surface that is fixed relative to the fixed me+mber. A controller, coupled to the actuator and to the proximity sensor, is configured to compute a position of the object surface along the axis based on a known location of the fixed surface along the axis, the fixed distance from the fixed surface, and position signals from the at least one proximity sensor.
    Type: Application
    Filed: April 24, 2014
    Publication date: October 30, 2014
    Applicant: Nikon Corporation
    Inventors: Michael R. Sogard, Motofusa Ishikawa
  • Publication number: 20140088493
    Abstract: Automated peritoneal dialysis (APD) cycler systems and methods are disclosed. The APD cycler can include a heater tray with load cells configured to measure the weight of fluid contained within a heater bag and/or a drain bag. The load cells can be toggleable between enabled and disabled configurations. The APD cycler can include a pressure-based volume measurement system, which can be used to confirm measurements made by the load cells. In some embodiments, the APD cycler can have algorithms for tracking an estimated patient volume to prevent overfilling the patient.
    Type: Application
    Filed: December 2, 2013
    Publication date: March 27, 2014
    Applicant: VR MEDICAL TECHNOLOGY, LLC
    Inventor: LI PAN
  • Publication number: 20130340504
    Abstract: A measuring head of a pneumatic measuring device for measuring a workpiece has a base element in which a first flow channel is provided for connecting a compressed air source to a measuring nozzle. The first flow channel has a constricted area with at least one cross-sectional constriction. The measuring head also has one or more second flow channels for connecting the constricted area to a measuring transducer. The base element has a divided configuration in the axial direction. The divided configuration may be provided at least in the constricted area of the first flow channel.
    Type: Application
    Filed: March 6, 2013
    Publication date: December 26, 2013
    Applicant: HOMMEL-ETAMIC GmbH
    Inventor: HOMMEL-ETAMIC GmbH
  • Patent number: 8584512
    Abstract: To inspect recesses in sides of an airfoil, gauge heads are moved into engagement with the recesses. Fluid pressure is conducted to the recesses while the gauge heads are in engagement with the recesses. A determination is made as to whether the rate of leakage of fluid from the recesses is greater than or less than a predetermined rate. If the rate of leakage of fluid is greater than a predetermined rate, one or more of the recesses is unacceptable. However, if the rate of leakage of fluid pressure is less than the predetermined rate, the recesses are acceptable.
    Type: Grant
    Filed: December 13, 2010
    Date of Patent: November 19, 2013
    Assignee: PCC Airfoils, Inc.
    Inventor: Kenneth B. Clarke
  • Patent number: 8561455
    Abstract: A sensor head for measurement of a film, includes a guide surface (14) for the film, at least one sensor element (28, 30) integrated in the guide surface for measuring a property of the film, and a generator for generating an air cushion between the guide surface (14) and the film, the generator including a system for supplying a pressure medium, and a guide member (12) that is made of a porous material and forms at least a part of the guide surface (14) and is adapted to distributedly discharge the pressure medium into the air cushion, the guide member (12) having a channel system (16, 18) that divides the guide surface (14) into a plurality of fields (20, 22) that, if not disconnected, are connected only by narrow lands, the channel system being configured for draining the pressure medium from the air cushion.
    Type: Grant
    Filed: November 3, 2010
    Date of Patent: October 22, 2013
    Assignee: Plast-Control GmbH
    Inventors: Stefan Konermann, Markus Stein
  • Patent number: 8485021
    Abstract: A measuring head is provided for an air micrometer which is capable of measuring an amount of eccentricity between a main spindle and a bush hole. A measuring head (41) includes a measuring-head body portion (42) and a measuring-head tip portion (43), in which: a first measurement air nozzle (51A) and a second measurement air nozzle (51B) are each formed in the measuring-head tip portion to extend in a radial direction of the measuring-head tip portion, and also formed to have an angle of 180 degrees with respect to each other in a circumferential direction of the measuring-head tip portion; individual measurement air supply passages corresponding to the respective measurement air nozzles are formed in the measuring-head body portion; and measurement air is supplied to the measurement air nozzles from the individual measurement air supply passages, respectively.
