Abstract: In order to separate and remove a dangerous substance such as yellow phosphorus from exhaust gas generated in a semiconductor fabricating process by chemical vapor deposition, the exhaust gas is bathed in operating oil of a cooled oil tank of an oil-sealed rotary vacuum pump so that molecules of the yellow phosphorus or the like are caught by the cooled operating oil so as to be enveloped in the operating oil. Thus, a mixture operating oil of the substance and the operating oil is generated in the form of colloid. The mixture operating oil is passed through an oil filter of a filtration device so that the substance such as yellow phosphorus is precipitated by the filter and then the substance is removed. Meanwhile, the operating oil as a filtrate from which the substance has been filtered is cooled by an oil-temperature controller, and then returned to the oil-sealed rotary vacuum pump.

Abstract: Air containing foreign particles is admitted into a cylindrical portable housing at the input end and cleaned air is discharged from the outlet end. A liquid supply has an open bath at the bottom of the housing. A source of liquid is controlled to supply liquid to the bath upon the level of the liquid falling below a predetermined magnitude. A spray sprays liquid from the bath into the housing, whereby foreign particles in the air entering the housing are coated with the liquid. Air entering the housing throws the liquid-coated particles onto a helical vane affixed in the housing. The particles are dispersed by the vane and helical ribbons mounted on the vane. A rotary vane has a plurality of blades mounted for rotation within the helical ribbons, and the blades collect and coalesce liquid mists on their surfaces.

Abstract: This invention relates to a process for detackifying and dispersing paint solids for example obtained from paint overspray in enclosed areas such as paint spray booths.The process includes contacting an oil-in-water emulsion with an aqueous solution whereby the oil-in-water emulsion is destabilised. On subsequent contact of paint particles with the aqueous solution comprising the destabilised oil-in-water emulsion, the paint is adsorbed on to destabilised emulsion particles. The process provides an effective method of denaturing paint over-spray which is easily handleable and effective over a wide range of paint compositions.In one embodiment of the invention, the oil-in-water emulsion comprises a latex.

Abstract: A novel method of treating circulating water containing over-sprayed, water-borne paint, such as in a paint spray booth operation, comprises adjusting the alkalinity of the paint spray booth water to between about 20 and 600 ppm, on a calcium carbonate basis, by adding a designated alkalinity source thereto, adding a cationic potato starch to the water, contacting the over-sprayed, water-borne paint with the alkalinity-adjusted paint spray booth water after addition of the cationic potato starch, adding an effective amount of a polymer floccing agent to the paint spray booth water, and removing resulting sludge from the paint spray booth water.