Abstract: The embodiments described herein include scanners that can provide improved scanning laser devices. Specifically, the embodiments described herein provide scanners with a modular construction that includes one or more separately formed piezoelectric actuators coupled to a microelectromechanical system (MEMS) scan plate, flexure structures, and scanner frame. Such modular scanners can provide improved scanning laser devices, including scanning laser projectors and laser depth scanners, LIDAR systems, 3D motion sensing devices, gesture recognition devices, etc.

Abstract: This disclosure pertains to weighing a physical item while it is moving in a servo-driven conveyor system for e-commerce, logistics, manufacturing and other applications. The introduction of an unknown mass to an electro-mechanical feedback or filter network controlling a conveyance system will modify the steady state behavior of that system in such a way that measuring the phase or frequency shift of an input signal or oscillation will enable us to infer the magnitude of that mass.

Abstract: A sensing device is to be connected to a piezoelectric resonator for sensing a target substance in a sample fluid based on oscillation frequency of the piezoelectric resonator. The sensing device includes an oscillator circuit, a voltage supply unit, an information obtaining unit, and a voltage adjusting unit. The oscillator circuit is commonalized for a plurality kinds of piezoelectric resonators. The voltage supply unit is configured to supply a DC drive voltage to the oscillator circuit. The information obtaining unit is configured to obtain type information of a piezoelectric resonator which is connected to the oscillator circuit. The voltage adjusting unit is configured to adjust the DC drive voltage to a voltage corresponding to the connected piezoelectric resonator based on the type information obtained by the information obtaining unit.

Abstract: In the field of nanoresonator oscillators or NEMS (nanoelectromechanical systems) oscillators, a circuit is proposed for measuring the oscillation frequency of a resonator, including a phase-locked loop with a frequency-controlled oscillator and a phase comparator. The resonator includes a vibration excitation input and a dynamic polarization input (using strain gauges). The frequency-controlled oscillator applies a polarization frequency f1 to the polarization input. A frequency generator supplies a fixed intermediate frequency FI; a mixer receives the frequencies f1 and FI for producing an excitation frequency f0 that is the sum or difference of f1 and FI. The phase comparator receives the frequency FI and the output signal of the resonator and produces a control signal that is sent to the frequency-controlled oscillator, indirectly locking the oscillation frequency onto the resonant frequency of the resonator.

Abstract: The present disclosure relates to nanoresonator oscillators or NEMS (nanoelectromechanical system) oscillators. A circuit for measuring the oscillation frequency of a resonator is provided, comprising a first phase-locked feedback loop locking the frequency of a controlled oscillator at the resonant frequency of the resonator, this first loop comprising a first phase comparator. Furthermore, a second feedback loop is provided which searches for and stores the loop phase shift introduced by the resonator and its amplification circuit when they are locked at resonance by the first loop. The first and the second loops operate during a calibration phase. A third self-oscillation loop is set up during an operation phase. It directly links the output of the controllable phase shifter to the input of the resonator. The phase shifter receives the phase-shift control stored by the second loop.

Abstract: A device for weighing micro- and nano-sized particles. The device includes a base portion, an oscillator coupled to the base portion and configured to vibrate the base portion, a first cantilevered beam coupled to the base portion, a second cantilevered beam coupled to the base portion, a first plurality of fingers coupled to the first cantilevered beam near the tip inwardly pointing toward the second cantilevered beam, and a second plurality of fingers coupled to the second cantilevered beam near the tip inwardly pointing toward the first cantilevered beam.

Abstract: Embodiments of the present invention are directed to resonating detection devices in which the sample flows through a conduit having a section in which the conduit is grouped or concentrated with the point of maximum movement. An exemplary device includes a primary conduit, at least one first flex section, at least one second flex section and at least one analysis section. The primary conduit cooperates with an energizer for inducing vibration and a programmed calculator for determining a resonant frequency to calculate a mass related parameter of the solution carried therein.

Abstract: A surface acoustic wave resonator including an input interdigital transducer (IDT), an output IDT, and a pair of gratings with each being spaced from each other by a predetermined distance and attached to a substrate. In at least one embodiment, the distance is equal to one-half of the wavelength of the acoustic wave produced by the input IDT. In a further embodiment, the surface acoustic wave further includes a polymer layer and a biomedical coating covering at least a part of the polymer layer. The surface acoustic wave resonator has uses in the mass sensor and communications fields.

