Abstract: The invention relates to a clamp element for a temperature-independent turgor pressure measurement device for measuring the turgor pressure in a plant sample.

Abstract: [Problem] To provide a pressure sensor element which is not greatly decreased in the resistance due to temperature increase. [Solution] A pressure sensor element which is provided with a piezoelectric element and a high-resistance material film. The piezoelectric element has an upper surface and a lower surface. The high-resistance material film at least partially covers the upper surface and/or the lower surface. The electrical resistance of the high-resistance material film is higher than the electrical resistance of the piezoelectric element.

Abstract: A pressure sensor venting system for efficiently and accurately measuring a liquid level. The pressure sensor venting system generally includes a housing, a pressure transducer within the housing, a diaphragm, a pressure passage fluidly connecting the pressure transducer and a pressurized liquid from the diaphragm, and a first vent tube that is fluidly connected to the pressure transducer opposite of the pressure passage. The distal end of the first vent tube extends outwardly from the housing and extends a distance into a second vent tube. The second vent tube is fluidly connected to liquid resistant vent that is positioned within the interior space of the liquid container and above the liquid level.

Abstract: A pressure compensator is configured to compensate for volume variations of an insulation medium of a subsea installation. The pressure compensator includes a first bellows chamber having walls and a first bellows part. The first bellows chamber is in flow connection with an insulation medium chamber of the subsea installation, and the walls of the first bellows chamber are configured to separate the insulating medium from surroundings. The first bellows chamber is surrounded by a second bellows chamber having walls and a second bellows part. The second bellows chamber is configured to form a closed intermediate space around the first bellows chamber. The walls of the second bellows chamber are configured to separate at least the bellows parts of the first bellows chamber from the surrounding sea water. The second bellows chamber is further filled with an intermediate medium.

Abstract: A remotely interrogatable pressure and/or temperature measuring device includes at least an acoustic wave sensor including at least one resonator coupled to a first antenna element, and an interrogation system including a second antenna element for transmission and reception. The device further includes an expandable tubular structure, the structure integrating a biocompatible material, and the acoustic wave sensor is encapsulated in the biocompatible material. The second antenna element operates at frequencies above several tens of MegaHertz.

Abstract: Certain embodiments of the invention may include systems, methods, and apparatus for providing compensating atmospheric pressure measurements in fired equipment. According to an example embodiment of the invention, a method is provided compensating pressure measurements. The method includes providing a wind compensating ring tube having three or more apertures to equalize pressure inside the compensating ring tube, installing the wind compensating ring tube adjacent to a furnace, connecting a pressure transmission tube from the wind compensating ring tube to one or more pressure sensors, and transmitting pressure from inside the wind compensating ring tube to the one or more pressure sensors by the pressure transmission tube.

Abstract: The present invention relates to a method of determining both pressures and temperatures in a high temperature environment. The present invention also relates to a method of determining temperatures about a pressure-sensing element using a bi-functional heater. In addition, the present invention preferably relates to a pressure sensor with the pressure-sensing element and a heating element both integrated into the sensor's packaging, preferably onto the diaphragm of the pressure sensor, and particularly to such a pressure sensor capable of operating at high or elevated temperatures, and even more particularly to such a pressure sensor wherein the heating element is capable of both heating, at least in part, the pressure-sensing element and monitoring the temperature of the application area. Preferably, the pressure-sensing element is formed from shape memory alloy (SMA) materials that can be used at high or elevated temperatures as a pressure sensor with high sensitivity.

Abstract: An air pressure sensor (100) for impact recognition is provided, having a chamber (R), and a sensor element (S) for generating a signal as a function of the air pressure being situated in the chamber (R). The chamber (R) is sealed off by a pressure compensation element (M, MV). The pressure compensation element (M, MV) is designed in such a way that penetration of interfering substances into the chamber (R) is prevented. However, transmission of pressure into the chamber (R) from the outside is possible.

Abstract: Method for one of adjusting (taring) or re-calibrating an apparatus that includes a liquid-filled previously pressurized flexible tube that is closed at one end and is connected to a pressure sensor at an other end. Method includes activating predetermined controlling functions by establishing a differential of an external pressure exerted onto the tube by a person and a pressure prevailing in the previously pressurized tube. In establishing the differential, the method includes taking into account variations of the pressure prevailing in the previously pressurized tube, when no external pressure is being exerted on the tube by the person, due to at least one variable external ambient parameter.

