By Measuring Vibrations (e.g., Resonant Frequency) Patents (Class 73/862.59)
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Patent number: 11906374Abstract: Provided is a measurement method including measuring, by using a piezoelectric sheet sensor in contact with a measurement object, vibration transmitted from the measurement object to the piezoelectric sheet sensor and measuring pressing force between the measurement object and the piezoelectric sheet sensor.Type: GrantFiled: February 6, 2019Date of Patent: February 20, 2024Assignee: YAMAHA CorporationInventor: Tomoya Miyata
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Patent number: 11815420Abstract: A resonant pressure sensor with improved linearity includes: a substrate including a substrate-separated portion separated from a housing-fixed portion; a first resonator that: is disposed in the substrate-separated portion; and detects a change of a first resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a second resonator that: is disposed in the substrate; detects a change of a second resonance frequency based on the strain in the substrate; and has a pressure sensitivity of the second resonance frequency; and a processor that: measures the static pressure based on the detected change of the first resonance frequency; and corrects the static pressure according to internal temperature of the pressure sensor based on a difference between the second resonance frequency and the first resonance frequency.Type: GrantFiled: January 27, 2023Date of Patent: November 14, 2023Assignee: Yokogawa Electric CorporationInventors: Shigeto Iwai, Atsushi Yumoto, Makoto Noro, Takashi Yoshida
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Patent number: 11592347Abstract: A resonant pressure sensor with improved linearity includes a substrate including a substrate-fixed portion fixed to a housing-fixed portion and a substrate-separated portion separated from the housing-fixed portion in a first direction; a first resonator disposed in the substrate-separated portion to detect a change of a resonance frequency based on a strain caused by static pressure applied by a pressure-receiving fluid interposed in a gap between the housing-fixed portion and the substrate; a first electrode extending along a second direction to output an excitation signal to the first resonator; a second electrode that extends along the second direction and from which the first resonator outputs a signal having the resonance frequency; and a processor that measures the static pressure based on the detected change.Type: GrantFiled: June 30, 2022Date of Patent: February 28, 2023Assignee: YOKOGAWA ELECTRIC CORPORATIONInventors: Shigeto Iwai, Atsushi Yumoto, Makoto Noro, Takashi Yoshida
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Patent number: 11118991Abstract: The present invention provides a pressure transducer (1) and a method for fabricating a pressure transducer. The pressure transducer is for use in a gas pressure gauge and uses a squeeze-film. The pressure transducer comprises a first wafer (2) and a second wafer (3), wherein—at least the first wafer comprises a device layer (2.1) and a handle layer (2.3); —the second wafer (3) has a top and bottom surface; and wherein—at least the device layer (2.1) of the first wafer (2) is structured. The pressure transducer further comprises a membrane (4.1), a cavity (5) between the membrane (4.1) and the second wafer (3), wherein the cavity (5) has a cavity bottom, an inlet (12) connecting the cavity (5) to a surrounding, a suspension (6) of the membrane (4.1), wherein the suspension (6) allows oscillation of the membrane (4.1), and an oscillation generator to set the membrane (4.1) in oscillation. The pressure transducer is characterized in that the structured device layer (2.Type: GrantFiled: February 27, 2017Date of Patent: September 14, 2021Assignee: ETH ZurichInventor: Stéphane Kühne
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Patent number: 10837854Abstract: The disclosed technology includes a transducer assembly having a first transducer element. The transducer assembly includes a first filter element adjacent to least of portion of the first transducer element such that a first cavity is defined between the first filter element and the first transducer element. The first filter element includes a plurality of machined passageways in communication with the first cavity. The transducer assembly also includes an inlet passage having a first end in communication with a first external portion of the transducer assembly and a second end in communication with the plurality of machined passageways.Type: GrantFiled: May 17, 2019Date of Patent: November 17, 2020Assignee: Kulite Semiconductor Products, Inc.Inventors: Robert Gardner, Louis DeRosa
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Patent number: 10539453Abstract: In a weighing sensor for a scale, comprising a base (1), a load receiver (4) jointedly linked to the base (1) by means of a parallelogram linkage, and a lever mechanism having at least two force transmitting levers each having a load arm (14, 23, 28, 35, 39, 46, 54) and an force arm (19, 30, 38), the force transmitting levers (8, 9, 36, 40, 50) being supported by means of supporting joints (17, 24, 29, 37, 42, 48, 55, 60) defining supporting joint pivot points on the base (1), and being arranged one behind the other as seen in the longitudinal direction of the weighing sensor, it is provided that all force transmitting levers (8, 9, 36, 40, 50) are two-sided levers.Type: GrantFiled: March 31, 2017Date of Patent: January 21, 2020Assignee: MINEBEA INTEC AACHEN GMBH & CO. KGInventor: Timo Hauck