Abstract: The subject invention provides improved means to measure mass collected on a sample collection surface in real time. A resonant structure is used as the “scale” to determine the mass in real time. The invention employs a membrane, or collection substrate, on the end of a resonant structure resonating in the longitudinal direction. A structure resonating in the longitudinal mode offers a considerably higher resonant frequency than the same structure in the bending mode. The higher the resonant frequency, the more resolution in the frequency of oscillation is available to determine the mass of the collection surface or membrane. The present invention implements this attribute in connection with such a structure.

Abstract: The invention relates to a method, to a device for electronic characterization, and to a measurement cell and support for monitoring a chemical or physical process with results that can be assessed in terms of the weight variation of a coating deposited on a piezoelectric sensor, exposed to a fluid medium with stable physical properties. The invention uses the deduction of an analytic expression establishing a simple connection between the phase variation of a fixed-frequency signal, which queries the piezoelectric resonator, and the variation in the bulk density of the coating. The invention is suitable for implementations that use piezoelectric resonators for characterizing biochemical and electrochemical processes, such as, inter alia: piezoelectric biosensors and immunosensors, process and material characterization by AC electrogravimetry, detection of dissolved chemical or biological substances.

Abstract: The objective of the present invention is to provide an unexpected detecting apparatus enabled to evaluate an evenness of a compound coated on an electrode of a battery. The detecting apparatus (1) detects an evenness of a compound (12) coated on an electrode (10) of a battery, and includes a first sensor (20) for measuring a mass per unit area of the compound (12) in any points thereof, a second sensor (30, 50) for measuring a thickness of the compound (12) in the any points, and a holder (40, 60) for holding the first and second sensors (20, 30, 50), in which the first and second sensors (20, 30, 50) measure the mass and thickness at the same time, and the evenness is evaluated on the basis of the measured mass and thickness.

Abstract: A vibration damper assembly that may be attached and moved about a payload or optical mount surface of an optical structure such as an optical table. The vibration damper assembly may include a sensor and an actuator that may be disposed within a housing. In some embodiments, the vibration damper assembly or components thereof may be incorporated into an optical structure in the form of an optical component to be disposed or mounted on an optical mount surface of an optical structure such as an optical table. Embodiments of the vibration damper system may include a controller in communication with the damper assembly Embodiments of the controller may use adaptive tuning, auto-ranging selection of gain factors and other features in order to optimize damping performance.

Abstract: A MEMS microbalance that includes a substrate made of semiconductor material with a cavity, and a resonator, which is suspended above the cavity of the substrate and is formed by a mobile body, by at least one first arm connected between the substrate and the mobile body, which has a first thickness and which enables oscillations of the mobile body with respect to the substrate, by an actuation transducer connected to the mobile body for generating the oscillations at a resonance frequency, and by a detection transducer for detecting a variation of the resonance frequency, wherein the mobile body possesses at least one thin portion having a second thickness smaller than the first thickness of the first arm.

Abstract: There is set forth herein a sensor for sensing of substances. The sensor can include a sensing crystal oscillator and a reference crystal oscillator. The sensing crystal oscillator and the reference crystal oscillator can be arranged in a phase locked loop so that the oscillators oscillate at a common frequency. The sensor can be configured so that there is a baseline phase differential between the oscillation frequencies of the sensing crystal oscillator and the reference crystal oscillator. Detectable substances accumulating on the sensing crystal oscillator will induce a phase shift between output frequencies of the reference oscillator and the sensing crystal oscillator to allow for highly sensitive sensing of substances in small concentrations.

Abstract: Objects in a cargo shipping container are detected by measuring vibration resonant frequency peaks of the container. The mass of an object on the floor of the container effects the vibration resonance of the container, enabling the object to be detected. A vibration source and a plurality of accelerometers are either attached to the steel structure of the container, or are disposed on a supporting structure, such as a cargo crane or lift, so that they contact the container. The vibration source causes the container to vibrate, and the accelerometers detect the vibration resonance of the container. A mismatch between a cargo manifest and an observed cargo, or detection of an object having relatively high mass, e.g., due to lead shielding, can justify a manual inspection. The process uses synchronous processing to achieve the sensitivity needed, is unobtrusive, and does not slow the flow of cargo through a facility.

Abstract: A low tare weight filter system is disclosed. The low weight makes the system especially advantageous for use in inertial microbalance instrumentation where small variations in mass must be accounted for to deliver accurate results. Moreover, the assembly is constructed to permit the filter collector to flex and stretch over a complimentary body incorporated in a filter support base and securely fasten to the same. Such use offers further advantages for instrument performance. It insures consistent apposition and long-term stability in the contact between the filter media and its reference surface.