    Type: Grant
    Filed: January 16, 2009
    Date of Patent: July 16, 2013
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventor: Noritaka Fujimura
  • Patent number: 8464575
    Abstract: In order to improve a device for measuring the geometry of a workpiece in such a way that the geometrical measurements are particularly precise wherein the device comprises a housing having a flow channel in which there is arranged a reference nozzle for the passage of a test fluid therethrough and a first pressure measuring device for measuring a first pressure of the test fluid upstream of the reference nozzle and also a second pressure measuring device for measuring a second pressure of the test fluid downstream of the reference nozzle, it is proposed that the device should comprise a differential pressure measuring device for measuring the differential pressure of the test fluid across the reference nozzle.
    Type: Grant
    Filed: July 23, 2010
    Date of Patent: June 18, 2013
    Assignee: Marposs GmbH
    Inventor: Ivan Basar
  • Publication number: 20130141571
    Abstract: A soft packaged sealed battery is contained in an airtight container. The airtight container is decompressed and images of the surface shape of the sealed battery in the airtight container before and after decompression are captured by a CCD camera or the like. Whether or not airtightness of the sealed battery is maintained is determined based on a change in the captured images, e.g. a change in the surface shape appearing as luminance differences of pixels. By this determination method, highly accurate airtightness determination is realized by eliminating the influence of invisible fine creases on a sealed battery surface.
    Type: Application
    Filed: June 15, 2011
    Publication date: June 6, 2013
    Inventors: Takeshi Yasooka, Toshihiko Kamiya, Itaru Tamura, Akira Suzuka, Shunji Noda, Takuya Takatsuka
  • Patent number: 8316693
    Abstract: Provided is a surface analysis and measurement method based on the flow resistance of a fluid. The method comprises: spraying a fluid on the surface of a sample; identifying and determining if a flow resistance value of the fluid colliding with the sample surface is optimal for the measurement of the surface topography of the sample; setting the determined optimal flow resistance value to a reference value and moving the sample in the X-Y axes to allow the entire surface of the sample to be scanned; varying the position of the sample in the Z axis together with the X-Y axis movement to adjust varying flow resistance values of the fluid along the irregular surface topography of the sample to the set flow resistance value during scanning; and expressing the movement ranges of the sample in the X, Y and Z axes as numerical values and representing the numerical values as brightness values on a computer screen to display the surface topography of the sample.
    Type: Grant
    Filed: November 25, 2009
    Date of Patent: November 27, 2012
    Assignee: Korea Advanced Institute of Science and Technology
    Inventors: Sung Jin Kim, Tae Young Kim, Dong Kwon Kim
  • Patent number: 8245977
    Abstract: An apparatus for pivotally fastening an aerodynamic surface. The apparatus includes a bearing block. A clamping block is connected to the bearing block and includes at least two elongate holes. A pivotally mounted strip member is coupled to the aerodynamic surface and to the clamping block. At least one fastening device is insertable into each of the at least two elongate holes for locking the clamping block relative to the bearing block. The aerodynamic surface is lockable in at least one angular position.
    Type: Grant
    Filed: December 24, 2008
    Date of Patent: August 21, 2012
    Assignee: Airbus Operations GmbH
    Inventor: Michael Binder
  • Patent number: 8220315
    Abstract: A gas gauge has a gas delivery tube arranged to determine a distance to an object. The gas delivery tube includes a gas conduit through which a suitable measurement gas is supplied. The measurement gas leaves the gas delivery tube under pressure via an outlet and impinges on the object in an interaction area, wherein a pressure of a recoiled gas is measured by a pressure detector. A gas having a low atomic number may be used. The pressure sensor may include a membrane positioned in the gas delivery tube at least partially enveloping the gas conduit at or near the gas outlet. The pressure sensor may include a membrane disk arranged about the gas conduit. The pressure sensor may include a suitable plurality of pressure elements arranged in a substantially common plane and which may be spaced apart yet enveloping the gas conduit.
    Type: Grant
    Filed: October 30, 2009
    Date of Patent: July 17, 2012
    Assignee: ASML Netherlands B.V.
    Inventors: Dzmitry Labetski, Yuri Johannes Gabriël Van De Vijver
  • Publication number: 20120072133
    Abstract: In an exemplary embodiment of the present invention, a materials testing method and apparatus comprises a test cell, a temperature control system, a pressure control system, a volume measurement system, a strength indicator system, at least one processor and an output device. The apparatus provides real-time output of temperature and pressure conditions, volume change of a test sample, and strength indication. A method of sample testing includes concurrent measurement of pressure, temperature, volume measurement and strength indication. Processed data is output to at least one graphic user interface as a function of time.