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Patent number: 10502615Abstract: A diagnostic apparatus includes: a storage unit that stores information on a vibration phenomenon in association with a video of a vibration phenomenon for each of kinds of vibration phenomena that can occur in a machine; a video display unit that displays the video of a vibration phenomenon of each of the kinds of vibration phenomena, the video being read by a video reading unit; a phenomenon selection unit that receives a selection result indicating the video of a vibration phenomenon selected by a user from the video of each of the plurality of kinds of vibration phenomena; a diagnosis unit that reads, from the storage unit, the information on a vibration phenomenon stored in association with the video corresponding to the selection result, and outputs the information on a vibration phenomenon that is read as a diagnostic result; and a diagnostic result display unit that displays the diagnostic result.Type: GrantFiled: May 24, 2017Date of Patent: December 10, 2019Assignee: Mitsubishi Electric CorporationInventor: Koichiro Ueda
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Patent number: 10429405Abstract: Systems and methods for improving common mode cancelation in a vibrating beam accelerometer (VBA) by using multiple resonant modes. The VBA includes two double-ended tuning forks (DETF). Additional oscillators drive the DETFs into the extra resonant modes. This increases common mode rejection from two modes to four modes. In addition the scale factor of the additional mode may provide a greater scale factor than prior designs.Type: GrantFiled: February 3, 2012Date of Patent: October 1, 2019Assignee: Honeywell International Inc.Inventors: Arthur Savchenko, Fred Petri
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Patent number: 10386204Abstract: An apparatus is provided which comprises: a substrate; a sensor including a sensing element, wherein the sensor is integrated within the substrate; and a calibration structure integrated within the substrate, wherein the calibration structure is to exhibit one or more physical or chemical properties same as the sensor but without the sensing element.Type: GrantFiled: June 28, 2017Date of Patent: August 20, 2019Assignee: Intel CorporationInventors: Sasha Oster, Feras Eid, Thomas L. Sounart, Georgios C. Dogiamis
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Patent number: 10215649Abstract: A force detector includes a first substrate, a second substrate, a circuit board provided between the first substrate and the second substrate, and an element mounted on the circuit board and outputting a signal in response to an external force, wherein a hole is formed in the circuit board at a location where the element is placed, and a first convex part inserted into the hole and protruding toward the element is provided on the first substrate. Further, the element is placed within a periphery of the first convex part as seen from a direction perpendicular to the first substrate.Type: GrantFiled: March 17, 2017Date of Patent: February 26, 2019Assignee: Seiko Epson CorporationInventors: Akira Matsuzawa, Hiroki Kawai, Toshiyuki Kamiya
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Patent number: 10124210Abstract: One or more processors may be configured to receive, via a radio from one or more sensors, one or more streams of sensor values indicating: (1) accelerations of a boxer's arm within a first range of acceleration, measured by a first acceleration sensor, (2) accelerations of a boxer's arm within a second range of acceleration, measured by a second acceleration sensor, and (3) rotation of the boxer's arm measured by a gyroscope sensor. The one or more processors may be configured to determine, based on the received sensor values from the first acceleration sensor, whether a punch landed but not to measure a force or velocity of the punch. The one or more processors may be configured to determine, based on the received sensor values from the second acceleration sensor, at least one of a force or a velocity of the punch but not to detect whether the punch landed.Type: GrantFiled: March 11, 2016Date of Patent: November 13, 2018Assignee: KO Luxembourg SARLInventors: Geoffrey Mather, Jeffrey Collins, Mark Ries Robinson, Petras Avizonis, Erik Andries, Johann Ammerlahn, Elena Allen, Paul Loftsgard, Adrey Dolgov
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Patent number: 9791470Abstract: Magnet placement is described for integrated circuit packages. In one example, a terminal is applied to a magnet. The magnet is then placed on a top layer of a substrate with solder between the terminal and the top layer, and the solder is reflowed to attach the magnet to the substrate.Type: GrantFiled: December 27, 2013Date of Patent: October 17, 2017Assignee: Intel CorporationInventors: Feras Eid, Sasha N. Oster, Kyu Oh Lee, Sarah Haney
