And Recycle Or Reuse Of Contact Liquid For Further Contact Patents (Class 95/94)
  • Patent number: 10384229
    Abstract: Provided are apparatus and method of dispensing an adhesive liquid for a dust trap, in which the adhesive liquid is dispensed to a camera module while effectively cleaning the adhesive liquid that may be smeared on a nozzle, thereby enhancing productivity and quality of a process of forming a dust trap.
    Type: Grant
    Filed: February 10, 2017
    Date of Patent: August 20, 2019
    Assignee: PROTEC CO., LTD.
    Inventor: Seung Min Hong
  • Patent number: 8932388
    Abstract: The present invention is related to an apparatus and a method for converting gas into fuel. The apparatus for converting gas into fuel in accordance with an embodiment of the present invention can include: a first gas processing unit discharging first fuel gas by removing hydrogen sulfide in the raw gas by spraying a solution; a second gas processing unit discharging second fuel gas by removing moisture in the first fuel gas; a third gas processing unit discharging third fuel gas by removing hydrogen sulfide remaining in the second fuel gas; and a solution reservoir supplied with the solution from at least one of the second gas processing unit and the third gas processing unit and storing the solution.
    Type: Grant
    Filed: March 15, 2011
    Date of Patent: January 13, 2015
    Assignee: Korea Electric Power Corporation
    Inventors: Jung-Keuk Park, Kwang-Beom Hur, Sang-Gyu Rhim, Jung-Bin Lee
  • Patent number: 8876951
    Abstract: Acid gas is removed from a feed gas in an absorber that produces a treated feed gas and a rich solvent. The treated feed gas is passed through an H2S scavenger bed, and the H2S scavenger bed is regenerated using H2S depleted acid gas flashed from the rich solvent. Most preferably, the off gas from the regenerating bed is injected into a formation.
    Type: Grant
    Filed: September 29, 2010
    Date of Patent: November 4, 2014
    Assignee: Fluor Technologies Corporation
    Inventor: John Mak
  • Patent number: 8801832
    Abstract: Methods for removing sulfur from a gas stream prior to sending the gas stream to a gas separation membrane system are provided. Two schemes are available. When the sulfur content is high or flow is relatively high, a scheme including two columns where one tower is regenerated if the sulfur concentration exceeds a preset value can be used. When the sulfur content is low or flow is relatively low, a scheme including one column and an absorption bed.
    Type: Grant
    Filed: February 12, 2014
    Date of Patent: August 12, 2014
    Assignee: Saudi Arabian Oil Company
    Inventors: Milind M. Vaidya, Jean-Pierre R. Ballaguet, Sebastien A. Duval, Anwar H. Khawajah
  • Patent number: 8795413
    Abstract: The object of the invention is a method for dissolving carbon dioxide from flue or other gas and for the neutralization of the solution obtained. The gas, in which the partial pressure of carbon dioxide is at least 0.4 bar, is led to a dissolution process, where the major part of the carbon dioxide is dissolved into a flow of water. The aqueous solution of carbon dioxide thus obtained is neutralized by passing it through a material containing feldspar minerals, at which time the hydrogen ions of said solution are replaced by ions of alkali or alkaline earth metals, and the aluminum in said material is converted into aluminum compounds that can be separated and utilized.
    Type: Grant
    Filed: June 30, 2009
    Date of Patent: August 5, 2014
    Assignee: Cuycha Innovation Oy
    Inventor: Matti Nurmia
  • Patent number: 8747520
    Abstract: The present invention are methods for removing preselected substances from a mixed flue gas stream characterized by cooling said mixed flue gas by direct contact with a quench liquid to condense at least one preselected substance and form a cooled flue gas without substantial ice formation on a heat exchanger. After cooling additional process methods utilizing a cryogenic approach and physical concentration and separation or pressurization and sorbent capture may be utilized to selectively remove these materials from the mixed flue gas resulting in a clean flue gas.