Abstract: The present invention is a measuring cell with a base body, a measurement membrane which is arranged on the base body, and a measurement device, where a clearance between the measurement membrane and the base body is filled with a fluid which presents an increased heat conductivity (?) compared to air.

Abstract: A fluid pressure measurement sensor (11) comprises a microelectromechanical system (MEMS) chip (23). The MEMS chip (23) comprises two lateral walls (56), a sensitive membrane (49) connected to said lateral walls (56) and sealed cavity (9). The exterior surfaces of the lateral walls (56) and the sensitive membrane (49) are exposed to the fluid pressure. The lateral walls (56) are designed to subject the sensitive membrane (49) to a compression stress transmitted by the opposite lateral walls (56) where said lateral walls (56) are connected to the sensitive membrane (49) such that the sensitive membrane (49) works in compression only. The MEMS chip (23) also comprises a stress detection circuit (31) to measure the compression state of the sensitive membrane (49) which is proportional to the fluid pressure.

Abstract: A pressure sensor for detecting a pressure of a first object to be measured; a pressure sensor for detecting a pressure of a second object to be measured; a temperature sensor for detecting the temperature of the pressure sensor and the pressure sensor; a first correcting portion for executing a correction that eliminates a fluctuation portion, due to a change in temperature, from the detection signal of the pressure sensor, and for outputting the signal, after the correction, as a measurement signal for the first object to be measured; and a second correcting portion for executing a correction that eliminates a fluctuation portion, due to a change in temperature, from the detection signal of the pressure sensor, and for outputting the signal, after the correction, as a measurement signal for the second object to be measured; wherein the temperature sensor is integrated with the pressure sensor and the pressure sensor so as to be in a state of mutual contact.

Abstract: Calibrating a measuring cell arrangement having a diaphragm vacuum measuring cell having a programmable heater for heating the diaphragm vacuum measuring cell to a constant presettable temperature. The heater encompasses the measuring cells and is encompassed by an insulation jacket. The method includes setting a first heating temperature on the measuring cell to a constant preset value, performing a first calibration step by generating at least one preset pressure in a vacuum volume and obtaining vacuum measuring signals of the measuring cell and at least one reference measuring cell, storing pressure values in the memory, determining compensation values from the difference values of the measuring cell and the reference measuring cell, intermediately storing these difference values in a calibration data memory and gauging the measuring cell by transmitting the determined compensation values to the measuring cell data memory.

Abstract: In various embodiments, a sensor device is provided. The sensor includes a sensor receiving portion, a sensor arranged in the sensor receiving portion and a cap covering the sensor and the sensor receiving portion. The cap includes a plurality of recesses in the inner side wall of the cap for reducing the pressure measured by the sensor.

Abstract: A fuel cell system may include a fuel cell stack, a manifold in fluid communication with the stack, and a pressure sensor. The pressure sensor may include a housing defining a chamber in fluid communication with the manifold, a pressure sensing element disposed within the chamber, and a heating element disposed within the chamber.

Abstract: A pressure-compensation unit, particularly for a tank-pressure sensor in a tank of a motor vehicle. The pressure-compensation unit includes a housing lid and a gas-permeable filter diaphragm, which covers an air hole. The pressure-compensation unit includes a cap-shaped cover element, which covers the filter diaphragm.

Abstract: A pressure detection apparatus has a pressure-sensitive resistor whose first resistance varies according to pressure and a change of its own temperature, a temperature-sensitive resistor which has a same resistance-temperature coefficient as the pressure-sensitive resistor and whose second resistance varies according to the change of the temperature, a current source supplying first and second constant-currents to the pressure-sensitive and temperature-sensitive resistors respectively, and a pressure signal generation output section. The current source adjusts the first and second constant-currents so that when the pressure is an initial pressure, a reference first voltage appearing across the pressure-sensitive resistor and a reference second voltage appearing across the temperature-sensitive resistor become equal to each other.

Abstract: Pressure sensors having components with reduced variations due to stresses caused by various layers and components that are included in the manufacturing process. In one example, a first stress in a first direction causes a variation in a component. A second stress in a second direction is applied, thereby reducing the variation in the component. The first and second stresses may be caused by a polysilicon layer, while the component may be a resistor in a Wheatstone bridge.

