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Publication number: 20110262027Abstract: A color image of an inspection object is taken by an imaging means capable of taking a color image to obtain color information of an RGB color space. A gray-scale image of a color component of the RGB color space or another color space is generated, and the inspection object is detected by a pattern recognition technique. Alternatively, a binary image is generated from the generated gray-scale image, and the inspection object is detected by performing pattern recognition on the binary image. Color data of a pixel occupied by the detected inspection object is compared with color data of a non-defective inspection object which is previously prepared to judge whether or not the inspection object is defective. In addition, this judgment result is reflected in another manufacturing step through a network and product quality is improved.Type: ApplicationFiled: June 27, 2011Publication date: October 27, 2011Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventors: Teppei Oguni, Tatsuji Nishijima, Akiharu Miyanaga
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Patent number: 7970200Abstract: A color image of an inspection object is taken by an imaging means capable of taking a color image to obtain color information of an RGB color space. A gray-scale image of a color component of the RGB color space or another color space is generated, and the inspection object is detected by a pattern recognition technique. Alternatively, a binary image is generated from the generated gray-scale image, and the inspection object is detected by performing pattern recognition on the binary image. Color data of a pixel occupied by the detected inspection object is compared with color data of a non-defective inspection object which is previously prepared to judge whether or not the inspection object is defective. In addition, this judgment result is reflected in another manufacturing step through a network and product quality is improved.Type: GrantFiled: June 25, 2010Date of Patent: June 28, 2011Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Teppei Oguni, Tatsuji Nishijima, Akiharu Miyanaga
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Patent number: 8311315Abstract: A color image of an inspection object is taken by an imaging means capable of taking a color image to obtain color information of an RGB color space. A gray-scale image of a color component of the RGB color space or another color space is generated, and the inspection object is detected by a pattern recognition technique. Alternatively, a binary image is generated from the generated gray-scale image, and the inspection object is detected by performing pattern recognition on the binary image. Color data of a pixel occupied by the detected inspection object is compared with color data of a non-defective inspection object which is previously prepared to judge whether or not the inspection object is defective. In addition, this judgment result is reflected in another manufacturing step through a network and product quality is improved.Type: GrantFiled: June 27, 2011Date of Patent: November 13, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Teppei Oguni, Tatsuji Nishijima, Akiharu Miyanaga
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Patent number: 7769226Abstract: A color image of an inspection object is taken by an imaging means capable of taking a color image to obtain color information of an RGB color space. A gray-scale image of a color component of the RGB color space or another color space is generated, and the inspection object is detected by a pattern recognition technique. Alternatively, a binary image is generated from the generated gray-scale image, and the inspection object is detected by performing pattern recognition on the binary image. Color data of a pixel occupied by the detected inspection object is compared with color data of a non-defective inspection object which is previously prepared to judge whether or not the inspection object is defective. In addition, this judgment result is reflected in another manufacturing step through a network and product quality is improved.Type: GrantFiled: January 19, 2006Date of Patent: August 3, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Teppei Oguni, Tatsuji Nishijima, Akiharu Miyanaga