    Type: Grant
    Filed: May 3, 2011
    Date of Patent: June 10, 2014
    Assignee: Battelle Memorial Institute
    Inventors: Mark D. Bearden, Paul H. Humble
  • Patent number: 8585803
    Abstract: A contaminant is removed from a gas in a method in which the gas is contacted with a solvent for the contaminant, and the resultant solution is contacted with intercalated graphite onto which the contaminant is adsorbed. The solvent will normally comprise water, and may itself be a contaminated liquid. In a preferred method the solvent is in a reservoir with particulate intercalated graphite; the contaminated gas is delivered to the base of the reservoir; and the gas rises in the solvent mobilizing the intercalated graphite in the reservoir.
    Type: Grant
    Filed: June 7, 2012
    Date of Patent: November 19, 2013
    Assignee: Arvia Technology Limited
    Inventors: Nigel W. Brown, Edward P. L. Roberts
  • Patent number: 8506680
    Abstract: Systems and techniques for the reclamation from boiler flue gas of all or substantially all gaseous substances for well injection oil recovery. A system can include one or more of a boiler for generating high pressure steam, a high pressure water pump, a tower scrubber, an induced draft fan, an absorber, a separating tank, a heat exchanger, a regenerator, a reboiler, a steam boiler, a water segregator, a carbon dioxide compressor, a purifier, a nitrogen compressor, drying beds, adsorption beds, a carbon dioxide pressurizer, a nitrogen pressurizer and a mixing tank of which: the boiler for generating high pressure steam, the tower scrubber, the absorber, the regenerator and the adsorption beds connect with each other in turn. In addition, the mixing tank connects by pipelines with a gas injection tube of an oil well. Mixed gases of carbon dioxide and nitrogen can be obtained for injection into the oil well, thus gaining favorable results of crude oil output increase as well as environment protection.
    Type: Grant
    Filed: November 14, 2007
    Date of Patent: August 13, 2013
    Assignee: Liaohe Petroleum Exploration Bureau, CNPC
    Inventors: Fengshan Zhang, Yuanwen Gao
  • Publication number: 20130123560
    Abstract: Crystals of [VOBDC](H2BDC)0.71 were synthesized hydrothemally. The guest acid molecules were removed by heating in air to give high quality single crystals of VOBDC. VOBDC was observed to show crystal-to-crystal transformations on absorption of the guest molecules aniline, thiophene and acetone from the liquid phase. Accurate structural data of the guest molecules and framework deformations were obtained from single crystal X-ray data. VOBDC was also shown to absorb selectively thiophene and dimethyl sulphide from methane.
    Type: Application
    Filed: October 22, 2012
    Publication date: May 16, 2013
    Applicant: THE UNIVERSITY OF HOUSTON SYSTEM
    Inventors: Allan J. Jacobson, Xiqu Wang, Lumei Liu
  • Publication number: 20130032029
    Abstract: Acid gas is removed from a feed gas in an absorber that produces a treated feed gas and a rich solvent. The treated feed gas is passed through an H2S scavenger bed, and the H2S scavenger bed is regenerated using H2S depleted acid gas flashed from the rich solvent. Most preferably, the off gas from the regenerating bed is injected into a formation.
    Type: Application
    Filed: September 29, 2010
    Publication date: February 7, 2013
    Inventor: John Mak
  • Patent number: 8216351
    Abstract: An Apparatus for purifying a feed stream containing carbon dioxide in which the feed stream, after having been compressed and dried, is partly cooled and then used to reboil a stripping column. Thereafter, the feed stream is further cooled and expanded to a lower operational temperature of the stripping column. A carbon dioxide product stream composed of the liquid column bottoms of the stripping column is expanded at one or more pressures to generate refrigeration, then fully vaporized within the main heat exchanger and compressed by a compressor to produce a compressed carbon dioxide product. Refrigeration is recovered in the main heat exchanger from a column overhead stream extracted from the stripping column within the main heat exchanger either directly or indirectly by auxiliary processing in which carbon dioxide is further separated and optionally recycled back to the main compressor used in compressing the feed stream.
