Abstract: A cluster tool system, including: a load lock; a first wafer transfer module; a buffer module; a second wafer transfer module; wherein the load lock, the first wafer transfer module, the buffer module, and the second wafer transfer module are positioned in a linear arrangement; a first process module connected to the first wafer transfer module on a first side of the linear arrangement; a second process module connected to the second wafer transfer module on the first side; a third process module connected to the first wafer transfer module on a second side of the linear arrangement that is opposite the first side; a fourth process module connected to the second wafer transfer module on the second side; a first ladder assembly connected to the buffer module on the first side; a second ladder assembly connected to the buffer module on the second side.

Abstract: A foldable stool or table having hinges comprises a plurality of support members. In one embodiment, a foldable device comprises three legs. In another embodiment, the foldable stool or table comprises two foldable support members and two non-foldable support members. Relative to the top and bottom of the device, embodiments of the present invention may comprise one or more intermediately located steps or shelves, wherein the steps or shelves are located along at least one of the non-foldable support members. The one or more intermediately located steps or shelves may be forwardly-offset relative to a front surface of the non-foldable support members. A method of using the stool is also provided.