Abstract: Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.
Type:
Grant
Filed:
June 27, 2016
Date of Patent:
June 16, 2020
Assignee:
Applied Materials, Inc.
Inventors:
Kevin M. Brashear, Zhiyuan Ye, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada
Abstract: Proposed is a flow sensor (10), in particular for single use, having at least three measurement chambers (11, 15, 19), which are arranged one behind the other and are interconnected in each case by a flow resistance. At least two of the flow resistances have a different coefficient of pressure loss. A pressure measuring means (12, 16, 20) is provided for each measurement chamber, which pressure measuring means (12, 16, 20) is suitable for measuring the pressure in the measurement chamber. An electromagnetically actuatable valve arrangement (50) can be connected downstream of the flow sensor.
Type:
Grant
Filed:
August 21, 2012
Date of Patent:
August 22, 2017
Assignee:
ReseaChem GmbH
Inventors:
Stefan Berger, Simon Zumbrunnen, Philip Marmet, Philipp Haslebacher, Manfred Schär
Abstract: A system and method are provided for optimized decision-making in water supply networks and/or water supply operations. The system includes at least one central data processing device and a control system having at least one integration device. The system also includes at least one functional unit for identifying and/or processing status information affecting the respective network or operation.
Type:
Grant
Filed:
May 13, 2011
Date of Patent:
February 17, 2015
Assignee:
ABB Technology AG
Inventors:
Frederik Blank, Markus Gauder, Heinrich-Martin Schreyer, Stefan Lauxtermann