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Patent number: 9335203Abstract: A new signal acquisition concept is provided for MEMS components having a pressure-sensitive diaphragm element, which at least partially spans a pressure connection opening. This signal acquisition concept is distinguished by an especially high sensitivity. For this purpose, the MEMS component includes a resonant vibrator device having a vibrating element, which is suspended, capable of vibrating, within a closed cavity and is equipped with at least one drive electrode and at least one sensing electrode. The vibrating element of the resonant vibrator device is coupled mechanically to the diaphragm element, so that the vibrating element is deformed in the case of a diaphragm deflection.Type: GrantFiled: August 28, 2013Date of Patent: May 10, 2016Assignee: Robert Bosch GmbHInventors: Jochen Zoellin, Ricardo Ehrenpfordt, Juergen Graf, Christoph Schelling, Frederik Ante, Michael Curcic
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Patent number: 9303737Abstract: A mechanism and method for motion conversion is disclosed. This mechanism can be easily fabricated using standard bulk micromachining technology. Based on this method with appropriate design, a horizontal, in-plane motion can be converted to a vertical or angular displacement out-of-plane. This design has great advantages in micro devices, which are built from a single layer, i.e. wafer fabrication, where an in-plane force is easy to implement, such as by the use of comb drive mechanisms, but an out-of-plane motion may be hard to achieve. The mechanism comprises a pair of beams of different heights, rigidly connected together at a number of points along their length, such that application of an in-plane force to the double beam structure results in out-of-plane motion of the double beam structure at points distant from the point of application of the force.Type: GrantFiled: July 5, 2013Date of Patent: April 5, 2016Assignee: Technion Research And Development Foundation Ltd.Inventors: David Elata, Arnon Hirshberg
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Patent number: 9300218Abstract: The invention relates to a signal (feed) separator for dead-zero or live-zero measurement signals. The signal (feed) separator has a primary-side (feed) input, a secondary-side output, a direct-current transformer for transferring primary-side measurement input current, an output stage for providing a secondary-side measurement output current, and an auxiliary energy feed-in for supplying the primary side and for supplying the secondary side. The auxiliary voltage of the auxiliary energy feed-in is controlled on the secondary side by a control device with the aid of a measuring device in such a way that the power loss of the output stage is substantially independent of a load connected in the operating state.Type: GrantFiled: December 20, 2011Date of Patent: March 29, 2016Assignee: PHOENIX CONTACT GMBH & CO. KGInventors: Heinz-W. Meier, Joerg Blanke
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Patent number: 9178018Abstract: A manufacturing method is described for a micromechanical component and a corresponding micromechanical component. The manufacturing method includes the steps: forming at least one crystallographically modified area in a substrate; forming an etching mask having a mask opening on a main surface of the substrate; and carrying out an etching step using the etching mask, the crystallographically modified area and a surrounding area of the substrate being removed and thus forming a cavern in the substrate.Type: GrantFiled: December 6, 2013Date of Patent: November 3, 2015Assignee: ROBERT BOSCH GMBHInventor: Christoph Schelling
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Publication number: 20150120052Abstract: A sensor element includes, when three axes orthogonal to one another are set to be an A-axis, a B-axis, and a C-axis, first piezoelectric plate that is configured to have an X cut quartz crystal plate and outputs a charge in response to an external force along the A-axis direction, second piezoelectric plate that is configured to have a Y cut quartz crystal plate, is stacked in the A-axis direction with the first piezoelectric plate, and outputs a charge in response to the external force in the B-axis direction, and third piezoelectric plate that is configured to have a Y cut quartz crystal plate, is stacked in the A-axis direction so as to interpose the second piezoelectric plate between the first piezoelectric plate and the third piezoelectric plate and be arranged to turn around the A-axis, and outputs a charge in response to the external force in the C-axis direction.Type: ApplicationFiled: October 27, 2014Publication date: April 30, 2015Inventors: Nobuyuki MIZUSHIMA, Toshiyuki KAMIYA, Hiroki KAWAI
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Patent number: 8950266Abstract: A method of manufacturing a fluidic structure is disclosed. A cavity that defines a shape of an element of the fluidic structure within a material is formed. The cavity is filled with liquid metal. The cavity is sealed. The fluidic structure behaves as an antenna. A fluidic antenna includes a material that defines a shape of the fluidic antenna by a cavity filled with liquid metal formed within the material, where the material further defines at least one mechanical property of the fluidic antenna.Type: GrantFiled: November 13, 2013Date of Patent: February 10, 2015Assignee: North Carolina State UniversityInventors: Michael David Dickey, Gianluca Lazzi, Ju-Hee So, Jacob Thelen, Amit Qusba, Gerard James Hayes