Abstract: A pressure of a fluid is determined in a vacuum-tight welded housing containing a first membrane enclosing a part of a first inner volume and having a first contact area associated with a first temperature sensor and a heater. A second membrane opposite the first contact area also encloses part of the first inner volume and has a second contact area associated with a second temperature sensor. The first or second membrane is elastic around the contact area. The membranes hermetically seal a second inner volume at a reference pressure. The contact areas determine the mechanical and thermal contact due to the elasticity of one of the membranes when the first inner volume is connected to the fluid. When the volume is connected to the fluid F, the intensity and/or the time gradient of the heat transfer from the first to the second contact area is measured.

Abstract: The invention relates to a housing (2) for a drive device, especially for an adjusting device and/or a windshield wiper drive in a motor vehicle, comprising a pressure compensating membrane (4) obturating a housing opening (7). The invention is characterized in that the pressure compensating membrane (4) has a peripheral sealing surface (11) which extends continuously in the direction of circumference. The invention further relates to a drive device and to a method for testing the operativeness of a pressure compensating membrane (4).

Abstract: The invention relates to an electronic pressure gauge for measuring the pressure inside a container, particularly a pressurized gas cylinder, said pressure gauge including: at least one pressure sensor; an electronic unit designed to acquire, store and process data; and at least one information device capable of transmitting at least one item of information. The pressure gauge also includes a first radio with a reception port, said first radio being connected to the electronic unit so as to receive external data in order to modify the operation or the configuration of the pressure gauge. The reception port of the first radio is designed to read data modulated in terms of the frequency and/or intensity of an external magnetic field at a first low frequency, for example a frequency between 50 and 300 khz.

Abstract: Circuits, methods, and systems to compensate pressure sensor readings for changes in temperature. An example measures temperature in a field-effect-transistor-based pressure sensor or micro-electromechanical system by measuring the device's threshold voltage. This threshold voltage is linearly dependent on the temperature but shows negligible sensitivity to mechanical stress. This allows the pressure sensor's temperature to be determined in an environment of changing pressure. Once the temperature is known, the pressure sensor's pressure readings can be adjusted. The threshold voltage can be extracted by measuring the turn-on transistor characteristic of the device and using device models. Alternately, the threshold voltage can be extracted using threshold voltage extraction circuits.

Abstract: A MEMS and/or NEMS pressure measurement device comprising a deformable membrane suspended on a substrate, one of the faces of the membrane being intended to be subjected to the pressure to be measured, detection means with strain gauges for the deformation of the membrane, said detection means being formed on a substrate and a non-deformable arm, transmitting the deformation in an amplified manner of the membrane to the detection means, the arm being rotatably hinged to the substrate about an axis (Y) substantially parallel to the plane of the membrane and which is integral with the membrane so that it transmits a deformation of the membrane to the detection means in an amplified manner.

Abstract: A semiconductor pressure sensor includes a silicon substrate, an active gauge resistance forming portion having a first diaphragm and a first gauge resistance formed on the silicon substrate, and a dummy gauge resistance forming portion for temperature compensation having a second diaphragm and a second gauge resistance, formed on the substrate. The first diaphragm of the active gauge resistance forming portion and the second diaphragm of the dummy gauge resistance forming portion for temperature compensation are formed of a common polysilicon film. The polysilicon film has an anchor portion to be connected to the substrate. The first and second diaphragms have mutually identical or symmetrical structures and the first and second gauges have mutually identical or symmetrical structures. Accordingly, a semiconductor pressure sensor capable of highly accurate temperature compensation and manufacturing method thereof can be provided.

Abstract: An automatic operation method for setting temperature compensation coefficients of a digital pressure gauge is revealed. Primarily, a microcontroller unit (MCU) in the pressure gauge is equipped with built-in calibration procedures. The gauge is placed into a temperature-controlled chamber in order to obtain the temperature coefficient of offset (Tco) and temperature coefficient of span (Tcs). This method is the automatic measuring outputs of zero pressure/full scale at two temperatures to calculate the temperature coefficients Tco/Tcs. The two temperature compensation coefficients are stored in the MCU inside the pressure gauge. As the pressure gauge operates in any working temperature environments, the gauge based on a certain algorithm formula with the two stored temperature coefficients shows an accurate pressure reading.