    Type: Application
    Filed: May 26, 2010
    Publication date: March 22, 2012
    Applicant: OFI TESTING EQUIPMENT, INC.
    Inventors: John D. Norwood, Jarod R. Hammar
  • Publication number: 20110265556
    Abstract: An apparatus for measuring film bubbles (10), includes a guide track (22) that extends in a circumferential direction of the film bubble with a constant spacing relative to the latter, the guide track guiding a carriage (20) which carries a measuring head (12) facing the peripheral surface of the film bubble (10), the measuring head (12) is connected to a free end of a cantilever (18) via an articulated joint (16), the cantilever having another end pivotally connected to the carriage (20), and a compensating drive mechanism (30) for correcting a change in the orientation of the measuring head (12) resulting from a pivotal movement of the cantilever (18) is associated with the articulated joint (16).
    Type: Application
    Filed: April 27, 2011
    Publication date: November 3, 2011
    Applicant: PLAST-CONTROL GMBH
    Inventors: Frank Müller, Markus Stein, Stefan Konermann
  • Publication number: 20110266218
    Abstract: A method of assessing biofilm thickness in a membrane supported biofilm reactor (MSBR) of the type comprising a lumen containing a gas phase, a liquid phase, and a gas permeable membrane providing an interface between the gas and liquid phases, the method comprising the steps of charging the lumen with an inert gas, closing the lumen to establish an initial elevated pressure in the lumen, measuring the rate of change of pressure within the lumen, and correlating the rate of change of pressure (dP/dt) with biofilm thickness. The step of correlating dP/dt with biofilm thickness involves correlating dP/dt with the rate of diffusion of the inert gas (dn/dt), correlating dn/dt with an overall mass transfer coefficient (K), correlating K with the mass transfer coefficient of the biofilm (ICB), and correlating k? with the biofilm thickness.
    Type: Application
    Filed: November 25, 2009
    Publication date: November 3, 2011
    Inventors: Eoin Casey, Eoin Syron, Barry Heffernan
  • Publication number: 20110209529
    Abstract: An apparatus for obtaining information about a workpiece may include a measuring device having a nozzle defining an orifice in fluid communication with a source of incompressible fluid. A fluid monitoring apparatus may monitor a parameter of the substantially incompressible fluid, and a pump may be fluidly coupled to the source and configured to supply incompressible fluid to the orifice. The pump may have a pump chamber with a first displacement setting having a first fixed volume, so that operation of the pump at a first pump speed with the pump chamber in the first displacement setting generates a first fluid flow having a substantially constant first volumetric rate. The pump may have more than one displacement setting, or the pump may be operated at different speeds to change the volumetric flow rate. The nozzle may include multiple, independent orifice sets that may be selectively provided fluid, thereby to obtain information on different parts of the workpiece with a single placement of the nozzle.
    Type: Application
    Filed: March 1, 2011
    Publication date: September 1, 2011
    Applicant: MORI SEIKI CO., LTD.
    Inventors: Gregory A. Hyatt, Nitin Chaphalkar
  • Publication number: 20110197658
    Abstract: A hydraulic accumulator including a fluid chamber and a displaceable piston that is connected to a piston position-measuring means is disclosed. Embodiments of the hydraulic accumulator can provide a device that measures the available fluid volume in the accumulator. In embodiments, the displaceable part of the piston may separate fluid volume from gas volume, and may be connected to a wire that runs through the fluid volume and exits the outside of the accumulator through a sealed opening. Further, in embodiments, the wire may be led over pulleys and through a hollow member connected to the accumulator. The position of an associated metallic core member can be electrically monitored to provide position and fluid volume information.
    Type: Application
    Filed: October 8, 2009
    Publication date: August 18, 2011
    Inventor: Arlindo Da Costa
  • Publication number: 20110157576
    Abstract: A fluid gauge (222) for measuring the position of a work piece (200) includes a gauge body (236), a fluid source assembly (238), and a gauge control system (240). The gauge body (236) includes a measurement conduit (246), a first reference conduit (248A), a second reference conduit (248B), a first reference surface (250A) that is spaced apart a first reference gap (242A) from an outlet (254) of the first reference conduit (248A), and a second reference surface (250B) that is spaced apart a second reference gap (242B) from an outlet (254) of the second reference conduit (248B). The gauge body (236) is positioned so that an outlet (254) of the measurement conduit (246) is spaced apart a measurement gap (244) from the work piece (200). Further, the fluid source assembly (238) directs a fluid (260) into the conduits (246), (248A), (248B).