    Type: Grant
    Filed: December 7, 2009
    Date of Patent: July 10, 2012
    Assignee: Praxair Technology
    Inventors: Minish Mahendra Shah, Henry Edward Howard
  • Publication number: 20120118829
    Abstract: Contaminants are removed from a quantity of contaminated liquid in a treatment reservoir (2,28) containing a carbon based adsorbent material capable of electrochemical regeneration. The adsorbent material is in the form of a bed supported on a plate (6) at the base of the reservoir. The bed is agitated for a period to distribute the adsorbent material in the liquid and adsorb contaminant therefrom. At the end of the period the agitation ceases, and the bed of adsorbent material is allowed to settle. The adsorbent is then regenerated, during or after settlement, by passing an electric current through the bed to release from the adsorbent gaseous products derived from the contaminant, in bubbles rising through the decontaminated liquid in the reservoir. Various methods of regenerating the adsorbent material are disclosed, as are apparatus in which the method can be applied.
    Type: Application
    Filed: May 6, 2010
    Publication date: May 17, 2012
    Inventors: Nigel Willis Brown, Edward P.L. Roberts
  • Patent number: 8080087
    Abstract: A method of drying liquid and gaseous hydrocarbons by contacting a feed stream of the hydrocarbon with an aqueous solution of a salt drying agent prior to passing the stream through a salt dryer to remove part of the water in the stream. The aqueous solution of the salt drying agent is generated in the salt dryer when the partly dried stream comes into contact with the drying salt and forms the solution. The solution is circulated in a loop from the salt dryer to the incoming feed and then through a liquid/liquid coalescer which removes a portion of the water together with dissolved salt from the mixture before the mixture is passed on to the salt dryer where further removal of water occurs. The salt dryer is off-loaded by a substantial factor by the initial partial dehydration and does not require to remove such a large amount of water; the salt consumption is therefore reduced in proportion to the amount of water removed in the treatment steps which precede the dryer.
    Type: Grant
    Filed: October 24, 2008
    Date of Patent: December 20, 2011
    Assignee: ExxonMobil Research & Engineering Company
    Inventors: Robert J. Falkiner, Bal K. Kaul
  • Patent number: 7955417
    Abstract: The method for reducing organic chlorine compounds in the cement production facility of the present invention is a method for reducing organic chlorine compounds in cement production facility by which a quantity of organic chlorine compounds contained in cement raw materials is reduced in the cement production facility, which is provided with an organic matter adsorbing step in which an adsorbing powder is supplied into exhaust gas generated on calcination of cement clinker from the cement raw materials, thereby the organic chlorine compounds are adsorbed on the adsorbing powder and an adsorbing-powder removing step in which the adsorbing powder, which has adsorbed the organic chlorine compounds, is collected, thereby removing the adsorbing powder from the exhaust gas.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: June 7, 2011
    Assignee: Mitsubishi Materials Corporation
    Inventors: Katsuhiko Ichihara, Eiji Koike, Munenori Ohgoshi, Hisanobu Tanaka, Ichiro Ebato, Kimitoshi Mizutani
  • Publication number: 20110083555
    Abstract: The object of the invention is a method for dissolving carbon dioxide from flue or other gas and for the neutralization of the solution obtained. The gas, in which the partial pressure of carbon dioxide is at least 0.4 bar, is led to a dissolution process, where the major part of the carbon dioxide is dissolved into a flow of water. The aqueous solution of carbon dioxide thus obtained is neutralized by passing it through a material containing feldspar minerals, at which time the hydrogen ions of said solution are replaced by ions of alkali or alkaline earth metals, and the aluminum in said material is converted into aluminum compounds that can be separated and utilized.
