Abstract: Embodiments of a Coriolis-force-based flow sensing device and embodiments of methods for manufacturing embodiments of the Coriolis-force-based flow sensing device, comprising the steps of: forming a driving electrode; forming, on the driving electrode, a first sacrificial region; forming, on the first sacrificial region, a first structural portion with a second sacrificial region buried therein; forming openings for selectively etching the second sacrificial region; forming, within the openings, a porous layer having pores; removing the second sacrificial region through the pores of the porous layer, forming a buried channel; growing, on the porous layer and not within the buried channel, a second structural portion that forms, with the first structural region, a structural body; selectively removing the first sacrificial region thus suspending the structural body on the driving electrode.

Abstract: A mass flow meter includes one or more sensing elements that are exposed to a fluid flow in a pipe or conduit. The preferred sensing elements comprise two types: a first having a single curved azimuthal arm and a second having two, i.e., outer and inner, curved azimuthal arms. In a preferred embodiment, three of the first elements, occupying approximately 60°, alternate with three of the second elements, the outer arms occupying approximately 60° and the inner arms occupying approximately 120°. Each sensing element includes a torque transfer portion which extends through the flow pipe or conduit and a lever arm outside the pipe which engages a circumferential torque collecting ring. The ring, in turn, engages a fixed element or fin having a torque sensing device such as one or more strain gauges affixed thereto. Alternatively, flow and torque sensing may be achieved by an LVDT or servo-feedback system.

Abstract: A flow sensor sub-assembly for sensing flow of a fluidic medicament is disclosed. The flow sensor sub-assembly includes a first spring contact and a second spring contact. The spring contacts are secured to a base that has a circuit for conducting an electrical signal to and from the spring contacts to a microprocessor. The first spring contact is in electrical communication with a first piezo element and the second spring contact is in electrical communication with a second piezo element. The first spring contact has a first contact force against the first piezo element and the second spring contact has a second contact force against the second piezo element, and the first and second contact forces are equivalent. A circuit board for interfacing to a flow sensor having a plurality of piezo elements for transmitting a flow signal indicative of flow of fluidic medicament is also disclosed.

Abstract: A motorless mass flowmeter in accordance with one embodiment of the invention comprises a turbine subassembly, a drum, and an impeller. The drum is rigidly connected to the turbine subassembly such that the drum rotates in accompaniment to rotation of the turbine subassembly. The impeller is rotationally coupled to the drum by way of a spring that allows relative rotation against the bias of the spring. The turbine subassembly has jets and bypass valves. The turbine subassembly may be implemented in the form of a laminated bypass valve structure. The laminated bypass valve structure may include an entrance layer having entrance port(s), a closure layer having closure member(s), an exit layer defining exit passage(s), and an intermediary layer forming conduit(s) for guiding fluid from entrance port(s) to exit passage(s).

Abstract: A force balanced mass flow meter is disclosed that includes a cylindrical sensor housing having an interior bore, an impeller body supported for axial rotation within the interior bore of the sensor housing, and including structure for converting fluid inertia into flow induced torque when fluid flows relative to the impeller body, a proximity sensor for measuring a rotation angle of the impeller body relative to the sensor housing, an electromagnet for generating a magnetic field about the sensor housing to prevent rotation of the impeller body, electronics for determining electrical values from the proximity sensor when fluid flows relative to the impeller body and a controller for controlling current supplied to the electromagnet in response to electrical values determined from the proximity sensor, to generate a magnetic field sufficient to prevent impeller rotation.

Abstract: A force balanced mass flow meter is disclosed that includes a cylindrical sensor housing having an interior bore, an impeller body supported for axial rotation within the interior bore of the sensor housing, and including structure for converting fluid inertia into flow induced torque when fluid flows relative to the impeller body, a proximity sensor for measuring a rotation angle of the impeller body relative to the sensor housing, an electromagnet for generating a magnetic field about the sensor housing to prevent rotation of the impeller body, electronics for determining electrical values from the proximity sensor when fluid flows relative to the impeller body and a controller for controlling current supplied to the electromagnet in response to electrical values determined from the proximity sensor, to generate a magnetic field sufficient to prevent impeller rotation.

Abstract: An axial flow meter includes a housing including a generally elongated body with a continuous internal bore. Two spindles are mounted parallel to one another in the housing. Each spindle has a blade on the exterior surface of the spindle. Blades on each of the two spindles engage with each other. Bearings at each end of both spindles engage the spindles. At least one of the bearings engaging each one of the spindles is fixed in a position relative to the elongated body thereby preventing axial movement of the two spindles while allowing rotational movement of the two spindles.