Abstract: Methods and apparatuses for determining whether a fluid has been introduced into an assay measurement apparatus involving delivering a fluid to a surface of a resonant device. The methods also involve monitoring an electrical signal output by the resonant device, wherein properties of the electrical signal vary based on physical properties of the fluid in contact with the surface of the resonant device and determining if the electrical signal output by the resonant device satisfies a predetermined condition indicative of the presence of the fluid.

Abstract: A vibration damper assembly that may be attached and moved about a payload or optical mount surface of an optical structure such as an optical table. The vibration damper assembly may include a sensor and an actuator that may be disposed within a housing. In some embodiments, the vibration damper assembly or components thereof may be incorporated into an optical structure in the form of an optical component to be disposed or mounted on an optical mount surface of an optical structure such as an optical table. Embodiments of the vibration damper system may include a controller in communication with the damper assembly Embodiments of the controller may use adaptive tuning, auto-ranging selection of gain factors and other features in order to optimize damping performance.

Abstract: A MEMS microbalance that includes a substrate made of semiconductor material with a cavity, and a resonator, which is suspended above the cavity of the substrate and is formed by a mobile body, by at least one first arm connected between the substrate and the mobile body, which has a first thickness and which enables oscillations of the mobile body with respect to the substrate, by an actuation transducer connected to the mobile body for generating the oscillations at a resonance frequency, and by a detection transducer for detecting a variation of the resonance frequency, wherein the mobile body possesses at least one thin portion having a second thickness smaller than the first thickness of the first arm.

Abstract: Methods and apparatuses for performing assays involving binding material elements with a plurality of bonds over a substantial area of a surface of a resonant device establishing a normalized exposure. The methods and apparatuses also involve controlling an external influence applied to the material elements over a first period of time and measuring a signal during a second period of time that is indicative of the change in the amount of material elements bound to the surface relative to the normalized exposure. In some cases, the measured signals are integrated with respect to time to determine the time averaged amount of material elements bound to the surface.

Abstract: A ring electrode design that produces a uniform mass sensitivity distribution across a TSM device is presented. A new technique and apparatus to measure this mass sensitivity distribution is also presented. Novel electrode geometries on thickness shear mode (TSM) quartz resonators achieve radial uniformity of mass sensitivity, how receptive the device is to mass loadings, and high frequency stability across the active sensing area of the sensor device. The device allows for absolute mass measurement down to the nanogram level. Fabricated devices utilizing model predictions were tested using this apparatus, and good agreement between theory and experiment is found.

Abstract: The invention relates to a method, to a device for electronic characterisation, and to a measurement cell and support for monitoring a chemical or physical process with results that can be assessed in terms of the weight variation of a coating deposited on a piezoelectric sensor, exposed to a fluid medium with stable physical properties. The invention uses the deduction of an analytic expression establishing a simple connection between the phase variation of a fixed-frequency signal, which queries the piezoelectric resonator, and the variation in the bulk density of the coating. The invention is suitable for implementations that use piezoelectric resonators for characterising biochemical and electrochemical processes, such as, inter alia: piezoelectric biosensors and immunosensors, process and material characterisation by AC electrogravimetry, detection of dissolved chemical or biological substances.

Abstract: The subject invention provides improved means to measure mass collected on a sample collection surface in real time. A resonant structure is used as the “scale” to determine the mass in real time. The invention employs a membrane, or collection substrate, on the end of a resonant structure resonating in the longitudinal direction. A structure resonating in the longitudinal mode offers a considerably higher resonant frequency than the same structure in the bending mode. The higher the resonant frequency, the more resolution in the frequency of oscillation is available to determine the mass of the collection surface or membrane. The present invention implements this attribute in connection with such a structure.

Abstract: Provided is a dynamic balancing apparatus using a linear time-varying angular velocity model, which includes a rotational shaft on which a rotational body having a rotating unbalanced mass is installed; a linear time-varying angular velocity generator which allow the rotational shaft to be rotated at a linear time-varying angular velocity; a support for supporting both sides of the rotational shaft; and a transducer for measuring applied force or vibration transferred to the support by revolution of the rotational shaft having a linear time-varying angular velocity.

Abstract: A computer implemented method, apparatus, and computer usable program code for testing a material. A signal is sent into the material using the transmitter. The signal has a frequency range that falls within a selected frequency range to form a transmitted signal. An actual response to the transmitted signal is received at a sensor. A simulated response of the material to the transmitted signal is generated using a functional model capable of modeling responses of the material to different frequency ranges falling within the selected frequency range. The simulated response is compared to the actual response to determine if a change has occurred in the material.

