Abstract: An apparatus (10) for fuelling an aircraft, in particular during performing a tank leakage test on the aircraft, comprises a fuel supply line (14) for supplying fuel to an aircraft tank system (12), at least one pressure sensor (26) for sensing a pressure within the aircraft tank system (12) and for providing a signal indicative of the pressure within the aircraft tank system (12), an electronic control unit (ECU) for processing the signal of the pressure sensor (26) and for generating an emergency shut-off signal, if the pressure within the aircraft tank system (12) exceeds a first predetermined level, and an emergency shut-off device (24) which is controlled by the electronic control unit (ECU) and which is adapted to interrupt the supply of fuel to the aircraft tank system (12) in response to the emergency shut-off signal from the electronic control unit (ECU).

Abstract: Embodiments involve smart device fabrication for semiconductor processing tools via precision patterning. In one embodiment, a method of manufacturing a semiconductor processing tool component includes providing a substrate of the semiconductor processing tool component, patterning the substrate to form a sensor directly on the substrate, and depositing a top layer over the sensor. The sensor may include, for example, a temperature or strain sensor. The method can also include patterning the substrate to form one or more of: heaters, thermistors, and electrodes on the substrate. In one embodiment, the method involves patterning a surface of the component oriented towards a plasma region inside of the semiconductor processing tool.

Abstract: Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a microelectromechanical system (MEMS) sensor for pressure measurement. The MEMS sensor is attached to a glass tube which is compressively sealed to a mounting frame that is attachable to a pressure port of a fluid-containing enclosure. Techniques disclosed herein provide an hermetic seal between the tube and the mounting frame and a rigid seal between the MEMS sensor to a pressure sensor while decoupling thermal expansion stress from the MEMS sensor. With such decoupling techniques, pressure sensing reliability and accuracy can be improved because thermal expansion stress is decoupled from the MEMS sensor. Such techniques provide an accurate, durable, and cost-effective pressure sensor.

Abstract: A method of forming a dual port pressure sensor includes forming a first opening and a second opening in a flag of a lead frame. An encapsulant is molded to hold the lead frame in which the encapsulant is over a top of the flag and a bottom of the flag is uncovered by the encapsulant. A first opening in the encapsulant is aligned with and larger than the first opening in the flag and a second opening in the encapsulant aligned with the second opening in the flag. A pressure sensor transducer is attached to the bottom of the flag to cover the first opening in the flag, wherein the pressure sensor transducer provides an electrically detectable correlation to a pressure differential based on a first pressure received on its top side and a second pressure received on its bottom side. An integrated circuit is attached to the bottom of the flag. The integrated circuit is electrically coupled to the pressure sensor. A lid is attached to the encapsulant to form an enclosure around the bottom of the flag.

Abstract: A header assembly for a pressure sensor and methods for manufacturing and using the same are provided. In one example embodiment, a header insert may include a base; a hollow protrusion coupled to the base and having a metalized inner surface and a metalized outer surface, wherein the metalized outer surface of the hollow protrusion is used to couple to a header and the metalized inner surface of the hollow protrusion is used to couple to a header pin; and wherein a seal is formed between the header, the header insert and the header pin.

Abstract: A fastening device includes a support element placed on a vehicle wall, a retaining element having a retaining wing for fastening the device in an opening of the wall, and a sealing element between the support and retaining elements. The retaining element is rotatable relative to the support element along a rotation path, e.g. by a bayonet-type movement. The support element, the retaining element and/or the sealing element are designed such that a play remains between the support element, the retaining element and/or the sealing element in a first section of the rotation path, and such that the support element and/or the retaining element move(s) relative to the sealing element so as to eliminate the play at the end of the rotation path, whereby the sealing element is sealingly compressed between the support element and the retaining element, thus sealing the fastening device.

Abstract: A retractable flow conditioner that includes a body adapted for insertion into a fluid in a confined conduit upstream of a differential pressure measuring probe. The body has at least one flow conditioning element. The retractable flow conditioner also includes a mounting assembly attached to the body. The mounting assembly is configured to retractably mount the body into the confined conduit.

Abstract: A circuit carrier for a sensor unit comprises a first interface via which at least one electrical output signal is tapped at least at one connection point of a measuring cell, a second interface via which the at least one electrical output signal of the measuring cell is applied via at least one first contact element to a circuit board with an electronic circuit, and a hollow, cylindrical main body. The main body includes an inner joining geometry defined on an inner contour which defines at least in part the first interface, an outer joining geometry which defines at least in part the second interface, and configured to electrically connect to a connection point of the measuring cell in a force-free manner. The outer joining geometry is configured as a receiving pocket with a protruding collar, and includes the at least one first contact element.

