Abstract: Vapor deposition systems and methods associated with the same are provided. The systems may be designed to include features that can promote high quality deposition; simplify manufacture, modification and use; as well as, reduce the footprint of the system, amongst other advantages.
Abstract: A filter unit for removing particulates in a gas to be treated, which unit includes a gas impermeable bulkhead that forms a channel through which the gas advances in the filter unit at least one round, and a filter member laminated on at least one side surface of the bulkhead without closing the channel. The filter unit or filter of the present invention reduces a load on a harm removing equipment, which in turn lowers the cleaning frequency and markedly prolongs the service life of the equipment.