Abstract: The invention relates to a measuring cell with a casing for housing a sensor, in particular a pressure transducer, in which the casing has a pressure compensation vent for the sensor; and is provided with a sealing element with an axisymmetrical circumferential surface arranged proximate an internal surface of a casing bore formed operably and complementary hereto, and that the pressure compensation vent is formed as at least one gap resistant to ignition flashovers by interaction of a strip-shaped and plane surface section extending along the casing bore on the circumferential surface of the sealing element with the internal surface of the casing bore.

Abstract: A pressure sensor device has a sensor detecting pressure of a gas that is introduced from the outside, a heater for heating the sensor, a package containing the sensor and the heater, a circuit portion producing an output signal that represents the pressure of the gas based on the detection output detected by the sensor, and a circuit containing portion containing the circuit portion. The package and the circuit containing portion are structured from separate cases and are disposed separately with a connecting structural member interposed therebetween. The connecting structural member 90 includes electrode lead pins connecting between the sensor within the package and the circuit portion within the circuit containing portion, insulated pipes for covering the outer peripheries of the electrode lead pins, and coil springs covering the outer peripheries of the insulated pipes.

Abstract: A sensor for force is formed from an elastomeric cylinder having a region with apertures. The apertures have passageways formed between them, and an optical fiber is introduced into these passageways, where the optical fiber has a grating for measurement of tension positioned in the passageways between apertures. Optionally, a temperature measurement sensor is placed in or around the elastomer for temperature correction, and if required, a copper film may be deposited in the elastomer for reduced sensitivity to spot temperature variations in the elastomer near the sensors.

Abstract: A micro vacuum gauge includes a substrate, a floating structure that is held above the substrate by a supporting structure extending from the substrate in a state where the floating structure is thermally isolated from the substrate, a heat generator that is arranged in the floating structure to generate heat, and a temperature sensor that is arranged in the floating structure to measure a difference in temperature between the substrate and the floating structure. A second member having a lower emissivity than a first member surrounding the heat generator and the temperature sensor is formed at least on a surface of the floating structure by being joined to the first member.

Abstract: An apparatus for a burst safe pressure-neutral high pressure cylinder in pVT and condensate cells is described. The dimensions of an outer cylinder are such as to prevent plastic flow of the inner cylinder wall caused by elevated inside pressure and/or temperature.

Abstract: A differential-pressure flowmeter that can reduce (eliminate) a difference between the ambient temperature of one pressure sensor and the ambient temperature of another pressure sensor so as to allow for accurate and stable pressure measurement is provided, and a flow-rate controller equipped with such a differential-pressure flowmeter is provided. Provided are a body having a main fluid channel through which a fluid, whose pressure is to be measured, flows, and two pressure sensors held by the body and arranged in series relative to the main fluid channel, and a temperature balancer composed of a material with high thermal conductivity is accommodated in a recess that is formed in the body located below the two pressure sensors.

Abstract: The present disclosure relates generally to pressure sensors, and more particularly, to methods and apparatus for compensating pressure sensors for stress, temperature and/or other induced offsets and/or errors. In one illustrative embodiment, a pressure sensor may include a pressure sensing die mounted to a substrate of a pressure sensor package. The pressure sensor die may include on-board compensation. In some instances, the on-board compensation may include an on-board heating element and an on-board zener diode trim network, both situated on or in the pressure sensing die. The zener diode trim network may include one or more zener diodes and one or more resistive elements, where the zener diodes can be selectively activated to “trim” the resistive network to compensate for one or more offsets and/or errors of the pressure sensor.

Abstract: An implantable intraocular pressure sensor system has a sealed geometric shape with an internal pressure at a first value. A strain gauge wire is embedded in a surface of the sealed geometric shape. When the surface is deflected by intraocular pressure, a measured resistance of the strain gauge wire indicates the intraocular pressure. The system also has a processor coupled to a power source and memory. The processor is configured to read the measured resistance and write values corresponding to intraocular pressure to the memory.

Abstract: A method for the compensating temperature gradient influences on a pressure measuring transducer, comprising the steps of: registering a pressure signal Sp(t); registering a temperature signal T(t); ascertaining a pressure measured value ps(Sp(t), T(t)); determining the time derivative of the temperature signal dT/dt; correcting the pressure measured value with a correction function, which depends on the time derivative, wherein, as a function of the sign of the time derivative, another correction function is selected, or other coefficients in a function of equal type are selected.