Abstract: A test fixture is provided for mounting a sample to a gas gun. The fixture includes a gun barrel mount including an annular enclosure with first and second axial ends, and a sample platform. The mount connects to the gas gun at the first end. The sample platform includes a tubular component having third and fourth axial ends, a pusher disk, an end plate, and a flange. The disk supports the sample and mounts to the end plate. The flange removably attaches to the component at the third end. The end plate removably attaches to the component at the fourth end and to the enclosure at the second end.

Abstract: The present disclosure relates to sensors including pressure sensors, humidity sensors, flow sensors, etc. In some cases, a cover for use with a sensor assembly may include an electrically insulating body having perimeter features extending a majority of the way around perimeters of upper and lower printed circuit boards that the cover may vertically separate. In one example, the body of the cover may include support features that extend from a lower side of the cover and those support features may contact the lower printed circuit board in at least two locations. The support features of the cover may be separated by a gap and a sensor connected to the lower printed circuit board may be situated within the gap.

Abstract: A pressure measuring transducer includes a pressure measuring cell; a measuring cell housing having an annular axial abutment surface, which surrounds an opening; a sealing ring; and a ring of angular cross section for positioning the pressure measuring cell and the sealing ring in the measuring cell chamber. The ring of angular cross section includes at least a first component of a form-retaining material and at least a second component of an elastic material, wherein the at least one form-retaining component forms the radial shoulder and extends in the axial direction into the annular gap, and the second component is connected with the first component and extends in the annular gap at least sectionally radially between the lateral surface of the pressure measuring cell and the wall of the measuring cell chamber.

Abstract: Retrievable sensor devices and methods are provided that can be easily installed and removed from a sub-sea system without the need to stop the flow of working/process fluid. In particular, a retrievable sensor is provided that can be configured to be located remote from the process fluid to allow for easy access. In other embodiments, an actuator is provided that allows for pressure adjustments to be made during installation and/or removal of the sensor so as to avoid damage to the sensor and/or other system components and to avoid any process fluid/material leakage. Methods are also provided for installing/removing a retrievable sensor, as well as for adjusting a pressure of a retrievable sensor.

Abstract: Pressure sensor unit for sealed attachment to a fluidic system comprising a mounting member, a membrane cavity extending through the mounting member with an opening in contact with the fluidic system when the sensor unit is attached thereto, a membrane formed at the distal end of the membrane cavity, and a membrane deflection sensor, wherein the membrane is separated from the mounting member by a stress insulating member arranged to isolate the membrane from stress and strain in the mounting member.

Abstract: A strapping device for a pipe and methods of using the strapping device to non-invasively detect pressure inside the pipe and the residual stress exerted on the pipe. The strapping device includes a linked or a solid band adapted to be fitted around an outside diameter of the pipe. The strapping device further includes a sensor for measuring at least one of a change in the outside diameter of the pipe due to a corresponding change in pressure inside the pipe and to detect the stress or strain transferred from the pipe. The measurements can be conveniently processed in a circuit board coupled to the strapping device or in a remote location. The measurements can be transmitted through wires or digitally transmitted to the circuit board.

Abstract: A pressure transducer assembly including: a pressure sensor header; a transducer assembly member; and a joining arrangement disposed at an interface of the header and the transducer assembly member, for joining the header with the transducer assembly member, the joining arrangement including: a recessed female joining element formed in one of the header and the transducer assembly member; and a protruding male joining element formed on the other of the header and the transducer assembly member, the male joining element received in the female joining element.

Abstract: The invention relates to a spray gun comprising a gun body (1), a nozzle arrangement (9) arranged on said gun body (1), a compressed air supply channel (22, 23) which is arranged in the gun body (1) and which comprises a valve arrangement (17) for controlling the compressed air supply to the nozzle arrangement (9), a device (31, 33, 37, 42, 40) for controlling the compressed air supply, and a pressure measuring device (35) for recording and displaying the pressure in the compressed air channel (22). Said invention is characterized in that said pressure measuring device (35) is secured in a removable manner to the device (31, 33, 37, 42, 40) for controlling the compressed air supply.

