Abstract: A physical quantity sensor includes a substrate, an oscillating member that is disposed over the substrate, support portions that support the oscillating member and that are disposed along a first axis, and detection electrodes that are disposed on the substrate so as to oppose the oscillating member. The oscillating member has a pair of side faces intersecting a second axis perpendicular to the first axis in a plane, and a protrusion is formed on at least one of the pair of side faces.

Abstract: An apparatus and method for calculating athlete speed non-invasively, on the field/court of play using data from a torso-mounted inertial measurement unit. The method complements existing, GPS-based methods for calculating athlete speed by enabling use in environments where GPS signal is unavailable (i.e. indoors).

Abstract: A system and a method for determining a true acceleration and velocity of a locomotive and for controlling wheel slip and wheel skid of the locomotive is disclosed. The system, using accelerometers, can control the velocity of the wheels of the locomotive based on the comparison between a true locomotive velocity signal and a wheel velocity signal such that an actual tangential speed of the wheels is regulated to correspond to the true locomotive longitudinal velocity plus an allowance velocity for creepage. The accelerometer can also be used at the same time for impact detection purposes. Furthermore, if a set of accelerometers are used, the locomotive can also play a diagnostic role for track quality reporting in rail yards. The control of wheel slip and wheel is particularly useful in DC locomotive applications with individual axle control.

Abstract: A motion analysis apparatus includes a first calculation unit that calculates a first vector on a node in an absolute coordinate system using an output from a first inertial sensor attached to one of two rigid bodies linked by the node having a multiple degrees of freedom, a second calculation unit that calculates a second vector on the node in the absolute coordinate system using an output from a second inertial sensor attached to the other one of the rigid bodies; and a third calculation unit that calculates a difference in directions of the first vector and the second vector.

Abstract: A measurement system having a miniature, wireless inertial measurement unit (IMU) disposed within or on a moving object, such as a ball or other member, to calculate the kinematics of the moving object.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using accelerometers. Some such accelerometers include a substrate, a first plurality of electrodes, a second plurality of electrodes, a first anchor attached to the substrate, a frame and a proof mass. The substrate may extend substantially in a first plane. The proof mass may be attached to the frame, may extend substantially in a second plane and may be substantially constrained for motion along first and second axes. The frame may be attached to the first anchor, may extend substantially in a second plane and may be substantially constrained for motion along the second axis. A lateral movement of the proof mass in response to an applied lateral acceleration along the first or second axes may result in a change in capacitance at the first or second plurality of electrodes.

Abstract: A MEMS device includes a substrate, a mass having a first and second set of elongated mass fingers extending from the mass, and a support structure supporting the mass on the substrate. The support structure may include at least one anchor and a plurality of springs that allow movement of the mass relative to the substrate. The MEMS device may also include a first set of sensing fingers for sensing movement of the first set of mass fingers relative to the first set of sensing fingers, and a second set of sensing figures for sensing movement of the second set of mass fingers relative to the second set of sensing fingers. The first and second sets of sensing fingers may have different size finger gaps between the sensing fingers and the respective mass fingers.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using x-axis gyroscopes, y-axis gyroscopes, z-axis gyroscopes, two-axis accelerometers and three-axis accelerometers. Combining fabrication processes for such devices can enable the monolithic integration of six inertial sensing axes on a single substrate, such as a single glass substrate. Such devices may be included in a mobile device, such as a mobile display device.

Abstract: The present invention discloses a three-dimensional micro-electro-mechanical-system sensor. The sensor includes movable first electrodes, plural movable second electrodes, plural fixed third electrodes, and plural fixed fourth electrodes. The first electrodes and their adjacent third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and their adjacent fourth electrodes form at least one third capacitor. The capacitance change of the first capacitor reflects the displacement of the proof mass along a first axis, the capacitance change of the second capacitor reflects the displacement of the proof mass along a second axis, and the capacitance change of the third capacitor reflects the displacement of the proof mass along a third axis. The first, second, and third axes define a three-dimensional coordinate system.