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Publication number: 20150020609Abstract: A method for detecting load in a machine, having a loading receptacle, by a load detection system is disclosed. The system includes a sound detection device, a signal-to-data processor with a sound-processing module, a data aggregator, and a data comparator. The method includes recording a continuous rolling audio signal sample corresponding one of an inflow and an outflow event fact. This is monitored for initial indicators. A recorded continuous rolling audio signal sample is recorded for audio pattern recognition. Thereafter, a filtered audio sample is generated. By computing a score for similarity between the filtered audio sample and pre-defined inflow and outflow audio signal templates, a highest scored pattern match is provided. Upon reaching a minimum threshold, the highest scored pattern match is logged. Finally, a data event is outputted based on the highest scored pattern match on at least one of an output port and a user interface.Type: ApplicationFiled: October 8, 2014Publication date: January 22, 2015Applicant: Caterpillar Inc.Inventor: Richard W. Gogolin
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Publication number: 20140338469Abstract: A load sensor includes a vibrator, a drive electrode provided at the vibrator, a drive circuit that supplies, to the drive electrode, a drive voltage for vibrating the vibrator, a detection electrode that outputs a current in response to a vibration of the vibrator, and an IV converter that converts the current output from the detection electrode into a voltage. The drive circuit includes an operational amplifier that outputs the drive voltage and a resistor connected to the operational amplifier. The drive circuit has a small internal resistance. The IV converter has an inverted input terminal that is virtually grounded and that has the current input thereto. The IV converter may constitute a negative feedback circuit.Type: ApplicationFiled: August 4, 2014Publication date: November 20, 2014Inventor: KOUMEI FUJITA
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Patent number: 8887582Abstract: Provided is a piezoelectric vibration type force sensor including a vibration body including a disk-shaped piezoelectric material and a pair of drive electrodes, for vibrating in a radial direction of the piezoelectric material when an AC voltage is applied to the pair of drive electrodes, a substrate to be brought into contact with a surface on one side of the vibration body, an elastic member that is disposed to be brought into contact with a surface on another side of the vibration body, and a holding member including a contact portion and a loose-fit portion that loosely fits in the hollow through hole. The holding member fixes the contact portion and the loose-fit portion to the substrate so that movements of the vibration body in a vibration direction and in a direction orthogonal to the vibration direction are restricted for positioning.Type: GrantFiled: February 8, 2012Date of Patent: November 18, 2014Assignee: Canon Kabushiki KaishaInventor: Hitoshi Suzuki
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Patent number: 8869632Abstract: A sensor device includes a sensor element which is formed by laminating a piezoelectric substance and an electrode, a first case and a second case which house the sensor element therein, and a pressing portion which presses the sensor element in the lamination direction of the piezoelectric substance and the electrode via the first and second cases.Type: GrantFiled: April 12, 2012Date of Patent: October 28, 2014Assignee: Seiko Epson CorporationInventors: Kazuhiro Tsuchiya, Toshiyuki Kamiya
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Patent number: 8826742Abstract: A pressure sensor including: a MEMS resonator; a sweeping unit which sweeps a frequency of an excitation signal in a predetermined direction of sweeping, over a predetermined frequency range including a resonance frequency f0 of a vibrator in the MEMS resonator, while outputting the excitation signal to the MEMS resonator; an integrating unit which inputs a vibrating-state information signal as a characteristic amount indicative of a vibrating state of the vibrator from the MEMS resonator while the sweeping unit sweeps the frequency, integrates a plurality of the vibrating-state information signals at different frequencies of the excitation signal, and outputs the integrated value; and a conversion unit adapted to determine a pressure acting on the MEMS resonator, based on the integrated value.Type: GrantFiled: February 12, 2013Date of Patent: September 9, 2014Assignee: Panasonic CorporationInventor: Kunihiko Nakamura
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Publication number: 20140216172Abstract: A device for determining a bearing preload of a rolling-element bearing includes an exciter configured to be attachable to a component of the rolling-element bearing and to excite the component of the rolling-element bearing and cause it to vibrate when the rolling-element bearing is not rotating, at least one vibration sensor configured to be attachable to the component or to a further component of the rolling-element bearing and to record (capture) a mechanical reaction, in response to the excitation, of the component or the further component of the rolling-element bearing, and an evaluating circuit configured to receive the sensor signal and provide an evaluation signal based on the sensor signal, the evaluation signal including information about the bearing preload. An associated method and computer program are also disclosed.Type: ApplicationFiled: January 28, 2014Publication date: August 7, 2014Applicant: AKTIEBOLAGET SKFInventor: Padelis Katsaros