Abstract: The present invention relates to an arrangement (1) for detection of a first resonance frequency (F1), related to a mass (1b?) loaded carrier means (1b), and to compare said first resonance frequency (F1) with a second, as a reference used, resonance frequency (F2), related to said carrier means (1b), by using frequency comparing and/or calculating means (3, 4) to evaluate, by a noted frequency shift (F2-F1), a mass weight (1b?). An array of individual carrier means (1a, 1b . . .

Abstract: An object of the present invention is that any of mass load, viscous load and viscoelasticity load is measured separately from other load whereby properties of the substance to be measured are able to be measured correctly. The characteristic feature of the present invention is that, in a method where property of a substance contacting to a quartz oscillator equipped with electrodes on both sides of a quartz plate is measured on the basis of the changes in frequency of the above quartz oscillator, the property of the above substance is measured using at least two frequencies among the n-th overtone mode frequency (n=1, 3, 5, . . . (n=2k+1)) of quartz oscillator when voltage is applied between the above electrodes and using frequencies F1, F2 (F1<F2) giving one half of the maximum value of conductance near the resonant point by each frequency.

Abstract: A method for inferring possible or impending corrosion or fouling of process elements from fluid flowing in a pipe of an industrial process is described. A frequency response of a body is measured. The measured frequency response is compared against a stored value. Corrosion or fouling of the process elements is identified based upon the comparison between the measured frequency response and the stored value.

Abstract: A method for measuring an amount of a sublimate in real time with respect to a lapse of heating time, comprising: adhering the sublimate from a thermoset film during heating to a surface of a crystal oscillator using a nozzle inserted into a detection part; and measuring the amount of the sublimate from a change in a resonance frequency corresponding to the amount of the sublimate adhered to the crystal oscillator. In the method, the thermoset film may be formed on a silicon wafer and the measurement is performed while the thermoset film is heated by a heat source disposed under the silicon wafer; or the sublimate may be set so as to flow together with an airstream ascending toward an upper part of an enclosure covering the thermoset film, and the airstream directly contacts the crystal oscillator through the nozzle inserted into the detection part disposed in the path of the airstream.

Abstract: A dual mode measurement system with quartz crystal microbalance (QCM) is provided, which includes a quartz sensing component, a first measurement circuit, a second measurement circuit and a switch unit. When the first measurement circuit is selected through the switch unit, the first measurement circuit and the quartz sensing component form an oscillation circuit and output a resonance signal. When the second measurement circuit is selected through the switch unit, the second measurement circuit outputs a frequency scanning signal to scan the quartz sensing component, so as to output an impedance sensing signal.

Abstract: A change in mass of a microbridge in a mass sensor can be sensed by applying a time-varying amplitude modulated electrostatic force to excite the microbridge into resonance at the frequency of amplitude modulation. An optical energy is then transmitted at a wavelength close to a resonant wavelength of a Fabry-Perot microcavity, which is formed by etching a movable reflective mirror into a region of the microbridge and by etching a fixed reflective minor in a region spaced apart from the microbridge. The two mirrors are interconnected by an optical waveguide. The movable mirror and fixed mirror reflect the optical energy to a receiver, and a change in the Fabry-Perot microcavity's reflectivity is interferometrically determined. The change in reflectivity indicates a change in the microbridge's resonant frequency due to increased mass of the microbridge resulting from sorption of a target chemical by a layer of chemoselective material deposited on the microbridge.

Abstract: Automatic devices that determine when pollutant deposits have accumulated in ductwork may be employed to notify maintenance personnel or automated cleaning equipment of the need for ducts to cleaned or replaced. Various detection devices may be employed to detect a property of accumulated grease and generate an indication of an accumulation. The detection device may present a surface to the fume stream inside a duct. The surface may be cooled to a temperature that represents a worst case temperature so that the accumulation due to condensation on the detector surface is at least as high as the coolest surface in the ductwork which is being monitored. Alternatively, the detection device may be located external to the duct. The detection device may interrogate the surface of the duct through contact or noncontact measurements to determine the thickness of an accumulated grease layer on the interior of the duct.

Abstract: A sensor for detecting mechanical perturbations represented by a change in an electrical signal includes a structure such as a cantilever, membrane, etc. and a field effect transistor such as a MOSFET embedded in the structure. The drain current of the embedded transistor changes with mechanical perturbations in the structure caused, for example, by a biochemical interaction being sensed. A scanning probe microscope utilizes the embedded MOSFET with a BiMOS actuator.