Abstract: Circuits, methods, and apparatus that provide pressure sensor devices where pressure sensors may be reliably attached to surfaces in device packages, and where the coefficients of expansion of the pressure sensor and the surface are at least approximately equal. Examples may provide pressure sensor devices where pressure sensors may be reliably attached to surfaces in device packages by providing interposers formed to prevent adhesives used to attach the pressure sensors to surfaces from blocking or encroaching into pressure sensor openings or cavities. These same features may be used to accurately locate a pressure sensor relative to the interposer. Embodiments of the present invention may provide pressure sensor devices where the coefficients of expansion of the pressure sensor and the surface are at least approximately equal by proving interposers that are formed of the same or similar material as the pressure sensors, such as silicon.

Abstract: A fuel system pressure tester for motorcycles adapted to be connected in-line with a fuel tank female fitting and a fuel line male fitting, has a fitting body, a first fitting for connection with the fuel tank fitting with an internal, normally closed valve, a second fitting for connection with the fuel line fitting, a pressure gauge, and a manually operated valve with a valve actuating element and a connection for a fuel hose. The fitting body has an internal passageway connecting the first fitting, the second fitting, the pressure gauge, and the manually operated valve. A method of testing a fuel system of the motorcycle involves connecting the pressure tester to the fuel tank by connecting the male tester fitting with the fuel tank female fitting, and connecting the female tester fitting with the fuel line male fitting, energizing the in-tank fuel sending unit, and reading pressure within the tester indicated by the pressure gauge.

Abstract: The invention relates to a burst pressure monitoring device intended to be employed in a pressure transmitter (1), said pressure transmitter comprising a body (10), an inlet duct (11) formed on the body and intended to receive a fluid, a sensor member on which the inlet duct emerges, said sensor member being intended to measure a pressure and to deliver an output electrical signal representative of the measured pressure, said burst pressure monitoring device being intended to be positioned inside the inlet duct (11) of the pressure transmitter (1) and comprising two parts (21a, 21b) assembled together, the two assembled parts forming an internal fluid flow channel (22) comprising one or more successive chicanes (220).

Abstract: Two detectors mounted on footprints (12) and (13) of a plate (5) can be permuted and placed in turn in front of a measuring location set in a plate (1) connected to the plate (5). Concentric sealing joints (24, 25) bound with the plates (1, 5) a closed cavity wherein a vacuum should be created to perform measurements. The joints enable the plate to be mutually moved without sealing loss. The invention is however applicable to any device implying a relative displacement of two parts in front of each other, a stronger pressure existing outside of the parts than between them, which tends to collapse them against each other.

Abstract: A method for manufacturing a single-wire anemometric probe, or an n-wire (n>1) probe, for making measurements near a surface, comprising, for at least one of the wires: a) positioning and holding of a straight portion of the wire, comprising a metal core surrounded by a protective sheath, on two surfaces; b) elimination of a part of the sheath, to expose an active wire measurement zone; and c) the wire is soldered on two pins of the probe body.

Abstract: A pressure measuring device includes a partially coiled tube having a closed end and an opposite open end. The closed end is rolled and set into a coiled configuration. The device also includes a partially coiled tube supporting structure having a pressure indicating scale. The supporting structure holds the partially coiled tube such that the open end of the tube is in communication with a fluid whose pressure is to be measured. Pressure applied by the fluid causes the tube to unroll and the closed end of the tube to be visibly displaced relative to the pressure indicating scale by a distance related to the pressure applied by the fluid.

Abstract: A coplanar process fluid pressure sensor module is provided. The module includes a coplanar base and a housing body. The coplanar base has a pair of process fluid pressure inlets, each having an isolator diaphragm. The housing body is coupled to the coplanar base at an interface between the coplanar base and the housing body. A differential pressure sensor is operably coupled to the pair of process fluid pressure inlets, and is disposed proximate the coplanar base within the housing body.

Abstract: A method is described for producing a pressure sensor assembly, the pressure sensor assembly having a sensor housing element having a pressure sensor and a base housing element, which have a continuous recess accommodating the pressure sensor and are welded to each other. It is provided that, after the welding, in the area of the welding connection, the recess of the base housing element and/or the sensor housing element is enlarged by material removal. A pressure sensor assembly is also described.

Abstract: A pressure sensor and method of use provides for the detection of a sudden increase or decrease of pressure within tubing during the administration of solutions to a patient. Detection of an occlusion, partial or other significant pressure change in the tubing is accomplished by measuring the compression and/or expansion of the tubing. Transfer of the change in force within the tubing is communicated from the tubing to a sensor by a transfer rod which as a membrane attached thereto to provide a seal thereabout.