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Publication number: 20140202260Abstract: A pressure sensor including: a MEMS resonator; a sweeping unit which sweeps a frequency of an excitation signal in a predetermined direction of sweeping, over a predetermined frequency range including a resonance frequency f0 of a vibrator in the MEMS resonator, while outputting the excitation signal to the MEMS resonator; an integrating unit which inputs a vibrating-state information signal as a characteristic amount indicative of a vibrating state of the vibrator from the MEMS resonator while the sweeping unit sweeps the frequency, integrates a plurality of the vibrating-state information signals at different frequencies of the excitation signal, and outputs the integrated value; and a conversion unit adapted to determine a pressure acting on the MEMS resonator, based on the integrated value.Type: ApplicationFiled: February 12, 2013Publication date: July 24, 2014Applicant: Panasonic CorporationInventor: Kunihiko Nakamura
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Patent number: 8770044Abstract: A load detection sensor capable of stably weighing a heavy object to be weighed in high precision. The load detection sensor according to the present invention includes a force sensor including a tuning fork vibrator and a block body that has a rectangular parallelepiped outer shape and transmits an applied load to the force sensor by using a lever to reduce the load. It is characterized in that the block body contains therein a lever mechanism and a Roberval mechanism by working on the longitudinal side thereof and that the force sensor is coupled to the side of the block body. Although the block body is cut and ground in the side for fabricating the lever mechanism and the Roberval mechanism, it maintains the rectangular parallelepiped outer shape and sufficient mechanical strength, thereby enabling to stably reduce the applied load.Type: GrantFiled: June 23, 2010Date of Patent: July 8, 2014Assignee: Shinko Denshi Co., Ltd.Inventor: Naoya Shinozaki
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Patent number: 8770043Abstract: An object of this invention is to detect an external force or acceleration with good sensitivity using a simple configuration. An external force detection sensor comprises a comb electrode including a fixed electrode having a plurality of fixed combtooth portions and a movable electrode having a plurality of movable combtooth portions inserted between the fixed combtooth portions; a power supply connected to the fixed electrode and the movable electrode in order to cause vibration of the movable electrode at a prescribed resonance frequency through an electrostatic force on the fixed electrode; and detection means for detecting an external force based on a change in electrical characteristics between the fixed electrode and the movable electrode when the movable electrode is caused to vibrate.Type: GrantFiled: June 5, 2009Date of Patent: July 8, 2014Assignee: National University Corporation Shizuoka UniversityInventor: Gen Hashiguchi
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Patent number: 8739641Abstract: A micro-force sensor comprising a one-piece plate including a first area defining a first recess, which must be held in position relative to a mounting, a second area connected to the first area defining the first recess and a second recess, a measuring beam across the first recess having a first end embedded in the first area and a second end connected to the second area, an excitation beam across the second recess having two ends embedded in the second area and being provided with at least one excitation element, a third area connected to the first area and an effector beam having one free end for receiving the force being measured and one end-embedded in the third area, and a fourth area connecting the embedded end of the effector beam to the second end of the measuring beam, which is provided with a measuring element.Type: GrantFiled: November 22, 2010Date of Patent: June 3, 2014Assignee: Commissariat a l'Energie Atomique et aux Energies AlternativesInventors: Mehdi Boukallel, Mathieu Grossard
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Patent number: 8725431Abstract: A tactile sensor unit is provided, which includes a substrate; a coat formed on the substrate; and a cantilever beam structure having one end fixed to the substrate and curved to rise in such a direction that the other end of the cantilever beam structure is farther from the substrate than the one end. The tactile sensor unit detects a load applied to the coat. The cantilever beam structure is capable of resonating at a first resonant frequency and a second resonant frequency which is different from the first resonant frequency. The tactile sensor unit further includes a computation section for calculating a directional component of the load based on a change ratio of the first resonant frequency obtained in accordance with a change in the load and a change ratio of the second resonant frequency obtained in accordance with the change in the load.Type: GrantFiled: February 12, 2010Date of Patent: May 13, 2014Assignee: National University Corporation Kyoto Institute of TechnologyInventor: Kaoru Yamashita