Abstract: A micromechanical resonator having an actuator configured to provide an excitation, a second component configured to move within a plane at a second frequency in response to the excitation of the actuator, and a first component coupled with the second component such that the movement of the second component at the second frequency induces resonant excitation of the first component that is substantially completely out of the plane.

Abstract: A self-sustaining ultra-high frequency oscillator and method enable the ability to oscillate and output a signal. A balanced bridge circuit is utilized to null an embedding background response. A first vibrating nanoelectromechanical (NEMS) beam resonator is part of one of the branches of the balanced bridge circuit and determines the frequency of the oscillator's output signal. A feedback loop establishes and sets oscillation conditions of the oscillator's signal. Further, the feedback loop connects an output of the first resonator to an input of the balanced bridge circuit.

Abstract: Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.

Abstract: Minute masses of a plurality of measuring objects are measured at a time. A multi-lever is prepared, in which a plurality of cantilevers, each having a buried piezoresistance element, is provided. Different measuring object attracting substances are coated on the multi-lever. The multi-lever is driven by a single vibration exciting device. The vibrational frequency is swept within a predetermined range, and the resonance frequency of each cantilever is detected. Frequency changes before putting in and after putting in the measuring object are detected, and based on this, the mass changes are calculated.

Abstract: It is an object of the present invention to provide a technique that can realize improvement of sensitivity of a vibrator. A platform 50 to which a substance adheres or sticks is provided to be mechanically coupled to a vibrator 20 of a sensor via bridges 51. Sensitivity of the sensor is improved by causing the mass of a substance adhering or sticking onto the platform 50 as if the substance concentratedly adheres or sticks to places where the platform 50 is connected to the vibrator 20. It is preferable to connect, via the bridges 51, the platform 50 to places where the platform 50 vibrates integrally with the vibrator 20. For this purpose, it is preferable to mechanically couple, via the bridges 51, the platform 50 to regions where vibration occurs only in one of an r direction or a ? direction in the vibrator 20.

Abstract: A dual mode measurement system with quartz crystal microbalance (QCM) is provided, which includes a quartz sensing component, a first measurement circuit, a second measurement circuit and a switch unit. When the first measurement circuit is selected through the switch unit, the first measurement circuit and the quartz sensing component form an oscillation circuit and output a resonance signal. When the second measurement circuit is selected through the switch unit, the second measurement circuit outputs a frequency scanning signal to scan the quartz sensing component, so as to output an impedance sensing signal.

Abstract: A condition detection apparatus comprising an AE sensor 1 that detects AE waves, which elastically-occur when a plurality of balls included in an LM system self-rotate and revolve within a circulation section at the same time, and generates detection signals Sae, and a signal processing unit 4 that generates a first parameter indicating an intensity of the AE waves based on the generated detection signals Sae, generates based on the detection signals Sae a second parameter by weighting only detection signals Sae temporally-continuously detected among the detection signals Sae, generates based on the detection signals Sae a third parameter by weighting only detection signals Sae temporally-discontinuously detected in correspondence with the movement of the balls among the detection signals Sae, and judges contents of an operational condition of the LM system using any one of the first, second or third parameter, is provided to enable prognosis of occurrences of failures in the LM system, to improve maintainabi

Abstract: A device according to the invention for performing vibration measurements on a test part that has a rotor, especially a transmission, includes a base structure, on which a fastening device for the test part is arranged, and a vibration measuring device for measuring vibrations caused by a rotation of the rotor of the test part. According to the invention, a balancing device is provided, arranged on the base structure or at least partially integrated into the base structure, for identifying and/or eliminating an imbalance in the rotor. The device of the invention thus enables both a balancing of the rotor and the performance of vibration measurements on the rotor, using a single device.

Abstract: The present disclosure relates to a method of beat tuning in a slightly asymmetric ring-type structure, and can be effectively used to control the beat property of a structure such as a bell, which can be modeled to a slightly asymmetric ring. A method of beat tuning in a slightly asymmetric ring structure includes the steps of establishing an original ring model which simplifies said ring structure, establishing an equivalent imperfection mass model which is equivalent to said original ring model and has at least one or more point masses on an asymmetric ring, determining magnitudes and positions of the point masses in said equivalent imperfection mass model based on mode data of said original ring model, and determining magnitudes and positions of masses which should be added to or removed from said equivalent imperfection mass model in order to obtain desired beat properties.

