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  • Polishing pads of flocked hollow fibers and methods relating thereto
    Patent number: 6454633
    Abstract: A polishing pad is provided which is comprised of vertically oriented hollow fibers. Such pads can be produced by electrostatically flocking fibers onto a substrate.
    Type: Grant
    Filed: June 22, 2000
    Date of Patent: September 24, 2002
    Assignee: Rodel Holdings Inc.
    Inventors: Heinz F. Reinhardt, Elmer W. Jensen, Jr.
  • Pad surface texture formed by solid phase droplets
    Publication number: 20010046834
    Abstract: A polishing pad is made by a piezoelectric delivery system, and a method of making the pad includes, building successive layers of droplets of material one layer on another layer by dispensing the material in fluid phase as droplets arranged in a droplet pattern, and solidifying the droplets in the droplet pattern to provide the polishing surface with a surface texture having recesses bounded by the droplets in the droplet pattern.
    Type: Application
    Filed: February 28, 2001
    Publication date: November 29, 2001
    Inventors: Anuradha Ramana, Elmer W. Jensen
  • Compositions and methods for polishing and planarizing surfaces
    Patent number: 5264010
    Abstract: An abrasive composition for use in polishing or planarizing the surface of a work piece is provided comprising about 30 to 50 percent of cerium oxide; about 8 to about 20 percent of fumed silica and about 15 to about 45 percent of precipitated silica. Methods using the composition to polish or planarize the surfaces of work pieces, as well as products produced by such methods, are also provided.
    Type: Grant
    Filed: April 27, 1992
    Date of Patent: November 23, 1993
    Assignee: Rodel, Inc.
    Inventors: Gregory Brancaleoni, Elmer W. Jensen, John V. H. Roberts
  • Polishing apparatus and method using a rotary work holder travelling down a rail for polishing a workpiece with linear pads
    Patent number: 5487697
    Abstract: The present invention relates to an apparatus for polishing semiconductor wafers and, in particular, one in which the polishing pads are linear, that is, the polishing pads have a long linear dimension relative to their width and have a uniform cross-section along this linear dimension. In addition, the wafer holder travels in a straight line parallel to the long linear dimension of the polishing pads.
    Type: Grant
    Filed: February 9, 1993
    Date of Patent: January 30, 1996
    Assignee: Rodel, Inc.
    Inventor: Elmer W. Jensen
  • Pad material for grinding, lapping and polishing
    Patent number: 4927432
    Abstract: An improved polishing pad material is produced by modifying conventional poromeric materials in which a porous thermoplastic resin matrix, typically polyurethane, is reinforced with a fibrous network such as a felted mat of polyester fibers. The polishing material is modified by coalescing the resin among the fibers, preferably by heat treatment, to increase the porosity and hardness of the material as well increasing the surface activity of the resin. The polishing material may also incorporate polishing aids such as particulate abrasives and may also be used as a lapping or grinding material.
    Type: Grant
    Filed: March 25, 1986
    Date of Patent: May 22, 1990
    Assignee: Rodel, Inc.
    Inventors: William D. Budinger, Elmer W. Jensen
  • System for ordering and manufacturing a tangible device
    Publication number: 20010032111
    Abstract: A system, method and apparatus by which a customer determines ordering, manufacturing at a selected site and delivery without shipping of a tangible device sold by using a seller's computer (3) receiving an order for a tangible device from a customer, selecting manufacturing process commands to manufacture the device as ordered, verifying that the site has the capability and an open schedule to manufacture the device, scheduling the manufacturing during the open schedule, and providing an order fulfillment schedule and status tracking of the order, a manufacturing control computer (4) providing manufacturing process commands to a production unit (5) at the site, and providing a record of maintenance fulfillment indicating capability and readiness of the production unit to manufacture the tangible device.
    Type: Application
    Filed: December 27, 2000
    Publication date: October 18, 2001
    Inventors: Elmer W. Jensen, Lee Melbourne Cook, William D. Budinger
  • Substrate containing fibers of predetermined orientation and process of making the same
    Patent number: 4728552
    Abstract: The present invention relates to a poromeric article of manufacture comprising a felt sheet of fibers impregnated with microporous elastomer having a work surface, side surfaces joining the work surface and a support surface joining the side surfaces, wherein a majority of the fibers are oriented primarily transverse to the work surface such that the majority of fiber ends adjacent to the work surface form an angle of between about 45.degree. and about 135.degree. with respect to the work surface, and preferably, wherein the fibers have a uni-directional orientation substantially perpendicular to the work surface. The present invention also includes a plurality of such articles bonded together and oriented such that the work surfaces of adjacent articles are substantially coplanar to form a laminated article of manufacture. Further, processes for making the basic and laminated articles are set forth as other aspects of the invention.
    Type: Grant
    Filed: July 6, 1984
    Date of Patent: March 1, 1988
    Assignee: Rodel, Inc.
    Inventor: Elmer W. Jensen, Jr.
  • Polymeric polishing pad containing hollow polymeric microelements
    Patent number: 5578362
    Abstract: The present invention relates to an article of manufacture or polishing pad for altering a surface of a workpiece, such as polishing or planarizing a semiconductor device. The article includes a polymeric matrix impregnated with a plurality of polymeric microelements, each polymeric microelement having a void space therein. The article has a work surface and a subsurface proximate to the work surface. When the article is in contact with a working environment, polymeric microelements at the work surface of the article are less rigid than polymeric elements embedded in the subsurface. As the work surface of the article is abraded during use, the work surface of the pad may be continuously regenerated. In alternative preferred embodiments, the work surface may further include a minitexture and/or a macrotexture. Preferably, the minitexture is formed by fractal patterning at least a portion of the work surface.
    Type: Grant
    Filed: July 12, 1994
    Date of Patent: November 26, 1996
    Assignee: Rodel, Inc.
    Inventors: Heinz F. Reinhardt, John V. H. Roberts, Harry G. McClain, William D. Budinger, Elmer W. Jensen
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