Abstract: A high-Q, mode-matched, vibratory tuning fork based MEMS device, capable of sensing rotational and translational motion around three axes, and processes of fabrication are disclosed herein. In one embodiment, a MEMS device has first and second proof masses actuated along a first axis, and a third and fourth proof masses actuated along a second orthogonal axis. Each of the proof masses includes an inner mass mechanically coupled to an outer frame. A plurality of electrodes sense rotational or translational motion along the three orthogonal axes.

Abstract: A module operable to be mounted onto a surface of a board. The module includes a linear accelerometer to provide a first measurement output corresponding to a measurement of linear acceleration in at least one axis, and a first rotation sensor operable to provide a second measurement output corresponding to a measurement of rotation about at least one axis. The accelerometer and the first rotation sensor are formed on a first substrate. The module further includes an application specific integrated circuit (ASIC) to receive both the first measurement output from the linear accelerometer and the second measurement output from the first rotation sensor. The ASIC includes an analog-to-digital converter and is implemented on a second substrate. The first substrate is vertically bonded to the second substrate.

Abstract: A motion sensing transducer includes an electrically conductive substrate having a major surface that defines a substrate plane, and a first compliant structure including a piezoelectric material and having greater compliance to inertial forces oriented out of the substrate plane than to inertial forces oriented in the substrate plane. The first compliant structure includes a piezoelectric material. The motion sensing transducer includes a second compliant structure having greater compliance to inertial forces oriented in the substrate plane than to inertial forces oriented out of the substrate plane. The second compliant structure includes a first surface that is electrically isolated from the substrate. The first surface faces a surface of the substrate. The motion sensing transducer includes a first electrically conductive lead that is electrically connected to the first surface, and a second electrically conductive lead that is electrically connected to the piezoelectric material.

Abstract: A RFID tag includes an RF transceiver; logic to operate the RF transceiver to respond to a received signal with a unique radio frequency id; logic to compare information in the received signal with conditional response criteria; and logic to determine if data has been received and written into a writable memory area by the RFID tag, and to respond to the received signal only if the data has been received and stored in the writable memory area and matches the conditional response criteria.

Abstract: A multi-axis force-balance accelerometer has a proof mass included within an enclosure. An electrically conductive tether, flexible in 6 degrees of freedom, provides a compliant electrically conductive link between the proof mass and the enclosure. Mechanical stops limit a range of motion of the proof mass. The enclosure includes captive plates and force balancing control loops for positioning the proof mass in a null position within the enclosure for each of the 3 rectilinear reference axes, and in a null position within the enclosure for each of 3 angular reference axes. The electrically conductive tether is sufficiently mechanically compliant that, on deactivation of the force balancing control loops for the rectilinear axes, the proof mass falls so as to rest on the mechanical stops.

Abstract: This document discusses among other things apparatus and methods for a proof mass including split z-axis portions. An example proof mass can include a center portion configured to anchor the proof-mass to an adjacent layer, a first z-axis portion configure to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis, a second z-axis portion configure to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane, wherein the first z-axis portion is configured to rotate independent of the second z-axis portion.

Abstract: An item tracking system includes a plurality of items for storage and removal from a compartment. The system includes tags affixed to the items and configured to store identifiers for the items. A tag reader receives data from the tags in response to the items being removed from and returned to the compartment. A sensor in the compartment identifies a state change associated with the compartment. A processor identifies removal of an item with data received by the tag reader, identifies the state change with the sensor after the item is removed and before it is returned, and generates an output with an output device including the identifier corresponding to the item in response to the state change in the compartment.

Abstract: A sensor device includes a mounting member having fixation surfaces inside, and at least one electronic component directly or indirectly fixed to the fixation surfaces of the mounting member, and the mounting member constitutes a part of a casing for housing the electronic component. Further, the fixation surfaces are perpendicular to each other.

