Abstract: Embodiments of the invention are directed to a sulfur trap comprising an inlet, a first chamber, a divider, a second chamber, an outlet, and a float assembly. The float assembly may have many different configurations, but generally comprises a float and plug, is configured to float within liquid sulfur, and is operatively coupled to a seal seat in the divider for sealing and unsealing the first chamber from the second chamber. Generally, only liquid sulfur is allowed to pass from the first chamber into the second chamber. However, the sulfur trap may be configured to allow for pressure relief, such that during an overpressure event the plug and seal seat disengage and allow the liquid-gas mixture to flow into the second chamber to prevent damage within the system. In some embodiments a filter and/or the flow of liquid sulfur is directed to collect debris from the liquid sulfur.

Abstract: A treating unit that comprises an absorber unit for contacting a regenerated solvent with a gas stream loaded with contaminants to yield a treated gas stream and a loaded solvent stream; a regenerator unit for stripping the loaded solvent stream to yield a loaded gas stream and the regenerated solvent; and a device for smoothing contaminant peak concentrations in the loaded solvent stream and for receiving the loaded solvent stream. The device comprises a first hold-up tank having a first inlet and a first outlet, a second hold-up tank having a second inlet and a second outlet, and an inlet distributor that is operatively connected to the first inlet and to the second inlet and that provides for directing flow of the loaded solvent stream to either the first hold-up tank or the second hold-up tank.

Abstract: A vacuum system for extracting a stream of a multi-phase fluid from a photolithography tool comprises a pumping arrangement for drawing the fluid from the tool, and an extraction tank located upstream from the pumping arrangement for separating the fluid drawn from the tool into gas and liquid phases. The pumping arrangement comprises a first pump for extracting gas from the tank, and a second pump for extracting liquid from the tank. In order to minimize any pressure fluctuations transmitted from the vacuum system back to the fluid within the tool, a pressure control system maintains a substantially constant pressure in the tank by regulating the amounts of liquid and gas within the tank.

Abstract: A gas/liquid phase separator includes a fluid inlet, a vapor outlet, a liquid outlet, and first and second valves disposed in fluid communication with the liquid outlet. Both valves are controllable in response to a fluid level in the gas/liquid phase separator. Both valves are further disposed in parallel fluid communication with each other. A method of controlling a liquid level in the phase separator includes sensing an amount of liquid in the phase separator, sensing a system pressure, and selectively opening a valve disposed in fluid communication with the phase separator to drain the liquid.

Abstract: A low flow rotary separator includes a housing that defines a separator chamber and a liquid/gas mixture inlet. A shaft driven by a motor includes a plurality of disks in frictional contact with the mixture to drive the liquid outward against an inner wall of the separator and displace gas to a central region about the shaft. The liquid exits through a liquid outlet valve into a high-pressure storage container. The pressure of the liquid is increased to allow flow into the high-pressure storage container by a pump driven by the shaft. A level control valve closes in response to a predetermined pressure differential between liquid in the feed line and liquid within the separator chamber to allow liquid flow through an outlet check valve.

Abstract: A degassing system for a hydrocarbon dispenser including a hydrocarbon circulating pump (12). The system includes a degassing assembly (16) having an inlet connected to the outlet of the pump, a degassed hydrocarbon outlet (90), a takeoff outlet (20) for taking off the hydrocarbon/gas mixture, a degassing vessel (24), and a duct (38, 60") for connecting the takeoff outlet to the degassing vessel. The end of the duct which opens out into the degassing vessel has an adjustable effective flow section. The system also includes a valve arrangement (110, 118) for modifying the effective flow section as a function of the gas content of the hydrocarbon.