    Type: Application
    Filed: December 28, 2010
    Publication date: June 30, 2011
    Inventor: Michael R. Sogard
  • Publication number: 20110107818
    Abstract: A sensor head for measurement of a film, includes a guide surface (14) for the film, at least one sensor element (28, 30) integrated in the guide surface for measuring a property of the film, and a generator for generating an air cushion between the guide surface (14) and the film, the generator including a system for supplying a pressure medium, and a guide member (12) that is made of a porous material and forms at least a part of the guide surface (14) and is adapted to distributedly discharge the pressure medium into the air cushion, the guide member (12) having a channel system (16, 18) that divides the guide surface (14) into a plurality of fields (20, 22) that, if not disconnected, are connected only by narrow lands, the channel system being configured for draining the pressure medium from the air cushion.
    Type: Application
    Filed: November 3, 2010
    Publication date: May 12, 2011
    Applicant: PLAST-CONTROL GMBH
    Inventors: Stefan Konermann, Markus Stein
  • Publication number: 20110069291
    Abstract: Methods and apparatus for compensating for forces applied by a system which measures a height of a photoresist-coated surface of a wafer are disclosed. According to one aspect, a method for measuring a height associated with a wafer includes utilizing a measurement of an air flow through an air gauge or air bearing to estimate the height, determining a first magnitude of a bearing load exerted on the wafer from the air flow measurement, and compensating for the bearing load. The bearing load is exerted by an arrangement configured to determine the height associated with the wafer a first direction. Compensating for the bearing load includes applying an opposing force to the wafer that includes at least a vacuum preload force. The vacuum preload force is applied in a second direction that is opposite from the first direction. The opposing force is calculated to have a second magnitude that is approximately equal to the first magnitude.
    Type: Application
    Filed: September 10, 2010
    Publication date: March 24, 2011
    Inventor: Michael R. Sogard
  • Publication number: 20110023584
    Abstract: The present invention aims to provide a measuring head for an air micrometer which is capable of measuring an amount of eccentricity between a main spindle and a bush hole.
    Type: Application
    Filed: January 16, 2009
    Publication date: February 3, 2011
    Applicant: Mitsubishi Heavy Industries, Ltd.
    Inventor: Noritaka Fujimura
  • Patent number: 7862752
    Abstract: Apparatus and method for checking the venting of a mold having one or more vents, the apparatus comprising a vacuum source, a flow connection between the source and the mold, and a vacuum gauge connected to the flow connection, whereby vacuum measurement by the gauge correlates with total effective venting area of the mold.
    Type: Grant
    Filed: September 27, 2006
    Date of Patent: January 4, 2011
    Inventor: Terry L. Schwenk
  • Patent number: 7797985
    Abstract: Provided are a methods and systems for determining a topography of an object. In an embodiment, a system includes a reference probe configured to measure a surface of a reference surface and to generate a reference signal, a measuring probe configured to measure a surface of an object and to generate a measurement signal, a sensor configured to sense a position of the measuring probe and to generate a sensor signal, and a combiner configured to receive the sensor signal and the measurement signal and to generate a combination signal therefrom. A desired distance between the measuring probe and the object is substantially maintained by adjusting the position of the measuring probe based on the measurement signal. A topography of the object is determined based at least on a comparison of the reference signal and the combination signal.
    Type: Grant
    Filed: September 12, 2008
    Date of Patent: September 21, 2010
    Assignee: ASML Holding N.V.
    Inventors: Daniel N. Galburt, Boguslaw F. Gajdeczko
  • Publication number: 20100162796
    Abstract: A matrix analyzer for determining the size and location of a conductive item placed thereon. The matrix analyzer includes plural row conductors and column conductors with a corresponding grid of conductive areas exposed on the surface of the matrix analyzer. When a conductive item, such as an ink droplet, is jetted onto the matrix analyzer, the intersection of various row conductors and column conductors exhibit a low resistance. The rows and columns of the matrix analyzer can be sequentially accessed to find those intersections where the low resistance exists. From such data, the size and location of the ink droplets can be determined.