Abstract: An impact detection device for detecting impacts to a body part of a user and various supporting systems are discussed. In an example, an impact detect device can include a circuit board, a component having a first section and a second section, a battery, and a molding for housing the circuit boat, the battery and the component. The circuit board can include impact detection circuitry including at least two sensors and a communication circuit. A zone of reduced rigidity can connect the first and second sections of the component, with the circuit board secured to the first section. The battery can be secured to the second section of the component allowing for flex relative to the circuit board. The molding can be shaped and dimensioned for mounting to a body part of the user.

Abstract: The present disclosure relates to a bump processing method and/or resulting MEMS-CMOS structure, in which one or more anti-stiction bumps are formed within a substrate prior to the formation of a cavity in which the one or more anti-stiction bumps reside. By forming the one or more anti-stiction bumps prior to a cavity, the sidewall angle and the top critical dimension (i.e., surface area) of the one or more anti-stiction bumps are reduced. The reduction in sidewall angle and critical dimension reduces stiction between a substrate and a moveable part of a MEMS device. By reducing the size of the anti-stiction bumps through a processing sequence change, lithographic problems such as reduction of the lithographic processing window and bump photoresist collapse are avoided.

Abstract: A motion detection device includes: an acceleration detection unit, a separating unit, a gravity axis determination unit, and a motion detection unit. The acceleration detection unit detects acceleration components of each axis of a three-dimensional rectangular coordinate system of acceleration acting on the acceleration detection unit and outputs sets of acceleration component data. The separating unit separates the outputted sets of acceleration component data into stationary components and motion components. The gravity axis determination unit determines an axis whose separated stationary component is the largest to be a gravity axis. The motion detection unit detects, if an axis corresponding to a largest motion component showing a largest value of the separated motion components is an axis other than the determined gravity axis, a motion axis of the acceleration detection unit on the basis of the largest motion component.

Abstract: The invention relates to a capacitive micromechanical acceleration sensor comprising a first sensor, a second sensor, and a third sensor. The first sensor comprises a rotor electrode and stator electrode. The sensor comprises a first beam that is connected to a rotor electrode support structure and that is connected to the rotor electrode. The sensor comprises a second beam that is connected to the rotor electrode support structure and that is connected to the rotor electrode. The second sensor is situated in a first space circumscribed by the first beam, the first sensor, and the rotor electrode support structure. The third sensor is situated in a second space circumscribed by the second beam, the first sensor, and the rotor electrode support structure.

Abstract: A method for measuring positional changes of an object, including rotation about any or all of three axes, using linear accelerometers. There is disclosed a method of using a linear accelerometer to integrate two 3D linear accelerometers in order to measure and supply for further use six-dimensional information, that is, translation in three dimensions and rotation about three axes. Two linear accelerometer sensors are used to determine all but rotation about an imaginary axis between the accelerometers. Output from a third accelerometer may be used to generate the data needed to determine rotation about the imaginary axis. The need for a gyroscope for detecting changes in heading (i.e., yaw or azimuth) may therefore be avoided.

Abstract: A device for detection of the motion of a compactor roller (20) of a soil compactor (10) rotatable about an axis of rotation (A), where said roller comprises on one inside of a roller mantle (22) a plurality of motion sensors (ai) arranged in the circumferential direction around the axis of rotation (A) and at a spacing from each other and moveable with the roller mantle (22) around the axis of rotation (A).

Abstract: A method for positioning an impact detection device on a rod-shaped member of a fork of a vehicle supporting a wheel of the vehicle is described. The detection device has at least one group of three accelerometers arranged on three axes orthogonal to each other and mounted on at least one printed circuit board, the at least one printed circuit board being arranged in a plane parallel to a longitudinal axis of the right-shaped member of the fork.

Abstract: A three-dimensional (3D) input sensing system includes a 3D input device, a host, and a power managing unit. The 3D input device includes at least one 3D motion sensing unit, and transmits a radio frequency (RF) signal obtained from detected motion of the 3D input device. The host receives the RF signal from the 3D input device and obtains 3D coordinate information of the 3D input device. The power managing unit controls supply of power in the 3D input device upon determining that the latter has remained motionless for a predetermined time period.