Abstract: Certain embodiments of the invention may include systems, methods, and apparatus for providing compensating atmospheric pressure measurements in fired equipment. According to an example embodiment of the invention, a method is provided compensating pressure measurements. The method includes providing a wind compensating ring tube having three or more apertures to equalize pressure inside the compensating ring tube, installing the wind compensating ring tube adjacent to a furnace, connecting a pressure transmission tube from the wind compensating ring tube to one or more pressure sensors, and transmitting pressure from inside the wind compensating ring tube to the one or more pressure sensors by the pressure transmission tube.

Abstract: A pressure gauge mounted to a pump or a back pressure regulator in an HPLC, SFC, or SFE system provides improved solvent exchange and improved measurement precision. A through hole having an inside diameter of 1.0 mm is made in a hexagonal member similar in shape to a pipe joint. A part of the hexagonal member is cut away to form a flat surface such that the distance to the outside periphery of the through hole is 0.5 mm to serve as a strain-measurement strain gauge attaching surface. One strain gauge is attached to the center of the strain-measurement strain gauge attaching surface, and two strain gauges are attached for temperature correction, one on the same surface as the strain-measurement strain gauge attaching surface and the other on an outside surface of the hexagonal member.

Abstract: A transducer comprising a filter assembly that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while removing dynamic pressure.

Abstract: A method is present for monitoring a structure. A plurality of modes is identified for a first response for the structure at a first temperature. Each mode in the plurality of modes is adjusted from the first temperature to the second temperature to form a plurality of temperature adjusted modes. A temperature adjusted response is formed from the plurality of temperature adjusted modes in which the temperature adjusted response is adjusted to a second temperature from the first temperature. The temperature adjusted response is compared to a second response to evaluate the changes in the structure between the two sets of measurements.

Abstract: A pressure compensation unit for use in a pressure sensor includes a housing which has at least one continuous channel, at least one opening being provided in a wall of the channel. The opening is connectable to a reference pressure chamber of the pressure sensor via at least one air passage in the housing. The opening is closed by at least one gas-permeable and preferably fluid-tight filter diaphragm.

Abstract: A pressure measuring device includes a pressure sensor element and an analog-digital converter. An output signal voltage of the pressure sensor element is a function of a temperature and is applied as an input voltage to an input of the analog-digital converter. The analog-digital converter is adapted to convert any input voltage from input voltage ranges which vary with a temperature into a digital value representing the input voltage.

Abstract: Circuits, methods, and systems to compensate pressure sensor readings for changes in temperature. An example measures temperature in a field-effect-transistor-based pressure sensor or micro-electromechanical system by measuring the device's threshold voltage. This threshold voltage is linearly dependent on the temperature but shows negligible sensitivity to mechanical stress. This allows the pressure sensor's temperature to be determined in an environment of changing pressure. Once the temperature is known, the pressure sensor's pressure readings can be adjusted. The threshold voltage can be extracted by measuring the turn-on transistor characteristic of the device and using device models. Alternately, the threshold voltage can be extracted using threshold voltage extraction circuits.

Abstract: A pressure sensor for detecting a pressure of a first object to be measured; a pressure sensor for detecting a pressure of a second object to be measured; a temperature sensor for detecting the temperature of the pressure sensor and the pressure sensor; a first correcting portion for executing a correction that eliminates a fluctuation portion, due to a change in temperature, from the detection signal of the pressure sensor, and for outputting the signal, after the correction, as a measurement signal for the first object to be measured; and a second correcting portion for executing a correction that eliminates a fluctuation portion, due to a change in temperature, from the detection signal of the pressure sensor, and for outputting the signal, after the correction, as a measurement signal for the second object to be measured; wherein the temperature sensor is integrated with the pressure sensor and the pressure sensor so as to be in a state of mutual contact.

Abstract: A pressure measuring device for measuring and/or monitoring the pressure of a measured medium. The pressure measuring device includes a sensor housing and a measurement transmitter, wherein assigned to the sensor housing is a pressure measuring cell with a pressure sensitive measuring element. Assigned to the pressure measuring cell is a temperature sensor, and assigned to the measurement transmitter is a control/evaluation unit.