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Publication number: 20140102216Abstract: Non-contact torque, thrust, strain, and other data sensing of a valve actuator or valve is disclosed. A sensor may include a surface acoustic wave device.Type: ApplicationFiled: December 16, 2013Publication date: April 17, 2014Applicant: Flowserve Management CompanyInventors: William T. Dolenti, Byron A. Fleury
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Publication number: 20140102217Abstract: A sensor includes a flexible wafer substrate and an oscillator provided on a principal surface of the wafer substrate, and the oscillator deforms when an external force is applied to the wafer substrate.Type: ApplicationFiled: October 3, 2013Publication date: April 17, 2014Applicant: Seiko Epson CorporationInventors: Shogo Inaba, Kyo Horie
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Patent number: 8590403Abstract: An inertial force sensor is composed of a plurality of arms and an oscillator having a base for linking the arms, in which a trimming slit is formed on a part of the arm except for a ridge portion, thus controlling damage to a tuning fork arm to be caused by the trimming.Type: GrantFiled: June 8, 2012Date of Patent: November 26, 2013Assignee: Panasonic CorporationInventors: Satoshi Ohuchi, Hiroyuki Aizawa
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Publication number: 20130276510Abstract: Self calibrating micro-fabricated load cells are disclosed. According to one embodiment, a self calibrating load cell comprises a resonant double ended tuning fork force sensor and a phase locked loop circuit for detection of frequency changes upon external load application to the resonant double ended tuning fork force sensor.Type: ApplicationFiled: March 15, 2013Publication date: October 24, 2013Inventors: Lorenzo Valdevit, Kivanc Azgin
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Patent number: 8516905Abstract: A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.Type: GrantFiled: April 2, 2012Date of Patent: August 27, 2013Assignee: Panasonic CorporationInventors: Kunihiko Nakamura, Tomohiro Iwasaki, Takehiko Yamakawa, Keiji Onishi
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Patent number: 8516904Abstract: A strain sensor apparatus for a rotatable shaft including a radiation emitter/receiver, a vibration element attached to the shaft and a reflector that is positioned to reflect radiation onto the vibration element.Type: GrantFiled: October 28, 2009Date of Patent: August 27, 2013Assignee: Rolls-Royce, PLCInventors: Werner Schiffers, John R. Webster
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Patent number: 8505394Abstract: A strain sensor apparatus for a rotatable shaft including a radiation emitter/receiver, a vibration element attached to the shaft and a radiation-reflective annulus surrounding the shaft and vibration element.Type: GrantFiled: October 28, 2009Date of Patent: August 13, 2013Assignee: Rolls-Royce PLCInventors: Werner Schiffers, John R. Webster
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Publication number: 20130181893Abstract: This disclosure provides systems, methods and apparatus for glass electromechanical systems (EMS) electrostatic devices. In one aspect, a glass EMS electrostatic device includes sidewall electrodes. Structural components of a glass EMS electrostatic device such as stationary support structures, movable masses, coupling flexures, and sidewall electrode supports, can be formed from a single glass body. The glass body can be a photochemically etched. In some implementations, pairs of sidewall electrodes can be arranged in interdigitated comb or parallel plate configurations and can include plated metal layers and narrow capacitive gap spacing.Type: ApplicationFiled: April 17, 2012Publication date: July 18, 2013Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.Inventors: Justin Phelps Black, Ravindra V. Shenoy, Jon Bradley Lasiter, Philip Jason Stephanou
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Publication number: 20130178715Abstract: A present-on-bed determination apparatus includes: a sensor unit usable with a bottom bedding and configured to measure biological displacement of a human subject on the bottom bedding so as to output a measurement signal showing a measurement result; a first signal processing unit configured to amplify the measurement signal with a first gain so as to output a first output signal; a first A/D conversion unit configured to output a plurality of first level values obtained by A/D conversion of the first output signal; and a determination unit configured to determine whether or not the human subject is present on the bottom bedding in accordance with a dispersion indicator that indicates dispersion degree of the plurality of the first level values.Type: ApplicationFiled: December 10, 2012Publication date: July 11, 2013Applicant: TANITA CORPORATIONInventor: Tanita Corporation