Abstract: The present invention relates to a strap device for a curtain or a flexible door, said straps having embedded RFID reader antenna modules and different MEMS and MOEMS sensors that make it possible to detect the direction of the objects passing through the gate and also detect the size of the objects so as to modulate the switching of the radiating elements of antennas on the basis of the position of the objects being read. The device also has embedded biosensors that measure in parallel the presence of toxic substances or materials. The device according to the invention has an LED or OLED and PHOLED display means embedded in the strap, more specifically, in a flexible material of the strap. The invention is particularly intended for the qualitative and quantitative traceability of materials passing through a logistical check gate. The device is intended for all places already having curtains with flexible straps, into which it is easily embedded. The device is suitable for all existing RFID readers.

Abstract: The invention relates to an electromechanic microsensor (MEMS) comprising drive elements which are moved linearly in an x-y plane and disposed on a substrate to determine at least two, preferably three, components of the yaw rate vector of a substrate, wherein two groups of drive elements are driven in directions running essentially at right angles to each other. The MEMS according to the invention is characterized in that the drive elements, which are moved at right angles to each other, are connected to one another to synchronize the movements via a coupling device that is rotatably mounted on the substrate.

Abstract: A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.

Abstract: A multi-axis gyroscope includes a microelectromechanical structure configured to rotate with respective angular velocities about respective reference axes, and including detection elements, which are sensitive in respective detection directions and generate respective detection quantities as a function of projections of the angular velocities in the detection directions. The gyroscope including a reading circuit that generates electrical output signals, each correlated to a respective one of the angular velocities, as a function of the detection quantities. The reading circuit includes a combination stage that combines electrically with respect to one another electrical quantities correlated to detection quantities generated by detection elements sensitive to detection directions different from one another, so as to take into account a non-zero angle of inclination of the detection directions with respect to the reference axes.

Abstract: A system for detecting an error in an inertial measurement unit (IMU) is disclosed. The system may have a first IMU including a first plurality of accelerometers and a first rotational rate measurer. The first plurality of accelerometers may be configured to measure acceleration along a plurality of first axes, a first axis of the plurality of first axes being substantially collinear with a collinear axis. The first rotational rate measurer may be configured to measure a first rotational rate about a second axis of the plurality of first axes that is substantially perpendicular to the collinear axis. The system may also have a second IMU and an IMU error detector. The IMU error detector may be configured to receive measurement data from the first IMU and the second IMU; and detect an error based on the measurement data.

Abstract: An apparatus for inertial sensing. The apparatus includes a substrate member comprising a thickness of silicon. The apparatus also has a first surface region configured from a first crystallographic plane of the substrate and a second plane region configured from a second crystallographic plane of the substrate. The apparatus has a quartz inertial sensing device coupled to the first surface region, and one or more MEMS inertial sensing devices coupled to the second plane region.

Abstract: The invention is related to a method and system for measuring motions of a moving, essentially rigid, floating (elongated) body such as a boat, yacht or vessel using two motion detectors that are installed near the ends of, or far enough away from each other in the (elongated) floating body. In accordance with the invention the two motion detectors are essentially simultaneously measuring the movements of the floating body.

Abstract: An X-axis acceleration level determining section determines whether an X-axis acceleration signal output from a three-axis acceleration sensor has a value equal to or more than a predetermined positive threshold level, a value equal to or less than a predetermined negative threshold level, a value between the positive threshold level and a level of 0, or a value between the level of 0 and the negative threshold level. A Y-axis acceleration level determining section also makes a similar determination for a Y-axis acceleration signal output from the three-axis acceleration sensor. An attitude determining section determines the rotated attitude of a device equipped with the three-axis acceleration sensor with respect to the Z axis based on results of determinations made by the X-axis acceleration level determining section and the Y-axis acceleration level determining section.

Abstract: A sensor includes a plurality of mounting boards with sensor components mounted on amounting surface, and a support member provided with fixation surfaces adapted to fix the plurality of mounting boards, the sensor components are disposed between the mounting boards and the support member, and the mounting boards are connected to each other with a connection member.