    Type: Application
    Filed: December 29, 2008
    Publication date: July 1, 2010
    Inventor: David Thomas Shadwick
  • Publication number: 20100116029
    Abstract: A gas gauge has a gas delivery tube arranged to determine a distance to an object. The gas delivery tube includes a gas conduit through which a suitable measurement gas is supplied. The measurement gas leaves the gas delivery tube under pressure via an outlet and impinges on the object in an interaction area, wherein a pressure of a recoiled gas is measured by a pressure detector. A gas having a low atomic number may be used. The pressure sensor may include a membrane positioned in the gas delivery tube at least partially enveloping the gas conduit at or near the gas outlet. The pressure sensor may include a membrane disk arranged about the gas conduit. The pressure sensor may include a suitable plurality of pressure elements arranged in a substantially common plane and which may be spaced apart yet enveloping the gas conduit.
    Type: Application
    Filed: October 30, 2009
    Publication date: May 13, 2010
    Applicant: ASML Netherlands B.V.
    Inventors: Dzmitry Labetski, Yuri Johannes Gabriël Van De Vijver
  • Patent number: 7708938
    Abstract: Method and device for measuring and controlling the circulation of fluids in endoscope channels. Device includes hermetic chamber having a known volume and a low level and high level sensor to control filling and emptying. The chamber is connected to a filtered air compressor, an injection pump to inject a drying product and a circulation pump to circulate cleaning and disinfecting solutions contained in the tank. The tank can receive at least one endoscope and includes injectors connected by a solenoid valve to the hermetic chamber. The device is used to verify and record the flow of cleaning, disinfecting, rinsing and drying solutions passing through each of the endoscope channels during the cleaning and disinfecting operations.
    Type: Grant
    Filed: February 14, 2003
    Date of Patent: May 4, 2010
    Inventors: Bernard Mariotti, Frédéric Dray
  • Patent number: 7694549
    Abstract: A single block pneumatic gauging system, with an appropriate passageway, receives compressed air to its inlet and its outlet is connected to an air probe. Parts to be gauged, are placed on a fixture which incorporates the air probe. The proximity of the part, to the nozzle of the air probe, creates a restriction which causes the air speed in the passageway to vary proportionally to the size of the part. A transmitter, at the mid-point of the passageway, generates a sonic wave, which propagates in the passageway. A receiver at the inlet will sense the sonic wave which travels at the speed of sound minus the air speed and a receiver at the outlet will sense the sonic wave which travels at the speed of sound plus the air speed. Phase comparison of both waves provides a signal proportional to air speed in the passageway which in turn is proportional to the size of the part being gauged.
    Type: Grant
    Filed: October 23, 2007
    Date of Patent: April 13, 2010
    Inventor: Michel Dechape
  • Patent number: 7690243
    Abstract: The invention relates to a method and an apparatus for measurement of the thickness of thin layers by means of a measurement probe (11) which has a housing (14) which holds at least one sensor element (17) whose longitudinal axis lies in particular on a longitudinal axis (16) of the housing (14), in which at least during the measurement process, a gaseous medium is supplied to a supply opening (21) of the measurement probe (11) on a measurement surface (28), and is supplied via at least one connection channel (24), which is connected to the supply opening (21), to one or more outlet openings (26) which are provided on an end face (29), pointing towards the measurement surface (28), of the measurement probe (11), and in which at least one mass flow, which flows out of one or more outlet openings (26), of the gaseous medium is directed at the measurement surface (28), and in which the measurement probe (11) is held in a non-contacting manner with respect to the measurement surface (28) during the measurement pr
    Type: Grant
    Filed: May 15, 2007
    Date of Patent: April 6, 2010
    Assignee: Immobiliengesellschaft Helmut Fischer GmbH & Co. KG
    Inventor: Helmut Fischer
  • Publication number: 20100043244
    Abstract: An edge detect system, using a torch height control system based on the use of a free floating probe in contact with the workpiece, uses a drop in pressurized air supplied to the probe tip in contact with the workpiece when the probe moves off the plate edge to generate a signal that prevents the torch from following the free floating probe downwardly and thereby prevents the cutting tool from crashing into the workpiece.
    Type: Application
    Filed: August 21, 2009
    Publication date: February 25, 2010
    Applicant: Messer Cutting Systems Inc.
