Abstract: A micro-electromechanical systems (MEMS) device includes a substrate comprising at least one anchor, a proof mass having first and second deceleration extensions extending therefrom, a motor drive comb, a motor sense comb, a plurality of suspensions configured to suspend the proof mass over the substrate and between the motor drive comb and the motor sense comb. The suspensions are anchored to the substrate. A body is attached to the substrate. At least one deceleration beam extends from a first side of said body. The at least one deceleration beam is configured to engage at least one of the first and second deceleration extensions and slow or stop the proof mass before the proof mass contacts the motor drive comb and the motor sense comb.

Abstract: A flyweight governor valve assembly having a fluid pressure modulator valve element mounted within a valve chamber for axial movement, a first set of primary and secondary weights mounted on a valve sleeve that forms a part of the governor valve assembly, a second set of primary and secondary weights mounted on said sleeve for rotation about the axis of said valve assembly. A spring acting between the primary and secondary weights of each set of weights, the primary weight for one set being separated from its corresponding second weight at a first brake point speed and a primary weight of the second set of weights being separated from its associated second weight at a second brake point speed, each set of weights being pivotally carried by a lever, the operating end of which engages the valve element whereby centrifugal force acting on said weight are translated to axial shifting movement of said valve element to oppose fluid pressure forces acting thereon.