Abstract: A pressure transducer, particularly to be installed in liquid pumping devices, comprising a cup-shaped container from the bottom of which a connector protrudes for connection to a pressurized duct; the connector and the bottom are traversed by a through hole for the passage of fluid inside the transducer to a pressure sensor; the transducer comprises elements for locking the pressure sensor in a single possible orientation inside the container and elements for preventing the extraction of the pressure sensor to from the container.

Abstract: A pressure switch comprises a housing having a cavity for conveying a pressurized fluid. The cavity extends from an inlet to an outlet and defines a flow path for the fluid. A pressure-transducing element is provided for measuring the fluid pressure. The pressure-transducing element is in fluid communication with the cavity and is at least partially disposed in the flow path between the inlet and the outlet. The pressure-transducing element has a cylindrical shape with a constant diameter and is partially disposed in a bore in the housing. The bore has a constant bore diameter. One end of the pressure-transducing element extends into the flow path.

Abstract: A portable air pump includes a pump body, a base member affixed to the pump body and defining therein an accommodation chamber, a casing movable in and out of the accommodation chamber between an exposed position and a hidden position, a pressure gauge mounted in the casing and kept in air communication with the pump body, a footplate pivotally pivoted to the pump body and biasable between a received non-operative position and an extended operative position, a spring member set between the casing and the base member and adapted for forcing the casing from the hidden position to the exposed position, locking device adapted for locking the casing in the hidden position or unlocking the casing to allow the spring member to force the casing to move from the hidden position to the exposed position when the footplate is biased from the received non-operative position to the extended operative position.

Abstract: A quick release coupling for connecting at least two connecting elements of a fluid system for a liquid medium, and comprises a coupling body, defining a flow channel between a first connecting end for the connection of a first connecting element, and a second connecting end. The coupling body includes a sensor chamber separated from the flow channel by a separating wall. At least one sensor is disposed in the sensor chamber, wherein a sensor probe is connected to the sensor, which extends through the separating wall from the sensor such that an end of the sensor probe facing the flow channel is in communication with the flow channel. The coupling body rests against the sensor probe without a seal. The sensor probe is a capillary tube and could be made of glass.

Abstract: A pressure probe assembly for attachment to a venturi of a gas-fired appliance, where the venturi includes a body having an inlet end, an outlet end, and a wall defining a mixing chamber extending from the inlet end to the outlet end about an axis. A support member is detachably coupled to the mixing chamber. A first pressure probe is coupled to the support member and has a first pressure tap disposed substantially adjacent the axis. A second pressure probe is coupled to the support member and has a second pressure tap disposed substantially adjacent the mixing chamber wall. Also disclosed is a gas-fired appliance, such as a water heater, including the pressure probe assembly.

Abstract: The invention relates to a sensor device (10), in particular for use in a motor vehicle, having a housing (11) for accommodating a sensor element (1), wherein the sensor element (1) has electrical contact areas (2, 3) which are connected to electrical plug connections (18, 19) arranged in the housing (11) in an electrically conductive manner in the region of contacts (23, 24) of the plug connections (18, 19), wherein a force is applied to the sensor element (1) for the purpose of making electrical contact with a housing element in the direction of the plug connections (18, 19). The invention provides for the electrical plug connections (18, 19) to be arranged in a stationary manner in the housing (11) in the region of the contacts (23, 24) with the electrical contact areas (2, 3) of the sensor element (1), and for a support to be formed between the sensor element (1) and the housing (11) in such a manner that the sensor element (1) has three-point contact in the housing (11).

Abstract: A process pressure measurement system includes a remote seal assembly configured to couple to a process. The system has a remote seal diaphragm with a first side adapted to contact a process fluid and a second side adapted to contact a fill fluid. A first capillary conduit has a first coupling and is coupled to the remote seal and is filled with the fill fluid. A second capillary conduit is coupled to a process fluid pressure transmitter. The second capillary conduit is filled with the fill fluid. A second coupling is coupled to the second capillary conduit and to the first coupling to provide fluidic communication from the remote seal diaphragm to the pressure inlet of the process fluid pressure transmitter. At least one of the first and second couplings is sized to pass through a penetration in a process containment barrier.