    Inventor: Alan E. ANDERSON
  • Publication number: 20100033705
    Abstract: A fluid proximity sensor having one or more measurement nozzles and a reference nozzle coupled to a common chamber. Diaphragms coupled to the measurement nozzles can be sensed by optical, capacitive or inductive means so as to detect changes in pressure. In addition, the number of pressure detectors can be minimized through the use of control valves to selectively couple the nozzles to the detectors, while maintaining the required high level of topographic sensitivity. Further, the measurement nozzle dimensions can be adjusted to optimize proximity measurements in response to accuracy, speed and similar requirements.
    Type: Application
    Filed: August 11, 2009
    Publication date: February 11, 2010
    Inventor: Joseph H. LYONS
  • Publication number: 20090211338
    Abstract: Disclosed are a computer numerically controlled incompressible machine and related methods. The machine includes a measuring device that has a source of fluid that is fluidically communicable with a nozzle and that configured to deliver fluid at a constant volumetric flow rate when a measurement reading is taken. The pressure of fluid delivered to the nozzle is monitored and, from this pressure, a measurement parameter is determined. Other embodiments are disclosed; for instance, the invention in some embodiments provides an integrated cutting tool and nozzle.
    Type: Application
    Filed: February 21, 2008
    Publication date: August 27, 2009
    Applicant: Mori Seiki USA, Inc.
    Inventors: Gregory Hyatt, Nitin Chaphalkar
  • Patent number: 7578168
    Abstract: A gas gauge for sensing distance to an object includes a gas supply system and a nozzle that supplies the gas from the gas supply system to a space between the nozzle and the object. For example, the gas supply system supplies the gas with a flow rate that corresponds to a flow in a transitional region between laminar flow and turbulent flow. A surface of the nozzle may be roughened so as to increase a friction factor across the surface, which increases gas pressure drop and also a gain of the nozzle. Noise generated by the increased flow rate may be attenuated using one or more strategically placed Helmholtz attenuators and/or snubbers.
    Type: Grant
    Filed: June 27, 2007
    Date of Patent: August 25, 2009
    Assignee: ASML Holding N.V.
    Inventor: Herman Vogel
  • Patent number: 7549321
    Abstract: A choked-flow orifice gas gauge proximity sensor for sensing a difference between a reference surface standoff and a measurement surface standoff is disclosed. Unlike existing proximity sensors, the gas gauge proximity sensor of the present invention replaces the use of a mass flow controller with a choked flow orifice. The use of a choked flow orifice provides for reduced equipment cost and improved system reliability. A gas supply forces gas into the proximity sensor. The gas is forced through the choked flow orifice to achieve sonic conditions at which time the mass flow rate becomes largely independent of pressure variations. The flow of gas proceeds from the choked flow orifice into a sensor channel system. A mass flow sensor within the sensor channel system monitors flow rates to detect measurement standoffs that can be used to initiate a control action.
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: June 23, 2009
    Assignee: ASML Holding N.V.
    Inventors: Peter C. Kochersperger, Joseph H. Lyons, James Walsh, Rajan Mali
  • Publication number: 20090100908
    Abstract: The present invention relates to a pneumatic gauging system, which is in the form of a single block having appropriate air passageways bored therein. Compressed air is supplied to the input of the system and its output is connected to an air probe. Parts to be gauged, are placed on a fixture which incorporates the air probe. The proximity of the part, to the nozzle of the air probe, creates a restriction which causes the air speed in the passageway to vary proportionally to the size of the part. A transmitter, at the mid-point of the passageway, generates a sonic or ultrasonic continuous wave, which propagates upstream and downstream through the passageway. A receiver at the inlet will sense the ultrasonic wave which travels at the speed of sound minus the air speed in the passageway and another at the outlet will sense the ultrasonic wave which travels at the speed of sound plus the air speed in the passageway.
    Type: Application
    Filed: October 23, 2007
    Publication date: April 23, 2009
    Inventor: Michel Dechape
  • Patent number: 7500380
    Abstract: In a gas gauge, effects due to changes in the local environment are reduced by causing a measurement nozzle and a reference nozzle to react as if they were co-located, or located at approximately the same position. This is achieved by venting the reference nozzle in very close proximity to the measurement nozzle. A reference chamber surrounding the reference plate and reference nozzle is vented at approximately the same location as the measurement nozzle. In an embodiment for use in a vacuum environment, the measurement nozzle is surrounded with an annular ring. The measurement annular ring is connected to an annular ring around the reference nozzle, which acts to co-locate the reference nozzle and the measurement nozzle. To avoid choked flow, another annular ring or rings may be placed around the measurement annular ring.