Abstract: Device and method for providing inertial indications with high accuracy using micro inertial sensors with inherent very small size and low accuracy. The device and method of the invention disclose use of the cluster of multiple micro inertial sensors to receive from the multiple sensors an equivalent single inertial indication with high accuracy based on the multiple independent indications and mathematical manipulations for averaging the plurality of single readings and for eliminating common deviations based, for example, on measurements of the deviation of the single readings.

Abstract: An apparatus and system that provides for the wireless receiving, storing and analysis of digital data as part of an RFID enabled motor vehicle license plate in wireless communication with a mobile interrogator for obtaining data such as license plate number and optionally, a VIN. When combined with additional RFID tags, information such as wireless driver license data retrieval, VIN, and other user defined information such as data relating to insurance policy information, addresses, registration information, driving records, driving restrictions and the like may be accessed. Data is wirelessly passed upon receipt of a valid request signal from a law enforcement vehicle, through a law enforcement portal to centralized databases in order analyze and verify the same. The invention also provides for non-law enforcement information such as parking and repossession information, which would be similarly processed for parking and repossession agents, but through separate non-law enforcement databases.

Abstract: A micromechanical acceleration sensor, including at least one substrate, one or more frames, at least a first frame of which is suspended directly or indirectly on the substrate by at least one spring element, and is deflected with respect to the substrate when at least a first acceleration acts, and at least a first seismic mass which is suspended on the first frame or an additional frame by at least one spring element, and is deflected with respect to this frame when an acceleration acts which is, in particular, different from the first acceleration.

Abstract: In order to be able to perform redundant measurements of rotation rates particularly economically, disclosed herein is a sensor device which includes a dual-axis, first rotation rate sensor element with which rotation rates of rotating motions of the sensor device about a first and a second rotation rate measurement axis can be detected, wherein the first and the second rotation rate measurement axes are oriented orthogonally in relation to one another. The sensor device is defined by the fact that the sensor device includes at least one other rotation rate sensor element with which a rotation rate of a rotating motion of the sensor device about a rotation rate measurement axis, which lies in a plane together with the first and the second rotation rate measurement axes, can be deselected.

Abstract: A micromechanical system includes a first movable element, which is connected to a substrate via a first spring element, and a second movable element, which is connected to the substrate via a second spring element. The first movable element and the second movable element are movable in relation to the substrate independent of one another. Furthermore, the first movable element and the second movable element are situated one above the other in at least some sections in a direction perpendicular to the substrate surface.

Abstract: A sensor device includes an outer casing, a first sensor module and a second sensor module. The outer casing encloses the first sensor module and the second sensor module at least partially. The first sensor module is enclosed at least partially by a first medium, and the second sensor module is enclosed at least partially by a second medium.

Abstract: A system and method for safing vehicle sensors includes two safety systems, each with a primary sensor for monitoring vehicle motion and activating its corresponding safety system in response to certain vehicle motions. Each sensor may act as a safing sensor for the other in the event that activation of a safety system is indicated by the primary sensor. Each sensor may also monitor the other prior to such an event, to detect a sensor malfunction before that sensor is needed to active a safety system.

Abstract: An example sensor band configured for attachment to a calf of a mammal and used in measuring track and balance motion of the mammal includes one or more first sensors for sensing muscle circumferential pressure at multiple positions; one or more second sensors for sensing Earth's magnetic field; and one or more third sensors for sensing Earth's gravitational field.

Abstract: Disclosed herein is a control module of an inertial sensor, including: at least one inertial sensor including a driving mass; a sensing unit detecting and transferring information of the inertial sensor; a multiplexer unit including at least one multiplexer to selectively transfer the information of the inertial sensor to a sampling unit or a filter unit according to whether before or after start-up of the inertial sensor; a controlling unit including automatic gain control (AGC) and connected to the sampling unit and the filter unit to generate control information including an AGC gain for the inertial sensor; and a driving unit applying the AGC gain to the inertial sensor according to the control information, wherein the sampling unit and the filter unit are connected to each other so as to interwork with each other.