Abstract: A spring testing fixture and measuring assembly thereof are described. The spring testing fixture includes a measuring assembly, an upper cover and a lower cover. The measuring assembly further includes a contact plate, a containing space and a buckling unit. The contact plate of the measuring assembly is correspondingly adapted to the configuration (or profile) of the spring for effectively restricting the exerted force on the spring to precisely measure the practical reliability and the life span of the spring.

Abstract: The invention relates to a measuring cell with a casing for housing a sensor, in particular a pressure transducer, in which the casing has a pressure compensation vent for the sensor; and is provided with a sealing element with an axisymmetrical circumferential surface arranged proximate an internal surface of a casing bore formed operably and complementary hereto, and that the pressure compensation vent is formed as at least one gap resistant to ignition flashovers by interaction of a strip-shaped and plane surface section extending along the casing bore on the circumferential surface of the sealing element with the internal surface of the casing bore.

Abstract: A pressure sensor device includes a semiconductor pressure sensor element and a base part. The base part includes a mounting surface, a through hole having an opening on the mounting surface and configured to introduce a fluid to the semiconductor pressure sensor element, a soldered part that is to be soldered and is provided on the mounting surface, and a step-like structure formed on the mounting surface between the opening and the soldered part.

Abstract: Systems and methods for a pressure sensor are provided, where the pressure sensor comprises a housing having a high side input port that allows a high pressure media to enter a high side of the housing and a low side input port that allows a low pressure media to enter a low side of the housing when the housing is placed in an environment containing the high and low pressure media; a substrate mounted within the housing; a stress isolation member mounted to the substrate; a die stack having sensing circuitry bonded to the stress isolation member; a low side atomic layer deposition (ALD) applied to surfaces, of the substrate, the stress isolation member, and the die stack, exposed to the low side input port; and a high side ALD applied to surfaces, of the stress isolation member and the die stack, exposed to the high side input port.

Abstract: A pressure sensor includes a metal port member having a first closed end and a second opposing opened end. A metal shell surrounds a portion of the periphery of the port. A first weld connection joins the port to the shell. A metal base has upper and lower surfaces and a second weld connection joins the shell to the lower surface of the base. Sensing structure is associated with the closed end of the port member. The sensing structure is constructed and arranged to sense pressure changes at the closed end of the port member. A connector housing covers the sensing structure.

Abstract: A process fluid pressure sensing system includes a process fluid pressure transmitter and a process manifold. The process fluid pressure transmitter has first and second pressure inlets and is configured to obtain a measurement relative to pressures applied at the first and second pressure inlets and provide a process variable output based on the measurement. The process manifold is operably coupled to a process fluid and has first and second pressure outlets. A first high-pressure coupling joins the first pressure outlet of the process manifold to the first pressure inlet of the process fluid pressure transmitter. A second high-pressure coupling joins the second pressure outlet of the process manifold to the second pressure inlet of the process fluid pressure transmitter. The first and second high-pressure fluid couplings are configured to accommodate misalignment between the respective pressure outlets and inlets.

Abstract: An apparatus and rodding method is disclosed for cleaning particulant matter from the interior high and low pressure fluid conducting conduits of a valve manifold and its mounting neck that are components of a process fluid flow or mass flow measuring assembly. High and low pressure fluid conducting conduits run through the longitudinal length of the manifold body with laterally extending diversion channels that conduct the high and low pressure fluid to a pressure transducer mounted on the back side of the valve manifold. Following shut down of the process fluid flow, plugs at the terminal end of the fluid channels are removed, permitting cleaning rods to be inserted into the fluid channels, without having to remove the pressure transducer and associated data transmitter from the assembly.

Abstract: A transducer, generally 10, has a robust, yet very flexible, steel-braid reinforced protective cover 12 which is permanently assembled to a custom machined fitting 14. A typical pressure transducer 16 is threaded through a SST nut 18 and then through the cover 12. Bonding the transducer body to the cover's fitting 14 captures the nut 18 between a flange 16A on the transducer 16 and a shoulder 18A in the nut 18, allowing the nut 18 to be freespinning yet a permanent part of the assembly 10.

Abstract: Techniques disclosed herein include systems and methods for pressure measurement of fluids including vehicular fluids. The pressure sensor includes a microelectromechanical system (MEMS) sensor for pressure measurement. The MEMS sensor is attached to a glass tube which is compressively sealed to a mounting frame that is attachable to a pressure port of a fluid-containing enclosure. Techniques disclosed herein provide an hermetic seal between the tube and the mounting frame and a rigid seal between the MEMS sensor to a pressure sensor while decoupling thermal expansion stress from the MEMS sensor. With such decoupling techniques, pressure sensing reliability and accuracy can be improved because thermal expansion stress is decoupled from the MEMS sensor. Such techniques provide an accurate, durable, and cost-effective pressure sensor.

