Abstract: A fluid centrifuge device for separating fluids and/or solids comprises a non-rotatable containment vessel (6) and a rotatable shroud (6A) of conical or other form within said vessel (6). The vessel (6) is located between an inlet assembly (2) including a manifold (8) which leads to the interior of a tubing housing (14) of a turbocharger and an outlet assembly (4) including two outlets (10, 10A) for respectively clean and dirty gases. The shroud (6A) is mounted on a drive shaft (20) for rotation therewithin. The shaft (20) and the shroud (6A) are driven by turbine blades (16) or by other drive.

Abstract: In a method of treating a fine particle dust in a manufacturing process of semiconductor elements wherein the fine particle dust is separated and collected from an air which includes the fine particle dust produced from a source of generating the fine particle dust generated in a process of manufacturing semiconductor elements by filtering air with a laminated filter which comprises at least three filters, each of which having a smaller mesh is arranged to located from an down-stream in order. The method comprising the step of separating removing water and oil by passing the air through a rotary brush prior before the air from the source of generating the fine particle dust is filtered with the laminated filter. The apparatus for carrying out the method.