Abstract: According to one embodiment, a MEMS memory microprobe includes a probe tip, a lever, and a base. The probe tip is arranged to oppose a recording medium and is brought into contact with the recording medium to perform recording or reproduction of information when a current or voltage is applied between them. In the probe tip, a plurality of electrodes used in the recording or reproduction and a plurality of support portions which form the probe tip together with the electrodes are alternately arranged, and the electrodes and the support portions form a single plane which opposes the recording medium.
Type:
Application
Filed:
January 28, 2011
Publication date:
August 11, 2011
Inventors:
Yongfang Li, Yasushi Tomizawa, Gen Hashiguchi, Masakazu Sugiyama