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Patent number: 8452552Abstract: A method for checking a vibration damper of a motor vehicle in the installed state includes setting start values of the damping constant kA, the spring rate cA, and the body mass mA for a wheel of a motor vehicle; inducing a vertical vibration of the motor vehicle with the aid of a defined excitation sRreal; determining the theoretical body vibration excursion sAmodel; optically detecting the positions of the wheel and the body shell of the motor vehicle at a plurality of detection instants during the vibration; minimizing the error function formed from the deviations between the theoretical body vibration excursion sAmodel and the observed body vibration excursion sAreal at the detection instants, and determining the damping constant kA, the spring rate cA, and the body mass mA therefrom; and determining the damping measure ? of the vibration damper.Type: GrantFiled: June 4, 2009Date of Patent: May 28, 2013Assignee: Robert Bosch GmbHInventors: Guenter Nobis, Daniel Wegener, Steffen Abraham
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Publication number: 20130047746Abstract: A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.Type: ApplicationFiled: April 2, 2012Publication date: February 28, 2013Inventors: Kunihiko Nakamura, Tomohiro Iwasaki, Takehiko Yamakawa, Keiji Onishi
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Patent number: 8371179Abstract: A measurement arrangement for measuring and/or monitoring a physical property, comprising a measurement device comprising: at least one primary sensing element to be exposed to a product at a measurement site, a remotely located secondary measurement device, and transmission lines connecting said primary sensing elements to said secondary measuring device, suitable for applications wherein the primary sensing elements may be exposed to strong vibrations at the measurement sites, is described, wherein said secondary measurement device is mounted above all primary sensing elements and wherein said transmission lines comprise an inner core, an outer tubular protection conduit enclosing said core, and a vibration absorbing medium filling an interior of said outer protection conduit surrounding said inner core.Type: GrantFiled: October 8, 2010Date of Patent: February 12, 2013Assignee: Endress + Hauser GmbH + Co., KGInventors: Georg Carton, Rob Vermeulen
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Patent number: 8365615Abstract: In a piezoelectric vibration type force sensor according to the present invention, vibration is restricted by a friction force between a piezoelectric body and a restricting member, and hence a range of sensing forces can be expanded compared with a case in which the vibration is restricted directly from a direction that is the same as an vibration direction. A conventional structure, in which a lead wire is soldered directly for electrically connecting the piezoelectric body to an external control circuit, causes a restriction of the vibration due to a solder attached to the piezoelectric body, resulting in narrowing the sensing range. Using the piezoelectric vibration type force sensor, the range of sensing forces can be expanded by making a state in which conducting portions of the piezoelectric body and the restricting member are not fixed but contact with each other for keeping electric conductivity.Type: GrantFiled: January 20, 2009Date of Patent: February 5, 2013Assignee: Canon Kabushiki KaishaInventors: Shuuichi Sato, Yuichi Someya, Hideyuki Nishida, Takao Yokomatsu, Kentaro Nakamura
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Publication number: 20120325019Abstract: A force sensing device and a force sensing system are provided. The force sensing device comprises at least one magnetic material layer and a force sensing layer which can move with respect to each other. The force sensing layer comprises two sensing elements. The first sensing element, disposed along a first axis of the magnetic material layer, generates a sensing signal varying with a first lateral force applied on the force sensing device. The first lateral force enables the first sensing element to move relatively with respect to the magnetic material layer along the first axis. The second sensing element, disposed along a second axis of the magnetic material layer, generates a sensing signal varying with a second lateral force applied on the force sensing device. The second lateral force enables the second sensing element to move relatively with respect to the magnetic material layer along the second axis.Type: ApplicationFiled: October 24, 2011Publication date: December 27, 2012Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Yio-Wha Shau, Arvin Huang-Te Li, Gaung-Hui Gu, Bai-Kuang Hwang, Jen-Chieh Lin
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Publication number: 20120279319Abstract: A micro-force sensor comprising a one-piece plate including a first area defining a first recess, which must be held in position relative to a mounting, a second area connected to the first area defining the first recess and a second recess, a measuring beam across the first recess having a first end embedded in the first area and a second end connected to the second area, an excitation beam across the second recess having two ends embedded in the second area and being provided with at least one excitation element, a third area connected to the first area and an effector beam having one free end for receiving the force being measured and one end-embedded in the third area, and a fourth area connecting the embedded end of the effector beam to the second end of the measuring beam, which is provided with a measuring element.Type: ApplicationFiled: November 22, 2010Publication date: November 8, 2012Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESInventors: Mehdi Boukallel, Mathieu Grossard