Abstract: According to the product administration system of the present embodiment, the radio tag having the acceleration sensor and the inquiry unit for communication with the radio tag are provided, the inquiry unit sets a direction of acceleration and a threshold value of the acceleration in the direction in the radio tag by communication, and the set radio tag responds to an inquiry from the inquiry unit when it exceeds the threshold value.

Abstract: A device and method of determining a travel direction of a mobile device carried by a user are disclosed. The method includes determining a line along which the mobile device is traveling, where the determining may be based on sensed acceleration of the mobile device. A walking style of the user traveling with the mobile device may be determined. The sensed acceleration may be resolved into at least two mutually perpendicular components. A first component may be substantially parallel with gravity, and a second component may be orthogonal to the first component. The travel direction of the mobile device along the travel line may be determined based on a user's walking style and the resolved sensed acceleration. The determining of the line may include applying a linear least square fitting method to a plurality of acceleration readings obtained from at least one inertial navigation sensor.

Abstract: A combo transducer includes a base, a proof mass, a membrane unit and a plurality of transducing components. The base is formed with an aperture. The proof mass is disposed in the aperture and has a surface that is formed with a cavity. The membrane unit includes a supporting part connected to the base, a covering part disposed to cover the surface of the proof mass, and a resilient linking part interconnecting the supporting part and the covering part such that the proof mass is movable relative to the base. The transducing components are disposed at the membrane unit. At least one of the transducing components is disposed at the covering part and is registered with the cavity.

Abstract: A motion detector includes a chamber, a resilient cantilever arm, a gimbal joint, an air bearing slider, and at least one piezoresistive sensor. The chamber has a front plate and a back plate located on opposite sides of the chamber, and each of the front plate and the back plate has a first through hole and a plurality of second through hole formed therein. The resilient cantilever arm is arranged in the chamber and has a free distal end. The air bearing slider is moveable coupled to the free distal end of the resilient cantilever arm via the gimbal joint. The at least one piezoresistive sensor is attached on the air bearing slider for sensing pitch, roll and yaw associated with the motion of the motion detector.

Abstract: The present invention discloses a MEMS (Micro-Electro-Mechanical System, MEMS) accelerator with enhanced structural strength. The MEMS accelerator is located on a substrate, and it includes: multiple springs, wherein each spring includes: an anchor, fixed on the substrate; an extensible part, which has a fixed end fixed on the anchor, and a free end floating above the substrate; a proof mass, connected to the free ends of the springs; and multiple in-plane sense electrodes, wherein the extensible part is folded back and forth to form a substantially polygon shape as a whole, in which the fixed end is located within the middle one third length of one side of the substantially polygon shape, and the free end is located within the middle one third length of an opposite side of the substantially polygon shape.

Abstract: A physical quantity sensor includes an anchor portion, a movable portion displaceable in a height direction, a supporting portion rotatably connected to the anchor portion and the movable portion, and a detection portion. The supporting portion includes a first connection arm connecting the anchor portion and the movable portion to each other and a leg portion extending from the anchor portion in a direction opposite to the first connection arm, the leg portion being displaced in a direction opposite to a displacement direction of the movable portion when the supporting portion rotates. A stopper surface is disposed at a position to which a distal end portion of the leg portion is contactable when the leg portion is displaced in the direction opposite to the displacement direction of the movable portion. Displacement of the movable portion is restricted when the distal end portion of the leg portion contacts the stopper surface.

Abstract: Disclosed herein are a device for detecting motions and a method for detecting motions. The device for detecting motions includes a sensor detecting motions to output detection result signals; an accumulation operation unit accumulatively summing absolute values of the detection result signals in a preset accumulation period to derive signal accumulation values; a motion determination unit comparing the signal accumulation values with a preset first reference value to determine whether the motions are present; and an output unit outputting motion detection signals according to determination results of the motion determination unit. By this configuration, the exemplary embodiments of the present invention can reflect a size of the detection result signals to motion detection while improving inaccuracy of the motion detection according to a fixing of a threshold value.