Abstract: A microfluidic device and method for assessing properties of a fluid. The device includes a base supported by a substrate and a tube extending from the base and spaced apart from the substrate surface. The tube has an internal passage, first and second portions adjacent the base and defining, respectively, an inlet and outlet of the passage, and a distal portion. A drive electrode is located on the substrate surface adjacent the distal portion of the tube. Sensing electrodes are located on the substrate surface adjacent the first and second portions of the tube, and are adapted for sensing deflections of the first and second portions when vibrated with the drive electrode and from which the fluid property is determined. A pair of electrodes is located on the substrate surface between the drive and sensing electrodes, and are operated to enhance the performance of the microfluidic device, such as by supplementing the drive or sensing electrodes.

Abstract: A fluid delivery system and method that combine a fluid source and an inline unit capable of delivering a precise amount of a therapeutic fluid to a patient based on specific data associated with the fluid, such as its identity, density, dosage, and dosage rate, so that the correct fluid is safely delivered in controlled amounts specific to its characteristics, purpose, and intended destination. The inline unit includes a flow controller and a flow sensor that produces a signal corresponding to the flow rate of the fluid flowing therethrough. The system further includes memory containing the data associated with the fluid, and electronic circuitry that causes the controller to regulate flow from the fluid source at the prescribed dosage rate and to deliver the prescribed dosage amount from the fluid source based on the signal from the sensor and the data contained by the memory.

Abstract: The device comprises a tubular stator intended to be fixed in a pipe, so as to be traversed, in use, by said stream of fluid, and in which there is axially mounted a rotor which has a central hub from which extends a plurality of blades and which is capable of being operated in rotation by said stream, like a turbine, at a velocity variable according to the flow rate, and at least one permanent magnet integral with the rotor, disposed eccentrically with respect to the axis of rotation of said rotor. Fixed to the hub of the rotor is a shaped support bush mounted rotatable about a fixed pin or shaft which extends, projecting in the opposite direction to the operational direction of flow of the stream, from a central support integral with the axial outlet portion of the stator. The magnet is held in a housing defined between the support bush and the rotor.

Abstract: The device comprises a tubular stator intended to be fixed in a pipe, so as to be traversed, in use, by said stream of fluid, and in which there is axially mounted a rotor which has a central hub from which extends a plurality of blades and which is capable of being operated in rotation by said stream, like a turbine, at a velocity variable according to the flow rate, and at least one permanent magnet integral with the rotor, disposed eccentrically with respect to the axis of rotation of said rotor. Fixed to the hub of the rotor is a shaped support bush mounted rotatable about a fixed pin or shaft which extends, projecting in the opposite direction to the operational direction of flow of the stream, from a central support integral with the axial outlet portion of the stator. The magnet is held in a housing defined between the support bush and the rotor.

Abstract: Motion signals representing motion of a conduit of a mass flowmeter are mode selective filtered to generate a plurality of mode selective filtered motion signals such that the plurality of mode selective filtered motion signals preferentially represent motion associated with a vibrational mode of the conduit. A plurality of time difference estimates is generated from the plurality of mode selective filtered motion signals. A correlation measure is generated from the plurality of time difference estimates. A status of the mass flowmeter system is determined from the generated correlation measure. In some embodiments, the correlation measure comprises an intercept parameter of a scaling function that relates the plurality of time difference estimates to a plurality of reference time differences representing motion of the conduit at a known mass flow. In other embodiments, the correlation measure comprises a correlation coefficient estimated from the plurality of time difference estimates.

Abstract: Micromachine fluidic apparatus incorporates a free-standing tube section and electrodes to actuate or control the movement of the tube section, or to sense the movement of the tube section, or both. Electronic circuitry, which may be disposed on the same substrate as the fluidic portion of the apparatus, is used in conjunction with the tube and electrodes in conjunction with a variety of different applications, including fluid flow measurement, fluid density measurement, fluid viscosity measurement, fluid transport, separation and/or mixing. According to a particular embodiment, the free-standing section of the tube is resonated for fluid flow and density measurements according to the Coriolis effect. Capacitive/electrostatic actuation techniques are used to control or resonate the free-standing section of the tube, and to detect variations in tube movement.

Abstract: A plurality of motion signals is received representing motion at a plurality of locations of a vibrating conduit containing material. The received plurality of motion signals is processed to resolve the motion into a plurality of real normal modal components. A process parameter is estimated from a real normal modal component of the plurality of real normal modal components. According to one aspect, the motion signals may be processed by applying a mode pass filter to produce an output that preferentially represents a component of the motion associated with a real normal mode of the vibrating conduit. A process parameter may be estimated from the filtered output using, for example, conventional phase difference techniques. According to another aspect, real normal modal motion is estimated from the received plurality of motion signals, and a process parameter is estimated from the estimated real normal modal motion.