    Type: Application
    Filed: June 30, 2009
    Publication date: April 14, 2011
    Applicant: CUYCHA INNOVATION OY
    Inventor: Matti Nurmia
  • Patent number: 7819942
    Abstract: The invention relates to a method for producing a high-molecular polyester from a solidified polyester prepolymer by solid phase polycondensation. The polycondensation cleavage products of the solid phase polycondensation reaction are extracted from the product by means of a process gas, and the process gas is then cleaned and essentially recycled. According to the invention, the process gas is cleaned by means of an aqueous washing liquid. The invention also relates to an installation for carrying out the inventive method, said installation containing a crystallisation appliance (1) and a reaction appliance (2). A gas outlet (2d) of the reaction appliance (2) is directly or indirectly connected to a gas inlet (3c) in a gas cleaning system (3), and a gas outlet (3d) of the gas cleaning system (3) is connected to a gas inlet (2c) of the reaction appliance (2).
    Type: Grant
    Filed: August 22, 2005
    Date of Patent: October 26, 2010
    Assignee: Buhler AG
    Inventors: Andreas Christel, Claudemiro Ferreira
  • Publication number: 20100251890
    Abstract: A contaminant is removed from a gas in a method in which the gas is contacted with a solvent for the contaminant, and the resultant solution is contacted with intercalated graphite onto which the contaminant is adsorbed. The solvent will normally comprise water, and may itself be a contaminated liquid. In a preferred method the solvent is in a reservoir with particulate intercalated graphite; the contaminated gas is delivered to the base of the reservoir; and the gas rises in the solvent mobilizing the intercalated graphite in the reservoir.
    Type: Application
    Filed: April 15, 2010
    Publication date: October 7, 2010
    Inventors: Nigel Willis Brown, Edward P.L. Roberts
  • Patent number: 7771670
    Abstract: A method for treating air flow containing particulates and oxidized compounds of carbon, sulfur, iron, and other elements. The method includes supplying an air flow to a reaction zone formed between an electrically insulated electrode node having a plurality of point source electrodes and a grounded receptor. A continuous film of electrically grounded water is supplied on the receptor. The water is filtered after traveling over the receptor and collecting elemental materials formed in the reaction zones.
    Type: Grant
    Filed: November 12, 2004
    Date of Patent: August 10, 2010
    Assignee: ABsalut Ecology Corporation
    Inventor: Alexander Vasilievich Borisenko
  • Patent number: 7674320
    Abstract: Hydrogen gas at a hydrogen refueling site is cooled below liquid nitrogen temperature (e.g., about 80K) for more efficient adsorption of hydrogen on hydrogen adsorbent particles in the fuel storage of a hydrogen powered vehicle. When compressed hydrogen gas is available it may be cooled with liquid nitrogen and then sub-cooled below about 70K by a Joule-Thompson expansion. When liquid hydrogen provides hydrogen gas it may be cooled below liquid nitrogen temperatures by mixing with liquid hydrogen or by heat exchange with liquid hydrogen.
    Type: Grant
    Filed: October 24, 2007
    Date of Patent: March 9, 2010
    Assignee: GM Global Technology Operations, Inc.
    Inventor: Senthil Kumar Vadivelu
  • Patent number: 7666251
    Abstract: Method of purifying a feed stream containing carbon dioxide wherein the feed stream after having been compressed and dried is partly cooled and then used to reboil a stripping column. Thereafter, the feed stream is further cooled and expanded to a lower operational temperature of the stripping column. A carbon dioxide product stream composed of the liquid column bottoms of the stripping column is expanded at one or more pressures to generate refrigeration, then fully vaporized within the main heat exchanger and compressed by a compressor to produce a compressed carbon dioxide product. Refrigeration is recovered in the main heat exchanger from a column overhead stream extracted from the stripping column within the main heat exchanger either directly or indirectly by auxiliary processing in which carbon dioxide is further separated and optionally recycled back to the main compressor used in compressing the feed stream.
    Type: Grant
    Filed: April 3, 2006
    Date of Patent: February 23, 2010
    Assignee: Praxair Technology, Inc.