Abstract: An air pressure sensor that has a first conductive membrane configured for deflection in response to pressure differences between air at a reference pressure and air at a pressure to be sensed. The sensor also has a second conductive membrane configured for deflection in response to a change in temperature to which the pressure sensor is exposed. The sensor uses a circuit in electrical communication with the first and second conductive membranes, that obtains a first signal and second signal from the first and second conductive membranes respectively. The first and second signals are indicative of the deflection of the first and second conductive membranes. The circuit adjusts the first signal by the second signal to generate an output signal indicative of the air pressure.

Abstract: A multivariable process fluid pressure transmitter includes an electronics module and a sensor module. The sensor module is coupled to the electronics module. A process fluid temperature sensor is coupled to the process fluid pressure transmitter. A differential pressure sensor is disposed within the sensor module and is operably coupled to a plurality of process fluid pressure inlets. A static pressure sensor is also disposed within the sensor module and is operably coupled to at least one of the process fluid pressure inlets. A first temperature sensor is disposed within the sensor module and is configured to provide an indication of a temperature of the differential pressure sensor. A second temperature sensor is disposed within the sensor module and is configured to provide an indication of a temperature of the static pressure sensor. Measurement circuitry is operably coupled to the differential pressure sensor, the static pressure sensor, and the first and second temperature sensors.

Abstract: The present invention relates to a method of determining both pressures and temperatures in a high temperature environment. The present invention also relates to a method of determining temperatures about a pressure-sensing element using a bi-functional heater. In addition, the present invention preferably relates to a pressure sensor with the pressure-sensing element and a heating element both integrated into the sensor's packaging, preferably onto the diaphragm of the pressure sensor, and particularly to such a pressure sensor capable of operating at high or elevated temperatures, and even more particularly to such a pressure sensor wherein the heating element is capable of both heating, at least in part, the pressure-sensing element and monitoring the temperature of the application area. Preferably, the pressure-sensing element is formed from shape memory alloy (SMA) materials that can be used at high or elevated temperatures as a pressure sensor with high sensitivity.

Abstract: A pressure compensator is configured to compensate for volume variations of an insulation medium of a subsea installation. The pressure compensator includes a first bellows chamber having walls and a first bellows part. The first bellows chamber is in flow connection with an insulation medium chamber of the subsea installation, and the walls of the first bellows chamber are configured to separate the insulating medium from surroundings. The first bellows chamber is surrounded by a second bellows chamber having walls and a second bellows part. The second bellows chamber is configured to form a closed intermediate space around the first bellows chamber. The walls of the second bellows chamber are configured to separate at least the bellows parts of the first bellows chamber from the surrounding sea water. The second bellows chamber is further filled with an intermediate medium.

Abstract: The invention relates to a housing (2) for a drive device, especially for an adjusting device and/or a windshield wiper drive in a motor vehicle, comprising a pressure compensating membrane (4) obturating a housing opening (7). The invention is characterized in that the pressure compensating membrane (4) has a peripheral sealing surface (11) which extends continuously in the direction of circumference. The invention further relates to a drive device and to a method for testing the operativeness of a pressure compensating membrane (4).

Abstract: An implantable pressure sensor system having a sensor assembly configured and adapted to measure pressure in a volume, the sensor assembly including at least a first MEMS pressure sensor, an application-specific integrated circuit (ASIC) having memory means, temperature compensation system, drift compensation system, and power supply means for powering the sensor assembly, the first MEMS pressure sensor having a pressure sensing element that is responsive to exposed pressure, the pressure sensing element being adapted to generate a pressure sensor signal representative of the exposed pressure, the temperature compensation system being adapted to correct for temperature induced variations in the pressure sensor signal, the drift compensation system being adapted to correct for pressure and temperature induced pressure sensor signal drift.

Abstract: The present disclosure relates generally to pressure sensors, and more particularly, to methods and apparatus for compensating pressure sensors for stress, temperature and/or other induced offsets and/or errors. In one illustrative embodiment, a pressure sensor may include a pressure sensing die mounted to a substrate of a pressure sensor package. The pressure sensor die may include on-board compensation. In some instances, the on-board compensation may include an on-board heating element and an on-board zener diode trim network, both situated on or in the pressure sensing die. The zener diode trim network may include one or more zener diodes and one or more resistive elements, where the zener diodes can be selectively activated to “trim” the resistive network to compensate for one or more offsets and/or errors of the pressure sensor.