Abstract: An abrasive composition for use in polishing or planarizing the surface of a work piece is provided comprising about 30 to 50 percent of cerium oxide; about 8 to about 20 percent of fumed silica and about 15 to about 45 percent of precipitated silica. Methods using the composition to polish or planarize the surfaces of work pieces, as well as products produced by such methods, are also provided.
Type:
Grant
Filed:
April 27, 1992
Date of Patent:
November 23, 1993
Assignee:
Rodel, Inc.
Inventors:
Gregory Brancaleoni, Elmer W. Jensen, John V. H. Roberts
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