Abstract: A piezoelectric cantilever with a non-piezoelectric, or piezoelectric tip useful as mass and viscosity sensors. The change in the cantilever mass can be accurately quantified by monitoring a resonance frequency shift of the cantilever. For bio-detection, antibodies or other specific receptors of target antigens may be immobilized on the cantilever surface, preferably on the non-piezoelectric tip. For chemical detection, high surface-area selective absorbent materials are coated on the cantilever tip. Binding of the target antigens or analytes to the cantilever surface increases the cantilever mass. Detection of target antigens or analytes is achieved by monitoring the cantilever's resonance frequency and determining the resonance frequency shift that is due to the mass of the adsorbed target antigens on the cantilever surface. The use of a piezoelectric unimorph cantilever allows both electrical actuation and electrical sensing.

Abstract: A portable analytical system for detecting organic chemicals in water comprising a miniature preconcentrator and a SAW detector, the latter being characterized by a nanoporous carbon coating that provides improved response compared to prior art polymer coatings, particularly when detecting low concentrations of trihalomethane chemicals, such as chloroform and bromoform.

Abstract: A biochemical semiconductor chip laboratory is disclosed including a coupled address and control chip for biochemical analyses and a method for producing the same. In at least one embodiment the semiconductor chip laboratory has a semiconductor sensor chip, which provides numerous analytical positions for biochemical samples in a matrix. The sensor chip is located on the address and control chip and the analytical positions are in electric contact with a printed contact structure on the upper face of the address and control chip via low-resistance through-platings through the semiconductor substrate of the semiconductor chip.

Abstract: This present invention relates to a system for measuring resonant frequency and delay time of the quartz crystal microbalance. The system includes a transistor oscillating circuit, a switch circuit, a comparator circuit, and a control circuit. The transistor oscillating circuit comprises a quartz oscillator for generating an original oscillating signal. The switch circuit is coupled to the transistor oscillating circuit for outputting a start signal to generate the original oscillating signal. The comparator circuit is coupled to the transistor oscillating circuit for transforming the original oscillating signal to a square wave oscillating signal. The control circuit is coupled to the comparator circuit for receiving the square oscillating signal to estimate the resonant frequency and the delay time of the quartz crystal microbalance.

Abstract: A sensor chip assembly for use in a sensor capable of Surface Plasmon Resonance (SPR) and gravimetric sensing. The assembly comprising a transparent piezoelectric substrate (I) having a first surface and a second surface opposite to the first surface. The assembly also comprising first and second thin film metal electrodes (2,3) respectively provided on the first and second surfaces of the substrate (1). The second thin film metal electrode (3) being position on the second surface of the substrate (1) such that a light beam is capable of being transmitted through the second surface of the substrate and reflected from the first thin film metal electrode. The assembly also comprising an attenuated total reflection (ATR) coupler (11) disposed adjacent to the second thin film metal electrode (3).

Abstract: A measurement system including a staging unit including a substrate having piezoelectric properties and a conductive electrode formed on the substrate, the conductive electrode including an area adapted to receive a sample, and an oscillator coupled to the conductive electrode. A method including in a tissue sample having a mass of less than about one microgram and that exerts a high osmotic pressure, calculating an osmotic pressure value for the tissue sample from a plurality of measurements of changes in the mass due to swelling.

Abstract: The invention relates to fluid paths in etchable materials. Fluid paths are formed by forming a cavity through a substrate material with a first dry removal process to produce a first surface of the cavity. The first surface of the cavity is associated with a first roughness. The first surface of the cavity is etched with a second wet removal process to reduce the first roughness and produce a second roughness associated with the first surface of the cavity. A coating is applied to the first surface of the cavity to produce a second surface to improve wettability of the first or second surface of the cavity, reduce in size or number gas nucleation sites in the first or second surface of the cavity, reduce the amount of debris associated with the first roughness carried by the fluid flow, and/or improve hydrophilicity of the first or second surface.

Abstract: A device for measuring thickness and/or rate of thickness increase of a film comprises at least one piezoelectric element, and first and second electrodes in contact with the piezoelectric element. A method of measuring thickness and/or rate of thickness increase of a film comprises applying a voltage across a piezoelectric element from a first electrode to a second electrode, thereby causing the piezoelectric element to vibrate, and measuring the rate of vibration of the piezoelectric element. Heat may be applied to the piezoelectric element. The piezoelectric element may be formed of quartz crystal, e.g., IT-cut or near-IT-cut.