Abstract: The present disclosure relates to sensors including pressure sensors, humidity sensors, flow sensors, etc. In some cases, a cable harness assembly for connection with a sensor assembly may include a cable cover having a first end and a second end, a cable extending through an opening in the first end of the of the cable cover, and a crimp ring configured to engage the cable at a position within the cable cover, such that the attached crimp ring may not fit through the opening. The second end of the cable cover may be configured to connect to a housing of an electrical connector. Further, the cable may have wires that may be configured to electrically connect to electrical terminals of the electrical connector. In some instances, the electrical connector may be electrically connected to a sensor.

Abstract: A pressure sensor for detecting a pressure of a medium, in particular for a braking apparatus, includes a connecting flange having a fluid channel for connection to the medium which is to be measured, a pressure measuring cell which is arranged at the end of the fluid channel, and a circuit mount, with the pressure measuring cell having a contact surface for making contact. The contact surface is arranged at an angle relative to a center axis of the pressure sensor.

Abstract: A process transmitter for measuring a process variable comprises a process sensor, transmitter circuitry, a transmitter housing, a mounting component, and a non-contact proximity sensor. The process sensor senses a process variable of a process fluid. The transmitter circuitry processes a signal from the process sensor. The transmitter housing receives the process sensor and transmitter circuitry. The transmitter mounting component is connected to the housing to isolate the sensor, the transmitter circuitry or the transmitter housing from the process fluid or an external environment. The non-contact proximity sensor system detects a spatial relationship between the transmitter housing and the transmitter mounting component.

Abstract: Provided is a measuring apparatus capable of measuring a wind pressure, and in particular, a bidirectional wind pressure detecting apparatus having wind pressure sensors installed at an air introduction port and an air ejection port, respectively, to measure a wind pressure regardless of a direction of the air.

Abstract: The invention relates to a multi-component part transducer assembly for determining the pressure of a fluid of interest. One part of the assembly comprises a reusable transducer, another part a disposable component comprising a flexible membrane which is in pressure connection with the fluid of interest, and another part comprises a locking component for securing the reusable and disposable parts together.

Abstract: The present disclosure provides for systems and methods for fabricating sensing and/or control device assemblies, e.g., a dual pressure switch sensing and/or control device, a dual temperature switch sensing and/or control device or the like. More particularly, the present disclosure provides for systems and methods for fabricating sensing and/or control device assemblies (e.g., dual switch sensing and/or control device assemblies) with adjustment features and/or functionalities for switch calibration and/or adjustment. In one embodiment, the present disclosure provides for systems and methods for fabricating sensing and/or control device assemblies (e.g., dual switch sensing and/or control device assemblies) with rotary adjustment features/functionalities wherein the switches of the sensing device may be calibrated or adjusted via the rotary adjustment features/functionalities.

Abstract: A test fixture is provided for mounting a sample to a gas gun. The fixture includes a gun barrel mount including an annular enclosure with first and second axial ends, and a sample platform. The mount connects to the gas gun at the first end. The sample platform includes a tubular component having third and fourth axial ends, a pusher disk, an end plate, and a flange. The disk supports the sample and mounts to the end plate. The flange removably attaches to the component at the third end. The end plate removably attaches to the component at the fourth end and to the enclosure at the second end.

Abstract: A method for manufacturing a Micro-Electro-Mechanical System pressure sensor, including forming a gauge wafer including a diaphragm and a pedestal region. The method includes forming an electrical insulation layer disposed on a second surface of the diaphragm region and forming a plurality of sensing elements patterned on the electrical insulation layer disposed on the second surface in the diaphragm region, forming a cap wafer with a central recess in an inner surface and a plurality of through-wafer embedded vias made of an electrically conductive material in the cap wafer, creating a sealed cavity by coupling the inner recessed surface of the cap wafer to the gauge wafer, such that electrical connections from the sensing elements come out to an outer surface of the cap wafer through the vias, and attaching a spacer wafer with a central aperture to the pedestal region with the central aperture aligned to the diaphragm region.

Abstract: A pressure sensor assembly is disclosed wherein the substrate to which the pressure sensing die is mounted is decoupled from the package.