    Type: Grant
    Filed: April 4, 2006
    Date of Patent: March 10, 2009
    Assignee: ASML Holding N.V.
    Inventors: Frederick Michael Carter, Peter Kochersperger
  • Patent number: 7472579
    Abstract: An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant liquid flow and sensing a liquid mass flow rate within a bridge to detect very small distances. Within the apparatus the use of a flow restrictor and/or snubber made of porous material and/or a liquid mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.
    Type: Grant
    Filed: February 24, 2006
    Date of Patent: January 6, 2009
    Assignee: ASML Holding N.V.
    Inventor: Kevin J. Violette
  • Patent number: 7472580
    Abstract: A vacuum-driven gas gauge proximity sensor for sensing a difference between a reference surface standoff and a measurement surface standoff is disclosed. Unlike existing proximity sensors, the vacuum-driven gas gauge proximity sensor uses a vacuum to reverse the traditional flow of gas through a proximity sensor, such that gas flows inward across measurement and reference standoffs through measurement and reference nozzles. The conditioned ambient gas that is vacuumed into the reference and measurement nozzles flows through reference and measurement channels that are coupled at a junction into a single channel. The single channel is coupled to the vacuum that is used to evacuate the conditioned ambient gas through the proximity sensor. A bridge channel couples the reference and measurement channels. A mass flow sensor along the bridge channel monitors flow rates to detect measurement standoffs that can be used to initiate a control action. A pump-driven liquid flow proximity sensor is also disclosed.
    Type: Grant
    Filed: December 29, 2006
    Date of Patent: January 6, 2009
    Assignee: ASML Holding N.V.
    Inventors: Joseph H. Lyons, Peter C. Kochersperger, James Walsh, Rajan Mali
  • Publication number: 20090000353
    Abstract: A gas gauge for sensing distance to an object includes a gas supply system and a nozzle that supplies the gas from the gas supply system to a space between the nozzle and the object. For example, the gas supply system supplies the gas with a flow rate that corresponds to a flow in a transitional region between laminar flow and turbulent flow. A surface of the nozzle may be roughened so as to increase a friction factor across the surface, which increases gas pressure drop and also a gain of the nozzle. Noise generated by the increased flow rate may be attenuated using one or more strategically placed Helmholtz attenuators and/or snubbers.
    Type: Application
    Filed: June 27, 2007
    Publication date: January 1, 2009
    Applicant: ASML Holding N.V.
    Inventor: Herman Vogel
  • Publication number: 20090000354
    Abstract: Provided are a methods and systems for determining a topography of an object. In an embodiment, a system includes a reference probe configured to measure a surface of a reference surface and to generate a reference signal, a measuring probe configured to measure a surface of an object and to generate a measurement signal, a sensor configured to sense a position of the measuring probe and to generate a sensor signal, and a combiner configured to receive the sensor signal and the measurement signal and to generate a combination signal therefrom. A desired distance between the measuring probe and the object is substantially maintained by adjusting the position of the measuring probe based on the measurement signal. A topography of the object is determined based at least on a comparison of the reference signal and the combination signal.
    Type: Application
    Filed: September 12, 2008
    Publication date: January 1, 2009
    Applicant: ASML Holding N.V.
    Inventors: Daniel N. GALBURT, Boguslaw F. Gajdeczko
  • Patent number: RE42650
    Abstract: A system and method that use a fluid gauge proximity sensor. A source of modulated unidirectional or alternating fluid flow travels along at least one path having a nozzle and a flow or pressure sensor. The fluid exists at a gap between the nozzle and a target. The sensor outputs an amplitude modulated signal that varies according to a size of the gap. The amplitude modulated signal is processed either digitally or in analog devices, which can include being filtered (e.g., band pass, band limited, high pass, etc. filter) to include the modulated frequency and sufficient bandwidth on either side of that frequency and/or being demodulated using a demodulator operating at the acoustical driver modulation frequency. Using this system and method can result in only ambient acoustical energy in a desired frequency range of the device actually having the opportunity to interfere with the device operation. This can lower the devices overall sensitivity to external acoustical noise and sensor offset.
    Type: Grant
    Filed: July 31, 2007
    Date of Patent: August 30, 2011
    Assignee: ASML Holding N.V.
    Inventors: Daniel N. Galburt, Earl W. Ebert, Joseph H. Lyons