    Inventors: Minish Mahendra Shah, Henry Edward Howard
  • Publication number: 20080264252
    Abstract: The method for reducing organic chlorine compounds in the cement production facility of the present invention is a method for reducing organic chlorine compounds in cement production facility by which a quantity of organic chlorine compounds contained in cement raw materials is reduced in the cement production facility, which is provided with an organic matter adsorbing step in which an adsorbing powder is supplied into exhaust gas generated on calcination of cement clinker from the cement raw materials, thereby the organic chlorine compounds are adsorbed on the adsorbing powder and an adsorbing-powder removing step in which the adsorbing powder, which has adsorbed the organic chlorine compounds, is collected, thereby removing the adsorbing powder from the exhaust gas.
    Type: Application
    Filed: June 30, 2006
    Publication date: October 30, 2008
    Applicant: MITSUBISHI MATERIALS CORPORATION
    Inventors: Katsuhiko Ichihara, Eiji Koike, Munenori Ohgoshi, Hisanobu Tanaka, Ichiro Ebato, Kimitoshi Mizutani
  • Patent number: 6929680
    Abstract: A process for concentrating and recovering methane and carbon dioxide from landfill gas includes absorption of commonly occurring pollutants using a carbon dioxide absorbent which itself may be in situ recoverable constituent. Separated methane is concentrated into a high heating value fuel, and a carbon dioxide product may also be recovered. Process streams may be used to provide fuel for compression and refrigeration and to regenerate carbon dioxide absorbent.
    Type: Grant
    Filed: September 26, 2003
    Date of Patent: August 16, 2005
    Assignee: Consortium Services Management Group, Inc.
    Inventors: Tadeush Krushnevych, Olexander Piatnychko
  • Patent number: 6849105
    Abstract: Prior to passing through pumping apparatus effluent gas containing hydrocarbons is subjected to washing by being sprayed with aromatic type oil in oil-recirculating washing apparatus. Polycyclic aromatic hydrocarbons contained in the effluent gas are trapped by being absorbed in the oil. The method is suitable for treating effluent gas coming from an installation for chemical vapor deposition or infiltration using a reagent gas containing a precursor for pyrolytic carbon, or else coming from a cementation installation.
    Type: Grant
    Filed: October 4, 2002
    Date of Patent: February 1, 2005
    Assignee: Snecma Propulsion Solide
    Inventors: Yvan Baudry, Jean-Pierre Lambert, Bernard Delperier, Jean-Fran├žois Potin
  • Patent number: 6623537
    Abstract: The raw syngas generated in a partial oxidation gasifier also includes carbon soot which is removed and recovered from the syngas by scrubbing with water. The scrubbing water contains one or more high temperature surfactants which allow greater soot concentrations in the water-scrubbing quench zone of the gasifier. The carbon soot is separated from the scrubbing water with the aid of a scrubbing oil. The separation of the carbon soot from the scrubbing water is enhanced with the aid of one or more surfactants that render the soot particles hydrophobic and oleophilic. The recovered carbon soot is ultimately recycled to the gasifier to recover the energy value of the carbon during the partial oxidation reaction. The overall energy efficiency of the gasification process can be increased by removing all or a significant portion of the water from the soot mixture before recycling the soot.
    Type: Grant
    Filed: March 9, 2001
    Date of Patent: September 23, 2003
    Assignee: Texaco Inc.
    Inventor: Frederick C. Jahnke
  • Patent number: 6551380
    Abstract: A gas separation apparatus and process has a first pressure swing adsorption (PSA) unit (110) receiving feed gas (112), which comprises a first and a second component. First PSA unit (110) produces first product gas (114) pre-dominantly containing the first component, and first off gas (116) containing at least some of the first component and second component. Compressor (120) is coupled to first PSA unit (110) to compress first off gas (116) to form compressed off gas (126), which is passed downstream to absorber unit (130), which employs a solvent to remove at least part of the second component from compressed off gas (126), forming an enriched compressed off gas (136B). Second PSA unit (140) receives enriched compressed off gas (136B) and produces second product gas (142) which predominantly contains the first component and a second off gas that is sent to waste or reformer burner (150).