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Publication number: 20120260745Abstract: A sensor device includes a sensor element which is formed by laminating a piezoelectric substance and an electrode, a first case and a second case which house the sensor element therein, and a pressing portion which presses the sensor element in the lamination direction of the piezoelectric substance and the electrode via the first and second cases.Type: ApplicationFiled: April 12, 2012Publication date: October 18, 2012Applicant: SEIKO EPSON CORPORATIONInventors: Kazuhiro TSUCHIYA, Toshiyuki KAMIYA
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Publication number: 20120204656Abstract: Provided is a piezoelectric vibration type force sensor including a vibration body including a disk-shaped piezoelectric material and a pair of drive electrodes, for vibrating in a radial direction of the piezoelectric material when an AC voltage is applied to the pair of drive electrodes, a substrate to be brought into contact with a surface on one side of the vibration body, an elastic member that is disposed to be brought into contact with a surface on another side of the vibration body, and a holding member including a contact portion and a loose-fit portion that loosely fits in the hollow through hole. The holding member fixes the contact portion and the loose-fit portion to the substrate so that movements of the vibration body in a vibration direction and in a direction orthogonal to the vibration direction are restricted for positioning.Type: ApplicationFiled: February 8, 2012Publication date: August 16, 2012Applicant: CANON KABUSHIKI KAISHAInventor: Hitoshi Suzuki
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Patent number: 8215190Abstract: An inertial force sensor is composed of a plurality of arms and an oscillator having a base for linking the arms, in which a trimming slit is formed on a part of the arm except for a ridge portion, thus controlling damage to a tuning fork arm to be caused by the trimming.Type: GrantFiled: April 10, 2007Date of Patent: July 10, 2012Assignee: Panasonic CorporationInventors: Satoshi Ohuchi, Hiroyuki Aizawa
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Patent number: 8181540Abstract: Tactile sensors are disclosed that mimic the human fingertip and its touch receptors. The mechanical components are similar to a fingertip, with a rigid core surrounded by a weakly conductive fluid contained within an elastomeric skin. The deformable properties of the finger pad can be used as part of a transduction process. Multiple electrodes can be mounted on the surface of the rigid core and connected to impedance measuring circuitry within the core. External forces deform the fluid path around the electrodes, resulting in a distributed pattern of impedance changes containing information about those forces and the objects that applied them. Strategies are described for extracting features related to the mechanical inputs and using this information for reflexive grip control. Controlling grip force in a prosthetic having sensory feedback information is described. Pressure transducers can provide sensory feedback by measuring micro-vibrations due to sliding friction.Type: GrantFiled: April 2, 2009Date of Patent: May 22, 2012Assignee: University of Southern CaliforniaInventors: Gerald E. Loeb, Jeremy Fishel, Nicholas Wettels, Veronica J. Santos, Raymond Peck
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Publication number: 20120096955Abstract: The scientific characterization of cellular contractility and cell movement, such as muscle function in particular is, to a large extent, carried out on intact tissue preparations for example using whole intact muscles from animals. Typical indices of muscle function may include isometric force, contractility under external force (load) and spatio-temporal determination of internal calcium concentration under strictly controlled conditions of length and applied force. The major advance of the described apparatus is that the common characterization of cellular contractility can be performed on a single cell rather than an entire tissue or whole animal. As such the apparatus described improves on and eliminates known limitations of currently considered state-of-the-art approaches.Type: ApplicationFiled: October 21, 2011Publication date: April 26, 2012Applicant: WORLD PRECISION INSTRUMENTS, INC.Inventors: Konrad Güth, Harm J. Knot, Harry Fein
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Publication number: 20120085180Abstract: A measurement arrangement for measuring and/or monitoring a physical property, comprising a measurement device comprising: at least one primary sensing element to be exposed to a product at a measurement site, a remotely located secondary measurement device, and transmission lines connecting said primary sensing elements to said secondary measuring device, suitable for applications wherein the primary sensing elements may be exposed to strong vibrations at the measurement sites, is described, wherein said secondary measurement device is mounted above all primary sensing elements and wherein said transmission lines comprise an inner core, an outer tubular protection conduit enclosing said core, and a vibration absorbing medium filling an interior of said outer protection conduit surrounding said inner core.Type: ApplicationFiled: October 8, 2010Publication date: April 12, 2012Applicant: Endress + Hauser GmbH + Co. KGInventors: Georg Carton, Rob Vermeulen