    Type: Grant
    Filed: June 25, 2001
    Date of Patent: April 22, 2003
    Assignee: Fluor Corporation
    Inventors: Satish Reddy, Ravi Ravikumar
  • Patent number: 6358301
    Abstract: The invention relates to a process for preparing a highly loaded adsorbent by extracting an oil from an oil crude product using supercritical fluid extraction to obtain a loaded supercritical fluid (SCF). The loaded SCF is expanded, followed by heating to obtain a liquid phase and an in-loading reduced SCF phase. Optionally, the pressure is decreased and/or the temperature of the SCF is raised to conditions of adsorption. The SCF is introduced into a fixed bed adsorber to obtain an adsorbent loaded with the purified oil and pure SCF. The liquid phase is fed as a reflux to the extraction device. The pure SCF is compressed and tempered to extraction conditions. The pure SCF is recycled to an extraction device. Also provided is a process for purifying an oil from an oil crude product by desorbing the adsorbed oil.
    Type: Grant
    Filed: January 24, 2000
    Date of Patent: March 19, 2002
    Assignee: Roche Vitamins Inc.
    Inventor: Ute Fleck
  • Patent number: 6019816
    Abstract: Process gases from microelectronic device fabrication processes are pumped through a filter unit including a plurality of absorbers for absorbing water entrained within the process gases. Residues deposited within the filtering unit are removed by spraying water on the absorbers. Water is prevented from escaping from the filtering unit into other portions of an exhaust gas system or into the environment by providing a curtain of pressurized, inert gas, within the filtering unit.
    Type: Grant
    Filed: May 28, 1998
    Date of Patent: February 1, 2000
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Yu-il Lim
  • Patent number: 5964921
    Abstract: A method for removing harmful substances, in particular dioxin, from flue gas generated in for example a waste incinerator, using an adsorption agent, characterized in that after said flue gas has been washed with a washing medium, the adsorption agent is discharged together with the washing medium for subsequent collection of the adsorption agent. At least one of the substances from the group of active carbon, brown coal, coke, lime, lava rock and pumice stone is used as the adsorption agent.
    Type: Grant
    Filed: November 10, 1998
    Date of Patent: October 12, 1999
    Assignee: N.V. Avira Afvalverwerking
    Inventor: Martin Gerardus Uitvlugt
  • Patent number: 5788743
    Abstract: A process for separating chlorine of high purity from a chlorine-containing feed gas by absorption of the chlorine using an inert absorbent and downstream desorption of the chlorine from the absorbent/chlorine mixture drawn off from the absorption stage by the supply of mixture to a desorption distillation column which is coupled to a chlorine separation column in such a way that the top of the chlorine separation column and an upper section of the desorption distillation column and a lower section of the desorption distillation column and the bottom of the chlorine separation column are connected to one another on both the gas and the liquid side, the absorbent/chlorine mixture being supplied exclusively to the desorption distillation column, and high-purity chlorine being drawn off from a middle region of the chlorine separation column.
    Type: Grant
    Filed: September 12, 1996
    Date of Patent: August 4, 1998
    Assignee: BASF Aktiengesellschaft
    Inventors: Otto Watzenberger, Joachim Pfeffinger
  • Patent number: 5683492
    Abstract: A process for the recovery of carbon monoxide from a purge gas from acetic acid synthetic containing at least carbon monoxide, nitrogen and hydrogen, wherein the purge gas (6) containing at least carbon monoxide, nitrogen and hydrogen is separated into a gas fraction (11) rich in carbon monoxide and a residual gas fraction (12, 13) rich in nitrogen and hydrogen by an adsorption process (G), preferably by a pressure change absorption process, and the gas fraction (11) rich in carbon monoxide is returned upstream of the acetic acid.
    Type: Grant
    Filed: May 24, 1996
    Date of Patent: November 4, 1997
    Assignee: Linde Aktiengesellschaft
    Inventors: Peter Hesse, Siegfried Michel, Horst Weiss
  • Patent number: 5584911
    Abstract: A system is provided for recovering volatile-liquid vapor from an air-volatile liquid vapor mixture. The system includes a reaction vessel having a bed of adsorbent for adsorbing volatile liquid vapor and producing relatively volatile liquid vapor-free air. The system further includes a liquid seal vacuum pump for regenerating the adsorbent, a first conduit for circulating the air-volatile liquid vapor mixture through the system and a second conduit for circulating seal liquid to the vacuum pump. A cyclonic separator separates the seal liquid from the air-volatile liquid vapor mixture produced during bed regeneration. A mechanism is also provided for removing the volatile liquid vapor from the air-volatile liquid vapor mixture separated from the seal liquid. A method of recovering volatile liquid vapor from an air-volatile liquid vapor mixture is also disclosed.
    Type: Grant
    Filed: June 15, 1995
    Date of Patent: December 17, 1996
    Assignee: Jordan Holding Company
    Inventor: Edward Menzenski
  • Patent number: 5515686
    Abstract: An absorber fluid circuit is provided for a volatile liquid vapor recovery system. The vapor recovery system includes at least one adsorbent bed for capturing volatile liquid vapor, a vacuum pump for regenerating the adsorbent bed, a heat exchanger for cooling the vacuum pump, an absorber tower for condensing volatile liquid vapor and an absorber fluid source. The absorber fluid circuit includes an absorber fluid supply pump and a first conduit for directing absorber fluid from the absorber fluid source to the supply pump. A second conduit directs absorber fluid from the supply pump to both the heat exchanger and absorber tower. A third conduit returns spent absorber fluid from the heat exchanger and absorber tower back to the absorber fluid source.
    Type: Grant
    Filed: January 30, 1995
    Date of Patent: May 14, 1996
    Assignee: Jordan Holding Company
    Inventor: Mark A. Jordan
  • Patent number: 5460636
    Abstract: An impurity scavenging system which scavenges impurities of off-gases discharged from a clean room of a production line for semiconductors. The impurity scavenging system has a gas introduction line through which gas to be processed (hereinafter referred as GSP) is discharged, a scavenging unit which stores scavenging liquid, a condenser for condensing vaporized liquid from the scavenging unit, a first pump which pumps the GSP of a discharging line connected with the downstream side of the condenser, a liquid source, a cleaning liquid line which connects the discharging line to a drain and a first valve having ports, including a first port connected with the condenser, a second port connected with the first pump, and a third port connected with one end of the cleaning line another end of which is connected to the drain, thereby selectively enabling a connection from the condenser to the first pump and a connection from the condenser to the cleaning line.
    Type: Grant
    Filed: November 30, 1993
    Date of Patent: October 24, 1995
    Assignees: Tokico Ltd., Mitsubishi Corporation
    Inventors: Hiroyuki Harada, Tsutomu Koinuma, Terufumi Iwata, Michio Nitta
  • Patent number: 5269833
    Abstract: The invention relates to a process for cleaning a stream of crude gas and/or waste gas charged with hydrocarbon vapors resulting in recovery of the hydrocarbons. The process consists of adsorption, desorption, and condensation and/or absorption, and the adsorption is accomplished in two two-stage adsorber systems connected to each other in parallel. A charged stream of gas is first directed to the first adsorber system for coarse cleaning by a primary adsorber (2) and then for precision cleaning to a secondary adsorber (4) connected in series to the first adsorber. The hydrocarbons adsorbed in the primary adsorber (2) are desorbed by use of a vacuum pump (26) and the hydrocarbon vapors depleted of inert gas that are obtained are recovered in the condensation and/or absorption system (24) after compression in the vacuum pump (26) and the hydrocarbon components that are not condensed or absorbed are returned to the stream of crude gas.
    Type: Grant
    Filed: October 9, 1992
    Date of Patent: December 14, 1993
    Inventor: Manfred Nitsche